JPS60113985A - Printed board - Google Patents
Printed boardInfo
- Publication number
- JPS60113985A JPS60113985A JP22237983A JP22237983A JPS60113985A JP S60113985 A JPS60113985 A JP S60113985A JP 22237983 A JP22237983 A JP 22237983A JP 22237983 A JP22237983 A JP 22237983A JP S60113985 A JPS60113985 A JP S60113985A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- diamond
- substrate
- graphite plate
- printed board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical And Physical Treatments For Wood And The Like (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】 本発明はプリン１一基板の改良である。[Detailed description of the invention] The present invention is an improvement of the printer 1-substrate.
従来のプリント基板はセラミックス、合成樹脂等ででき
ているが、いずれも電気的に絶縁性であると同時に熱絶
縁体である。しかしながらプリント基板としてはプリン
トされ、また取イ」【ブられた素子の発熱が大きく、こ
れを容易に放熱Ｃ′きることが必要であり、熱伝導性を
有する方がよい。Conventional printed circuit boards are made of ceramics, synthetic resins, etc., which are both electrically insulating and thermally insulating. However, as a printed circuit board, printed and removed elements generate a large amount of heat, and it is necessary to easily dissipate this heat, so it is better to have thermal conductivity.
本発明はこの点に鑑みて提案されたもので、基板として
グラフアイ１−板を用い、この上にダイヤライクカーボ
ンを生成させたことを特徴とするものである。The present invention has been proposed in view of this point, and is characterized in that a Grapheye 1-plate is used as a substrate, and diamond-like carbon is formed thereon.
以下図面の一実施例により本発明を説明する。The present invention will be explained below with reference to an embodiment of the drawings.
１はグラファイト板で、加工テーブル２に固定して設け
られる。３は真空処理容器で、グラファイト板１の固定
雰囲気を真空排気させる真空ポンプ４が設けられる。５
はダイヤライクカーボンを析出させる原料ガスを供給す
るガスタンクで、原料ガスとしてＣＨ４等が用いられる
。６はグラファイト板１の表面をクリーニングづる対向
ノズル（゛、クリーニングカスの８２タンク７にｊ小過
する。８゜９．１０はいずれもカスコツつて゛ある。１
１はレーザ発振器の例えば炭酸カスレーザ発振器、１２
はレーリ゛ビームの反射鏡、１３は集光レンズ、１４．
１５は加エアー７）’ｖ ２ヲＸ 、Ｙ！＋ｌｌニ駆動
スルＥ −タテ、ＮＣ制御装置１６により制御される。Reference numeral 1 is a graphite plate, which is fixedly provided on the processing table 2. 3 is a vacuum processing vessel, and a vacuum pump 4 for evacuating the fixed atmosphere of the graphite plate 1 is provided. 5
is a gas tank that supplies raw material gas for depositing diamond-like carbon, and CH4 or the like is used as the raw material gas. 6 is an opposing nozzle that cleans the surface of the graphite plate 1 (a small amount of cleaning scum is passed into the tank 7. 8, 9, and 10 are all scum.
1 is a laser oscillator, for example a carbon dioxide gas laser oscillator, 12
13 is a reflecting mirror for the Rayleigh beam, 13 is a condensing lens, and 14.
15 is added air 7)'v 2woX, Y! +ll2 drive through E-vertical, controlled by the NC control device 16.
以上の装置によりダイヤライクカ−ボンを析出生成させ
るには、先ｆ真空ポンプ４を駆動して処理容器仝°丙３
を真空排気して後にコック８を聞きタンク５からＣＩ−
１４ガスを供給ηる。雰囲気圧約２ｘ １０−２ ａｔ
ｍでＣＩ−１４を約ｉ０ ｍ 、ｅ ／ ＋１１１ Ｉ
Ｉ テ？Ｍ ”ｌ。In order to precipitate and generate diamond-like carbon using the above-mentioned apparatus, the first step is to drive the vacuum pump 4 and move the processing vessel 3.
After evacuating the tank, listen to cock 8 and pump CI- from tank 5.
14 gas is supplied. Atmospheric pressure approximately 2x 10-2 at
CI-14 at m about i0 m, e/+111 I
I te? M”l.
そしてレーザ発振器１１を作動して、例えば３００Ｗの
ＣＯｚレーザをレンズ１３で集光させてグラフアイ１〜
板１上に照射づる。照射点で約１０２０℃、発振周波数
的１０７１−１２で、グラファイト板１上に特殊な高密
度カーボンの層１７を析出できた。生成速度は約２００
μ／１−１で、テーブル２をＮＣ制御しレーザ照射点を
移動し走査することによって希望するパターンで或いは
全面に析出ざけることができた。Then, the laser oscillator 11 is activated, and a 300W COz laser is focused by the lens 13 to generate graph eyes 1 to 1.
Irradiate onto board 1. A special high-density carbon layer 17 could be deposited on the graphite plate 1 at approximately 1020°C at the irradiation point and at an oscillation frequency of 1071-12. The generation rate is about 200
μ/1-1, by controlling the table 2 by NC and moving and scanning the laser irradiation point, it was possible to deposit in a desired pattern or over the entire surface.
前記グラファイト板１上に析出した特殊カーボン層１７
は比抵抗値が約１０′１ΩＣＩｌ、誘電率約８．６、熱
伝導度約０．３であり、ダイヤモンドに非常に似た特性
を有していた。この特性から前記特殊カーボン層１７を
ダイヤライクカーボンという。表面にこのダイヤライク
カーボンが析出することによって基板のグラフアイ１〜
１は比抵抗０．２ｘ１（１３〜４Ｘ １０−３０ Ｃｌ
１１の誘電体から前記比抵抗１０１１Ωｃｍの高絶縁性
となり、且つグラフフィトの熱伝導度３７，７Ｘ１０’
３の熱絶縁体からダイヤライクカーボンの析出によって
熱伝導度０．３の良熱伝導体になる。従ってグラフフィ
ト板１にダイヤライクカーボンを析出させることによっ
て熱伝導性、放熱性が良く、耐熱であり、且つ電気絶縁
性の高いパッケージング基板を得ることができる。Special carbon layer 17 deposited on the graphite plate 1
had a specific resistance value of about 10'1 ΩCI1, a dielectric constant of about 8.6, and a thermal conductivity of about 0.3, and had properties very similar to diamond. Because of this characteristic, the special carbon layer 17 is called diamond-like carbon. By depositing this diamond-like carbon on the surface, the graph eye of the substrate 1~
1 is specific resistance 0.2x1 (13~4X 10-30 Cl
The dielectric material of No. 11 has high insulation properties with the specific resistance of 1011 Ωcm, and the thermal conductivity of graphite is 37.7X10'.
The precipitation of diamond-like carbon from the thermal insulator No. 3 makes it a good thermal conductor with a thermal conductivity of 0.3. Therefore, by depositing diamond-like carbon on the graphite plate 1, it is possible to obtain a packaging substrate that has good thermal conductivity, heat dissipation, heat resistance, and high electrical insulation.
なおグラファイト板１上にダイヤライクカーボン１７を
析出させるのにカーボンの微粉末を供給しノズル６から
水素ガスを供給するようにしてもよい。勿論他の炭素含
有ガスの供給ができる。ダイヤライクカーボンの生成雰
囲気圧は前記１１０−２ａｔ程度の場合と、ｉｏ′６ａ
ｔｍ程度の低圧状態の場合と二通りあり、いずれを利用
してもＪ：い。また生成温度は５００℃前後から１００
０℃前後の加熱を行なえばよく、加熱手段はレーザ以外
に高周波加熱、放電を利用した加熱、その他が利用でき
る。In order to deposit the diamond-like carbon 17 on the graphite plate 1, fine carbon powder may be supplied and hydrogen gas may be supplied from the nozzle 6. Of course, other carbon-containing gases can also be supplied. The atmospheric pressure at which diamond-like carbon is generated is about 110-2at, and io'6a.
There are two cases, one is a low pressure state of about tm, and either one is used. In addition, the generation temperature ranges from around 500℃ to 100℃.
Heating may be performed at around 0° C., and as the heating means, in addition to laser, high frequency heating, heating using electric discharge, and others can be used.
以上のように本発明はグラファイト根土にダイヤライク
カーボンを析出生成してパッケージングして利用される
が、このパッケージング基板は、従来の絶縁基板と同様
の高い電気抵抗を有し、且つ従来の基板が高い熱絶縁体
であったのに対して熱伝導度が金属と変らない良導体で
あり、放熱効果の優れた基板が得られ、また基板グラフ
ァイト板によって耐熱性が極めて高い基板が提供できる
効果がある。As described above, the present invention is utilized by precipitating and producing diamond-like carbon on graphite soil for packaging, but this packaging substrate has high electrical resistance similar to that of conventional insulating substrates, and Whereas the previous substrate was a high thermal insulator, it is a good conductor with thermal conductivity comparable to that of metal, making it possible to obtain a substrate with excellent heat dissipation effects.Also, the graphite substrate makes it possible to provide a substrate with extremely high heat resistance. effective.
図面は本発明の製造工程を示す実施例装置構成図である
。
１・・・・・・・・・グラファイト板
１１・・・・・・・・・ダイＡ２ライクカーボン特 許
出 願 人
株式会社井上ジ１ｚパックス研究所The drawings are configuration diagrams of an embodiment of an apparatus showing the manufacturing process of the present invention. 1...Graphite plate 11...Die A2-like carbon patent Applicant Inoue Ji1z Pax Laboratory Co., Ltd.
Claims (1)
て成るプリント基板。A printed circuit board made by producing diamond-like carbon on the surface of a graphite plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22237983A JPS60113985A (en) | 1983-11-25 | 1983-11-25 | Printed board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22237983A JPS60113985A (en) | 1983-11-25 | 1983-11-25 | Printed board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60113985A true JPS60113985A (en) | 1985-06-20 |
| JPH0312788B2 JPH0312788B2 (en) | 1991-02-21 |
Family
ID=16781430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22237983A Granted JPS60113985A (en) | 1983-11-25 | 1983-11-25 | Printed board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60113985A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638284A (en) * | 1986-06-25 | 1988-01-14 | 松下電工株式会社 | High heat conductivity substance |
| EP0520243A2 (en) * | 1991-06-24 | 1992-12-30 | Siemens Aktiengesellschaft | Metal core circuit board |
| EP0619282A2 (en) * | 1993-04-07 | 1994-10-12 | APPLIED SCIENCES, Inc. | Diamond/carbon/carbon composite useful as an integral dielectric heat sink and method for making same |
-
1983
- 1983-11-25 JP JP22237983A patent/JPS60113985A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638284A (en) * | 1986-06-25 | 1988-01-14 | 松下電工株式会社 | High heat conductivity substance |
| EP0520243A2 (en) * | 1991-06-24 | 1992-12-30 | Siemens Aktiengesellschaft | Metal core circuit board |
| EP0520243A3 (en) * | 1991-06-24 | 1993-03-10 | Siemens Aktiengesellschaft | Metal core circuit board |
| EP0619282A2 (en) * | 1993-04-07 | 1994-10-12 | APPLIED SCIENCES, Inc. | Diamond/carbon/carbon composite useful as an integral dielectric heat sink and method for making same |
| EP0619282A3 (en) * | 1993-04-07 | 1995-02-15 | Applied Sciences Inc | Diamond/carbon/carbon composite useful as an integral dielectric heat sink and method for making same. |
| US5604037A (en) * | 1993-04-07 | 1997-02-18 | Applied Sciences, Inc. | Diamond/carbon/carbon composite useful as an integral dielectric heat sink |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0312788B2 (en) | 1991-02-21 |
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