JPS60133369A - Gas rate gyroscope - Google Patents

Gas rate gyroscope

Info

Publication number
JPS60133369A
JPS60133369A JP58242692A JP24269283A JPS60133369A JP S60133369 A JPS60133369 A JP S60133369A JP 58242692 A JP58242692 A JP 58242692A JP 24269283 A JP24269283 A JP 24269283A JP S60133369 A JPS60133369 A JP S60133369A
Authority
JP
Japan
Prior art keywords
gas
electrode
rate gyroscope
gas rate
ionized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58242692A
Other languages
Japanese (ja)
Inventor
Yoshimasa Hiruma
比留間 義昌
Satoru Itabashi
板橋 哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orient Watch Co Ltd
Original Assignee
Orient Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orient Watch Co Ltd filed Critical Orient Watch Co Ltd
Priority to JP58242692A priority Critical patent/JPS60133369A/en
Publication of JPS60133369A publication Critical patent/JPS60133369A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE:To elevate the reliability while simplifying the construction of a gas rate gyroscope by having a working gas ionized and flying with an electric field to generate a gas flow in a purely electric manner. CONSTITUTION:An a gas is fed from an inflow port 12 into a closed container 2 of a gas rate gyroscope body 1 causing it to exhaust until the average free travel of ion becomes larger than the distance between an ion acceleration electrode 7 and a collector electrode 10 therein 2, the gas is ionized by discharge, accelerated with the electrode 7 to be focused like a beam with a convergence electrode 8 and released to a detection area 3. Then, the gas flies to the collector electrode 10 to reach a detection electrode 11 eccentrically from the center line according to an angular velocity applied on the free axis vertical to the center axis of the container 2 and a gyroscope output proportional to the eccentricity thereof is detected. With such an arrangement of generating the gas flow in a purely electric manner, mechanically mobile parts are eliminated thereby simplifying the construction of the gas rate gyroscope while elevating the reliability.

Description

【発明の詳細な説明】 (技術分野) 本発明は、角速度の影響によりガス流が偏流することを
利用したガスレートジャイロに関スる。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a gas rate gyro that utilizes the drift of gas flow due to the influence of angular velocity.

(従来技術) ガスレートジャイロは、第1図に示したように密閉した
ケーシングaの一端にピエゾ振動子型ポンプbを、他端
にノズルCを配設し、ノズルCからポンプb側に向けて
ガス流dを発生させた状態で、ガス流に垂直な軸を自由
軸として角速度を作用せしめたときに生じるガス流の変
位をフローセンサeにより検出して角速度を測定する装
置である。
(Prior art) As shown in Fig. 1, the gas rate gyro has a piezo vibrator type pump b installed at one end of a sealed casing a, and a nozzle C installed at the other end. This device measures the angular velocity by detecting the displacement of the gas flow that occurs when an angular velocity is applied using an axis perpendicular to the gas flow as a free axis in a state in which a gas flow d is generated using a flow sensor e.

しかしながら、ガスの流れをポンプにより生起させるた
め1機械的可動部を有し、構造が複雑であるばかりでな
く、信頼性が低いという問題があった。
However, since the gas flow is generated by a pump, there is one mechanically movable part, and there are problems in that the structure is not only complicated but also low in reliability.

(目的) 本発明はこのような問題に鑑み、ガス流を純電気的に発
生させることにより、構造が簡単で、しかも信頼性が高
いガスレートジャイロを提供することを目的とする。
(Objective) In view of these problems, it is an object of the present invention to provide a gas rate gyro that is simple in structure and highly reliable by generating a gas flow purely electrically.

(構成) そこで、以下に本発明の詳細を図示した実施例に基づい
て説明する。
(Structure) Therefore, details of the present invention will be described below based on illustrated embodiments.

第2図は、本発明の実施例を示すものであって、図中符
号lは、ガスレートジャイロ本体で、密閉容器を形成す
るケース2の一端に、検出憤域3側に中心孔5aを設は
放電電源4に接続してなるイオン化源5を形成し、これ
の前面に中心孔5aと同軸上に中心孔7aを穿設し、加
速電源6に接続してなるイオン加速型棒7、及びイオン
収束電極8を順次配設し、他端には中心に通孔9aを穿
設した遮蔽板9を設け、下流側にイオンコレクタ電極1
Oを、上流側に後述するイオン検出電極11を設けて構
成されている。11は、前述のイオン検出電極で、中心
線に対称となるように電極板11a、llbを配設し、
加速電極から放出されたイオンの偏りに比例した信号を
出力するように構成されている。なお、図中符号12は
、ガス供給源に接続するガス流入孔を、13は排気ポン
プに接続するガス排出口をそれぞれ示している。
FIG. 2 shows an embodiment of the present invention, in which reference numeral 1 denotes a gas rate gyro main body, and a center hole 5a is formed at one end of the case 2 forming a closed container on the side of the detection area 3. The ionization source 5 is connected to a discharge power source 4, and a center hole 7a is bored coaxially with the center hole 5a in the front surface of the ionization source 5, and an ion accelerating rod 7 is connected to an acceleration power source 6. A shielding plate 9 with a through hole 9a in the center is provided at the other end, and an ion collector electrode 1 is provided on the downstream side.
The ion detecting electrode 11, which will be described later, is provided on the upstream side of the sensor. Reference numeral 11 denotes the aforementioned ion detection electrode, in which electrode plates 11a and llb are arranged symmetrically about the center line,
It is configured to output a signal proportional to the bias of ions emitted from the accelerating electrode. In the figure, reference numeral 12 indicates a gas inlet hole connected to a gas supply source, and reference numeral 13 indicates a gas outlet port connected to an exhaust pump.

この実施例において、イオン加速室ai7とコレクタ電
極10との間の距離よりもイオンの平均自由行程が大き
くなる程度まで排気しつつ、イオン化源5にガスを供給
すると、・ガスは放電によりイオン化され、加速電極7
により加速されて収束電極8によりビーム状に集束して
検出領域3に放出され、中心軸上をコレクタ電極10に
向って飛行する。このような状態において、本体1に角
速度の作用がないとき、イオンビームエは検出電極11
の中心を通過するため、信号は出力されない。一方、中
心軸に垂直な軸を自由軸として角速度が作用すると、検
出領域3を飛行するイオンビーム■に角速度が作用して
中心線から偏位しながらコレクタ電極11に到達する。
In this embodiment, when gas is supplied to the ionization source 5 while being evacuated to such an extent that the mean free path of the ions is larger than the distance between the ion acceleration chamber ai7 and the collector electrode 10, the gas is ionized by the discharge. , acceleration electrode 7
It is accelerated by the converging electrode 8, focused into a beam shape, and emitted to the detection area 3, and flies on the central axis toward the collector electrode 10. In such a state, when there is no angular velocity effect on the main body 1, the ion beam is transferred to the detection electrode 11.
Since it passes through the center of , no signal is output. On the other hand, when an angular velocity acts on the ion beam (2) with the axis perpendicular to the center axis as a free axis, the ion beam (2) flying in the detection region 3 reaches the collector electrode 11 while being deviated from the center line.

これにより検出電極11を通るイオンの経路に偏りが生
じ、この偏位に比例した信号が出力して作用している角
速度を検出することができる。
This causes a deviation in the path of the ions passing through the detection electrode 11, and a signal proportional to this deviation is output, making it possible to detect the acting angular velocity.

[実施例] 収束電極と検出電極との距離を1000mm、検出領域
を10 Torrの真空度に維持し、作用ガスとしてキ
セノンXeを使用し、加速電圧をO,tVに保つと、キ
セノンイオンは380v秒の速度で飛行する。これによ
り分解能lILmの検出電極を一手 使用して3 、8 X 10 rad /秒の角速度を
検出することができた。
[Example] When the distance between the focusing electrode and the detection electrode is 1000 mm, the detection area is maintained at a vacuum of 10 Torr, xenon Xe is used as the working gas, and the accelerating voltage is maintained at O, tV, xenon ions are generated at 380 V. Fly at a speed of seconds. As a result, it was possible to detect an angular velocity of 3.8 x 10 rad/sec using a detection electrode with a resolution of lILm.

なお、この実施例では、ガスの供給路を開放系として構
成したが、排気口と供給口をポンプを介して接続し、循
環させて再利用するようにしても同様の作用を奏する。
In this embodiment, the gas supply path is configured as an open system, but the same effect can be obtained even if the exhaust port and the supply port are connected via a pump and the gas is circulated and reused.

また、この実施例においては、直流グロー放電によりガ
スをイオン化しているが、高周波放電もしくは熱電子源
を用いてイオン化も同様の作用効果を奏する。
Further, in this embodiment, the gas is ionized by direct current glow discharge, but ionization using a high frequency discharge or a thermionic source can also produce similar effects.

(効果) 以」二述べたように本発明によれば、作用ガスをイオン
化して電界により検出領域を飛行するようにしたので1
機械的な可動部がなく、構造が簡単で、信頼性を向上さ
せることができるばかりでなく、ガス流の速度を加速電
界の強度を調整することにより簡単に変更することがで
き、測定レンジの切り換えを簡単に行うことができる。
(Effects) As mentioned above, according to the present invention, the working gas is ionized and is caused to fly through the detection area by an electric field.
There are no mechanical moving parts, the structure is simple, and reliability can be improved.In addition, the gas flow velocity can be easily changed by adjusting the strength of the electric field that accelerates the gas flow, making it possible to change the measurement range. Switching can be done easily.

またイオン化されたガスの偏位を電位変化として検出す
るようにしたので、応答性が非常に高い装置を実現する
ことができる。
Furthermore, since the deviation of the ionized gas is detected as a potential change, it is possible to realize an apparatus with extremely high responsiveness.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来のガスレートジャイロの一例を示す装置
の断面図、第2図は、本発明の一実施例を示す装置の斜
視断面図である。 ■・・・・本体 2・・・・密閉容器 3・・・・検出領域 5・・・・イオン化源7・・・・
加速電極 10・・・・コレクタ電極11・・・・検出
電極 出願人 オリエント時計株式会社 代理人 弁理士 西 川 慶 拍 同 木 村 勝 彦
FIG. 1 is a sectional view of a device showing an example of a conventional gas rate gyro, and FIG. 2 is a perspective sectional view of the device showing an embodiment of the present invention. ■...Body 2...Sealed container 3...Detection area 5...Ionization source 7...
Accelerating electrode 10... Collector electrode 11... Detecting electrode Applicant Orient Watch Co., Ltd. Agent Patent attorney Kei Nishikawa Katsuhiko Kimura

Claims (1)

【特許請求の範囲】[Claims] ガスをイオン化するガスイオン化手段と、該手段からの
イオンを加速°するイオン加速手段と、該手段から一定
距離を置いて配設されたイオン検出手段と、これらの手
段を収容し、前記一定の距離よりもイオンの平均自由行
程が大きい真空領域を形成する密閉容器とからなるガス
レートジャイロ。
a gas ionization means for ionizing gas; an ion acceleration means for accelerating ions from the means; and an ion detection means disposed at a certain distance from the means; A gas rate gyro consisting of a sealed container that forms a vacuum region where the mean free path of ions is greater than the distance.
JP58242692A 1983-12-22 1983-12-22 Gas rate gyroscope Pending JPS60133369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58242692A JPS60133369A (en) 1983-12-22 1983-12-22 Gas rate gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58242692A JPS60133369A (en) 1983-12-22 1983-12-22 Gas rate gyroscope

Publications (1)

Publication Number Publication Date
JPS60133369A true JPS60133369A (en) 1985-07-16

Family

ID=17092817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58242692A Pending JPS60133369A (en) 1983-12-22 1983-12-22 Gas rate gyroscope

Country Status (1)

Country Link
JP (1) JPS60133369A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251712A (en) * 1985-05-01 1986-11-08 Japan Radio Co Ltd Thermoelectron rate gyro sensor
US4941353A (en) * 1988-03-01 1990-07-17 Nippondenso Co., Ltd. Gas rate gyro
WO2011005685A1 (en) * 2009-07-07 2011-01-13 Memsic, Inc. Ion discharge gyroscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251712A (en) * 1985-05-01 1986-11-08 Japan Radio Co Ltd Thermoelectron rate gyro sensor
JPH0535803B2 (en) * 1985-05-01 1993-05-27 Japan Radio Co Ltd
US4941353A (en) * 1988-03-01 1990-07-17 Nippondenso Co., Ltd. Gas rate gyro
WO2011005685A1 (en) * 2009-07-07 2011-01-13 Memsic, Inc. Ion discharge gyroscope
US8146423B2 (en) 2009-07-07 2012-04-03 Memsic, Inc. Ion discharge gyroscope

Similar Documents

Publication Publication Date Title
CN111344489B (en) Compact electrostatic ion pump
JPH05306962A (en) Improved vacuum gauge
US3133874A (en) Production of thin film metallic patterns
JPS60133369A (en) Gas rate gyroscope
EP0329461B1 (en) Mass spectrometer
US4780284A (en) Gas chromatography
JPH04196708A (en) Frequency adjustment device and method for piezoelectric element
JP2000500275A (en) Low vacuum mass spectrometer
US4393707A (en) Fluidic angular rate sensor employing ionized gas
JPH07325020A (en) Sample introducing apparatus for ion analytical instrument
JP3403383B2 (en) Ion source control method and ion source control device
JPH0746594B2 (en) Mass spectrometer using inductively coupled plasma as ion source
SU1118229A1 (en) Time-out-of-flight mass spectrometer
CA1070809A (en) Electron beam pumped gas laser
JP2000146914A (en) Frit laser ion source
RU2810625C1 (en) Single-component jet angular velocity meter
JP7315061B2 (en) Quadrupole mass spectrometer
JPS6182652A (en) Time-of-flight type collision dissociation mass spectrometer
JPH04196707A (en) Frequency adjustment device and method for piezoelectric element
JP3833776B2 (en) Broadband ionization vacuum gauge
JPH11345590A (en) Surface ionization type ionization detector
JP2768450B2 (en) Mass spectrometer
JP2000340170A (en) Mass spectroscope
JPH09223474A (en) Acceleration type plasma gun
JPH11510644A (en) Vacuum technology application equipment with gas discharge electrode