JPS60136049U - Central control device for ion implanter - Google Patents
Central control device for ion implanterInfo
- Publication number
- JPS60136049U JPS60136049U JP2399784U JP2399784U JPS60136049U JP S60136049 U JPS60136049 U JP S60136049U JP 2399784 U JP2399784 U JP 2399784U JP 2399784 U JP2399784 U JP 2399784U JP S60136049 U JPS60136049 U JP S60136049U
- Authority
- JP
- Japan
- Prior art keywords
- control device
- ion implanter
- central control
- control
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案の実施例を示すブ爾ツク図である。
１・・・・・・イオン注入装置制御盤、２・・・・・・
モニター、３・・・・・・制御信号出力部、４・・・・
・・接続切替制御部、５・・・・・・イオン注入装置本
体、６・・・・・・イオン注入装置集中制御装置。FIG. 1 is a block diagram showing an embodiment of the present invention. 1... Ion implanter control panel, 2...
Monitor, 3... Control signal output section, 4...
... connection switching control unit, 5 ... ion implanter main body, 6 ... ion implanter central control device.
Claims (1)
盤に設置されている装置状態の表示を行う各種メーター
への入力信号を並列に受信可能な複数のモニターと各種
制御を行える出力信号を制御盤と同様に出しうる制御部
及びこれらの接続を任意に切り替えできる接続制御部を
具備した主制御装置で、接続の切り替えに依り一ケ所で
複数のイオン注入装置を集中的に制御しうろことを特徴
としたイオン注入装置用集中制御装置。The ion implanter I' has multiple monitors that can receive input signals in parallel to various meters that display the device status installed on the control panel that controls its operation, and output signals that can perform various controls. A main control device equipped with a control section that can be accessed in the same way as a control panel and a connection control section that can switch these connections arbitrarily.It is possible to centrally control multiple ion implanters from one place by switching connections. A central control device for ion implantation equipment featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2399784U JPS60136049U (en) | 1984-02-22 | 1984-02-22 | Central control device for ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2399784U JPS60136049U (en) | 1984-02-22 | 1984-02-22 | Central control device for ion implanter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60136049U true JPS60136049U (en) | 1985-09-10 |
Family
ID=30517741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2399784U Pending JPS60136049U (en) | 1984-02-22 | 1984-02-22 | Central control device for ion implanter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60136049U (en) |
-
1984
- 1984-02-22 JP JP2399784U patent/JPS60136049U/en active Pending
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