JPS60134508A - Manufacture of piezoelectric vibrator - Google Patents
Manufacture of piezoelectric vibratorInfo
- Publication number
- JPS60134508A JPS60134508A JP24087983A JP24087983A JPS60134508A JP S60134508 A JPS60134508 A JP S60134508A JP 24087983 A JP24087983 A JP 24087983A JP 24087983 A JP24087983 A JP 24087983A JP S60134508 A JPS60134508 A JP S60134508A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- piezoelectric vibrator
- vibrators
- base
- prolonged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 6
- 230000002787 reinforcement Effects 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract 4
- 230000003014 reinforcing effect Effects 0.000 description 11
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は複数の圧電振動子を１枚の圧電性薄板から一体
に形成した後、個々の振動子に切離す圧電振動子の製造
方法に関するものである。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a method of manufacturing a piezoelectric vibrator, in which a plurality of piezoelectric vibrators are integrally formed from one piezoelectric thin plate and then separated into individual vibrators. It is.
例えば超小形の音叉形水晶振動子は、通常１枚の水晶薄
板からエツチング加工により多数連結した状態で形成さ
れる。従来用いられているこの種の連結体を第１図に示
す。同図はＺ方向に垂直な主面を有するいわゆるＺ板か
ら形成した例で、図において１が振動子、２は補強枠で
あシ、各振動子１は、その１端に位置する基部１ａにお
いて連結部３にニジ補強枠２に連結され、他端に向けて
振動部１ｂが延在している。For example, an ultra-small tuning fork-shaped crystal resonator is usually formed by connecting a large number of thin crystal plates by etching. A conventionally used connector of this type is shown in FIG. The figure shows an example formed from a so-called Z plate having a main surface perpendicular to the Z direction, in which 1 is a vibrator, 2 is a reinforcing frame, and each vibrator 1 has a base 1a located at one end The connecting portion 3 is connected to the rainbow reinforcing frame 2, and the vibrating portion 1b extends toward the other end.
各振動子１は、それぞれその基部１ａにおいて上記振動
部１ｂの延在方向、図示の例ではＹ方向に保持される。Each vibrator 1 is held at its base 1a in the extending direction of the vibrating section 1b, which is the Y direction in the illustrated example.
このような連結体は、連結部３において個々の振動子に
切断されて保持器に組立てられるのであここを切除して
各振動子を個々に切シ離した後も、その一部が底面に残
る。このため、当該底面を保持器に当接させて組立てる
際の固定位置８度にばらつきを生ずる。また、連結部３
が上記底面にあるため補強枠２もまた轟然に底面側にあ
ｐ、このために各振動子１は補強枠２から１個１個切シ
離した後でなければ組立てができず、取扱い上不便であ
った。Such a connecting body is cut into individual vibrators at the connecting part 3 and assembled into a holder, so even after cutting this part and separating each vibrator individually, a part of it remains on the bottom surface. remain. Therefore, when the bottom surface is brought into contact with the retainer and assembled, the fixing position varies by 8 degrees. In addition, the connecting part 3
Since the reinforcing frame 2 is located on the bottom surface, the reinforcing frame 2 also rises to the bottom side, and for this reason, each vibrator 1 can only be assembled after being separated from the reinforcing frame 2 one by one, making it difficult to handle. It was inconvenient.
〔発明の目的および構成」
本発明はこのような事情に鑑みてなされたもので、その
目的は、振動子の保持器への組立作業を容易にし、かつ
その組立精度も向上させることが可能な圧電振動子の製
造方法を提供することにある０
このような目的を達成するために、本発明は、各圧電振
動子を振動部の延在方向とは直角の方向に延在する連結
部によって連結するようにしたものである。[Object and structure of the invention] The present invention has been made in view of the above circumstances, and its object is to facilitate the assembly work of the vibrator to the holder and to improve the assembly accuracy. An object of the present invention is to provide a method for manufacturing a piezoelectric vibrator. In order to achieve such an object, the present invention connects each piezoelectric vibrator with a connecting portion extending in a direction perpendicular to the extending direction of the vibrating portion. It is designed to be connected.
以下、実施例を用いて本発明の詳細な説明する０〔実
施 例〕
第２図は本発明の一実施例を示す圧電振動子連結体の平
面図である。図から明らかなように、振動子１はその基
部１＆において、振動部１ｂの延在方向（Ｙ方向）とは
直角のＸ方向に延在する連結部３によシ、隣接する振動
子と相互に連結され両端の補強枠２に接続されておシ、
Ｙ方向に配列した振動子相互の間には連結部３も補強枠
２も存在しない。Hereinafter, the present invention will be explained in detail using examples.
Embodiment] FIG. 2 is a plan view of a piezoelectric vibrator assembly showing an embodiment of the present invention. As is clear from the figure, the vibrator 1 is connected to the adjacent vibrator by the connecting portion 3 extending in the X direction perpendicular to the extending direction (Y direction) of the vibrating portion 1b at its base 1&. It is connected to the reinforcing frame 2 at both ends,
Neither the connecting portion 3 nor the reinforcing frame 2 exists between the vibrators arranged in the Y direction.
このため、Ｘ方向両端の補強枠２を適宜切断することに
よシＸ方向に一列に連結された振動子群が得られ、その
ブロックのままの状態で保持器に取付けることができる
。また、保持器に取付けられる基部１ａの底面には連結
部３が存在しないため、取シ付けの際の位置精度にばら
つきを与える要因は皆無となる。Therefore, by appropriately cutting the reinforcing frame 2 at both ends in the X direction, a group of vibrators connected in a row in the X direction can be obtained, and the blocks can be attached to the holder as they are. Further, since the connecting portion 3 is not present on the bottom surface of the base portion 1a that is attached to the retainer, there is no factor that causes variations in positional accuracy during attachment.
第３図は、補強枠２の切離し個所に予め切欠き部４を設
け、捷た連結部３の切離し個所に切欠き部５を設けてそ
れぞれ切断しやすくした例を示す。FIG. 3 shows an example in which notches 4 are provided in advance at the locations where the reinforcing frame 2 is to be separated, and notches 5 are provided at the locations where the torn connecting portions 3 are to be separated to facilitate cutting.
個々の振動子に切離した際、連結部３の一部が残っても
、基部１ａの側面であ）、保持器に固定する際の位置出
しには影響を与えない。なお、基部１ａの側面に切欠き
部６を設け、その部分に連結部３を配置しているため、
振動子１相互の間隔自体を広げることなく連結部３を設
けかつそれを切断するために十分なスペースが確保卒き
る。またこの切欠き部６を設けたことは、振動部１ｂに
対する保持部の影響を緩和する効果をも有している。Even if a portion of the connecting portion 3 remains when the vibrator is separated into individual vibrators (on the side surface of the base portion 1a), it does not affect the positioning when fixing to the holder. In addition, since the notch part 6 is provided on the side surface of the base part 1a and the connecting part 3 is arranged in that part,
Sufficient space can be secured for providing and cutting the connecting part 3 without increasing the interval between the vibrators 1 itself. Further, the provision of this notch 6 also has the effect of alleviating the influence of the holding section on the vibrating section 1b.
このような形状を付加することは、エツチング加工によ
シ一体に抜き出すものにおいては特に工数を増加する必
要もなくきわめて容易に行なえる。Adding such a shape can be done very easily without increasing the number of man-hours especially in the case where the material is extracted as one piece by etching.
同様に第４図は補強枠の切離し個所に溝７を、連結部３
の切離し個所に構８を設けて切断しやすくした例である
が、このような溝７，８は、ハーフエツチングにより容
易に形成できる。なお、第５図は第４νｊのＶ−■断面
図、第６図はＶ＋−Ｖ＋断面図である。Similarly, Fig. 4 shows grooves 7 at the separation points of the reinforcement frame,
In this example, a structure 8 is provided at the separation point to facilitate cutting, but such grooves 7 and 8 can be easily formed by half etching. In addition, FIG. 5 is a V-■ sectional view of the 4th νj, and FIG. 6 is a V+-V+ sectional view.
この工うな圧Ｍ１振動子連結体に、例えば真空蒸着によ
シＨｒ定の励振電極を形成した後、例えば第４しｊの例
なら溝γにおいて一列に切離す。これを、例えば第７図
に示すように補強枠９に多数連結して形成された保持器
１０に対し、専電性接沼剤等にエリ同系する。すなわち
、上記導電性接着剤により、谷振動子１はリード線１１
に機械的に保持されると同時に、し１示ｌ−ない励振％
ＩＪとリード線１１との電気的接続が行なわれる。こ
のように−列が一括して取扱えるため、自動化も容易で
あるＯその後、溝８において各振動子１を切離すととも
に、各リード線１１を補強枠ｑから切離した後、ケース
に封入する。After forming an excitation electrode with a constant Hr on this pressure M1 vibrator assembly, for example, by vacuum deposition, for example, in the case of the fourth example, it is cut in a line at the groove γ. For example, as shown in FIG. 7, this is applied to a retainer 10 formed by connecting a large number of reinforcing frames 9 to a proprietary electrowetting agent or the like. That is, the valley vibrator 1 is connected to the lead wire 11 by the conductive adhesive.
At the same time it is mechanically held at
Electrical connection between IJ and lead wire 11 is established. In this way, since the rows can be handled all at once, automation is easy.O After that, each vibrator 1 is separated in the groove 8, and each lead wire 11 is separated from the reinforcing frame q, and then sealed in the case. .
以上、２カツトの水晶板を用いて音叉形振動子を製造す
る例について説明したが、本発明はこれに限定されるも
のではなく、他のカットアングルの水晶板、あるいは他
の圧電性薄板を用いたものでも、１端に基部、すなわち
保持部を有し、他端側に振動部が延在する輪郭系の圧電
振動子を製造する場合に一般に適用して同様の効果を得
ることができる。例えば、第８図に示すように棒状の振
動部１ｂに対しその１端側を囲む↓９に一体形成される
基部１ａを有する振動子１についても、振動部１ｂの延
在方向に直角な方向に延在する連結部３によって連結し
た連結体として形成し、後に切離すことによって同様に
製造することができる。Although the example in which a tuning fork vibrator is manufactured using a two-cut crystal plate has been described above, the present invention is not limited to this, and the present invention is not limited to this. However, the same effect can be obtained by applying it generally when manufacturing a contour type piezoelectric vibrator having a base portion, that is, a holding portion at one end, and a vibrating portion extending from the other end. . For example, as shown in FIG. 8, a vibrator 1 having a base portion 1a integrally formed with ↓9 surrounding one end side of a rod-shaped vibrating portion 1b may also be used in a direction perpendicular to the extending direction of the vibrating portion 1b. It can be manufactured in the same way by forming a connected body connected by a connecting part 3 extending in the opposite direction and separating it later.
以上説明したように、本発明によれば、各圧電振動子を
、その基部において振動部と直角方向に連結しておくこ
とによシ、個々の振動子に切離す前に、複数の振動子が
連結したブロックのままで保持器への組立てができるこ
とから、組立ての自動化が容易になり、作業能率を著し
く高めることが可能となる。また、基部底面を固定する
際に連結部の影響を受けず、固定位置精度のばらつきを
皆無にすることができる。このため、高性能な圧電振動
子を安価に得ることが可能となる。As explained above, according to the present invention, by connecting each piezoelectric vibrator to the vibrating part at its base in a direction perpendicular to the vibrating part, it is possible to connect a plurality of piezoelectric vibrators to each other before separating them into individual vibrators. Since the connected blocks can be assembled into the cage as they are, automation of the assembly becomes easy and work efficiency can be significantly improved. Further, when fixing the bottom surface of the base, it is not affected by the connecting portion, and there can be no variation in fixing position accuracy. Therefore, it is possible to obtain a high-performance piezoelectric vibrator at a low cost.
第１図は従来の圧電振動子連結体の構成例を示す平面図
、第２図は本発明の一実施例を示す圧電振動子連結体の
平面図、第３図は連結部の有４成例を示す平面図、第４
図は連結部の他の構成例を示す平面図、第５図は■−■
断面図、第６図はＶｌ −■断面図、第７図は保持器に
固着した状態を示す図、第８図は圧電振動子の他の構成
例を示す平面図である。
１・・・・振動子、ｉａ ・・・φ基部、１ｂ・・・・
振動部、３・・・・連結部。FIG. 1 is a plan view showing an example of the configuration of a conventional piezoelectric vibrator coupling body, FIG. 2 is a plan view of a piezoelectric vibrator coupling body showing an embodiment of the present invention, and FIG. Plan view showing an example, 4th
The figure is a plan view showing another example of the configuration of the connecting part, and Figure 5 is ■-■
FIG. 6 is a sectional view taken along Vl-■, FIG. 7 is a view showing a state in which the piezoelectric vibrator is fixed to a cage, and FIG. 8 is a plan view showing another example of the structure of the piezoelectric vibrator. 1... Vibrator, ia... φ base, 1b...
Vibrating part, 3... Connection part.
Claims (1)
て延在する振動部とを備えた複数の圧電振動子を、連結
部によシ相互に連結された圧電振動子連結体として圧電
性薄板から一体に形成した後、上記連結部で個々の圧電
振動子に切離す圧電振動子の製造方法において、上記圧
電振動子連結体は、各圧電振動子がその基部において上
記振動部の延在方向とは直角の方向に延在する連結部に
よって隣接する圧電振動子と相互に連結されてなること
を特徴とする圧電振動子の製造方法。A plurality of piezoelectric vibrators each having a base located at one end and a vibrating portion extending from the base toward the other end are connected to each other by a connecting portion to form a piezoelectric vibrator assembly. In the method of manufacturing a piezoelectric vibrator, in which the piezoelectric vibrator is integrally formed from a thin plate and then separated into individual piezoelectric vibrators at the connecting portion, the piezoelectric vibrator connected body is formed such that each piezoelectric vibrator has an extension of the vibrating portion at its base. A method for manufacturing a piezoelectric vibrator, characterized in that adjacent piezoelectric vibrators are interconnected by a connecting portion extending in a direction perpendicular to the direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24087983A JPS60134508A (en) | 1983-12-22 | 1983-12-22 | Manufacture of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24087983A JPS60134508A (en) | 1983-12-22 | 1983-12-22 | Manufacture of piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60134508A true JPS60134508A (en) | 1985-07-17 |
Family
ID=17066053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24087983A Pending JPS60134508A (en) | 1983-12-22 | 1983-12-22 | Manufacture of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60134508A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100313399A1 (en) * | 2008-02-21 | 2010-12-16 | Kiyoshi Aratake | Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device, and radio clock |
-
1983
- 1983-12-22 JP JP24087983A patent/JPS60134508A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100313399A1 (en) * | 2008-02-21 | 2010-12-16 | Kiyoshi Aratake | Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device, and radio clock |
| US8448311B2 (en) * | 2008-02-21 | 2013-05-28 | Seiko Instruments Inc. | Method of manufacturing a piezoelectric vibrator |
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