JPS6012515A - 光導波回路の製造方法 - Google Patents
光導波回路の製造方法Info
- Publication number
- JPS6012515A JPS6012515A JP58119511A JP11951183A JPS6012515A JP S6012515 A JPS6012515 A JP S6012515A JP 58119511 A JP58119511 A JP 58119511A JP 11951183 A JP11951183 A JP 11951183A JP S6012515 A JPS6012515 A JP S6012515A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- opening
- aperture
- mask
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 abstract description 37
- 239000011521 glass Substances 0.000 abstract description 15
- 239000000126 substance Substances 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 abstract description 6
- 229910052708 sodium Inorganic materials 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 13
- 239000000835 fiber Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 4
- -1 thallium ions Chemical class 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001414 potassium ion Inorganic materials 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229910001415 sodium ion Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229920002100 high-refractive-index polymer Polymers 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58119511A JPS6012515A (ja) | 1983-07-02 | 1983-07-02 | 光導波回路の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58119511A JPS6012515A (ja) | 1983-07-02 | 1983-07-02 | 光導波回路の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6012515A true JPS6012515A (ja) | 1985-01-22 |
| JPH0310282B2 JPH0310282B2 (enExample) | 1991-02-13 |
Family
ID=14763070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58119511A Granted JPS6012515A (ja) | 1983-07-02 | 1983-07-02 | 光導波回路の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6012515A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005116705A1 (ja) * | 2004-05-27 | 2005-12-08 | Omron Corporation | 光分岐器及びその製造方法 |
| US8061615B2 (en) | 2005-09-20 | 2011-11-22 | Fuji Xerox Co., Ltd. | Detection method of two-dimensional code, detection device for the same, and storage medium storing detection program for the same |
-
1983
- 1983-07-02 JP JP58119511A patent/JPS6012515A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005116705A1 (ja) * | 2004-05-27 | 2005-12-08 | Omron Corporation | 光分岐器及びその製造方法 |
| US7335875B2 (en) | 2004-05-27 | 2008-02-26 | Omron Corporation | Optical branching unit, and method of manufacturing the same |
| US8061615B2 (en) | 2005-09-20 | 2011-11-22 | Fuji Xerox Co., Ltd. | Detection method of two-dimensional code, detection device for the same, and storage medium storing detection program for the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310282B2 (enExample) | 1991-02-13 |
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