JPS60152125U - light deflection device - Google Patents
light deflection deviceInfo
- Publication number
- JPS60152125U JPS60152125U JP1984039777U JP3977784U JPS60152125U JP S60152125 U JPS60152125 U JP S60152125U JP 1984039777 U JP1984039777 U JP 1984039777U JP 3977784 U JP3977784 U JP 3977784U JP S60152125 U JPS60152125 U JP S60152125U
- Authority
- JP
- Japan
- Prior art keywords
- displacement end
- deflection device
- support plate
- piezoelectric laminate
- hard material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims 9
- 239000000463 material Substances 0.000 claims 6
- 230000003287 optical effect Effects 0.000 claims 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
添付図面は本考案の一実施例を示し第１図は斜視図、第
２図は一部切欠平面図、第３曲は要部の拡大斜視図、第
４図は第２図Ａ−Ａ線断面図、第５図は要部の縦断側面
図である。
１；筐体、９、；支持板、１５ａｗ １５ｂ；圧電
゛積層体、１６；硬球、１９；硬質層、２１；鏡、
２２；反射鏡面。The attached drawings show one embodiment of the present invention, and Fig. 1 is a perspective view, Fig. 2 is a partially cutaway plan view, Fig. 3 is an enlarged perspective view of the main part, and Fig. 4 is a line taken along line A-A in Fig. 2. The sectional view and FIG. 5 are longitudinal sectional side views of the main parts. 1; Housing, 9; Support plate, 15aw 15b; Piezoelectric
゛Laminated body, 16; hard sphere, 19; hard layer, 21; mirror,
22; Reflective mirror surface.
Claims (5)
支点から離間した位置の支持板下部に、電圧の印加によ
り上下方向に伸縮する圧電積層体を配置して、該積層体
の変位端を前記支持板下面に当接し、前記圧電積層体の
伸縮に伴なって前記反射鏡面を傾動させる光偏向装置に
おいて、前記圧電積層体の変位端を硬質材料によって形
成し、前記支持板の少なくとも前記変位端との当接面を
前記と同質の硬質材料によって形−・成したことを特徴
とする光偏向装置。(1) A support plate with a reflective mirror surface on the upper surface is supported at a point, and a piezoelectric laminate that expands and contracts in the vertical direction when a voltage is applied is placed at the bottom of the support plate at a distance from the fulcrum. In the optical deflection device, the displacement end of the piezoelectric laminate is formed of a hard material, and the displacement end of the piezoelectric laminate is formed of a hard material, and the displacement end of the piezoelectric laminate is made of a hard material. An optical deflection device characterized in that at least a contact surface with the displacement end is made of the same hard material as the above.
変位端との当接面をステンレス、クロム等゛の硬質金属
で形成したことを特徴とする実用新案登録請求の範囲第
（１）項記載の光偏向装置。(2) Utility model registration claim No. (1) characterized in that the contact surface between the displacement end of the piezoelectric laminate and at least the displacement end of the support plate is formed of a hard metal such as stainless steel or chrome. The optical deflection device described in .
変位端との当接面をチツ化ケイ素、アルミナ等の硬質セ
ラミック材料で形成したことを特徴とする実用新案登録
請求の範囲第（１）項記載の光偏向装置。(3) Claims for registration of a utility model characterized in that the displacement end of the piezoelectric laminate and the contact surface of the support plate (both of which are in contact with the displacement end are made of a hard ceramic material such as silicon nitride or alumina) The optical deflection device according to item (1).
たことを特徴とする実用新案登録請求の範囲第（１）項
記載の光偏向装置。(4) The light deflection device according to claim (1), wherein the displacement end is constituted by a hard ball made of a hard material.
特徴とする実用新案登録請求の範囲第（１）項記載の光
偏向装置。(5) The light deflection device according to claim (1), wherein the entire support plate is made of a hard material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984039777U JPS60152125U (en) | 1984-03-20 | 1984-03-20 | light deflection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984039777U JPS60152125U (en) | 1984-03-20 | 1984-03-20 | light deflection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60152125U true JPS60152125U (en) | 1985-10-09 |
| JPH046009Y2 JPH046009Y2 (en) | 1992-02-19 |
Family
ID=30548042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984039777U Granted JPS60152125U (en) | 1984-03-20 | 1984-03-20 | light deflection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60152125U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55151614A (en) * | 1979-05-17 | 1980-11-26 | Nippon Telegr & Teleph Corp <Ntt> | Laser beam deflecting device |
-
1984
- 1984-03-20 JP JP1984039777U patent/JPS60152125U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55151614A (en) * | 1979-05-17 | 1980-11-26 | Nippon Telegr & Teleph Corp <Ntt> | Laser beam deflecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH046009Y2 (en) | 1992-02-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60152125U (en) | light deflection device | |
| JPS60121227U (en) | contact | |
| JPS61119U (en) | fluoroscope | |
| JPS62129157U (en) | ||
| JPH0225077U (en) | ||
| JPS6112231U (en) | Differential actuator | |
| JPS62130201U (en) | ||
| JPS6137134U (en) | optical head | |
| JPS615432U (en) | Mounting structure of weight detection part in vibrating electronic scale | |
| JPH0170544U (en) | ||
| JPS63191632U (en) | ||
| JPH01136430U (en) | ||
| JPS613515U (en) | Displacement magnification mechanism | |
| JPS63137962U (en) | ||
| JPH02122457U (en) | ||
| JPS62196367U (en) | ||
| JPS6359362U (en) | ||
| JPS6313468U (en) | ||
| JPS60171092U (en) | Displacement magnification mechanism | |
| JPS6175149U (en) | ||
| JPH036140U (en) | ||
| JPS58168051U (en) | piezoelectric relay | |
| JPS60130042U (en) | Drive piezoelectric device | |
| JPH035263U (en) | ||
| JPH03124669U (en) |