JPS60139567A - Cargo carrier facility in clean room - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to load transport equipment in a clean room, which is used to transport loads such as wafers, which must be protected against dirt and dust, within the clean room.

Conventional configuration and its problems In the past, rails were installed inside the clean room,
A configuration is adopted in which a self-propelled trolley is provided that can freely travel back and forth on a fixed route while being guided by the rails. Here, the self-propelled trolley has a drive motor for traveling, and further has a drive motor for changing direction when a load support part that can freely change direction is provided on the upper part. This has led to the self-propelled trolley becoming larger and heavier, and as a result, the entire load transfer equipment has become larger and the space occupied by the equipment in the clean room has become larger. In addition, with the conventional type, dust is generated when the wheels of the self-propelled cart roll in contact with the rails, or when the current collection brush on the self-propelled cart slides into contact with the power supply rail installed on the rails, making it difficult to clean. This will have a negative impact on the

In order to deal with this dust, it has been considered to install rails inside the duct, but this would make the load transport equipment even larger.

OBJECTS OF THE INVENTION It is an object of the present invention to provide load transport equipment in a clean room that can solve the above-mentioned conventional problems.

yI of the Invention In order to achieve the above object, the cargo removal equipment in the clean room of the present invention is provided with a box-shaped duct with a suction duct attached to the lower outer surface side, and a guide body is provided on the bottom surface of the box-shaped duct. The guided body, which is slidably guided by the guide body, is attached to a movable platform disposed inside the box-shaped duct, and the cable body is placed inside the box-shaped duct, and the cable body is placed in the appropriate position. A driving device connected to the movable base and reciprocating the cable body in the longitudinal direction is provided in an operating chamber formed at the end of the box-shaped duct, and a slit formed in the top plate of the box-shaped duct is provided. A vertical shaft that passes through the movable base is rotatably attached to the movable base, a rectangular plate-shaped load support part is attached to the protrusion of the vertical shaft with one end in the length direction, and a pushing rod is provided on the movable base. , the two are interlocked and connected so that the vertical axis can be rotated in forward and reverse directions by the pushing and pulling movements of the push-pull rod, and a delivery device is provided outside the box-shaped duct at a proper location, and the push-pull rod is moved at the proper location. The box-shaped duct is provided with an operating device that can freely face the user.

Embodiment and Function An embodiment of the present invention will be described below based on the drawings. (
1) is a box-shaped duct installed in a clean room (2), which consists of a bottom plate (IA), a pair of left and right side plates (IB), and a top plate (
A slit (37) extending over the entire length in the width direction of the top plate (IC) is formed in the center of the width direction of the top plate (IC), and a large number of suction holes (4) are formed in the bottom plate (IA). On the bottom plate (IA) in the box-shaped duct (1), there is a
A guide body (5), which is one of the M guide structures, is laid over the entire length in the longitudinal direction, and the other guided body (6), which is guided in sliding contact with this guide body (5), is connected to the box-shaped duct. (
1) It is attached to the lower part of the movable stand (7) arranged inside.

An endless cable (8) is disposed inside the box-shaped duct (1) along its length. That is, the box-shaped duct (1
) has a pair of guide wheels (9) α (1 and these guide wheels (9) (
A drive wheel 0]1 located below 10 is disposed, and a pair of guide wheels θ203 whose phases are shifted in the front and rear as well as up and down directions are provided on the other end side, and a drive wheel 0]1 located below these guide wheels 02θ]. A tension $04 is provided. The cord body (8
) are arranged over 141 questions from (9) to (141 questions), and therefore, in the rectangular duct (1), they are located in pairs on the negative side and over the entire length in the length direction Cζ
Become. A plurality of receiving rings αe are provided in the box-shaped duct (1) to prevent the cables (8) from sagging. Appropriate positions on the upper position line portion of the cable body (8) are connected by a connecting member αQ from the movable platform (7). An operating chamber is formed by a cover frame (+7) at one end of the box-shaped duct (1), and the cable (8) is reciprocated in the longitudinal direction within this operating chamber. Drive device 0
1 is provided. This drive device a-samurai consists of a motor (e) and a transmission mechanism that interlocks the output shaft Qυ of this motor (e) and the drive wheel I (support). Said box-shaped duct (1)
On the other end side, an adjustment chamber wall is formed by a cover frame (c).

Inside this adjustment chamber (2), there is provided a weight that can be raised and lowered while being guided by a guide rod (2), and the tension transport A4 is attached to the upper part of this weight.

Therefore, by driving the drive unit uI forward and backward,
A movable platform (7) can be moved back and forth within the box-shaped duct (1).

A vertical shaft is rotatably provided at the upper part of the other end of the movable table (7) via a bearing device, and this vertical shaft projects outward through the slit (3). do.

A rectangular plate-shaped (rectangular plate-shaped) load support part (2) is attached to one end of the load support part (1) in the longitudinal direction on the protrusion of the vertical axis. A plate 0υ is attached, and carrier trunks (which store sea urchins and are an example of a load) can be freely installed at the middle part and the other end in the length direction of the load support part (toward), respectively. . Career (
2) is provided with a pair of left and right support brackets (to) on the movable base (7) having a locking part (82, A) projecting laterally at the upper end, and between these support brackets (to) Multiple upper and lower guide rods (b) are installed. Block c9 that can be moved left and right *h by being guided by these guide rods
is provided, and this block (2) is biased to move in the other direction by a spring (t) provided between it and the support bracket (-4111). A push-pull rod (b) is inserted into the block (i) along the guide rod (b).
At the same time, a few stopper plates (7) are installed on the - side of this push-pull rod (B), and an operation receiver is installed on the other side.
is installed. The push-pull rod (2) is urged to be pulled out in the other direction by a buffer spring provided between the tool (A) and the block (2), and the operation receiver is urged by the buffer spring provided between the tool (A) and the block (2). The other side of the case is formed into a positioning surface (89a) that is V-shaped in plan view.The elastic force of the PL spring 01 is set to be larger than the elastic force of the spring (1) (1) (2).

Therefore, when the push-pull rod □□□ is pushed and moved, the block (bone moves integrally against the spring)
I will do j. The rack part θ〃 is attached to the block (2).
At the same time, a pinion C'4 that engages with this rack part θυ is attached to the vertical shaft (2) at the front, and from this, the vertical shaft can be rotated in forward and reverse directions by the push and pull movement of the push and pull rod (B). In order to do so, both @Kan are linked together. Here, when the push-pull rod (b) is pulled out to the other side the most, the load support part 0η is set so that its length direction is along the length direction of the box-shaped duct (1). Said box-shaped duct (1)
A cargo receiving/handling device (1) is provided on one side outside the box-shaped duct (1), and on the other side, an operating device that can freely oppose the push/pull rod (2) is provided on the box-shaped duct (1). ing. The said operating device (goods) is attached to the inner end of the driving part (2), the operating lever (which causes the operating receiver to move toward and away from the tool (2)), and the operating lever (2). Laura Gl? 'l
The operating rod (1) passes through the through hole (1) formed in the side plate (IB) and is located inside the box-shaped duct (1), and the entire box-shaped duct (1) is covered with a cover. phase]. Here, the stroke of the operating rod is set to a length necessary to rotate the load support part (1) counterclockwise by [90+α], and at that time, the load support part (to) is rotated 90 degrees to the counterrotation layer side. A retaining bracket is provided, and the α degree is absorbed by a buffer spring θQ. In addition, the stopper bracket... is vertical! ! It is attached to the ll (to) and receives the load support part (to). J
The machine wheel is made of an upright rectangular cylindrical body, a vertical slit formed at the center of the front surface of the cylindrical body 15Il, and a machine wheel that passes through the four slits. A medium body located inside and outside of the rectangular cylinder 151), a vertical guide rail attached to the rear inner surface of the rectangular cylinder 151), and a large movable body guided by this guide rail H. It consists of a guided body integrated with the main body, a chain-driven lift-and-open type 11 holder (a), and a load holder η attached to the front of the one-body frame. (57a) has a pair of holding arms (57a) (57a).

The distance between the inner surfaces of the image holding arm (57a) is the same as that of the carrier (2
), but not the locking part (82A). - indicates a locate pin.

Outer side of the bottom plate (IA) in the box-shaped duct (1)
(A suction duct is provided on the lower surface (l+ll), and a suction pipe communicates with this suction duct.

The operation of the above embodiment will be explained below. Here, we will explain the action of transferring the carrier (2) on the load support part (the carrier (2) on the load support part) to the other side by the load transfer device m (c). When the carrier (2) is placed on the load support part (1), the load support part (1) has a box-shaped duct (1) in the longitudinal direction. It is located along the length direction of the box-shaped duct (1).At this time, as shown in the solid line in Fig. 5, both springs 0IHI
I is fully extended, and both the block (2) and the push/pull rod (b) have moved the most to the other side. In this state, the drive device 01 is operated to move the cable (8).

Then, the movable base (7) integrated with the cable body (8) via the connecting member ae etc. moves to the guide body (7) via the guided body (6).
5) and, by detection by suitable detection means, the consignment stops at the transfer device (1) and the operating device (2). Next, operate the operating device and press the operating lever.
The roller 0 is advanced through the . Then, the roller θη comes into contact with the positioning surface (89a), and pushes and moves the push-pull rod (b) as a unit. At this time, since the elastic force of the buffer spring is greater than the elastic force of the spring (2), the block (to) moves against the spring (11),
The vertical shaft (2) rotates via the rack part (to the sword). This causes the load support part (to) to swing together with the vertical shaft (2), causing the carrier to protrude outward from the negative side of the box-shaped duct (1).

When the load support part (2) is swung by 90 degrees at right angles, the bearing mounting fil (2) comes into contact with the stopper bracket, and further movement of 1i1'Ah is prevented. Thereafter, the operating lever moves by a small amount (alpha), but the amount of movement is absorbed by the elastic deformation of the Alj spring, resulting in the state shown by the imaginary line in FIG. When the carrier (goods) is extended, m8
As shown in the solid line in the figure, the lower ζ holding arm (5) of the carrier 0
7a) is located, and in this state, the lifting drive unit WI- is operated to raise the holding arm (57a). Painting arm (
57a) rises on the side of the carrier (2) and engages the locking part (8
2A) and lift the carrier (2A) upward from the load support part (2) as shown by the imaginary line (A) in Figure 8.

Thereafter, the operating device @- is operated in reverse to move the operating lever (■) in and out. Then, the push-pull rod (2) is pushed out by the elastic force of the tip 1' buffer spring (2), and the push-pull rod (2) is moved toward the other side by the elastic force of the spring (2). As a result of this movement, the vertical axis - is rotated in the opposite direction to the above through the rack part G11) and the pinion), and the box-shaped duct (1) (1 to be moved by fi, and the movable if!+ platform (7) to be moved back to the carrier received by the tζ holding arm (57a) as shown by the imaginary line (a) in Figure 8). Since the reception is performed via the locating pin, it is performed with high precision. As mentioned above, after the load support part (1) escapes, the lifting drive device v4 is operated in reverse to hold the load Q (57,).
lower. By kneading, the carrier (to) is lowered as shown in Figure 3 (reflection line (b).
2) is removed mechanically or artificially.

During the above-mentioned work, on the box-shaped duct (1) side, the suction hole (4) is opened from the slit (3) into the box-shaped duct (1).
), an air current flows into the suction duct and into the suction pipe, and therefore the dust generated in the box-shaped duct (17) does not leak into the clean room (2) from the slit (3). It is removed by suction through a suction tube.

As shown in the above embodiment, by employing the combination structure of the positioning surface (89a) and the roller@force, it is possible to achieve high positioning accuracy. Furthermore, the structure of the abutting bracket &I and the buffer spring (2) allows rotation of 90 degrees at all times by setting the amount of operation of the operating device @(B) to (90+α) degrees.

Effects of the Invention According to the load transport equipment in a clean room configured according to the present invention, the following effects can be expected. In other words, the travel drive device and the load support rotating part i[11+ device can be used @J, stand (
Running platform) side lζ holding? 7, the movable table can be expected to be smaller and lighter, and the coil can make the entire equipment including the box-shaped duct smaller, reducing the space occupied by the equipment in the clean room, making it easier to arrange in terms of space. Easy to set up.

Furthermore, since no wheels or current collection mechanism are used, the generation of dust inside the box-shaped datato can be minimized.

[Brief explanation of drawings]

The drawings show one embodiment of the present invention, and FIG. 1 is a longitudinal side view;
Fig. 2 is a partially cutaway plan view, Fig. 8 is a front view, Fig. 4 is a partially cutaway perspective view of the main part, Fig. 5 is a cross-sectional plan view of the main part,
FIG. 6 is a longitudinal sectional front view of the same. (υ...Box-shaped duct, (IA)...Bottom plate, (IB)
...Side plate, (IC)...Top plate, (2)...Clean room, (3-to-slit, (5)...Guide body,
(6)...Guided rest, (7)...Movable platform, (8)
...Cable body, )...Working chamber, On...Drive device,
(c)...adjustment chamber, wing...vertical axis, (e)...load support section, (2) carrier (simplified), (82A)...locking section, (7)...・Block, (to)...Spring, (b)
... Push/pull rod, (to)... Stopper plate, ■
・・The operating device is a tool, (89a) ・・positioning surface, θ1・
...Buffer spring, @υ...Rack part, Tsu...pinion, wheel...Delivery device for receiving goods, (Foundation)...Operating device, θ
Q... Operating rod, (B)... Roller, (Q... Stopping bracket, -... Movable body, -... Lifting drive device, I... Load holder, (57a)・・・Holding arm, -・
・Suction duct agent Yoshihiro Morimoto

Claims (1)

[Claims] 1. A box-shaped duct with a suction duct attached to the lower outer surface is provided, and a guide body is laid on the bottom of this box-shaped duct,
The guided body, which is slidably guided by this guide body, is attached to a movable base disposed within a box-shaped duct, and a cable body is disposed within the box-shaped duct, and a suitable position of this cable body is attached to the movable base. a drive device that connects and reciprocates the cable body in the longitudinal direction;
A vertical shaft that is provided in an operating chamber formed on the end side of the box-shaped duct and passes through a slit formed in the top plate of the box-shaped duct is rotatably mounted on the movable table, and a protrusion of the vertical shaft is provided. A rectangular plate-shaped load support part is placed at one end in the longitudinal direction, and a push/pull rod is provided on the flexible table, and the vertical shaft is rotated in forward and reverse directions by the push/pull movement of the push/pull rod. If the two are connected in an interlocking manner, and a delivery device is installed at a suitable position of the box-shaped duct,
A cargo transport facility in a clean room, characterized in that the box-shaped duct is provided with an operating device that can freely face the push-pull rod.