JPS60140355U - mass spectrometer - Google Patents

mass spectrometer

Info

Publication number
JPS60140355U
JPS60140355U JP2787084U JP2787084U JPS60140355U JP S60140355 U JPS60140355 U JP S60140355U JP 2787084 U JP2787084 U JP 2787084U JP 2787084 U JP2787084 U JP 2787084U JP S60140355 U JPS60140355 U JP S60140355U
Authority
JP
Japan
Prior art keywords
section
mass spectrometer
ionization section
mass spectrometry
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2787084U
Other languages
Japanese (ja)
Other versions
JPH0342610Y2 (en
Inventor
正彦 土屋
大塚　紀一郎
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP2787084U priority Critical patent/JPS60140355U/en
Publication of JPS60140355U publication Critical patent/JPS60140355U/en
Application granted granted Critical
Publication of JPH0342610Y2 publication Critical patent/JPH0342610Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来例の構造を説明するための断面図、第２図
は本考案を実施した質量分析装置の一例を示す断面図で
ある。 １：ＡＰＩイオン源、２：四重極質量分析装置、３．４
，７：アパーチャ板、１７：フランージ、１９．２１：
排気管。FIG. 1 is a sectional view for explaining the structure of a conventional example, and FIG. 2 is a sectional view showing an example of a mass spectrometer embodying the present invention. 1: API ion source, 2: Quadrupole mass spectrometer, 3.4
, 7: Aperture plate, 17: Flange, 19.21:
Exhaust pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 圧力の高いイオン化部と、該イオン化部で生成されたイ
オンを導入して分析する圧力の低い質量分析部と、上記
イオン化部と上記質量分析部との“　　　　間に間隔を
おいて配列された少な（とも３枚のアパーチャ板と、該
アパーチャ板で挟まれた領域を排気する手段とを備え、
前記アパーチャ板を単一のフランジに取付けたことを特
徴とする質量分析装置。A high-pressure ionization section, a low-pressure mass spectrometry section that introduces and analyzes ions generated in the ionization section, and a small ionization section arranged at intervals between the ionization section and the mass spectrometry section. (Equipped with three aperture plates and a means for exhausting the area sandwiched by the aperture plates,
A mass spectrometer characterized in that the aperture plate is attached to a single flange.
JP2787084U 1984-02-28 1984-02-28 mass spectrometer Granted JPS60140355U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2787084U JPS60140355U (en) 1984-02-28 1984-02-28 mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2787084U JPS60140355U (en) 1984-02-28 1984-02-28 mass spectrometer

Publications (2)

Publication Number Publication Date
JPS60140355U true JPS60140355U (en) 1985-09-17
JPH0342610Y2 JPH0342610Y2 (en) 1991-09-06

Family

ID=30525222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2787084U Granted JPS60140355U (en) 1984-02-28 1984-02-28 mass spectrometer

Country Status (1)

Country Link
JP (1) JPS60140355U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550563A (en) * 1978-10-07 1980-04-12 Ulvac Corp Mass analyzer
JPS5623273A (en) * 1979-07-31 1981-03-05 Takara Belmont Co Ltd Sieve for scattering glaze

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550563A (en) * 1978-10-07 1980-04-12 Ulvac Corp Mass analyzer
JPS5623273A (en) * 1979-07-31 1981-03-05 Takara Belmont Co Ltd Sieve for scattering glaze

Also Published As

Publication number Publication date
JPH0342610Y2 (en) 1991-09-06

Similar Documents

Publication Publication Date Title
JPS60140355U (en) mass spectrometer
JPS60140356U (en) mass spectrometer
JPS58101458U (en) mass spectrometer
JPS60140764U (en) plasma processing equipment
JPS60114958U (en) Gas chromatograph mass spectrometer
JPS6163757U (en)
JPS60193657U (en) Ion source for mass spectrometers, etc.
JPS60121252U (en) Ion source for mass spectrometer
JPS6143262U (en) Target for sputtering equipment
JPS59103267U (en) Gas chromatograph mass spectrometer
JPS5926859U (en) Mass spectrometer ion source device
JPS59129161U (en) Aperture plate replacement mechanism
JPS617849U (en) Electron tube cooling structure
JPS59144561U (en) Gas chromatograph mass spectrometer
JPS6130069U (en) Film forming device
JPS60121251U (en) mass spectrometer
JPS6128083U (en) Multi-element ionization chamber type X-ray detector
JPS60153001U (en) Hermetic window for waveguide
JPS5979966U (en) flat cathode ray tube
JPS58134768U (en) ionization smoke detector
JPS6258900U (en)
JPS58101459U (en) Ion source for mass spectrometer
JPS6123257U (en) Ion source for mass spectrometers, etc.
JPS6097766U (en) sputtering device
JPS58113953U (en) cathode ray tube