JPS60147664U - Steam injection device for molten substances - Google Patents
Steam injection device for molten substancesInfo
- Publication number
- JPS60147664U JPS60147664U JP3664084U JP3664084U JPS60147664U JP S60147664 U JPS60147664 U JP S60147664U JP 3664084 U JP3664084 U JP 3664084U JP 3664084 U JP3664084 U JP 3664084U JP S60147664 U JPS60147664 U JP S60147664U
- Authority
- JP
- Japan
- Prior art keywords
- injection device
- steam injection
- molten substances
- crucible
- molten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の溶融物質の蒸気噴出装置を示す構成図、
第2区はこの考案の一実施例を示す構成図である。
図において、1はるつぼ、4はふたである。なお、各図
中、同一符号は同−又は相当部分を示す。FIG. 1 is a configuration diagram showing a conventional molten material steam ejection device;
The second section is a configuration diagram showing an embodiment of this invention. In the figure, 1 is a crucible and 4 is a lid. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
噴出孔から噴出させるものにおいて、上記ふたを上記る
つぼの開口部に嵌め込むように構成したことを特徴とす
る溶融物質の蒸気噴出装置。What is claimed is: 1. A device for ejecting steam from a molten substance in a crucible from an ejection hole provided in a lid of the crucible, characterized in that the lid is fitted into an opening of the crucible.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3664084U JPS60147664U (en) | 1984-03-12 | 1984-03-12 | Steam injection device for molten substances |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3664084U JPS60147664U (en) | 1984-03-12 | 1984-03-12 | Steam injection device for molten substances |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60147664U true JPS60147664U (en) | 1985-10-01 |
Family
ID=30542010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3664084U Pending JPS60147664U (en) | 1984-03-12 | 1984-03-12 | Steam injection device for molten substances |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60147664U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0316634A (en) * | 1989-06-14 | 1991-01-24 | Mitsubishi Electric Corp | Material vapor generator |
KR100467805B1 (en) * | 2002-01-22 | 2005-01-24 | 학교법인연세대학교 | Linear or planar type evaporator for the controllable film thickness profile |
JP2019039050A (en) * | 2017-08-28 | 2019-03-14 | キヤノントッキ株式会社 | Evaporation source container and evaporation source device |
-
1984
- 1984-03-12 JP JP3664084U patent/JPS60147664U/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0316634A (en) * | 1989-06-14 | 1991-01-24 | Mitsubishi Electric Corp | Material vapor generator |
KR100467805B1 (en) * | 2002-01-22 | 2005-01-24 | 학교법인연세대학교 | Linear or planar type evaporator for the controllable film thickness profile |
JP2019039050A (en) * | 2017-08-28 | 2019-03-14 | キヤノントッキ株式会社 | Evaporation source container and evaporation source device |
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