JPS60138248U - Ion irradiation device - Google Patents
Ion irradiation deviceInfo
- Publication number
- JPS60138248U JPS60138248U JP2621184U JP2621184U JPS60138248U JP S60138248 U JPS60138248 U JP S60138248U JP 2621184 U JP2621184 U JP 2621184U JP 2621184 U JP2621184 U JP 2621184U JP S60138248 U JPS60138248 U JP S60138248U
- Authority
- JP
- Japan
- Prior art keywords
- irradiation device
- film thickness
- detection means
- ion irradiation
- liner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
、 第１−はこの考案のイオン照射装置の一実施例の
構成説明図、第２図Ａは膜厚検知手段の他の例の構成説
明図、第２図Ｂは膜厚検知手段のさらに他の−の構成説
明図、第３図はライナの破損を検知する手段の他の例の
構成説明図、第４図は分析管の内壁面の表面導電性測定
手段の一例の構成説明図、第５図は分析管の内壁面の汚
染を検知する手段の一例の構成説明図、第６図はターゲ
ット部の内壁面の汚染を検知する手段の一例の構成説明
図である。
１・・・イオン照射装置、２・・・イオン源部、３・・
・質量分析部、４・・・加速・収束部、５・・・ターゲ
ット部、６，１９．６２・・・水晶膜厚計、９・・・発
光素子、１０・・・受光素子、１１・・・ガラス窓、１
２・・・絶縁体、１３・・・電極、１４・・・電極、１
５・・・絶縁体、１６・・・空隙、１８・・・感温素子
、３２，３３・・・ライナ、３４．６０・・・表面絶縁
化探知棒。
−第１図−
７１ｆ１, 1- is an explanatory diagram of the configuration of one embodiment of the ion irradiation device of this invention, FIG. 2A is an explanatory diagram of the configuration of another example of the film thickness detection means, and FIG. 2B is an explanatory diagram of another example of the film thickness detection means. Fig. 3 is an explanatory diagram of another example of the means for detecting damage to the liner; FIG. 5 is an explanatory diagram of the configuration of an example of means for detecting contamination on the inner wall surface of an analysis tube, and FIG. 6 is an explanatory diagram of the construction of an example of means for detecting contamination on the inner wall surface of the target portion. 1... Ion irradiation device, 2... Ion source section, 3...
・Mass spectrometry section, 4... Acceleration/convergence section, 5... Target section, 6, 19.62... Crystal film thickness meter, 9... Light emitting element, 10... Light receiving element, 11.・・Glass window, 1
2... Insulator, 13... Electrode, 14... Electrode, 1
5... Insulator, 16... Gap, 18... Temperature sensing element, 32, 33... Liner, 34.60... Surface insulated detection rod. -Figure 1- 71f1
Claims (1)
段および／または表面導電性測定手段お−よび／または
膜厚検知手段を付設し、これによ−り質量分析管部の内
部の劣化度合を検知可能としたことを特徴とするイオン
照射装置。 ２ ライナ破損検知手段が、ライナの背後に設置された
イオン検知電極である請求の範囲第１準記載の装置。
、 、 ３ 表面導電性測定手段が、所望により分析管内壁面に
当接される探知棒とその当接部を通じて流れる電流の測
定手段からなる請求の範囲第１項記載の装置。 ４ 膜厚検知手段が、水晶膜厚計で鼠る請求あ範囲第１
項記載の装置。[Scope of claim for utility model registration] 1 Liner broken in the mass spectrometry tube of the ion irradiation device! An ion irradiation device characterized in that it is equipped with a detection means, a surface conductivity measurement means, and/or a film thickness detection means, thereby making it possible to detect the degree of deterioration inside the mass spectrometry tube section. . 2. The device according to claim 1, wherein the liner damage detection means is an ion detection electrode installed behind the liner.
3. The apparatus according to claim 1, wherein the surface conductivity measuring means comprises a detection rod that is brought into contact with the inner wall surface of the analysis tube, if desired, and a means for measuring the current flowing through the contact portion. 4 Claim No. 1 in which the film thickness detection means is a crystal film thickness meter
Apparatus described in section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2621184U JPS60138248U (en) | 1984-02-24 | 1984-02-24 | Ion irradiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2621184U JPS60138248U (en) | 1984-02-24 | 1984-02-24 | Ion irradiation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60138248U true JPS60138248U (en) | 1985-09-12 |
Family
ID=30522004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2621184U Pending JPS60138248U (en) | 1984-02-24 | 1984-02-24 | Ion irradiation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60138248U (en) |
-
1984
- 1984-02-24 JP JP2621184U patent/JPS60138248U/en active Pending
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