JPS60143750A - Contour line display unit for analyzer - Google Patents

Abstract

PURPOSE:To reduce the computation time by providing a frame memory reading selection circuit for selecting the reading of intensity data between a plurality of frame memories for memorizing intensity data according to the level thereof and a display unit. CONSTITUTION:X ray intensity data measured by a two-dimensional scanning with an analyzer (EPMA)1 and scanning position data are brought into a control computing section 4 to be memorized into one of frame memories 6a-6n as specified corresponding to the level of the intensity. In the reading, the computing section 4 outputs a frame memory selection control signal to a frame memory reading selection circuit 10 to set the contour line interval and the intensity data specified alone is allowed to pass the circuit 10 so that a contour line connecting the same intensity levels of X rays will be shown on the screen of a display 8. The interval of the contour line can be changed simply by outputting a frame selection control signal to the circuit 10 from the computing section 4 to select the memories 6a-6n properly.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Industrial application field The present invention is directed to EPMA (Electron Probe).
The present invention relates to a contour line display device in an analytical instrument such as a Micro Analyzer.

(b) Prior art In general, in analytical instruments such as EPMA, when investigating the two-dimensional distribution of elements contained in a sample, in order to facilitate observation, points with the same X-ray intensity are connected continuously. A so-called contour line display is sometimes performed. A conventional device a for displaying contour lines has a control calculation section as shown in FIG.

It is equipped with an external storage device C and a display device d such as a CRT.

Then, the X-ray intensity is measured while scanning the EPMA electron beam or sample stage two-dimensionally in the X and Y directions.
The intensity measured at each point and the data of its position X-Y are sequentially stored in a predetermined address location of an external storage device via a control calculation section.

When the measurement is completed, the intensity data is sequentially read from the external storage device C, and the control calculation section compares and calculates the level of the read intensity data with a predetermined value, and then calculates the level of the intensity at a constant intensity level. The intensity data is output to a display (d) at the TV scanning speed, thereby displaying contour lines.

by the way. In such a conventional device a, the control calculation unit must read intensity data for each pixel from the external storage device C and perform calculation processing, so the access required for screen configuration increases as the number of pixels on the display device d increases. It takes a long time. In addition, since arithmetic processing must be performed at the TV scanning speed, it is necessary to use a circuit with excellent high-speed response for the control arithmetic unit, which causes problems such as increased cost.

(c) Purpose The present invention aims to solve the problems of the conventional method, and to provide a contour line display device which requires a short calculation time for contour line display and is relatively inexpensive.

(D) Configuration In order to achieve such an object, the present invention includes a plurality of frame memories in which intensity data measured by an analytical instrument such as an EPMA is stored according to the intensity level, and a plurality of frame memories that are stored in these frame memories. a display for displaying an image of the intensity data, and a frame memory readout selection circuit for selecting readout of the intensity data from the frame memory is provided between the frame memory and the display. It consists of

(e) Examples Hereinafter, the present invention will be described in detail with reference to FIGS. 2 and 3.

In this example, a case will be described in which the present invention is applied to EPMA as an analytical instrument.

FIG. 2 is a configuration diagram of an EPMA and a contour line display device provided in the EPMA. In the figure, 1 is EPMA,
2 is a contour line display device. Reference numeral 4 denotes a control calculation unit that controls the writing and reading of the X-ray intensity (count value) measured by EPMAl and each measurement data of the scanning position X-Y indicating the X-ray intensity, and also performs various calculation processes.

Reference numerals 63 to 6n denote frame memories in which the intensity data output from the control calculation unit 4 is divided and stored into n bits (n is an integer of 2 or more) according to these intensity levels, and each bit is stored in the frame memory 6a. 6n has a storage area corresponding to a pixel of a display device 8, which will be described later. Reference numeral 8 denotes a CRT display for displaying an image of the intensity data stored in each of the frame memories 6a to 6n. 10 is each frame memory 6a
A frame memory successive selection circuit selects intensity data reading 1 from the frame memories 6a to 6n.
h and the display 8, and the interval between the contour lines is set by the same circuit 10. In this example, as shown in FIG. 3, this frame memory successive selection circuit 10 includes comparators 12a to 12n individually provided corresponding to each frame memo 96a to 6n, one OR circuit 14, and one OR circuit 14 for each comparison. The switching circuit 16 selectively switches the connection between the devices 128 to 12n and the reference power source. In addition, 18
a to 18n are input terminals for intensity data read out from the frame memories 6a to 6n; 20 is an input terminal for a control signal from the control calculation section 4 for switching the switching circuit 16; 22
Reference numerals a to 22n are input terminals of reference power supplied to each of the comparators 12a to 12n, and 24 is an output terminal to the display 8.

Next, using the contour line display device 2 having the above configuration, the EPMA
The operation of each part when displaying the X-ray intensity data in contour lines will be explained.

EPMAI uses its sample stage or electron beam as
-Measure the X-ray intensity at each point on the sample surface while performing two-dimensional scanning in the Y direction. This X-ray intensity data and its scanning position data are sequentially taken into the control calculation unit 4. The control calculation unit 4 generates one frame memo IJ corresponding to this intensity level based on the value of the X-ray intensity from EPMAI.
6a to 6n, and the specified frame memory 6
For a to 6n, a predetermined address is designated based on the data of the scanning position X-Y, and the value of the X-ray intensity is stored in the designated address position. Therefore, the X-ray intensity data is stored in frame memories 6a to 6a corresponding to the intensity level.
6n, and is stored at an address corresponding to the sample position in the frame memories 6a to 6n. Subsequently, when reading the intensity data stored in each frame memory 6a to 6n, the control calculation unit 4 sets the contour interval for display in advance, so that the switching circuit 16 of the frame memory successive selection circuit 10 selects the frame memory. Outputs selection control signal. As a result, predetermined comparators 128 to 12
Since a reference power source is applied to n, only the comparators 12a to 12n can pass read intensity data. on the other hand,
The intensity data in each frame memory 6a to 6n is read out in n bits in parallel by the control calculation unit 4 in synchronization with the TV scanning signal of the display 8. However, since the frame memory read selection circuit 10 has already selected the frame memories 6a to 6n from which the intensity data should be read, only the intensity data of the selected frame memories 1J6a to 6n are read out.
The signal is output to the display 8 via the R circuit 14. In this way, contour lines continuously connecting points of the same X-ray intensity are displayed on the screen of the display 8. When changing the interval between contour lines, a frame selection control signal is output from the control calculation section 4 to the frame memory successive selection circuit 10, and the switching section 16 of the circuit 10 is operated to switch the frame memories 6a to 6n from which the intensity data is to be read. All you have to do is choose as appropriate.

In this embodiment, an EPMA was used as the analytical instrument, but it goes without saying that the present invention can be widely applied to other analytical instruments such as IMA and SAM.

(F) Effects As described above, according to the present invention, intensity data is stored in each frame memory according to its intensity level, and the contour interval can be freely set using the frame memory successive selection circuit. In comparison, the calculation processing time for contour line display is significantly reduced. Moreover, it has the excellent effect of being able to achieve this with a relatively inexpensive circuit.

[Brief explanation of the drawing]

Fig. 1 shows a conventional example, and Figs. 2 and 3 show embodiments of the present invention.
Configuration diagram of PMA and its attached contour line display device, No. 3
The figure is a circuit diagram showing details of the frame memory successive selection circuit. 1... Analytical equipment (EPMA>, 2...
- Contour line display device, 6a to 6n...Frame memory, 8...Display device, IO...Frame memory successive selection circuit. Applicant Shimadzu Corporation Representative Patent Attorney 1) Hide Kazu Figure 1 Figure 2 Figure 3 0 ＼ zb

Claims (1)

[Claims] (1) A plurality of frame memories in which intensity data measured by an analytical instrument such as an EPMA is stored according to these intensity levels, and a display device that displays images of the intensity data stored in these frame memories. Be prepared and
A contour line display device for an analytical instrument, characterized in that a frame memory successive selection circuit for selecting readout of the intensity data from the frame memory is provided between the frame memory and the display.