JPS60139242U - leak detector - Google Patents

leak detector

Info

Publication number
JPS60139242U
JPS60139242U JP2657584U JP2657584U JPS60139242U JP S60139242 U JPS60139242 U JP S60139242U JP 2657584 U JP2657584 U JP 2657584U JP 2657584 U JP2657584 U JP 2657584U JP S60139242 U JPS60139242 U JP S60139242U
Authority
JP
Japan
Prior art keywords
leak detector
molecular pump
turbo molecular
tube valve
analysis tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2657584U
Other languages
Japanese (ja)
Inventor
片山　幸昭
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP2657584U priority Critical patent/JPS60139242U/en
Publication of JPS60139242U publication Critical patent/JPS60139242U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ターボ分子ポンプを使用して高真空ｋｆ、排気し、封止
部品の気密性試験を行うリークデテクタに於いてミ質量
分析管に接続された分析管バルブと、ターボ分子ポンプ
の真空度が所定値に達することにより前記分析管バルブ
を開閉作動させる制御回路とを具蝉したことを特徴とす
るり一７デスク二−A turbo molecular pump is used to evacuate high vacuum kf and perform an airtightness test on the sealed parts.In the leak detector, the vacuum level of the analysis tube valve connected to the mass spectrometer tube and the turbo molecular pump is set to a predetermined value. and a control circuit for opening and closing the analysis tube valve by reaching the above.
JP2657584U 1984-02-24 1984-02-24 leak detector Pending JPS60139242U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2657584U JPS60139242U (en) 1984-02-24 1984-02-24 leak detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2657584U JPS60139242U (en) 1984-02-24 1984-02-24 leak detector

Publications (1)

Publication Number Publication Date
JPS60139242U true JPS60139242U (en) 1985-09-14

Family

ID=30522708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2657584U Pending JPS60139242U (en) 1984-02-24 1984-02-24 leak detector

Country Status (1)

Country Link
JP (1) JPS60139242U (en)

Similar Documents

Publication Publication Date Title
JPS60139242U (en) leak detector
JPS5945848U (en) Exhaust operation display device for vacuum equipment
JPS59152436U (en) Leak test device
JPS5934342U (en) Heat exchanger tube end leak detection device
JPS5810369U (en) Gas chromatograph direct-coupled mass spectrometer
JPS60195982U (en) vacuum pump equipment
JPS60114958U (en) Gas chromatograph mass spectrometer
JPS59144561U (en) Gas chromatograph mass spectrometer
JPS5998347U (en) gas sampling device
JPS5857940U (en) Leak inspection device
JPS59158059U (en) sampling device
JPS6262947U (en)
JPS58103372U (en) sampling device
JPS5879850U (en) Sample contamination prevention device
JPS60122360U (en) sputtering equipment
JPS5977767U (en) tube valve
JPS5835969U (en) Fritted glass coating equipment
JPS61112265U (en)
JPH0327335U (en)
JPS59155546U (en) Dissolved oxygen measuring device for solutions in vacuum equipment
JPS60167863U (en) vacuum equipment
JPS5858051U (en) vacuum blood collection needle cap
JPS5948706U (en) Vacuum breaker for tubular membrane separator
JPS58145561U (en) Carbonization test equipment
JPS60149365U (en) car cleaner