JPS60113629U - 急冷機構付結晶成長装置 - Google Patents

急冷機構付結晶成長装置

Info

Publication number
JPS60113629U
JPS60113629U JP108384U JP108384U JPS60113629U JP S60113629 U JPS60113629 U JP S60113629U JP 108384 U JP108384 U JP 108384U JP 108384 U JP108384 U JP 108384U JP S60113629 U JPS60113629 U JP S60113629U
Authority
JP
Japan
Prior art keywords
reaction tube
quartz reaction
fan
crystal growth
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP108384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246047Y2 (enrdf_load_stackoverflow
Inventor
香西　照雄
大越　隆之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP108384U priority Critical patent/JPS60113629U/ja
Publication of JPS60113629U publication Critical patent/JPS60113629U/ja
Application granted granted Critical
Publication of JPH0246047Y2 publication Critical patent/JPH0246047Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
JP108384U 1984-01-09 1984-01-09 急冷機構付結晶成長装置 Granted JPS60113629U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP108384U JPS60113629U (ja) 1984-01-09 1984-01-09 急冷機構付結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP108384U JPS60113629U (ja) 1984-01-09 1984-01-09 急冷機構付結晶成長装置

Publications (2)

Publication Number Publication Date
JPS60113629U true JPS60113629U (ja) 1985-08-01
JPH0246047Y2 JPH0246047Y2 (enrdf_load_stackoverflow) 1990-12-05

Family

ID=30473500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP108384U Granted JPS60113629U (ja) 1984-01-09 1984-01-09 急冷機構付結晶成長装置

Country Status (1)

Country Link
JP (1) JPS60113629U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0246047Y2 (enrdf_load_stackoverflow) 1990-12-05

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