JPS60124035U - 電子ビーム描画装置における試料室の恒温装置 - Google Patents

電子ビーム描画装置における試料室の恒温装置

Info

Publication number
JPS60124035U
JPS60124035U JP1123984U JP1123984U JPS60124035U JP S60124035 U JPS60124035 U JP S60124035U JP 1123984 U JP1123984 U JP 1123984U JP 1123984 U JP1123984 U JP 1123984U JP S60124035 U JPS60124035 U JP S60124035U
Authority
JP
Japan
Prior art keywords
holes
sample chamber
electron beam
constant temperature
beam lithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1123984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328508Y2 (OSRAM
Inventor
沼賀　拓興
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1123984U priority Critical patent/JPS60124035U/ja
Publication of JPS60124035U publication Critical patent/JPS60124035U/ja
Application granted granted Critical
Publication of JPH0328508Y2 publication Critical patent/JPH0328508Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1123984U 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置 Granted JPS60124035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1123984U JPS60124035U (ja) 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1123984U JPS60124035U (ja) 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置

Publications (2)

Publication Number Publication Date
JPS60124035U true JPS60124035U (ja) 1985-08-21
JPH0328508Y2 JPH0328508Y2 (OSRAM) 1991-06-19

Family

ID=30493174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1123984U Granted JPS60124035U (ja) 1984-01-30 1984-01-30 電子ビーム描画装置における試料室の恒温装置

Country Status (1)

Country Link
JP (1) JPS60124035U (OSRAM)

Also Published As

Publication number Publication date
JPH0328508Y2 (OSRAM) 1991-06-19

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