JPS60120760U - polishing equipment - Google Patents
polishing equipmentInfo
- Publication number
- JPS60120760U JPS60120760U JP1984008224U JP822484U JPS60120760U JP S60120760 U JPS60120760 U JP S60120760U JP 1984008224 U JP1984008224 U JP 1984008224U JP 822484 U JP822484 U JP 822484U JP S60120760 U JPS60120760 U JP S60120760U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holder
- wrap
- workpiece
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１乃至２図は従来例のこの種研磨装置で、第１図は断
面図、第２図は平面図、第３図は本考案の主要部をなす
研磨治具の断面図、第４図はその下面図である。
図中、１は研磨容器、２は基板、３はラップ、４はホル
ダー、５は加工物、６，２０は平面研磨治具、８はモー
タ、１１．１２はＬ７−ラ、１３は加工液、１４は回転
軸、２０′は鍔である。Figures 1 and 2 show a conventional polishing device of this kind, where Figure 1 is a sectional view, Figure 2 is a plan view, Figure 3 is a sectional view of a polishing jig that is the main part of the present invention, and Figure 4. is its bottom view. In the figure, 1 is a polishing container, 2 is a substrate, 3 is a wrap, 4 is a holder, 5 is a workpiece, 6 and 20 are surface polishing jigs, 8 is a motor, 11.12 is L7-RA, 13 is a processing liquid , 14 is a rotating shaft, and 20' is a collar.
Claims (1)
れて回転する研磨容器と、 前記ラップ上に乗せられ且つモータにより回転するリン
グ状のホルダーと、そのホルダーの内周に遊嵌すると共
に、下面にラップと接する加工物を配置した円板状の平
面研磨治具おいて前記ホルダーとの隙間が加工物の研磨
量と等価となる様に鍔を上端に形成したことを特徴とす
る研磨装置。[Claims for Utility Model Registration] A polishing container whose bottom is a substrate with a wrap on the top surface and which is filled with a polishing liquid and rotated, a ring-shaped holder placed on the wrap and rotated by a motor, and the holder. In a disk-shaped flat polishing jig, which loosely fits into the inner periphery of the holder and has a workpiece in contact with the lap on the lower surface, the collar is placed at the upper end so that the gap with the holder is equivalent to the amount of polishing of the workpiece. A polishing device characterized by forming.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984008224U JPS60120760U (en) | 1984-01-26 | 1984-01-26 | polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984008224U JPS60120760U (en) | 1984-01-26 | 1984-01-26 | polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60120760U true JPS60120760U (en) | 1985-08-15 |
Family
ID=30487311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984008224U Pending JPS60120760U (en) | 1984-01-26 | 1984-01-26 | polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60120760U (en) |
-
1984
- 1984-01-26 JP JP1984008224U patent/JPS60120760U/en active Pending
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