JPS60127905A - High touchness ceramic tool - Google Patents

High touchness ceramic tool

Info

Publication number
JPS60127905A
JPS60127905A JP23148883A JP23148883A JPS60127905A JP S60127905 A JPS60127905 A JP S60127905A JP 23148883 A JP23148883 A JP 23148883A JP 23148883 A JP23148883 A JP 23148883A JP S60127905 A JPS60127905 A JP S60127905A
Authority
JP
Japan
Prior art keywords
ceramic
tool according
layer
coating layer
zro2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23148883A
Other languages
Japanese (ja)
Other versions
JPH0260442B2 (en
Inventor
Hidetoshi Baba
馬場 英俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Tokushu Togyo KK
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Nippon Tokushu Togyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd, Nippon Tokushu Togyo KK filed Critical NGK Spark Plug Co Ltd
Priority to JP23148883A priority Critical patent/JPS60127905A/en
Publication of JPS60127905A publication Critical patent/JPS60127905A/en
Publication of JPH0260442B2 publication Critical patent/JPH0260442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/87Ceramics
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308Oxynitrides

Abstract

PURPOSE:To obtain high toughness and hard ceramic tool by providing a very hard coating layer of such as TiC, TiN on the surface of a base material made of a predetermined ceramic sintered body having sufficient strength and toughness. CONSTITUTION:This ceramic tool is made by forming a coating layer of TiC, TiN, TiCN, Al2O3 or AlON, or combination of them on the surface of a base material made of Al2O3-ZrO2 group ceramic sintered body. The ceramic sintered body should be composed of ZrO2 of 0.1-99.9wt% and Al2O3 for the rest, desirably composed of ZrO2 of 1-30wt% and Al2O3 for the rest, and ZrO2 should be partially stabilized by adding CaO, MgO, Y2O3 or rare earth oxide or combination of them.

Description

【発明の詳細な説明】 未発明は、Al2O3Z r 02 系セラミンク焼結
体を基材とする高靭性セラミックー[共に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high toughness ceramic based on an Al2O3Z r 02 -based ceramic sintered body.

従来のA、o3 糸およびAl2O3−TjC系セラミ
ンク下具は、高温における硬さが大きいという利点をも
っているが、反面、強度または靭性についでは必ずしも
良好ではないため、荒加工する場合に通さず、また最近
の」ニ作機械のNC化が進んでいる状況下では、工具と
しての信頼性が乏しいという欠点がある。
Conventional A, O3 threads and Al2O3-TjC ceramic ceramic undercoats have the advantage of being highly hard at high temperatures, but on the other hand, they do not necessarily have good strength or toughness, so they cannot be passed through during rough processing, and In the recent situation where the use of NC in machine tools is progressing, there is a drawback that reliability as a tool is poor.

これに対して、Z r 02 系セラミンク工具は、特
開昭55−140762号に開示されるように、その基
材としてのZ r 02 系セラミンクが、抗折力10
0kg/mrn’以ヒ、靭性(Kic)30する優れた
諸特性を備えており、このような高強度、高靭性のZr
O2系セラミンクは、主成分としてのZrO2にCao
、Mg0.y2o3 等の酸化物を添加して、高温にお
ける正方晶や立方晶などの高温安定相を常温付近におい
ても部分的に安定化させることにより得られるものであ
る。
On the other hand, as disclosed in JP-A-55-140762, Z r 02 ceramic ceramic tools have a transverse rupture strength of 10
It has excellent properties such as 0kg/mrn' or higher and toughness (Kic) of 30.
O2-based Ceramink contains ZrO2 as the main component and Cao
, Mg0. It is obtained by adding oxides such as y2o3 to partially stabilize high-temperature stable phases such as tetragonal and cubic crystals even at room temperature.

また、A文λ03 − Z r 02 系セラミックを
開示する特開昭52−86413号、特開昭54−60
308号および特開昭54−61215号公報によれば
、Al、03 マトリックス中にZrO!を分散させる
ことにより、かなり高い靭性を発揮することが知られて
いる。
In addition, Japanese Patent Application Laid-open No. 52-86413 and Japanese Patent Application Laid-Open No. 54-60 disclose A-pattern λ03-Z r 02 ceramics.
According to No. 308 and Japanese Unexamined Patent Publication No. 54-61215, ZrO! It is known that considerably high toughness can be achieved by dispersing .

しかしながら、かかる従来のZrO2,系 セ ラミッ
クおよびAl2O3Z r Oz系セラミックを切削工
具材として用いた場合には、Au203 系セラミック
やAM、03−Tic系セラミックに比べて強度および
靭性の点で優れているために、荒加]二するときには好
適であるが、一方、例えばグクタイル鋳鉄や鉄鋼を被切
削材とするときには、フランク摩耗、クレータ摩耗とも
にw4著となる。このため従来のZ r 02系セラミ
ツクやAl2O3”−Z r 02 系セラミンクから
なる工具は、耐摩耗性が良好でなく切削二り具としての
上のな機能を発揮することができなかった。
However, when such conventional ZrO2-based ceramics and Al2O3ZrOz-based ceramics are used as cutting tool materials, they are superior in strength and toughness compared to Au203-based ceramics, AM, and 03-Tic-based ceramics. Therefore, it is suitable for rough machining, but on the other hand, when cutting tile cast iron or steel, for example, both flank wear and crater wear become W4. For this reason, conventional tools made of Z r 02 series ceramics or Al2O3"-Z r 02 series ceramics have poor wear resistance and cannot exhibit superior functions as cutting tools.

本発明は、このような点に着目し7てなされたもので、
1−分な強度および靭性をもち併せて、とくに高い硬度
をもつセラミンク工具を提供することを目的とする。
The present invention has been made by paying attention to these points.
The object of the present invention is to provide a ceramic tool having particularly high hardness as well as strength and toughness as high as 1-minute.

そのために本発明のセラミック上具は、−上のな強度及
び靭性をもつ基材に、高い硬度をもつ被覆層を設ける。
To this end, the ceramic upper of the present invention is provided with a coating layer having high hardness on a base material having superior strength and toughness.

即ち、本発明は、基材としてのA Q203 Z r 
02 系セラミックと、その表面に形成される被苗層と
しての、−TjC,TiN、T1CN、Al;、03 
、A文ONのうちの少なくとも・種のセラミックとから
構成することにより。
That is, the present invention uses A Q203 Z r as a base material.
02 series ceramic and -TjC, TiN, T1CN, Al as a seedling layer formed on its surface;, 03
, by constituting at least one species of ceramic.

高靭性かつ高硬度セラミンク、」工具を提供する。基材
はZ r 02 系又はA n、、C)3 Z r 0
2系セ ラミンク焼結体から成る。
We provide tools made of "ceramink with high toughness and high hardness." The base material is Z r 02 type or A n,,C)3 Z r 0
It consists of a 2-series ceramic sintered body.

ノ1(材としてのA i、o3 Z r 02系セラミ
ック焼結体の組成は、ZrO’2 0 、 1〜99 
、 9wt%、残部A1203からなり、好ましくはZ
 r o21〜30 w t%、残部A、Q203がよ
い。
No. 1 (The composition of the A i, o3 Z r 02 ceramic sintered body as a material is ZrO'2 0, 1 to 99
, 9wt%, balance A1203, preferably Z
ro21-30 wt%, balance A, Q203 is good.

Z r 02 をO,1wt%以上にしたのは、Z r
 02100wt%で十分な強度、靭性をもち、Al2
O3にZrO2を添加すると、AsL2o3 の強度、
特に靭性が改善されるからである。また、ZrO2を3
0wt%以下とすると基材の硬度面で好ましい特性が得
られる。即ち、ZrO2のマイクロビッカース硬度が略
1100 k g、’rnm’程度であるのに対し、A
文>03(7)ソれは2000kg/mm7以−にを示
すからである。Zr021wt%以上とすると強度、靭
性がさらに向上するので好ましい。
The reason why Z r 02 was made more than O.1wt% was because Z r 02
02100wt% has sufficient strength and toughness, and Al2
When ZrO2 is added to O3, the strength of AsL2o3,
This is particularly because toughness is improved. In addition, ZrO2 was added to 3
When the content is 0 wt% or less, favorable properties can be obtained in terms of hardness of the base material. That is, while the micro Vickers hardness of ZrO2 is about 1100 kg, 'rnm', A
Sentence>03(7) Sore indicates 2000kg/mm7 or more. If the Zr content is 21 wt% or more, the strength and toughness are further improved, which is preferable.

このうちZrO2は、好ましくは、CaOlMgO,Y
、+03 などのん土類酸化物の安定化剤を含むが、必
ずしも含まなくてもよい。該安定化剤を倫む場合、Ca
0またはM g OはトータルでZ r 02 に対し
て15wt%以下、Y2O3は同しく Z r 02 
に対して9wt%以下が好ましい。
Among these, ZrO2 is preferably CaOlMgO, Y
, +03, etc., but need not necessarily be included. When using the stabilizer, Ca
0 or M g O in total is 15 wt% or less with respect to Z r 02 , and Y2O3 is also Z r 02
It is preferably 9 wt% or less.

この場合の添加剤ZrO2は、その総量2に対し7て1
[方晶ZrO2が5wt%以りを含む部分安定化構造を
もつようにするのがよい。尚、AQ、2O3にZrO2
を添加する際には、予め部分安定化したZ r 02 
をA fL203 に添加してもよいし、また単斜晶Z
rOλ と安定化剤をそれぞれ早独でA文、O3に添加
してもよい。
In this case, the additive ZrO2 is 7 to 1 for the total amount of 2.
[It is preferable to have a partially stabilized structure containing 5 wt % or more of square ZrO2. In addition, ZrO2 is added to AQ and 2O3.
When adding Z r 02 that has been partially stabilized in advance
may be added to A fL203 , or monoclinic Z
rOλ and a stabilizer may be added to A sentence and O3 individually.

・力、安定化剤を含まない場合は、平均粒径0.3μm
以下のZ r 02 を使用するのが好ましい。ZrO
2のA又、03 への添加のさいに、微粒ZrOλ が
A号O3に分散すると、Z r 02 が正)1品のま
ま残留し、これにより靭性の良好なA 1203 Z 
r 02系セラミンクが得られるからである。
・If no stabilizer is included, the average particle size is 0.3 μm.
Preferably, the following Z r 02 is used. ZrO
When fine particles of ZrOλ are dispersed in No. A O3 when adding No. 2 to A 1203, ZrO2 (positive) remains as a single product, which results in A 1203 Z with good toughness.
This is because r02-based ceramics can be obtained.

なおZrO2系セラミンク焼結体を基材とする場合には
、安定化剤を含むことが望ましくまた、A 1z03 
が少くない場合も同様である。
In addition, when using a ZrO2-based ceramic sintered body as a base material, it is desirable to include a stabilizer, and A 1z03
The same is true when there is not a small amount.

Z r 02 系又はA文、03 2 r 02系 セ
 ラユソク基材の焼成条件は、酸化雰囲気中、温度13
50〜1650’c、処理時間数分ないし数時間が良い
。温瓜1350°C未満では焼結が十分に行われず、1
650°Cを超えると結晶粒の成長が著しくなって基材
の強度および靭性がともに劣化するからであるにのよう
にして構成される基材は、抗折強度50kg/mrn’
以上、破壊靭plKic 10kg/mノ以)、0bc
z&、望よ。
The firing conditions for the Z r 02 series or A pattern, 03 2 r 02 series serayusoku base material are: temperature 13 in an oxidizing atmosphere.
50 to 1650'c and a processing time of several minutes to several hours. If the temperature is lower than 1350°C, sintering will not be sufficient, and 1
If the temperature exceeds 650°C, the growth of crystal grains will become significant and both the strength and toughness of the base material will deteriorate.
Above, fracture toughness plKic 10kg/m or above), 0bc
Z&, hope.

い。stomach.

次に被覆材としてのセラミックは、TiC1TiN、T
1CN、A文203 もしくはAfLON又はこれらの
成分の組合せからなり、上記基材の表面に対して単層被
覆してもよいし、多層被覆にしてもよい。上記成分を組
合せて多層被覆した場合の被攬層は、2層以上とし、例
えば第1表に示すような内層、中間層、外層をもつよう
にするのがよい(中間層としてはAl0Nが好ましい)
Next, the ceramics used as coating materials are TiC1TiN, T
It is made of 1CN, AfLON, AfLON, or a combination of these components, and may be coated in a single layer or in multiple layers on the surface of the base material. When the above components are combined to form a multilayer coating, the covered layer should be two or more layers, for example, an inner layer, an intermediate layer, and an outer layer as shown in Table 1 (Al0N is preferable as the intermediate layer). )
.

コノ場合の被覆方法は、PVD法(PhysicalV
apor Deposition)とCVD法(Che
mical Vapor 。
The coating method in this case is the PVD method (Physical V
apor deposition) and CVD method (Che
Mical Vapor.

Deposition)、その他の物理的ないし化学的
析着被膜形成方法を用いてもよいが、被覆材の密着性均
質性および被覆速度の点からして、下記に示す反応によ
るCVD法を用いるのが好ましい。
Although other physical or chemical deposition film formation methods may be used, from the viewpoint of uniformity of adhesion of the coating material and coating speed, it is preferable to use the CVD method using the reaction shown below. .

T + CI++ CH牛−ンTiC+4HC12Tl
CI4 + Nユ+4H□−→2TiN + 8HC:
12TiCI++ 2GH++N、−→2TiGN +
8HG12A1(:13 + 3G0ユ+3H2−→A
1よ03 + 3C0+ 8)1C;12AICI +
 2C0□十N2+3)+2−→2AlON+ 2C0
+ 6HCITiC,TiN、T1CN、A見、O3、
A文ONの被覆方法の肩側は、それ自体公知のため記述
を省く。
T + CI++ CH Beef TiC+4HC12Tl
CI4+Nyu+4H□-→2TiN+8HC:
12TiCI++ 2GH++N, -→2TiGN +
8HG12A1 (:13 + 3G0U+3H2-→A
1yo03 + 3C0+ 8) 1C; 12AICI +
2C0□1N2+3)+2-→2AlON+ 2C0
+ 6HCITiC, TiN, T1CN, A-view, O3,
The shoulder side of the A-mon ON coating method is known per se, and will not be described here.

超硬合金にへCVD法により各種被覆層を設ける方法は
特公昭42013 (Ti C)を初めとして多tタイ
−jす、TiN、T1CNは特公昭51−24982、
AちO3は特開昭48−217、TiC,TiN/A島
03やA文ON/A文ユO3の2屯被覆はそれぞれ特公
昭52−13201、特開昭54−29185があり、
同様な被覆方法を用いることができる。但しこれらは、
し・ずれも超硬合金をIfI材としCいるため、高速切
削には不向きであったものである。
There are many methods for applying various coating layers to cemented carbide by the CVD method, including Japanese Patent Publication No. 42013 (TiC), and Japanese Patent Publication No. 51-24982 for TiN and T1CN.
Achi O3 is published in Japanese Patent Publication No. 48-217, TiC, TiN/A Island 03 and A Bun ON/A Bun Yu O3 are covered in Japanese Patent Publications No. 52-13201 and Patent Publication No. 54-29185, respectively.
Similar coating methods can be used. However, these are
However, since both of them are made of cemented carbide as an IfI material, they are not suitable for high-speed cutting.

被覆層の膜厚は0.3〜15pmが好ましい。The thickness of the coating layer is preferably 0.3 to 15 pm.

なぜなら、0.3gm未満では被覆材としての機能が薄
れるとともに、15系mを超えると被覆のさいに粒成長
が著しく剥離しやすくなるからである。A 1,03 
を被覆する場合のA 1x03 層厚は、0.3〜5ル
m程度が好ましい。
This is because if it is less than 0.3 gm, its function as a coating material will be weakened, and if it exceeds 15 gm, grain growth will be significant and it will be easy to peel off during coating. A 1,03
The thickness of the A 1x03 layer in the case of coating is preferably about 0.3 to 5 m.

このようにして構成されるセラミック工具は、高強度、
高靭性を備えるうえに、耐摩耗性の点においても優れた
特性を発揮する。このことを以下に述べる実験例に基づ
いて説明する。
Ceramic tools constructed in this way have high strength,
In addition to having high toughness, it also exhibits excellent properties in terms of wear resistance. This will be explained based on the following experimental example.

見I 基材に用いた原料は、A文203 については純度(w
t%)99.9%、平均粒径0.6gm、単斜晶ZrO
λ については純度99%以上、平均粒径0.2 gm
、CacO3については原料Ca0純度98%、MgO
については純度97%以に、Y、L03 については純
度99.9%以」二であった。
The raw materials used for the base material have purity (w) for A203.
t%) 99.9%, average particle size 0.6 gm, monoclinic ZrO
For λ, purity is 99% or more, average particle size is 0.2 gm
, for CacO3, raw material Ca0 purity is 98%, MgO
The purity was 97% or higher for Y and L03, and the purity was 99.9% or higher for Y and L03.

基材の各試料は第2表のような組成とし、所定の原料を
湿式混合したあと、乾燥、バインダ添加を経て造粒した
のち圧力1.5kg/crt+’ にてプレス成形した
。この圧粉体は、仮焼によりバインダを除去したのち、
電気炉内にて1400〜1650°Cて1a1を間焼成
した。この焼結体をサイズ4X8X25mmに研摩した
Each sample of the base material had a composition as shown in Table 2, and after wet-mixing predetermined raw materials, drying, adding a binder, granulating, and press-molding at a pressure of 1.5 kg/crt+'. After removing the binder from this compact by calcination,
1a1 was fired at 1400 to 1650°C in an electric furnace. This sintered body was polished to a size of 4 x 8 x 25 mm.

こうして作成された各試料の緒特性は第2表に示すとお
りである。第2表から明らかなように、各試$′lは、
鶴常のA文、L03の抗折力50kg/・・・・・以下
、靭性(K・・)lokg/・−も以丁″に比へ、かな
り高い抗折力および靭性を示してU)る。
The characteristics of each sample thus prepared are shown in Table 2. As is clear from Table 2, each trial $′l is
Tsurutsune's A text, L03 transverse rupture strength 50 kg/...Hereinafter, toughness (K...)lokg/...- also shows considerably high transverse rupture strength and toughness compared to U) Ru.

尚、試料の各特性の測定法は次のとおりである。C1)
曲げ強度はJIS B12O3により測定、5木の〕(
l均値を示す。(2)破壊靭性はASTMスペシャルテ
クニカルノぐブリデージョンNo、410に準して、I
ll 4 m m、厚ざ5mm、長さ25 m mの試
片に深さ0.5’mm、11]0.15+rznの切欠
きを入れ、スノぐン20 m mの“−τ点曲げ切欠き
法によって測定した。1llll定値は各5末の)l均
値である。(3)結晶系は理学電搬製ガイカーフレンク
ス゛RAD−γA型を用い、X線回折法により行った。
The method for measuring each characteristic of the sample is as follows. C1)
Bending strength is measured according to JIS B12O3, 5 wood] (
Indicates the l average value. (2) Fracture toughness is determined according to ASTM Special Technical No. 410.
A notch with a depth of 0.5'mm and 11]0.15+rzn was made in a specimen measuring 4 mm in width, 5 mm in thickness, and 25 mm in length, and a "-τ point bending cut of 20 mm in diameter was made. It was measured by the chipping method. The constant value is the average value of 1 for each of the 5 ends. (3) The crystal system was determined by X-ray diffraction using a Geyker Flex RAD-γA manufactured by Rigaku Denkai Co., Ltd.

まず、15gmダイヤモンドペーストで鏡面研摩した試
片をX線回折し、単斜晶ZrQ2の(111)面と(1
11)面の積分強度Inと、正方晶ZrOλの(111
)面と立方晶ZrO3の(111)面の積分強度の和−
It+Ieの比から、単斜晶ZrOλの量を決定した。
First, X-ray diffraction was performed on a specimen mirror-polished with 15 gm diamond paste, and the (111) plane and (1
11) Integrated intensity In of the surface and (111
) plane and the (111) plane of cubic ZrO3 -
The amount of monoclinic ZrOλ was determined from the ratio of It+Ie.

ついで焼結体を325メツシュ全通迄粉砕し、同条件で
X線回折し、再度単斜晶ZrOλ と立方晶ZrO3の
積分強度I’mおよびIeをめた。この際、焼結体中の
残留正方晶ZrO2は粉砕によって機械的応力を受け、
すべて単斜晶(I’m + I’e )から)′7方晶
Zr03−9が決定されついでjF方晶ZrOλ緘も決
定I7た。
The sintered body was then crushed to a 325-mesh size, subjected to X-ray diffraction under the same conditions, and the integrated intensities I'm and Ie of monoclinic ZrOλ and cubic ZrO3 were determined again. At this time, the residual tetragonal ZrO2 in the sintered body is subjected to mechanical stress due to crushing,
All from the monoclinic crystal (I'm + I'e))' heptagonal Zr03-9 was determined, and then the jFgonal crystal ZrOλ was also determined I7.

次に、これらの各試料を5NGN4’32TN(JIS
OO8Bによるスローアウェイチップ形状表示法)の形
状に加工し、この成形体(基材)の表面にCVD法によ
り所定の被覆層を形成した。具体的には、基材をセット
した反1も容器内にキャリアカスとしてH2カスを流し
、前述の化学反応を伴わせて基材の表面に所定の被覆材
を41着させた(第3表参照)。反応容器の内圧は、T
iC,AΩユO3,AMONを被覆する場合100mb
、同じ(T i CNの場合300mb、TiN+の場
合500mbとし、反応容器内の温度は1050’cに
セントシた。被覆速度は、TiC,TiN、T1CNに
ついてはlpm/hr、A文、O,、Al0Nについて
は0 、5 gm/ h rに設定した。
Next, each of these samples was 5NGN4'32TN (JIS
A predetermined coating layer was formed on the surface of this molded body (base material) by CVD method. Specifically, H2 scum was poured into the container as a carrier sludge into the container with the base material set, and 41 predetermined coating materials were deposited on the surface of the base material through the aforementioned chemical reaction (see Table 3). reference). The internal pressure of the reaction vessel is T
100mb when covering iC, AΩyu O3, AMON
, the same (300 mb for T i CN, 500 mb for TiN+, and the temperature in the reaction vessel was set at 1050'c. The coating rate was lpm/hr for TiC, TiN, and T1CN, A, O,... For AlON, it was set at 0 and 5 gm/hr.

このようにして得られたセラミ・ンク工具(試料)を用
いて、ダクタイル鋳鉄(FCD55)のプライス切削(
テスト1)と、クロムモリブデ7合金網(30M44C
)の旋削(テスト2)を行った。切削条件は第4表のと
おりである。
Using the ceramic tool (sample) obtained in this way, price cutting of ductile cast iron (FCD55) (
Test 1) and chromium molybde 7 alloy mesh (30M44C
) turning (Test 2) was performed. The cutting conditions are shown in Table 4.

この切削試験の結果は、第3表に示すとおlJ−であり
、この表かられかるように、テスト11こおし)て、試
料No、3〜8は略5000回の衝撃に十分−えるのに
対し、試料No、1.2および91±2000〜300
0回の衝撃で欠損してl/)る。しかし、これらNo、
3〜8およびNo、1.2.9の両グループは比較例1
〜4に比べ寿命かかなり長いことから被覆層としてのA
lz03 −ZrOλ系セラミックが、所定の膜厚でダ
クタイル鋳鉄のフライス切削に特に有効であることがわ
かる。また、テスト2からも同様に、被覆層としてのA
 u、o3 Z r 02 系セラミックが、鋼の旋削
において耐フランク摩耗性に優れていることがわかる。
The results of this cutting test are shown in Table 3, and as can be seen from this table, after 11 tests, Samples Nos. 3 to 8 were able to withstand approximately 5000 impacts. In contrast, sample No. 1.2 and 91±2000-300
It will break after 0 impacts (l/). However, these No.
Both groups 3 to 8 and No. 1.2.9 are Comparative Example 1
- A is suitable as a coating layer because it has a considerably longer lifespan than 4.
It can be seen that the lz03-ZrOλ ceramic is particularly effective for milling ductile cast iron at a given film thickness. Also, from Test 2, A as a coating layer was similarly found.
It can be seen that u, o3 Z r 02 -based ceramics have excellent flank wear resistance in turning steel.

以上説明したように、本発明によれば、基材としてA 
12o3 − Z r Oλ系セラミックを用いるとと
もに、その基材の表面に所定の薄膜としてのTiC,T
iN、T1CN、A文ユ03、A文ONのうちの少なく
とも一種のセラミックからなる被覆層を形成したので、
高い強度および靭性を発揮することはもちろん、従来の
セラミック」で具では得られなかった優れた耐摩耗性を
発揮するという効果がある。
As explained above, according to the present invention, A
12o3-Z r Oλ ceramic is used, and TiC, T as a predetermined thin film is coated on the surface of the base material.
Since a coating layer made of at least one type of ceramic of iN, T1CN, A-bun Yu03, and A-bun ON was formed,
It not only exhibits high strength and toughness, but also has the effect of exhibiting excellent wear resistance that was not available with conventional ceramic tools.

本発明のセラミック工具は単に切削、旋削用工具のみな
らず線引き用ダイス、その他の、耐摩耗性、靭性、硬度
を兼ね備えることを要求される、金属等加工用工具とし
ても応用できる。
The ceramic tool of the present invention can be used not only as a cutting and turning tool, but also as a wire drawing die and other metal processing tools that are required to have wear resistance, toughness, and hardness.

Claims (1)

【特許請求の範囲】 (1) A 1zoa Z r 0λ系セラミック焼結
体から成る基材の表面に、TiC,TiN、TiCNA
 魁o、若しくはAJION又はこれらの組合せから成
る被覆層を形成したことを特徴とする高靭性セラミック
工具。 から成る特許請求の範囲第1項記載の工具。 (3) A %03 − Z r 02 系セラミック
焼結体はZrO2l 〜30wt%、残部An、03(
1)組成からなる特許請求の範囲第2項記載の工具。 (4) Z r、Oλ は、安定化剤を含まない特許請
求の範囲第1〜3項の−に記載の1具。 (5)Zr0λ は、安定化剤を含む特許請求の範囲f
f11〜3項の−に記載の工具。 (8) Z r 02 は、Ca0.MgO1Y203
 もしくは稀土類酸化物又はこれらの組合せの添加によ
り部分安定化されている特許請求の範囲第5項記載の工
具。 (7)被覆層は、少なくとも内層と外層の2層から構成
し、内層がTiC,TiNもしくはT1CN又はこれら
の組合せからなり、外層がAl、03 からなる特許請
求の範囲第1〜3項の−に記載の工具。 (8)被覆層における内層及び外層の中間層にAl0N
を含有する特許請求の範囲第7項記載の工具。 (8)被覆層は、内層Al0N、外層AlλO3から成
る特許請求範囲第1〜3項記載の工具。 (10)被覆層は厚さ0.3〜15#Lmである特許請
求の範囲第1〜9項の−に記載の工具。 (11)Zr02 系セラミック焼結体から成る基材の
表面に、T i C,T、i N、Ti CN、Al、
03若しくはAl0N又はこれらの組合せから成る被覆
材により被覆層を形成して成る高靭性セラミック工具。 (12)前記2丁O2系セラミンク焼結体は部分安定化
ZrO2である特許請求の範囲第11項記載の」工具。 (13)被覆層は厚さ0.3〜15#Lmである特許請
求の範囲第11又は12項に記載の工具。
[Claims] (1) TiC, TiN, TiCNA on the surface of a base material made of A 1zoa Z r 0λ ceramic sintered body.
A high-toughness ceramic tool characterized by forming a coating layer made of AJION, AJION, or a combination thereof. A tool according to claim 1 consisting of. (3) A %03-Zr02 ceramic sintered body contains ZrO2l ~ 30wt%, balance An, 03(
1) The tool according to claim 2, consisting of a composition. (4) The device according to claims 1 to 3, wherein Z r and Oλ do not contain a stabilizer. (5) Zr0λ is a claim f containing a stabilizer.
f11--The tool according to item 3. (8) Z r 02 is Ca0. MgO1Y203
The tool according to claim 5, which is partially stabilized by the addition of a rare earth oxide or a combination thereof. (7) The coating layer is composed of at least two layers, an inner layer and an outer layer, the inner layer is made of TiC, TiN or T1CN or a combination thereof, and the outer layer is made of Al, 03. Tools listed in. (8) Al0N in the intermediate layer between the inner layer and outer layer in the coating layer.
The tool according to claim 7, comprising: (8) The tool according to claims 1 to 3, wherein the coating layer comprises an inner layer Al0N and an outer layer AlλO3. (10) The tool according to any one of claims 1 to 9, wherein the coating layer has a thickness of 0.3 to 15 #Lm. (11) T i C, T, i N, Ti CN, Al,
A high-toughness ceramic tool having a coating layer formed of a coating material made of 03, Al0N, or a combination thereof. (12) The tool according to claim 11, wherein the two-piece O2-based ceramic sintered body is partially stabilized ZrO2. (13) The tool according to claim 11 or 12, wherein the coating layer has a thickness of 0.3 to 15 #Lm.
JP23148883A 1983-12-09 1983-12-09 High touchness ceramic tool Granted JPS60127905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23148883A JPS60127905A (en) 1983-12-09 1983-12-09 High touchness ceramic tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23148883A JPS60127905A (en) 1983-12-09 1983-12-09 High touchness ceramic tool

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3307214A Division JPH0516031A (en) 1991-10-28 1991-10-28 Manufacture of sheathed ceramic tool of high toughess and durability

Publications (2)

Publication Number Publication Date
JPS60127905A true JPS60127905A (en) 1985-07-08
JPH0260442B2 JPH0260442B2 (en) 1990-12-17

Family

ID=16924273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23148883A Granted JPS60127905A (en) 1983-12-09 1983-12-09 High touchness ceramic tool

Country Status (1)

Country Link
JP (1) JPS60127905A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0237622A1 (en) * 1986-03-15 1987-09-23 Feldmühle Aktiengesellschaft Coated ceramic-rotary cutting plate
JPS6341103A (en) * 1986-08-07 1988-02-22 東ソー株式会社 Mold for molding powdered body
JPH01179778A (en) * 1988-01-11 1989-07-17 Mitsubishi Metal Corp Surface-coated ceramics member for cutting tool
US6939607B2 (en) * 2000-09-07 2005-09-06 Ngk Spark Plug Co., Ltd. Cutting tool
WO2005121388A1 (en) * 2004-05-19 2005-12-22 Tdy Industries, Inc. Al2o3 ceramic tools with diffusion bonding enhanced layer
GB2520798A (en) * 2013-08-30 2015-06-03 Kennametal Inc Refractory coatings for cutting tools
CN106278200A (en) * 2016-08-16 2017-01-04 安徽瑞泰新材料科技有限公司 A kind of high abrasion aluminium oxide ceramic ball and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651049A (en) * 1979-10-01 1981-05-08 Pioneer Electronic Corp Optical position detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651049A (en) * 1979-10-01 1981-05-08 Pioneer Electronic Corp Optical position detector

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0237622A1 (en) * 1986-03-15 1987-09-23 Feldmühle Aktiengesellschaft Coated ceramic-rotary cutting plate
JPS6341103A (en) * 1986-08-07 1988-02-22 東ソー株式会社 Mold for molding powdered body
JPH01179778A (en) * 1988-01-11 1989-07-17 Mitsubishi Metal Corp Surface-coated ceramics member for cutting tool
JP2570354B2 (en) * 1988-01-11 1997-01-08 三菱マテリアル株式会社 Surface coated ceramic members for cutting tools
US6939607B2 (en) * 2000-09-07 2005-09-06 Ngk Spark Plug Co., Ltd. Cutting tool
AU2005252629B2 (en) * 2004-05-19 2011-01-27 Kennametal Inc. AL2O3 ceramic tools with diffusion bonding enhanced layer
JP2007537968A (en) * 2004-05-19 2007-12-27 ティーディーワイ・インダストリーズ・インコーポレーテッド Al2O3 ceramic tool with diffusion bonding enhancement layer
US7581906B2 (en) 2004-05-19 2009-09-01 Tdy Industries, Inc. Al2O3 ceramic tools with diffusion bonding enhanced layer
WO2005121388A1 (en) * 2004-05-19 2005-12-22 Tdy Industries, Inc. Al2o3 ceramic tools with diffusion bonding enhanced layer
US7914913B2 (en) 2004-05-19 2011-03-29 Tdy Industries, Inc. Al2O3 ceramic tool with diffusion bonding enhanced layer
US7968147B2 (en) 2004-05-19 2011-06-28 Tdy Industries, Inc. Method of forming a diffusion bonding enhanced layer on Al2O3 ceramic tools
US8147992B2 (en) 2004-05-19 2012-04-03 TDY Industries, LLC AL2O3 ceramic tools with diffusion bonding enhanced layer
KR101178978B1 (en) 2004-05-19 2012-09-05 티디와이 인더스트리스, 인코포레이티드 Al2o3 ceramic tools with diffusion bonding enhanced layer
NO341546B1 (en) * 2004-05-19 2017-12-04 Kennametal Inc AL2O3 - cutting ceramics with diffusion-bonded reinforced layer.
GB2520798A (en) * 2013-08-30 2015-06-03 Kennametal Inc Refractory coatings for cutting tools
US9427808B2 (en) 2013-08-30 2016-08-30 Kennametal Inc. Refractory coatings for cutting tools
CN106278200A (en) * 2016-08-16 2017-01-04 安徽瑞泰新材料科技有限公司 A kind of high abrasion aluminium oxide ceramic ball and preparation method thereof
CN106278200B (en) * 2016-08-16 2019-08-30 安徽瑞泰新材料科技有限公司 A kind of high abrasion aluminium oxide ceramic ball and preparation method thereof

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