JPS60116241U - Semiconductor wafer inspection equipment - Google Patents
Semiconductor wafer inspection equipmentInfo
- Publication number
- JPS60116241U JPS60116241U JP162384U JP162384U JPS60116241U JP S60116241 U JPS60116241 U JP S60116241U JP 162384 U JP162384 U JP 162384U JP 162384 U JP162384 U JP 162384U JP S60116241 U JPS60116241 U JP S60116241U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer inspection
- inspection equipment
- probe card
- integrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の半導体６エノ１−検査装置の構成図、第
２図は本考案の一実施例による半導体ウェハー検査装置
の構成図である。
１・・・・・・半導体ウェハー、２・・・・・・半導体
ウェハー用チャックテーブル、３・・・・・・プローブ
カード、４・・・・・・金属針、５・・・・・・マーカ
ー治具、６・・・・・・マーカ一端子、７・・・・・・
マーカー治具取付台。FIG. 1 is a block diagram of a conventional semiconductor wafer inspection apparatus, and FIG. 2 is a block diagram of a semiconductor wafer inspection apparatus according to an embodiment of the present invention. 1... Semiconductor wafer, 2... Chuck table for semiconductor wafer, 3... Probe card, 4... Metal needle, 5... Marker jig, 6... Marker one terminal, 7...
Marker jig mounting stand.
Claims (1)
とを特徴とする半導体ウェハー検査装置。A semiconductor wafer inspection device characterized by integrating a probe card and a marker jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP162384U JPS60116241U (en) | 1984-01-10 | 1984-01-10 | Semiconductor wafer inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP162384U JPS60116241U (en) | 1984-01-10 | 1984-01-10 | Semiconductor wafer inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60116241U true JPS60116241U (en) | 1985-08-06 |
Family
ID=30474536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP162384U Pending JPS60116241U (en) | 1984-01-10 | 1984-01-10 | Semiconductor wafer inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60116241U (en) |
-
1984
- 1984-01-10 JP JP162384U patent/JPS60116241U/en active Pending
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