JPH0316634A - Material vapor generator - Google Patents

Abstract

PURPOSE:To enhance the accelerating energy of a vapor ion beam by providing a vessel contg. the material at the center of a tube filled with a gas in its axial direction and furnishing a hole piercing the vessel. CONSTITUTION:A voltage is impressed between a pair of electrodes 1a and 1b, and an electric discharge is generated in the discharge space 3 filled with a buffer gas. The buffer gas in the discharge space 3 is heated by the discharge, hence the vessel contg. the metals 4a and 4 deposited on the inner surface of a discharge tube 2 is heated, and the metal 4 is heated. The vapor is liberated from the metal 4a deposited on the inner surface of the discharge tube 2 into the discharge space 3 in the amt. determined by the surface temp. of the metal 4, and the vapor fills a vapor generating layer 17 and is then injected into the discharge space 3 from a through hole 18. Consequently, the injection of the vapor is controlled.

Description

[Detailed description of the invention]

[Industrial use 1F] This invention is based on v! 1 quality vapor as an exciting medium or 1! Away.
This relates to a substance vapor generating device that is used as a medium.
In detail, it concerns the structure of the function that causes material M to be emitted.

[Japanese technology] Examples of material vapor generators using this type of steam include gold II vapor laser devices and vapor ion beam devices.
Proceedings of the Annual Conference, 21a II B 3, No. 60
FIG. 7 is a sectional view showing the conventional metal vapor laser device shown on pages 63 to 63. In the figure, (la), (lb
) is the electric current tf% for discharging, (2) is a cylindrical discharge tube, {3} is a discharge space for exciting steam, and {4} is a substance for generating steam, such as copper and metals such as gold. (5) is the metal vapor that evaporates when the metal (4) is heated, (6) is the insulation material, (7a), (7b)
is a resonant mirror (8a) for laser oscillation.
(8bl is a flange for creating a sealed space, <<9>> is a vacuum layer, (IO) is an insulating tube, (1l) is a sealed tube, 02a
) is the gas inlet, and (12b) is the gas outlet. Next, we will explain the operation. Electrode pair (la), (I
b) A voltage is applied between them to discharge the discharge space (part 3) filled with buffer gas. The acceleration energy of the discharged ions and electrons heats the bathophore gas in the discharge space (part 3), and the metal (4) is evaporated. Ions with high acceleration energy due to pulsed discharge. When electrons and atoms of the heated buffer gas collide with the evaporated gold a vapor atoms, they transfer energy to the vapor atoms and reach a higher excitation level. The heat insulating material (6) is the discharge space《
Part 3 serves to enhance the gas temperature insulation effect in order to maintain the specified vapor density. Also, vacuum 1! ! (9) has the same role as the heat insulating material {6}, especially insulating against radiant heat. When metal vapor atoms excited to an upper excitation level transfer to a lower excitation level or reference level, light is generated. This generated light is transmitted to the resonant mirror (7a),
The light is amplified at (?b) and output as a laser beam to the outside as shown in the eight directions of arrows, and is used in industries such as laser processing. [Problems to be Solved by the Invention] The conventional material vapor generator is configured as described above, and the diameter in the discharge space (3). The axial buff 7 gas temperature distribution and vapor density distribution are shown in Figure 12. In the figure %
X indicates the radial direction of the discharge space (3), and Y indicates the discharge space <3
》 indicates the axis direction. T is temperature, (3a) is discharge space《3
), (3b) is the radial end of the discharge chamber (3), the curve (dotted line) I is the temperature distribution in the axial direction, the curve (dotted line) n**n 1nS is the radial steam Density distribution, curve (
Solid line) m @, m s, ms are the temperature distributions in the radial direction. As shown in the figure, the center of the discharge space {3} (
The buffer gas temperature at the radial end (3b) is lower than that of 3aJ, and the buffer gas temperature at the axial end is also lower. Therefore, the vapor density distribution in the discharge tube (2) can be approximated to the saturated vapor density no, which is the buff 7 - gas temperature [SI1 failure, so the vapor density distribution in the radial direction is the curve n
It becomes like l, nm, ns. (In the case of this figure, no
>ns = ns. ) On the other hand, with respect to the buffer gas density of 11t (gas pressure), when the vapor W becomes higher, electrons, buffer gas ions,
The mean free path of the neutral atoms until they collide with the vapor atoms becomes shorter, and the kinetic energy of the electrons, buffer gas ions, and neutral atoms obtained by the pulse discharge becomes lower before they collide with the vapor atoms. As a result, the probability that vapor atoms can be excited to the −L excitation level decreases, resulting in a problem that laser radiation cannot be obtained. In addition, the discharge space (3
In the current device, where the vapor density is high at the center of the discharge space (3), there are problems such as a low laser power density at the center of the discharge space (3). This invention was made in order to solve the above-mentioned problems, and suppresses the vapor electricity caused by the evaporation of a substance into the discharge space, thereby lowering the vapor density due to the substance relative to the buffer gas density in the discharge space. ．． This lengthens the average self-height travel until collision with electrons, buffer gas ions, neutral atoms, etc., and increases the number of vapor atoms that are excited to higher excitation levels.
As a result, the laser power can be increased and even more laser or vapor ionization can be achieved. The purpose of this invention is to obtain a material vapor generator that can increase the acceleration energy of a beam. Means for Solving Caa 1 A substance vapor generator according to the first invention heats a substance in a gas-filled tube and uses the vapor obtained by evaporating the substance as an excited body or an ionization medium. In this case, a container filled with a substance is provided in the axial center of the tube filled with gas, and a hole is provided through the container. Further, in the substance vapor generating device according to the second invention, one or more containers filled with a substance are provided in a pipe filled with gas, each of the containers is provided with a plurality of through holes, and a plurality of n holes are provided in each of the containers. The diameter distribution of the holes or the distribution of the arrangement of multiple through holes increases from the center to the ends in the axial direction of the tube. Further, a substance vapor generating device according to a third aspect of the invention is one in which a porous body surrounding a substance is provided in the central part in the axial direction of a tube filled with gas. Further, the substance vapor generating device according to the fourth invention is provided with +a several containers filled with substances, and the containers are arranged around the discharge space inside the tube at the center in the axial direction of the tube filled with gas, Each container has one or more through holes. Further, a substance vapor generating device according to a fifth aspect of the present invention is provided with a container filled with a substance in the center of the pipe in the axial direction, and a fixing member for fixing the container in the pipe. Further, the substance vapor generating device according to the sixth aspect of the present invention is provided with a container in which the substance is sealed in the central part in the axial direction of the pipe in which the gas is sealed, and in which at least one straight hole is provided in the container. It is equipped with a pair of electrodes. [Function] The substance vapor generating device according to the first invention evaporates the substance in the container by providing a container in which the substance is sealed inside a pipe filled with gas, and the evaporated vapor is sent to one or more locations in the container. By controlling the steam ejector by ejecting it from the through hole into the discharge space, it is possible to adjust the vapor density of the material vapor with respect to the buffer gas density.Furthermore, the material vapor generating device in the second invention includes:
Gas In addition to controlling the ejection of steam in the axial direction of the tube containing the material, it also makes the vapor density distribution of the material more uniform with respect to the buffer gas density in the axial direction. Further, in the substance vapor generating device according to the third aspect of the invention, the porous body suppresses the substance evaporating into the discharge space, and the vapor density of the vapor due to the substance in the tube is controlled. Further, in the substance vapor generating device according to the fourth aspect of the invention, a plurality of containers filled with a substance are arranged around the inside of the pipe, and the vapor containing the substance is spouted from the through hole of the container, and the vapor containing the substance is ejected from the through hole of the container. Make the vapor density distribution uniform. Further, in the substance vapor generating device according to the fifth aspect of the invention, by providing a fixing member for fixing the container in the pipe, the container is supported and the vapor density distribution in the pipe can be easily controlled. Further, the substance vapor generating device in the sixth invention provides a zti pair in the container and applies a voltage to the electrode pair, thereby
The material is heated by electrical discharge between the electrodes, and the amount of vapor evaporated inside the container is controlled with relative precision. [Example J Hereinafter, an example of these inventions will be explained with reference to the drawings.
FIGS. 1(a) and 1(b) are diagrams showing the main parts of a material vapor generating device according to an actual example of the first invention. In the figure, (2) is a discharge tube, (3) is a discharge space, (41 is a substance such as metal such as copper or gold, (5) is the vapor ejected from substance (4), and 06 is a container such as ceramic , a tubular container made of a heat-resistant material such as tungsten or molybdenum, (l7) is a vapor generating layer of the material, and (l8) is a through hole provided in the container (06). Fig. 1(a) shows an example in which one through hole (l8) is provided, and Fig. 1(b) shows an example in which several through holes (l8) are provided. In the figure, X indicates the radial direction of the discharge space (3), and Y indicates the axial direction of the discharge space (3). The other parts are the same as those shown in Fig. 11. Below, we will explain the operation of, for example, a metal vapor laser device. A voltage is applied between the electrode pair (1a) and (1b) to cause a discharge in the discharge space (3) filled with buffer gas. This discharge heats the discharge space (31 parts of buffer gas) and heats the metal (4a) already adhered to the inner surface of the discharge tube (2) and the container containing the metal (4) to raise the temperature of the metal (4). The amount of vapor determined by the surface temperature of these metals is released from the metal (4a) attached to the inner surface of the discharge tube (2) into the discharge space (3), and the amount of vapor determined by the surface temperature of these metals is released into the discharge space (3). After the steam once fills the steam generation layer 07), it flows from the through hole {l8} to the discharge space {
3}. In this way, @″iil! (16)
Since the steam emitted from the metal (4) inside is ejected into the discharge space (3) only from the through hole (l8), the amount of ejected steam can be suppressed, and the vapor density in the discharge space (3) can be controlled by adjusting the temperature of the buffer gas. The operation is performed so that the saturated vapor density is lower than the saturated vapor density determined by Good. Figure 2 shows the mechanism of laser oscillation in a metal vapor laser device. Figure 2 (a) shows the discharge current waveform, where the horizontal axis is time t and the vertical axis is the discharge current. Figure 2 (b) shows the ion/electron energy Pe distribution where the horizontal axis is the kinetic energy of electrons/ions (Kon/ion temperature), the vertical axis is the number Ne of electrons/ions, and Figure 2 (C) is the horizontal axis In Figure 2 (d), the energy of the buffer gas (buffer gas temperature) is the energy of the buffer gas (buffer gas temperature), the vertical axis is the number of atoms in the buffer gas Ng, the energy Pg distribution of the buffer gas, the horizontal axis is the excitation level of the steam Rf, and the vertical axis is the vapor atoms The number of excitations Pj of vapor atoms is the number Nj
Show the distribution. In the figure, <<23>> is the pulse current, (2
0 is Pe distribution characteristic, (2Sa) is Pg distribution characteristic a, (2
5b) is the Pg distribution characteristic b, (26a) . (27a
) are the lower excitation numbers % of vapor atoms (26b), (27b
) is the upper excitation number of vapor atoms. Next, the mechanism of metal vapor laser oscillation will be explained according to Fig. 2. As shown in Fig. 2(a), a discharge of a pulse current 《23》 is generated in a buffer gas. Due to the electric field E in this discharge space, the ions and electrons of Batz1-gas atoms separated by 'Ji are accelerated, and the kinetic energy Pe
obtain. The kinetic energy Pc collides with the buffer gas and transfers energy to the gas atoms. Therefore, the energy distribution of ions and electrons is shown in Figure 2 (b).
The kinetic energy Pe is equal to the electric field E and the ion.
Determined by the average distance (mean free path of the gas) leg that electrons collide with buffer gas atoms (PeocE-I
Bg), generally, the average value of this movement energy is called the electron temperature Te. Furthermore, the energy Pg obtained by the buffer gas atoms from ions and electrons is the Pg distribution characteristic a (
25a), the energy Pg is determined by the kinetic energy Pe of ions and electrons and the V uniform distance fi (mean free path of I) Igj at which bathophore gas atoms collide with vapor atoms (PgocPe・l gj). -In the crotch,
Is the average value of this energy Y-1 gas? ! i! It is called degree Tg. Furthermore, the ions, electrons, and buffer gas atoms collide south with the metal vapor atoms, and the vapor atoms receive and receive energy from the ions, electrons, and buffer gas atoms, and are excited to the lower/subordinate excitation level. The excitation distribution of these excited vapor atoms is such that there are more atoms at the upper excitation level than at the lower excitation level, that is, the population is inverted, which causes laser oscillation. Also, as a matter of course, when the pulse discharge stops, the electrons and ions disappear, the energy of the buffer gas is transmitted by diffusion toward the wall of the discharge tube (2), and the gas temperature Tg decreases. From the above mechanism of laser oscillation,
When the metal vapor density is suppressed, the mean free path 1gj of the vapor between the buffer gas atoms and the vapor atoms increases, and the gas temperature TgJ? during the pulse period increases. hThe electron temperature're increases,
The number of atoms at the upper excitation level increases relative to the number of atoms at the lower excitation level, increasing the laser output. Therefore, in this embodiment, as a means to suppress the metal vapor density from the saturated vapor density determined by the gas temperature, the method shown in FIG. 1(a). (b
), the steam generated in the container (l6) is passed through the through hole {
18} and by restricting the diameter of the through hole (18) to suppress the amount of vapor flowing into the discharge space (3), the vapor density in the discharge space (3) will be reduced. In other words, the number of atoms at the upper excitation level increases and the laser output can be increased, resulting in a device with improved utilization efficiency, quality, and functionality. Third
Figure (a). 3(b) each shows an embodiment of the second invention, and FIG. 3(a) shows the size distribution of the diameters of the plurality of tribute holes provided in the container (l6) of the pipe {2}. The diameter is increased from the center to the ends in the axial direction.For example, the diameter of the hole located at the center is 0.6 ms, and the diameter of the hole located at the ends is approximately 2 mm. With this configuration, the amount of steam generated in the container (l6) is ejected from the through hole (18) into the discharge space by increasing the amount of steam per unit length to the point where the gas temperature Tg is higher fl (in this case, at the center)
It can be decreased at the axial end of the detonator (2) where the gas temperature is low, and increased at the axial end of the detonator (2) where the gas temperature is low. Therefore, the discharge space (3)
It makes the vapor density in the axial direction uniform and increases the laser oscillation efficiency per unit length in the axial direction. In this example, the position where the gas temperature Tg is high is at the center of the vent tube (2), but
Depending on the device, the position may be slightly off-center rather than in the center, so it is best to reduce the amount of steam at a specified position depending on the device, and increase it at the axial end of the discharge tube (2). In Fig. 3(b), a plurality of spherical containers (l6) are provided, and the diameters of the through-holes (!8) of the containers are different from each other.With such a configuration, steam can be passed through the through-holes (!8). The amount of steam ejected from the discharge space (31) per unit length is reduced at the position where the gas temperature Tg is high (in this case, the center), and conversely at the axial end of the discharge tube (2) where the gas temperature is low. You may increase the number of through holes (I8) in this spherical container (16) by making three of them the same, and adjusting the distribution of the through holes (I8) to the prescribed positions of the gas-filled tube (2). It is also possible to increase the amount from the spherical container (
16) may be constructed with a ring-shaped container. If a ring-shaped container is used, steam will be generated from the surroundings in the discharge space (3). Figure 4(a). (b) is a perspective view showing containers according to still other embodiments of the second invention. In the figure,
(161) is a box-shaped container with a plurality of through holes (18), and Fig. 4 (a) shows the diameter size distribution of "a through holes 08" provided in the container (i6). (2) is made to increase from the center to the end in the axial direction. Figure 4 (b) shows the distribution of the through holes (18) at the specified positions of the gas-filled tube (2). In these embodiments, the same effects as in the above embodiments can be achieved.According to the second invention, in addition to the effects of the first invention, the device has the following advantages: The spatial utilization efficiency is improved, a more compact device is obtained, and the output of the device is increased. Fig. 5 and Fig. 6 each show an embodiment of the third invention, and Fig. 5 shows the main points. 6 is a perspective view of the main part. In FIG. 5, (162) is a container, which is made of a porous material such as ceramic. A porous body is provided in the central part in the axial direction of the container to surround the substance, and the porous body is made of a porous material, for example, as the constituent material of the container.The vapor evaporated in the container (162) is It is discharged into the discharge space (3) through the pores of the porous material.By reducing the pore density of this container (162), the density of the ejected vapor is suppressed and the vapor is discharged from the entire container 1162) into the discharge space (3). Steam (5
), a uniform vapor density can be obtained in the discharge space (3) and the laser output can be increased. Also, the 6th
In the figure, (20) is a sheet made of mesh or porous VJ material, (21) is a substrate, and (22) is a retaining pin. (163) is a sheet (20), a sheet metal (4) 1 The substrates (21) are stacked in layers to form a bottle (2).
It is a multilayer sheet-like porous body fixed in step 2). A porous sheet (163) is placed around the discharge space (3).
Wind it into a cylindrical shape and install it so that 20) is on the inside,
Eject the material vapor (5) through the porous sheet {20} into the discharge space (3). By reducing the pore density of this multilayer sheet (163), the density of ejected steam can be suppressed. The substrate (21) may also be configured to serve as the discharge tube (2). According to the third invention, the effects of the first and second inventions can be obtained within a container, and can be achieved using a cheaper container. FIG. 7 is a cross-sectional view showing the main parts of an embodiment of a material vapor generation device by FFI45E Akira. As shown in the figure, a plurality of tubular containers (j64L. (165) are connected to a discharge space (3)
These containers are placed around the discharge space 《3》. The metal vapor 《5) generated in the plurality of volumes a (164) and (165) is ejected from the through hole (18) toward the radial center of the discharge space 《3),
3) The vapor density can be controlled by the hole diameter, increasing the uniformity of the vapor density. Also, this container (l64).
(165) may be made of the porous material shown in the third invention. According to this invention, the vapor of the substance can be supplied from the periphery of the discharge space (3), and the metal vapor can be uniformly permeated to the gas in the center of the gas-filled tube. With a hole diameter of 18}, the amount of steam ejected can be controlled, the utilization efficiency can be increased, and a more compact device can be obtained. Fig. 8 shows an implementation of the material steam generation device according to the fifth invention. FIG. 2 is a sectional view showing the main part of the example. In the figure, (23) is a fixing member provided along the inner diameter of the discharge tube (2), such as a ring made of a heat-resistant material such as ceramic, molybdenum, or tungsten. A perspective view of this ring (23) is shown in Fig. 9.The ring (23) is a fixing member that fixes a plurality of containers (164) and (165) inside the discharge tube (2). In the embodiment, a plurality of containers (164) and (16) are arranged along the inner diameter of the discharge tube (2).
5) has, for example, four holes (23a) for fitting. With the ring (23)? St several containers (164)
．． (165) and the discharge tube (2), the container can be fixed at any position in the discharge space (3). Therefore, a container can be placed in a position that increases usage efficiency, resulting in a more efficient device. Also, FIG. 10 shows v! according to the 61st light! FIG. 2 is a cross-sectional diagram showing the equation of an embodiment of the J-quality steam generator. In the figure, (19a). (19b) G in container 416j:
This is the first #I electrode. Pre-WR electric% (19a)
．． (19b) Apply a voltage between them to generate a discharge,
The heat from this waste electricity increases the surface temperature of the substance (4) inside the container. As a result, the amount of vapor evaporated in the container (■6) increases, the gas pressure in the container 06 is further increased, and the ejection of the steam (5) is temporally controlled by electric discharge, and the discharge space is The vapor density can be suppressed in synchronization with the pulse output of laser oscillation, etc., and the peak value of the pulse output can be increased.According to the sixth invention, the amount of vapor generated from the substance in the container can be promoted, and the amount of vapor generated can be increased. In addition to being able to control the amount, the time of generation can also be controlled, resulting in a product with increased utilization efficiency, and the output can be controlled.Furthermore, although the above embodiment describes a gold RI4 vapor laser device, it is not limited to this. , it can also be applied to steam ion beam devices, etc. [9. Effect of light J As described above, according to the first invention, a substance is heated in a gas-filled tube, and the vapor that evaporates the substance is used as an excitation medium. Or, in a material vapor generator used as an ionizing medium, a container filled with a material is provided in the center of the tube in the axial direction, and a hole is provided in the container to evaporate the material in the container. By ejecting steam from a through hole, the amount of steam emitted can be controlled by adjusting the diameter of the through hole, which has the effect of increasing the output of the device and improving its usability, quality, and functionality.Also. According to the second invention, a substance is sealed in a gas-filled tube.
or more containers are provided, each of the containers is provided with a plurality of through holes, and the size distribution of the diameter of the plurality of through holes or the distribution of the arrangement of the plurality of through holes is centered in the axial direction of the tube. In addition to the effect of the first invention, by increasing the number from the part to the end, the space utilization efficiency of the device is increased, a more compact device is obtained, and the output of the device is increased. ．． Further, according to the third invention, the effects of the first and second inventions can be obtained with the porous body by providing a porous body surrounding the substance at the center in the annular direction in the pipe filled with gas, and furthermore, the effects of the first and second inventions can be obtained with the porous body. They are cheaper than containers, can be easily placed in equipment, and have the advantage of being easy to change. Further, according to the fourth invention, a plurality of containers filled with a substance are provided, and the containers are arranged around the discharge space in the tube at the center in the axial direction of the tube filled with gas, and each of the containers is By providing one or more through holes in the tube, the vapor of the substance can be supplied from the periphery of the gas-filled tube, and the vapor can evenly permeate to the gas in the center of the gas-filled tube. can. Further, as in the above embodiment, the location of the steam ejection can be controlled by changing the diameter of the through hole, resulting in an improved utilization efficiency and a more compact device. Further, according to the fifth invention, a container filled with a substance is provided in the center of the pipe in the axial direction, and a fixing member is provided for fixing this container in the pipe, so that any space in the pipe filled with gas can be used. The effect is that the container can be easily placed, and the container can be placed in a position where the utilization efficiency can be increased. According to the sixth aspect of the invention, a container filled with a substance is provided in the center of the pipe filled with gas in the axial direction, and the container has an I.
In addition to providing at least several through holes, t[i
By providing a pair, it is possible to promote the steam generation of the substance in the container, and also to control the steam generation rate, as well as to control the time of generation, resulting in a product with increased efficiency, which has the effect of increasing output IIJgI. There is.

[Brief explanation of the drawing]

Figure 1(a). (b) is a cross-sectional view showing the main parts of the material vapor generating device according to an embodiment of the first invention, and FIG.
) to (d) are characteristic diagrams showing the laser oscillation mechanism of a metal vapor laser device, and FIG. 2(a) shows the horizontal axis as time t.
, the discharge current waveform where the vertical axis is the discharge current, the horizontal axis is the kinetic energy of electrons/ions (?t/ion temperature), and the vertical axis is the ion/electron number Ne. In Figure 2 (C), the horizontal axis is the energy Pe distribution of
- Gas energy (buffer gas temperature), vertical axis is buffer gas atoms aNg Buffer 1 - gas energy Pg distribution, Figure 2 (d) shows horizontal axis as excitation level of vapor atoms, vertical axis as vapor atoms Distribution of the excitation number Pj of the steam generator, where the number Nj is the number Nj, and FIGS. 3(a) and 3(b) are sectional views showing the main parts of the material vapor generator according to an embodiment of the second invention, respectively.
Figure 4(a). (b) is a perspective view showing a container according to an embodiment of the second invention, FIG. A seventh perspective view showing a porous body according to another embodiment of the invention.
The figure is a cross-sectional view showing the main parts of a material vapor generating device according to an embodiment of the fourth invention, and FIG. FIG. 9 is a cross-sectional view showing the main parts of the substance vapor generator according to the embodiment, FIG. 9 is a perspective view showing a ring according to this embodiment, and FIG. FIG. 11 is a sectional view showing an example of a conventional material vapor generating device, and FIG. 12 is a radial temperature distribution inside a discharge tube related to a conventional material vapor generating device. It is an explanatory diagram showing the J tightness distribution. (la). (lb) ・--electrode, (2) ---
-Dead electrical tube, (3)...discharge space, (4)...substance, (5)...steam, (7a). (7b) ・
""Resonance mirror (161 - - - Container, 06th ... Container, (162), (163) ...
Porous body, (164). (165) ...container,
(+8)...Through hole, (19a). (19b)
... Pre-#1 electrode, (23) ---Ring. In addition, the same reference numerals in the figures indicate the same or equivalent parts.

Claims (6)

[Claims] (1) In a substance vapor generator that heats a substance in a tube filled with gas and uses the vapor obtained by evaporating the substance as an excitation medium or an ionization medium, the What is claimed is: 1. A substance vapor generating device comprising: a container sealed with a substance; and a hole penetrating the container. (2) In a substance vapor generator that heats a substance in a tube filled with a gas and uses the vapor obtained by evaporating the substance as an excitation medium or an ionization medium, a tube in which the above substance is sealed inside a tube filled with the above gas is used. A plurality of containers are provided, a plurality of through holes are provided in each of the containers, and the size distribution of the diameter of the plurality of through holes or the distribution of the arrangement of the plurality of through holes is adjusted in the axial direction of the tube. A substance vapor generating device characterized in that the substance vapor increases from the center toward the ends. (3) In a substance vapor generation device that heats a substance in a tube filled with gas and uses the vapor obtained by vaporizing the substance as an excitation medium or ionization medium, the A substance vapor generating device characterized in that a porous body surrounding a substance is provided. (4) In a substance vapor generator that heats a substance in a tube filled with a gas and uses the vapor obtained by evaporating the substance as an excitation medium or an ionization medium, a plurality of containers filled with the substance are provided, and the gas is evaporated. A substance vapor generating device characterized in that the container is arranged around a discharge space in the tube at the center in the axial direction of the tube, and each of the containers is provided with at least one through hole. (5) In a substance vapor generator that heats a substance in a tube filled with gas and uses the vapor obtained by evaporating the substance as an excitation medium or ionization medium, the substance is sealed in the center of the tube in the axial direction. 1. A substance vapor generating device comprising a container and a fixing member for fixing the container in the pipe. (6) In a substance vapor generator that heats a substance in a tube filled with gas and uses the vaporized substance as an excitation medium or an ionization medium, the above-mentioned substance is heated in a tube filled with gas, and the above-mentioned substance is heated in the axial center of the tube filled with gas. What is claimed is: 1. A substance vapor generating device, comprising: a container in which a substance is sealed; one or more through holes are provided in the container; and an electrode pair is provided in the container.