JPS60148029U - 半導体処理液の供給装置 - Google Patents

半導体処理液の供給装置

Info

Publication number
JPS60148029U
JPS60148029U JP3706184U JP3706184U JPS60148029U JP S60148029 U JPS60148029 U JP S60148029U JP 3706184 U JP3706184 U JP 3706184U JP 3706184 U JP3706184 U JP 3706184U JP S60148029 U JPS60148029 U JP S60148029U
Authority
JP
Japan
Prior art keywords
semiconductor processing
processing liquid
tube
liquid supply
supply equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3706184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230023Y2 (Direct
Inventor
森　勇鋼
早坂　知紘
Original Assignee
小松エレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 小松エレクトロニクス株式会社 filed Critical 小松エレクトロニクス株式会社
Priority to JP3706184U priority Critical patent/JPS60148029U/ja
Publication of JPS60148029U publication Critical patent/JPS60148029U/ja
Application granted granted Critical
Publication of JPH0230023Y2 publication Critical patent/JPH0230023Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP3706184U 1984-03-15 1984-03-15 半導体処理液の供給装置 Granted JPS60148029U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3706184U JPS60148029U (ja) 1984-03-15 1984-03-15 半導体処理液の供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3706184U JPS60148029U (ja) 1984-03-15 1984-03-15 半導体処理液の供給装置

Publications (2)

Publication Number Publication Date
JPS60148029U true JPS60148029U (ja) 1985-10-01
JPH0230023Y2 JPH0230023Y2 (Direct) 1990-08-13

Family

ID=30542810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3706184U Granted JPS60148029U (ja) 1984-03-15 1984-03-15 半導体処理液の供給装置

Country Status (1)

Country Link
JP (1) JPS60148029U (Direct)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028635U (Direct) * 1973-07-09 1975-04-02
JPS582425U (ja) * 1981-06-30 1983-01-08 株式会社大金製作所 クラツチデイスクのフエ−シング取付構造

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028635U (Direct) * 1973-07-09 1975-04-02
JPS582425U (ja) * 1981-06-30 1983-01-08 株式会社大金製作所 クラツチデイスクのフエ−シング取付構造

Also Published As

Publication number Publication date
JPH0230023Y2 (Direct) 1990-08-13

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