JPS60113643U - 半導体装置用沸騰冷却装置 - Google Patents

半導体装置用沸騰冷却装置

Info

Publication number
JPS60113643U
JPS60113643U JP17771784U JP17771784U JPS60113643U JP S60113643 U JPS60113643 U JP S60113643U JP 17771784 U JP17771784 U JP 17771784U JP 17771784 U JP17771784 U JP 17771784U JP S60113643 U JPS60113643 U JP S60113643U
Authority
JP
Japan
Prior art keywords
tube
cooling device
boiling cooling
semiconductor equipment
bellows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17771784U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112688Y2 (enrdf_load_stackoverflow
Inventor
鉄野　治雄
三金　敏雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17771784U priority Critical patent/JPS60113643U/ja
Publication of JPS60113643U publication Critical patent/JPS60113643U/ja
Application granted granted Critical
Publication of JPS6112688Y2 publication Critical patent/JPS6112688Y2/ja
Granted legal-status Critical Current

Links

JP17771784U 1984-11-22 1984-11-22 半導体装置用沸騰冷却装置 Granted JPS60113643U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17771784U JPS60113643U (ja) 1984-11-22 1984-11-22 半導体装置用沸騰冷却装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17771784U JPS60113643U (ja) 1984-11-22 1984-11-22 半導体装置用沸騰冷却装置

Publications (2)

Publication Number Publication Date
JPS60113643U true JPS60113643U (ja) 1985-08-01
JPS6112688Y2 JPS6112688Y2 (enrdf_load_stackoverflow) 1986-04-19

Family

ID=30735289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17771784U Granted JPS60113643U (ja) 1984-11-22 1984-11-22 半導体装置用沸騰冷却装置

Country Status (1)

Country Link
JP (1) JPS60113643U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6112688Y2 (enrdf_load_stackoverflow) 1986-04-19

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