JPS6014167A - Ultrasonic examination device - Google Patents

Abstract

PURPOSE:To perform a high-precision examination by providing a gain control circuit which controls the gain of a receiving circuit which amplifies the signal received by an ultrasonic probe. CONSTITUTION:In the ultrasonic examination device consisting of an ultrasonic probe 1, transmitting circuits 2a-2n, transmission delay circuits 3a-3n, receiving circuits 4a-4n, reception delay circuits 5a-5n, a delay time control circuit 6, a main control circuit 7, an adding circuit 8, a reception level detecting circuit 13, a discriminating circuit 15, etc., a gain control circuit 17 which controls gains of receiving circuits 4a-4n is provided. By providing the gain control circuits 17, variances of gain of transmitting circuits 2a-2n, the ultrasonic probe 1, receiving circuits 4a-4n, and reception delay circuits 5a-5n are controlled automatically by the main control circuit 7.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to a device that performs inspection and sieving by scanning an ultrasonic beam. In recent years, ultrasonic diagnostic equipment for the human body has been developed, and tomographic images of the body are displayed using a B-scope and the like for examination.

On the other hand, B-scope tomographic image display is also being utilized for non-destructive inspection of iron and copper products, processed products, etc. using ultrasonic waves.

2'; 1 t'2<1 is general 1, ultrasonic meter 1i/1
It is a system diagram of a device.

In the figure, (1) indicates multiple ultrasonic waves 4 that transmit and receive ultrasonic waves.
This is an ultrasonic probe incorporating a radial element, and the ultrasonic transducers (1a) to (1n) are arranged in an array for scanning ultrasonic waves. (2a) to (2n) are transmitting circuits.

(5a) to (6n) are transmission delay circuits, (4a) to (4
n) is the receiving circuit, (5a) to (5n) are the receiving delays fR
J path, (6) is a delay time control circuit, (7) is a main control circuit, (8) is an addition circuit, (9) is a signal processing circuit, and 01 is a display circuit.

In the figure, the amount of transmission delay determined with respect to the scanning direction or focal length is determined by the delay time ity control circuit (6), and then sent to the transmission circuits (2a) to (2n) via the transmission delay circuits (3a) to (6n). is given to the ultrasonic transducer (1
a) to (In) are excited to generate an ultrasonic beam. The ultrasonic beam is reflected by the inside of the material to be inspected (11 not shown), becomes an electric signal again by the ultrasonic transducers (1a) to (1n), and is received by the receiving circuits (4a) to (4n). Generally, the same amount of delay as the corresponding transmission delay time is applied to the reception delay circuit (5
After being given in a) to (5n), they are added in an adder circuit (8). The added signals finally become input signals for the display 1+, l, and 4 motion circuits ool, are amplified and processed, and are displayed on the display circuit oI).

The tomographic image is displayed as a B scope within the plane by scanning the ultrasonic beam within the plane by changing the delay amount of the above-mentioned transmission and reception.

Such ultrasonic diagnostic equipment allows doctors with highly specialized knowledge to visually observe and diagnose tomographic images of the inside of the human body, and is not designed to automatically perform examinations. It wasn't there.

That is, automatic inspection requires an inspection and calibration function to ensure that each operation of the device is normal, and must maintain reproducibility.

In particular, to replace human decision-making functions with expanded capabilities.

The first condition is the level of the received A signal, the reproduction group and stability of the position on the time axis. Further examination is required.

The position of each part of the human body is roughly known], and the doctor judges the position and size from the B scope and makes a diagnosis. Ya diagnosis 1υ
It is thought that it is useless, and in fact, it is close to incompetence.

Therefore, there have been problems in terms of the lack of an operation check function and the lack of a calibration function in the case of automation.

On the other hand, FIG. 2 shows an example of a conventional automatic inspection device for iron products using ultrasonic waves.

In the figure, (1) is an ultrasonic probe, and (2) is a transmission circuit.

(4) is a receiving circuit, (7) is a main control circuit, and (2 is a gate circuit).

α snoring reception level detection circuit, zero-subtraction reception signal time measurement circuit, a9 is a judgment circuit that judges defects from the reception level and occurrence time, QIG is a judgment result output circuit, 0η is the signal level obtained during calibration 0υ is a gain control circuit that controls the amplification degree of the receiving circuit (4), and 0υ is a gate control circuit that controls the gate time from the time of the signal obtained during calibration. (19a
, ) , (19b) is a changeover switch that operates in conjunction with the switch.When inspecting or calibrating by emitting ultrasonic waves to the actual covered object, it will fall towards contact S1, and when inspecting, it will move towards contact S2. Fall down.

In conventional automatic inspection equipment, each probe (1) is equipped with a set of signal processing circuits including a transmitting circuit (2) and a receiving circuit (4). 1 Inspection and calibration are performed for each individual probe.

Next, the @ operation will be explained in detail.

(a) Inspection of circuit operation The changeover switches (19a) and (19b) each fall to contact s2, and the transmitted signal is directly input to the receiving circuit (4) and detected, and the overall operation is inspected.

(b) The calibration changeover switches (19a) and (19L+) each fall to contact S1, and the transmission signal is applied to the probe (1). A test piece (for calibration) with a defect that has been determined in advance, such as size and position 1611, is used for the probe.
IJζ (not shown) is brought into contact with the IJζ via a couplant material (not shown) that propagates the ultrasonic waves, and a gain control circuit ( 17) and gate control circuit H operate to adjust the amplification degree,
Set the gate position correctly.

C. Inspection After the above (a) inspection and (b) iE are performed, an inspection is performed with the switching switches (19a) and (19b) falling to the contact point s1.

When each part of the ultrasonic inspection device described above (the geometry is applied as it is to a device using a probe consisting of a plurality of ultrasonic transducers arranged in an array), the transmission efficiency of each ultrasonic transducer described above is Alternatively, the following drawbacks arise due to variations in reception efficiency and variations in reception circuits and reception delay circuits.

(b) If the above variations are used without adjustment.

When the ultrasonic signals received by each ultrasonic transducer pass through a receiving circuit, a receiving delay circuit, and are combined in an adding circuit, defocusing occurs and performance deteriorates.

(b) Even if a circuit that can adjust variations in the receiving circuit and the receiving delay circuit is added, the adjustment is difficult.

Even if variations in the receiving circuit and reception delay circuit are eliminated, when the ultrasonic transducer is replaced and used depending on the purpose of use, the gain of each receiving circuit will be changed to absorb the variation in the ultrasonic transducer. need to be adjusted accordingly.

2) When scanning an ultrasound beam, it is necessary to change the reception delay time to match the transmission delay time.

Depending on the delay element used in the delay circuit, the passing gain may differ depending on the delay time, and this is similar to (a) above.
This results in performance deterioration such as defocusing. In addition, since the ultrasonic transducer has directional characteristics, it is necessary to correct the overall sensitivity of ultrasonic transmission and reception according to the scanning angle, but when this is corrected in the receiving circuit, the amount of correction must be determined and corrected. There was also a drawback that it was difficult to judge the appropriateness of the amount.

The present invention has been made in order to solve these drawbacks and provide a highly accurate ultrasonic testing device.

An embodiment of the present invention shown in FIG. 3 will be described in detail below.

FIG. 3(a) shows the configuration 1 of an ultrasonic inspection apparatus showing an embodiment of the present invention! /:1, and in Figure 1, (1) is an ultrasound probe, (1a) to (1n) are individual ultrasound transducers (2a) to (2n) are transmission circuits, and (3a) to (" +n
) is the transmission delay circuit.

(4a) to (4n) are receiving circuits, (5a) to (5n)
is a reception delay circuit, (6) is a delay time control circuit, (7) is a main control circuit, (8) is an addition circuit, 0 is a gate circuit, Sumitomo is a reception level detection circuit, (Kuni is a judgment circuit, ( 1G is an output circuit, (lη is a gain control circuit, and αsha is a gate control circuit.

FIG. 3(b) is a block diagram of an ultrasonic inspection apparatus showing another embodiment of the present invention. In this figure, an output selection circuit 21 is added compared to FIG. 3(a).

FIG. 3(C) is a configuration diagram of an ultrasonic inspection apparatus showing another embodiment of the present invention. In this figure, Figure 3 (for paddy,
An input switching circuit c2υ is added.

FIG. 3(d) is a configuration diagram of an ultrasonic inspection apparatus showing another embodiment of the present invention. In this figure, in contrast to FIG. 3(b), the modified circuit c! Thirst has been added.

FIG. 3 (θ) is a configuration diagram of an ultrasonic inspection apparatus showing another embodiment of the present invention. In this figure, two calibration signal generation circuits are added compared to FIG. 3(b).

FIG. 3(f) is a configuration diagram of an ultrasonic inspection apparatus showing another embodiment of the present invention. In this figure, an output selection circuit (2) is added compared to FIG. 3(d).

FIG. 3 (ω is a configuration diagram of an ultrasonic inspection apparatus showing another embodiment of the present invention. In this figure, in contrast to FIG. 3 (f>),
A distance amplitude correction circuit (2) is added.

Next, the operation of each circuit constituting this generator will be explained. First, the overall operation and the relationship between signals will be explained based on FIG. 3(a). The delay time control circuit (6) is driven by 1 from the signal lever of the main control circuit (7) to determine the amount of transmission delay.

And with the amount of delay, the transmission delay circuits (3a) to (3n
) transmitting circuits (2a) to (2n
), and the ultrasonic transducer (1) of the ultrasonic probe (1)
Ultrasonic pulses are generated in addition to a) to (1n).

The ultrasonic wave pulses generated by the ultrasonic transducers (1a) to (1n) propagate in the inspected material (not shown) as a composite wave due to interference with each other, are reflected by one reflection source, and are returned to the ultrasonic transducers. The signals are input to (1a) to (1n) and converted into electrical signals. This electrical signal is input to the receiving circuits (4a) (4n), and the outputs of the receiving circuits (4a) to (4n) are given a time delay by the receiving delay circuits (5a) to (5n), and the adder circuits (8 ) and add it. Receiving circuits (4a) to (4
The gain of n) is controlled by a gain control circuit (1η), and the delay amount of reception delay circuits (5a) to (5n) is controlled by a delay time control circuit (6).

Now, the signal added by the adder circuit (8) is input to the gate circuit α2 controlled by the gate control circuit αS,
The received signal within the set gate is detected by the received level detection circuit α.
output to the screen. The reception level detection circuit 03 detects the reception level from the reception signal within the set gate, and the detected reception level value is determined by a determination circuit set, outputted from the output circuit 0e, and sent to the main control circuit. (7) is also input. Although only one gate circuit (Iz) is provided in this embodiment, it goes without saying that it is possible to provide multiple gate circuits depending on the inspection method and purpose.Also, the reception level detection circuit Although the maximum amplitude value of the signal is detected, other information may also be detected.

Now, the first feature of the present invention is that by having a gain control circuit (171), unlike the conventional one, the transmitting circuit (2a) to
(2n), ultrasonic probe (1), receiving circuit (4a) ~ (
4n) and the reception delay circuits (5a) to (5n) can be automatically controlled by the main control circuit (7). Next, repeat that action in the fourth step.
This will be explained according to the diagram.

Now, prepare a rectangular parallelepiped block () and place the ultrasonic probe (1) on the - face of this block at an angle of 7 degrees.

The ultrasonic pulses (27a)~ perpendicular to the above-mentioned block (e) are transmitted through the couplant (a) that propagates the ultrasonic waves into this block (e).
(27n) is incident, this ultrasonic pulse is reflected by the other surface of this block (c), and is again input to the ultrasonic probe (]). At this time, the transmission delay circuit (6a)
~(ron) and Ukei if :if:3+)! ;Circuit (5
If the delay ff of both or either of a) to (5n) is changed for each system, the ultrasonic transducer (18) to (in)
The outputs of the reception delay circuits (5a) to (5n) corresponding to (
28a) to (2On). The part (2) is the leakage waveform of the transmitted pulse, and the part 0@ is the received signal waveform. As shown in the figure, super-one-wave oscillators (1a) to (1
Since the reception times of the reception (8) signal waveforms corresponding to the respective signals (n) are different, a similar signal (61) obtained by adding these signals by the adder circuit (8) is obtained as a form in which the respective signals are separated. Therefore, it is possible to extract each received signal waveform one by one using the gate circuit α2 and use a reception l/bell detection circuit (the IE detects the reception level of each signal waveform). The received level value is input to the gain control circuit (In) via the main f'jf control circuit 1'71, and the gain control circuit aη can perform gain control so that the received level of the received signal becomes uniform. In the method described above, the transmission delay circuits (6a) to
(6n) and the receiving delay circuits (5a) to (5n) to separate the received signal waveforms of each system corresponding to the ultrasonic transducers (1a) to (1n). For example, a method of suppressing the gain of a circuit other than a specific receiving circuit using a gain control circuit (17) may be used instead or in combination. In addition, the block (c) has a sufficiently smooth surface on which ultrasonic waves are incident or a surface on which it reflects, and the material of the block (c) itself is sufficiently uniform, and the ultrasonic probe (
1), the acoustic coupling state of the ultrasonic incident surfaces of the couplant (c) and the block (c) is the ultrasonic transducer (1a) to (1n).
) is required to be sufficiently uniform. Otherwise, variations due to these factors would be included in the received signal, making it impossible to correct variations only between the ultrasonic probe (1) and the inspection device.

Now, as mentioned above, as a method for separating the individual reception signals transmitted and received by the ultrasonic transducers (1a) to (1n), there are two ways to separate the individual reception signals transmitted and received by the ultrasonic transducers (1a) to (1n).
There is a way to easily obtain this effect without changing the delay amount of 5a) to 5n or changing the gain of receiving circuits 4a to 4n using a gain control circuit (IT).

FIG. 3(b) is a diagram showing an example thereof. Figure 3(b) has a configuration in which an output selection circuit ■ is simply added to the configuration of Figure 3(a), but this output selection circuit (a) receives commands from the main control circuit (7). 7 Since any of the received signals from the reception delay circuits (5a) to (5n) that are input to this circuit are output to the adder circuit (8), each received signal is By selecting each one one by one, it becomes possible to detect the reception level value of each individual system, and it is possible to measure the dispersion between the systems. Similarly, these variations can be corrected by adjusting the gains of the receiving circuits (4a) to (4n) by controlling the gain control circuit (In).The output selection circuit (4) transfers the received signal to the receiving circuits (4a) to (4n). Since it is provided after sufficient amplification or impedance conversion by (4n), it can be realized extremely easily without suffering from problems such as I/N deterioration and crosstalk that are common in this type of circuit. It is possible to do so.

Now, in the embodiments of the present invention shown in FIGS. 3(a) and 3(b), as mentioned above, variations due to the shape, material, and acoustic coupling state of the block (c) are attempted to be corrected. The disadvantage was that it was included in the variation.

However, this problem can be solved by providing an input switching circuit Qυ instead of the output selection circuit, as shown in FIG. 3(C). This input switching circuit Gll
inputs the received signals of the ultrasonic transducers (1a) to (In)#, etc., and outputs arbitrary signals to the receiving circuits (5a) to (5n).

Especially this input switching circuit C! υ is 9For example, an ultrasonic transducer (
1a) Input the received signals of # and others, and send this to the receiving circuit (4
b) It is possible to switch the received signal between different systems, such as outputting it to the system. Therefore, if this input switching circuit 3υ is used, the block (
c) Receiving circuits (4a) to (4n) and receiving delay circuits (5a) to (5) regardless of the shape, material, and acoustic coupling state.
It is possible to correct variations in n).

In other words, one of the received signal inputs from the ultrasonic transducers (1a) to (1n) is selected, and it is switched to II and outputted to one of the receiving circuits (4a) to (4n) one by one. The way to go is to go. If you do it like this.

Because the source signals are the same.

Receiving circuits (4a) to (4n) and receiving delay circuit (5a)
It is possible to completely correct the variations in ~(5n). However, in this method, the transmitting circuits (2a) to (2n
) and the variations in ultrasonic transducers (1a) to (1n) are:
Since this is not corrected, it is necessary to correct or adjust this using another method. Note that in this example.

Ultrasonic transducer (1a) ~ as a received signal used for correction
Although one of (1n) is selected, it is also possible to adopt other methods such as selecting these in order and averaging the results to improve the correction accuracy. Furthermore, a common drawback of the embodiments shown in FIG. 3(a), FIG. 3(b), and FIG. 3(c) is the problem of variations in the material, shape, and acoustic coupling state of the block (c). is an ultrasonic probe (1)
Change its position relative to the block (c).

If the average value of the received level values at a plurality of positions is used for correction, a considerable improvement can be achieved.

Now, in all of the embodiments described above, the block (c)
However, as shown in Figure 3 ((Source), the transmitter circuit (
A modification circuit (2) is added which inputs the outputs of 2a) to (2n), selects one of them, processes the waveform as necessary, and then outputs it to the input switching circuit υ.

The same effect can be obtained without using blocks (c). Since the output pulses of the transmitting circuits (2a) to (2n) generally have a large voltage and are single pulses, they cannot be used as they are in place of the received signal. Therefore, in this embodiment, the waveform is attenuated by resistor division, and the wave number of the pulse waveform is increased using a resonant circuit consisting of a capacitor and a coil, so that it is used to resemble the received signal.

Of course, it is also possible to simplify the configuration by omitting the resonant circuit, or to add a more complicated circuit. Now, if such a modified circuit (2) is provided, the input switching circuit Qη can have a function that allows any combination of input and output as explained in the embodiment of FIG. 3(c), for example, an ultrasonic transducer ( There is no need for a function in which the input from 1a) is output to the receiving circuit (4b), and instead of 2;), the input from the modified circuit (c) is output to the receiving circuits (4a)-(4n). A function that can be switched and output separately is required. Also sent (K
l! It goes without saying that the gate circuit a needs a function that can set the gate at the output time of the , +1 paths (28) to (2n).

Well, send it last time j! The output power of +'r (2a) to (2n) increases and the moment the excitation pulse is output, the inrush current to the power supply circuit, the gap between the circuits, the loss) -
Due to such factors, the operation of the receiver #'f, i (4a) to (4n) and its peripheral circuits becomes unstable, resulting in the deformed surface 16 as shown in the embodiment shown in FIG. 3(d). (
i: 'j If a pseudo signal that is adequate is not obtained, A-Ruru, in this case &j. As shown in Figure 3 (θ), the deformed surface 11
! 4'! An independent calibration signal generation circuit (
2), and the deviation is set so that the pseudo signal is generated at a timing different from the pulse output timing of L''3 (2a) to (2n) before sending; 1: Good. Calibration Iha number generation 101 path (
C) is similar to the actual received waveform; C and other signals are generated at arbitrary timings, as shown in Figure 3(d).
It is not necessary to provide a function that allows the gate circuit a'aKn to be set to a transmission time that is not required in actual use as in the embodiment shown in , and it is also possible to set the gate at a timing that does not cause instability due to the influence of excitation pulses. can be used.

Now, if an output selection circuit I is further added to the embodiments shown in FIGS. 3(d) and 3(e), even more fine-grained correction becomes possible. FIG. 3(f) is an embodiment in which an output selection circuit is added to the embodiment of FIG. 3(e). In the figure, the pseudo signal output by the calibration signal generation circuit (c) is simultaneously input to the input switching circuit Qυ and the output selection circuit (
7) is also entered. So first of all.

Output selection circuit 4 selects only this pseudo signal, and its reception level value is detected by reception level detection circuit 0,
After storing this in the main control circuit (7), the output selection circuit (4) outputs the reception delay circuits (5a) to (5n).
The input switching circuit υ outputs the pseudo signals to the receiving circuits (4a) to (4n) in order, and the received level value is detected by the received level detection circuit 0→. Then, by comparing the received level value when only the pseudo signal is selected in the output selection circuit (4) described above, the receiving circuits (4a) to (4n) and the receiving delay circuit (5a)
) to (5n) can be measured. Therefore.

This function becomes very effective when measuring the absolute values of the received signals from the ultrasonic transducers (1a) to (1n). In this case, the gain after the output selection circuit ■ must be known, but this can be easily determined if the level of the pseudo signal is known, and it is safe to assume that this gain is usually 1. . It goes without saying that the same effect can be obtained even if an output selection circuit (4) is added to the embodiment shown in FIG. 3(d).

By the way, conventionally, this type of device has been equipped with reflection sources that occur due to the attenuation or diffusion of ultrasonic pulses as they propagate through the inspected material, or due to the structure of the ultrasonic probe. A distance/amplitude correction circuit may be added to correct the difference in sensitivity due to position.9 When such a circuit is added, the present invention can produce the effect of measuring the correction curve of this circuit. . This is the second feature of the present invention. FIG. 3 (ω is one embodiment thereof. In this figure, a distance amplitude correction circuit C!4 is added to the embodiment of FIG. 3(f). In the figure.

Calibration signal generation circuit (c) as input of input switching circuit υ
, and sends it to receiving circuits (4a) to (4n).
), and the output selection circuit selects the reception delay, 1
7\ Make sure to select extension circuits (5a) to (5n).

Calibration signal generation circuit (c) If the reception level is detected while changing the signal generation timing, the correction curve of the distance amplitude correction circuit (goods) can be obtained immediately. Therefore, 1 judgment circuit u9
By providing a function to determine whether the correction curve is within a predetermined tolerance range, if there is an abnormality in the distance amplitude correction circuit, the output circuit ae
or by providing the main control circuit (7) or the gain control circuit aη with a function of changing the correction curve.

It is also possible to calibrate the correction curve within acceptable limits. In this embodiment, the latter is adopted, and after one calibration, the correction curve is measured again, and if it is still not within the allowable range, an alarm is output from the output circuit Oe, and the measured value of the correction curve is displayed. did.

Now, in this embodiment, a case is shown in which a distance amplitude correction circuit C14 is added to the embodiment shown in FIG. , 3rd
Figure (b), Figure 3 (C), Figure 3 (d) and Figure 3 (
Distance amplitude correction circuit Q4I for any implementation 1+11 of θ)
It can also be obtained by adding . That is, Fig. 3 (a
), distance amplitude correction circuit C! When 4) is added, the correction curve of the distance amplitude correction circuit can be measured by changing the delay amount of the transmission delay circuits (6a) to (3n).

The distance amplitude correction circuit c! in the embodiment of FIG. 3 (θ)! When 4) is added, the correction curve of the distance amplitude correction circuit Q4 can be measured in the same manner as the embodiment shown in FIG. 3(g).

Now, the third feature of the present invention is the reception delay circuits (5a) to (
5n) when there is a difference in the passing gain depending on the amount of delay.

The point is that this difference in pass gain can be corrected. Generally, a delay circuit using a delay line is used, but if the amount of delay is large, the attenuation amount of the delay line cannot be ignored. Therefore, when the adder circuit (8) combines the outputs of the reception delay circuits (5a) to (5n) with different delay amounts, the attenuation amounts in the reception delay circuits (5a) to (5n) will differ, so one combination If the level of the received signal differs depending on how the amount of delay is applied, an inconvenience occurs. Examples of the present invention Fig. 3(a), Fig. 3(1)), Fig. 3(C), Fig. 3(d), Fig. 3(e), and Fig. 3(f) show the present invention. This is the first characteristic of When performing an operation to correct gain variations through the receiving circuits (4a) to (4n) and the receiving delay circuits (5a) to (5n),
), while changing the delay amount of the reception delay circuits (5a) to (5n), the difference in reception level value due to the difference in delay amount is stored in the main control circuit (7), and the reception delay circuit (5a)
~ (5n) Corresponding to the amount of delay given to ``C receiver (i circuit (
By providing the gain control circuit with a function of setting the gains of 4a) to (4n).

Even if the amount of delay given to the reception delay circuits (5a) to (5b) is arbitrary, the gain through the reception circuits (4a) to (4n) and the reception delay circuits (5a) to (5b) does not change. We were able to. In the embodiment shown in FIG. 3(g), the operation of the third feature of the present invention described herein is the same as in the third embodiment 1(f).

Finally, I will explain the fourth feature of the misfire. The ultrasonic probe (1) originally has finger diffractive properties, and several ultrasonic transducers (1a) to (1n) per bale can be used simultaneously. When excitation occurs, the ultrasonic pulse is propagated in the direction of propagation.

When the excitation pulses for the ultrasonic transducers (1a) to (1n) are given a time difference and have a certain angle in the propagation direction of the ultrasonic pulse, when will the intensity of the ultrasonic pulse differ depending on this angle? There is. Similarly, when the ultrasonic probe (1) receives ultrasonic waves, the reception feeling differs depending on the direction in which the ultrasonic pulses are incident.
Use the delay time Wtl) circuit (6) to change the delay amount of the transmission delay circuits (3a) to (6n) to change the propagation direction of the ultrasonic pulse generated by the ultrasonic probe (1). In this case, even if the received signals are reflected from the same reflection source that is equidistant from the ultrasonic probe (1), the angle between the reflection source and the ultrasonic probe (1) is different. In this case, the received level values will be different. This is inconvenient when this device is used for the purpose of determining the size of the reflection source from the size of the received level value. However, the third embodiment of the present invention
Figure (a).

Figure 3(b), Figure 3(C), Figure 3(d), Figure 3(
θ), FIG. 3(f), this problem can also be solved by adding the calibration test piece (32) shown in FIGS. 5 and 6 to this device. As shown in Figure 5, when the ultrasonic probe (1) is placed on this calibration test piece (52) via a couplant, the amount of delay of the transmission delay circuits (6a) to (3n) is changed and the ultrasonic wave is No matter which direction the ultrasonic pulse generated by probe +11 is directed, the ultrasonic pulse is incident perpendicularly to the cylindrical surface of the calibration test piece (62), and the ultrasonic pulse is reflected in the same direction as the incident direction. Therefore, this calibration test piece (32) - creates the same reflection source regardless of the propagation direction of the ultrasound pulse. Therefore, the receiving circuit (
4a) to (4n), and the gain control circuit αD controls the gains of the receiving circuits (4a) to (4n) by i, :1.

The reception level value of the reception signal obtained from the calibration test piece (62) is determined by the transmission delay [[j1] The amount of delay given to paths (5a) to (6n) is changed to change the general direction of propagation of the ultrasonic pulse. can also be made constant. In this example, the one shown in FIG. For example, through-holes 1 were arranged in a fixed pattern as the target reflection σ east or contrast reflection at the time of inspection at the position where the inlet 1 [from 14, which is incident on the calibration test piece, has a geometric ratio 1\11. The effect is the same even if the calibration sample 11 piece (32), which is closer to the actual source 1, is used.Also, the effect described above can be obtained by using the example shown in FIG. 'J, exactly the same.

Now, in the calibration test piece (62) described above, 1 reflection source is 1f4. Needless to say, this must be determined depending on the object to be tested by this device and the purpose of frugality, and if necessary, two calibration test pieces with different positions of the reflection source may be used. 7. Use 4 or more types. 4) Of course, if a plurality of calibration test pieces with different positions of reflection sources are prepared, the third embodiment of this invention can be achieved. Figure (distance amplitude correction as in season -
If the circuit C24 is included, this distance amplitude correction circuit C24
) correction curve can be calibrated.

In this case, unlike the above-mentioned method of calibrating the correction curve of this circuit, there is an advantage that the correction curve can be calibrated even if the correct correction curve is not known in advance. For example, the positional information of the reflection sources of these multiple calibration test pieces (32) is input in advance to the main control circuit (7), etc., and the reflection is performed while replacing these calibration test pieces (62) in a predetermined order. By detecting the received level value of the source, a correction curve can be obtained.

If the calibration test piece has a time measurement circuit that can measure the position of the reflection source from the time when the received signal is received, there is no need to input the position information and replacement order of the 62-side reflection source in advance. The described effects can be obtained from other embodiments of the present invention in Fig. 3(a), Fig. 3(b), Fig. 3(C), Fig. 3(
d), the same result can be obtained even when the distance amplitude correction circuit (241) is provided in FIG. 3(e).

As described above, according to the present invention, all of the above-mentioned drawbacks of conventional ultrasonic inspection apparatuses are eliminated.

It becomes possible to provide an automatic ultrasonic inspection device with good reproducibility and precision.

Although a probe with ultrasonic transducers arranged in an array was used as an example of the present invention, it is clear that the same effect can be obtained for probes of other shapes such as circular or radial. .

Furthermore, although the ultrasonic transducer is treated as an integrated transmitter and receiver, a split-type probe with separate transmitter and receiver can also be applied in the same way.

[Brief explanation of drawings]

FIG. 1 and FIG. 2 are diagrams showing a conventional ultrasonic inspection device,
FIG. 3 is a block diagram showing the configuration of an ultrasonic inspection apparatus according to an embodiment of the present invention, FIG. 4 is a diagram of blocks used in an embodiment of the present invention and received waveforms obtained at this time, and FIG. FIG. 6 is a diagram showing a calibration test piece. In fig. (1) is an ultrasonic probe, (2) is a transmitting circuit, (3) is a transmitting delay circuit port 4) is a receiving circuit, (5) is a receiving delay circuit,
(6) is the delay time control circuit, (7) is the main control circuit, (8
) is an adder circuit. H & house gate circuit, (13 is reception level detection circuit, 0
→ is a time measurement circuit, Ql is a judgment circuit, e is an output circuit, αη is a gain control circuit, aυ is a gate control circuit, αchin is an output selection circuit, C70) is an input cutoff circuit, c! a
is a deformed circuit.翰 is a calibration signal generation circuit, and Q4) is a distance amplitude correction circuit. (to) is a block, and (32) is a calibration test piece. In the figure, the same or equivalent RIS portions are indicated with the same reference numerals. Agent Masuo Oiwa

Claims (1)

[Scope of Claims] (1) An ultrasonic probe in which a plurality of ultrasonic transducers are arranged in an array on one surface of a backing material on a flat plate. a delay time control circuit that controls the excitation time of the ultrasonic transducer; a plurality of transmission circuits that excites the plurality of ultrasonic transducers using the output of the delay time control circuit; and a plurality of ultrasonic transducers. a plurality of reception circuits that amplify reception signals received by the ultrasound probes arranged in an array; a plurality of reception delay circuits that delay the reception signals according to the output of the delay time control circuit; an addition circuit that adds output signals of the reception delay circuits; and a reception level detection circuit that detects the level of a signal extracted by a time gate circuit based on the reception signals added by the addition circuit. An ultrasonic inspection apparatus including a determination circuit that uses the signal detected by the reception level detection circuit for determination of inspection,
An ultrasonic inspection device characterized in that a gain control circuit is added to control the gain of the receiving circuit, (2) an ultrasonic inspection device in which a plurality of ultrasonic transducers are arranged in an array on one surface of a flat backing material; with a probe. a delay time control circuit that controls the excitation time of the ultrasonic transducer; a plurality of transmission circuits that excites the plurality of ultrasonic transducers using the output of the delay time control circuit; and a plurality of ultrasonic transducers. a plurality of receiving circuits that amplify the received signals received by the ultrasonic probes arranged in a play shape; a plurality of receiving delay circuits that delay the received signals according to the output of the delay time control circuit; an adder circuit that adds output signals of the delay circuit; and a receiver 4M level detection circuit that detects the level of a signal extracted by a time gate circuit based on the received signal added by the adder circuit. An ultrasonic inspection apparatus including a determination circuit that uses the signal detected by the reception level detection circuit for determination of inspection,
A 7T5 sonic inspection device comprising a calibration test piece contacted by the ultrasonic probe and a gain control circuit for controlling the gain of the receiving circuit. (3) An ultrasonic probe in which a plurality of ultrasonic transducers are arranged in an array on one side of a backing material on a flat plate. a delay time control circuit that controls the excitation time of the ultrasonic transducer; a plurality of transmission circuits that excites the plurality of ultrasonic transducers using the output of the delay time control circuit; and a plurality of ultrasonic transducers. a plurality of reception circuits that amplify reception signals received by the ultrasound probes arranged in an array; a plurality of reception delay circuits that delay the reception signals according to the output of the delay time control circuit; an adder circuit that adds the output signals of the reception delay circuit; and a receiver 4 that is added by the adder circuit;
a distance amplitude correction circuit that corrects the amount of signal attenuation due to distance for the M signal; a reception level detection circuit that detects the level of a signal extracted by a time gate circuit from the reception signal corrected by the distance amplitude correction circuit; An ultrasonic inspection apparatus having a determination circuit that uses the signal detected by the reception level detection circuit for inspection determination, characterized in that a control circuit for controlling a correction constant of the distance amplitude correction circuit is added. Device. (4) An ultrasonic probe in which a plurality of ultrasonic transducers are arranged in a play shape on one side of a flat backing material. a delay time control circuit for controlling the excitation time of the ultrasonic transducer; a plurality of transmitting circuits for exciting the plurality of ultrasonic transducers using the output of the delay time control circuit; and a plurality of ultrasonic transducers. a plurality of receiving circuits that increase the reception signal received by the ultrasonic probe arranged in an array by +1'rW, and a plurality of reception delay circuits that delay the reception signal according to the output of the delay time control circuit. , an addition circuit that adds the output signals of the reception delay circuit, and a reception level detection circuit that detects the level of the signal extracted by the time gate circuit based on the reception signal added by the addition circuit. . An ultrasonic inspection apparatus including a determination circuit that uses the signal detected by the reception level detection circuit for determination of inspection,
A selection circuit that arbitrarily selects a plurality of output signals output from the reception delay circuit and outputs them to the addition circuit between the reception delay circuit and the addition circuit, and a gain of the reception circuit? ! 1. An ultrasonic inspection apparatus comprising: a gain control circuit for controlling a gain for IJ11. (51) An ultrasonic probe having a plurality of ultrasonic transducers arranged in a play shape on one surface of a flat backing material, a delay time control circuit for controlling the excitation time of the ultrasonic transducers, and the delay time control circuit. A plurality of transmitting circuits that excite the plurality of ultrasonic transducers with the output of the circuits and an ultrasonic probe having 41 ultrasonic transducers arranged in an array amplify the received signals. a plurality of reception delay circuits that delay the reception signal by the output of the delay time control circuit; an addition circuit that adds the output signals of the reception delay circuit; an ultrasonic inspection apparatus comprising: a reception level detection circuit that detects the level of a signal extracted by a time gate circuit based on the received signal; and a determination circuit that uses the signal detected by the reception level detection circuit for inspection determination. In,
A switching circuit between the ultrasonic probe and the receiving circuit, which switches the plurality of received signals received by the ultrasonic probe in an arbitrary combination and outputs it to the receiving circuit; An ultrasonic inspection device characterized by having a gain control circuit that controls gain. (6) An ultrasonic probe having a plurality of ultrasonic transducers arranged in an array on one side of a flat backing material. a delay time control circuit that controls the excitation time of the ultrasonic transducer; a plurality of transmission circuits that excites the plurality of ultrasonic transducers using the output of the delay time control circuit; and a plurality of ultrasonic transducers. a plurality of reception circuits that amplify reception signals received by the ultrasound probes arranged in an array; a plurality of reception delay circuits that delay the reception signals according to the output of the delay time control circuit; an addition circuit that adds output signals of the reception delay circuits; and a reception level detection circuit that detects the level of a signal extracted by a time gate circuit based on the reception signals added by the addition circuit. An ultrasonic inspection apparatus including a determination circuit that uses the signal detected by the reception level detection circuit for determination of inspection,
A modified circuit inputs the output of the transmitting circuit and outputs a pseudo received signal, and outputs the output of the modified circuit and the received signal received by the ultrasonic transducer to the receiving circuit by switching with an arbitrary combination. An ultrasonic inspection apparatus comprising: a switching circuit for controlling the gain of the receiving circuit; and a gain control circuit for controlling the gain of the receiving circuit. (7) An ultrasonic probe with lril ultrasonic transducers arranged in an array on one side of the flat backing material. The excitation time of the ultrasonic transducers is t!i:I. The delay time to be controlled is 1 b 1 1 time A'i and the delay time control both times + tN
A constant number of transmitting circuits excite the ultrasonic transducers with the number of legs 11j' and l by the output of i, and a plurality of ultrasonic transducers are arranged in an array, a plurality of reception delay circuits 1 and 1 for delaying the reception signal according to the output of the delay time control circuit; an adding circuit for adding the output signals of the receiver, and a receiving novel detecting circuit for detecting the level of the signal θ) extracted by the time gate circuit based on the received newsletters added by the adding circuit. A calibration signal generation circuit that generates one calibration signal in an ultrasonic inspection apparatus having a 4'11 constant circuit that uses the signal detected by the circuit for inspection determination; An ultrasonic inspection apparatus characterized by having a switching circuit that switches received signals in an arbitrary combination and outputs the received signals to the receiving circuit, and a gain control circuit that controls the gain of the receiving circuit. (8) Flat plate shape. an ultrasonic probe having a plurality of ultrasonic transducers arranged in an array on one surface of a backing material; a delay time control circuit for controlling an excitation time of the ultrasonic transducers; and an output of the delay time control circuit. a plurality of transmitting circuits that excite the plurality of ultrasonic transducers, and a plurality of reception circuits that amplify the received signals received by the ultrasonic probe in which the plurality of ultrasonic transducers are arranged in an array. a plurality of reception delay circuits that delay the reception signal by the output of the delay time control circuit; an addition circuit that adds the output signals of the reception delay circuit; and a reception signal added by the addition circuit. An ultrasonic inspection apparatus having a reception level detection circuit that detects the level of a signal taken out by a time gate circuit, and a determination circuit that uses the signal detected by the reception level detection circuit for inspection determination. A calibration signal generation circuit that generates a calibration signal, and an arbitrary combination of the calibration signal and the reception signal received by the ultrasonic probe to switch the reception ft, , jUil/
Between the switching circuit that outputs to S, the reception delay circuit, and the addition circuit, there is a
Ultrasonic inspection characterized by having a selection circuit that arbitrarily selects a + output signal and outputs it to the added circuit 1, and a gain control circuit that controls the gain of the receiving circuit. Device.