JPS6011155A - Monitoring device for mass spectrometer - Google Patents

Monitoring device for mass spectrometer

Info

Publication number
JPS6011155A
JPS6011155A JP58119655A JP11965583A JPS6011155A JP S6011155 A JPS6011155 A JP S6011155A JP 58119655 A JP58119655 A JP 58119655A JP 11965583 A JP11965583 A JP 11965583A JP S6011155 A JPS6011155 A JP S6011155A
Authority
JP
Japan
Prior art keywords
parameters
mass spectrometer
value
time
optimum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58119655A
Other languages
Japanese (ja)
Other versions
JPH0554061B2 (en
Inventor
Tsunezo Takeda
武田 常蔵
Kiyoshi Shimizu
清水 喜代志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58119655A priority Critical patent/JPS6011155A/en
Publication of JPS6011155A publication Critical patent/JPS6011155A/en
Publication of JPH0554061B2 publication Critical patent/JPH0554061B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/022Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply

Abstract

PURPOSE:To enable easy optimization operation as well as maintenance and control of a device by subtracting the optimum value of parameters in a reference stage from the optimum value of the parameters at the present point of time and displaying a deviation value so that the change of conditioning owing to the contamination, trouble, etc. of a mass spectrometer can be monitored. CONSTITUTION:A signal for optimization is inputted to a CPU8 from an operation board 10 to monitor the condition of a present mass spectrometer 1 upon lapse of certain time from a reference stage, then the CPU8 reads the parameter values from the respective systems 2, 4, 6 of the spectrometer 1, calculates the optimum value of the parameters at the present point of time, stores the same in the 2nd storage part 16, reads out at the same time the optimum parameter value in the reference stage stored in the 1st storage part 14 and transmits the same together with the optimum value at the present point of time to a subtraction part 18. Both optimum values are subtracted for each of the parameters in the part 18 and a deviation is calculated. The deviation is displayed together with the optimum value of the present parameters sotred in the part 16 on the image screen of a display part 20.

Description

【発明の詳細な説明】 (イン 産業上の利用分野 本発明は質量分析計のパラメータの最適化をこ有用なモ
ニタ装置tこ関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a monitoring device useful for optimizing mass spectrometer parameters.

(リ 従来技術 一般【こ質量分析計はイオン源系1分析系、検出系で構
成されるが、これらの各基のパラメータ、たとえばレン
ズや電極〔こけ装置全体のバランスlζより決定される
それぞれの最適値がある。つまり各パラメータ、上記の
例でいえはレンズ収差や電極精度等は装置ごとに異なる
ので、パラメータの最適値は各装置昏こ固有の値を示す
。しかも、初期にパラメータの最適値を設定していても
、装置の汚染や故障昏こよりコンディ/コンが経時変化
する。
(Prior art in general) This mass spectrometer is composed of an ion source system, an analysis system, and a detection system. There is an optimum value.In other words, each parameter, such as lens aberration and electrode accuracy in the above example, differs depending on the device, so the optimum value of the parameter is a value unique to each device. Even if a value is set, the condition/control value may change over time due to equipment contamination or malfunction.

ところで、従来の質量分析計でに、オーバホール時など
には各パラメータの最適値が新たに設定し直されるが、
このようφこ一度最適値を設定しても従来はそれ以降の
装置のコ/ティ7ヨンの変化しこついては何らモニタす
る手段がないので定期的に洗浄や部品の交換をしたり、
また故障が生じたときに始めてその部分を修理する他な
かった。このため、補修の目やすがつき昏こ<(、装置
の維持管理が不充分になるという難点がある。
By the way, in conventional mass spectrometers, the optimal values of each parameter are reset when overhauled.
Conventionally, even if the optimum value of φ is set once, there is no way to monitor any subsequent changes in the equipment's components, so cleaning or replacing parts must be done periodically.
Moreover, when a failure occurred, there was no choice but to repair that part. For this reason, there is a problem in that the maintenance of the equipment becomes insufficient because it is difficult to make repairs.

(ハ) 目 的 本発明は上述の問題点Iこ鑑みてなされたものであって
、質量分析計の汚染や故障等によるコンディションの変
化をモニタできるようにして装置の最適化操作ならびに
維持管理を容易に行なえるよう蚤こすることを目的とす
る。
(c) Purpose The present invention has been made in view of the above-mentioned problem I, and it is possible to monitor changes in the condition of a mass spectrometer due to contamination or failure, thereby optimizing operation and maintenance of the device. The purpose is to make it easier to scrub.

に)構成 本発明はこのような目的を達成するため質量分析計のイ
オン源系1分析系、検出系などの各基の基準時における
パラメータの最適値を記憶する第1記憶部と、現時点で
設定ちれる前記各基のパラメータの最適値を記憶する第
2記憶部と、この第2記憶部普こ記憶された現時点のパ
ラメータの最適値から、前記第1記憶部に記憶された基
準時のパラメータの最適値を減算して偏差値を算出する
減算部と、この減算部で算出でれた偏差値を表示する表
示部とでモニタ装置を構成し、上記表示器1こ表示され
た偏差値で質量分析計の各基の状態をモニタするようを
こしている。
2) Structure In order to achieve such an object, the present invention has a first storage section that stores the optimum values of parameters of each group such as the ion source system 1 analysis system and detection system of a mass spectrometer at the reference time, and a second storage section that stores the optimum values of the respective parameters to be set; A monitor device is composed of a subtraction section that calculates a deviation value by subtracting the optimum value of the parameter, and a display section that displays the deviation value calculated by this subtraction section, and the deviation value displayed on the above-mentioned display 1. The system is designed to monitor the status of each group in the mass spectrometer.

(ホ)実施例 以F本発明を実施例昏こついて、図面に基づいて詳細蚤
こ説明する。
(E) Embodiments The present invention will be explained in detail based on embodiments and drawings.

第1図は質量分析計とそのモニタ装置の構成図である。FIG. 1 is a block diagram of a mass spectrometer and its monitoring device.

同図において1は質量分析計、2は分析試料をイオン化
するイオン源系で、このイオン源系21こはイオンビー
ムを集束するレンズを含む。4はイオン源系2から導入
されるイオンを質量分離する分析系で、この分析系41
こQユ7グ不ツト又は4重極電極を含む。6は分析系4
で質量分離された各イオンを検出する検出系で、この検
出系6tよ二次電子増倍管などの検出器と増幅器を含む
。8は上記イオン源系2、分析系4.検出系6のパラメ
ータの値を人力して、その値から質量分析計1全体のバ
ランスからみて分解能が良好でかつ検出感度に優れた条
件を示すパラメータの最適値を算出する演算処理部(以
下C1) Uという)である。
In the figure, 1 is a mass spectrometer, 2 is an ion source system for ionizing an analysis sample, and this ion source system 21 includes a lens for focusing an ion beam. 4 is an analysis system for mass-separating the ions introduced from the ion source system 2, and this analysis system 41
This includes 7 non-contact or quadrupole electrodes. 6 is analysis system 4
This detection system 6t includes a detector such as a secondary electron multiplier and an amplifier. 8 is the above-mentioned ion source system 2, analysis system 4. The arithmetic processing unit (hereinafter referred to as C1) manually inputs the values of the parameters of the detection system 6 and calculates from those values the optimum values of the parameters that indicate conditions for good resolution and excellent detection sensitivity in terms of the overall balance of the mass spectrometer 1. ) is called U).

また10ばこの演算処理部8を1fflJ gIする信
号を人力する操作盤である。
It is also an operation panel that manually inputs signals to the arithmetic processing unit 8 of 10 cigarettes.

12V:i本発明のモニタ装置で、このモニタ装置12
tよ、CI) U 8で算出された各基2.4.6のハ
ラメータの基準時(すなわらオーバホ了ル時など装置の
モニタの目やすとなる基準の時)の最適値を記憶する第
1記憶部14と、基準時から時間経過した現時点昏こお
いてCPU8で算出された各パラメータの最適値を記憶
する第2記憶部16と、第2記憶部16に記憶された現
時点のパラメータの最適値から前記第1記憶部14に記
憶された基準時におけるパラメータの最適値を減算して
偏差値を算出する減算部18と、この減算部18で算出
てれた偏差値ならびに第2記憶部16に記憶された現時
点のパラメータの最適値を同時に表示する表示部20と
で構成される。
12V:i In the monitor device of the present invention, this monitor device 12
t, CI) U Store the optimum value of the Harameter of each base 2.4.6 calculated in 8 at the reference time (i.e., the reference time to be used as a guide for the equipment monitor such as when an overhaul is completed). A first storage unit 14, a second storage unit 16 that stores the optimum values of each parameter calculated by the CPU 8 at the current moment when time has passed since the reference time, and parameters at the current moment stored in the second storage unit 16. a subtraction unit 18 that calculates a deviation value by subtracting the optimum value of the parameter at the reference time stored in the first storage unit 14 from the optimum value of the parameter, and a deviation value calculated by the subtraction unit 18 and a second memory. The display section 20 simultaneously displays the optimum values of the parameters stored in the section 16 at the present time.

上記構成を有するモニタ装置12により質量分析計1を
モニタする昏こは次のよう昏こ行なわれる。
Monitoring of the mass spectrometer 1 by the monitor device 12 having the above configuration is performed as follows.

まず質量分析計1のオーバホール完了時などに操作盤1
0から最適化のための信号を入力すると、cpuBは各
基2,4.6のパラメータの値を読み込み、その値から
質量分析計1全体のバランスからみて分解能が良好で検
出感度に優れた条件を示すパラメータの最適値x1を算
出する。この算出された各パラメータの最適値x、L?
第1記憶部14に送出されここ1こ記憶σれる。そして
、この第1記憶部14+こ記憶された最適値x1が基準
時における最適値とされる。
First, when the overhaul of mass spectrometer 1 is completed, etc.,
When a signal for optimization is input from 0, cpuB reads the values of parameters 2 and 4.6 for each group, and from those values it determines conditions that have good resolution and excellent detection sensitivity in terms of the overall balance of the mass spectrometer 1. Calculate the optimal value x1 of the parameter indicating . The calculated optimum value of each parameter x, L?
The data is sent to the first storage unit 14 and stored here. The optimal value x1 stored in the first storage unit 14 is then set as the optimal value at the reference time.

基準時からある時間経過後の現在の質量分析計1の状態
をモニタするには、操作盤10より最適化のための信号
を入力すると、CP U 13は質量分析計1の各基2
.4.6のパラメータの値を読み込み基準時のときと同
様【こして現時点でのパラメータの最適値X2を算出す
る。この算出きれたパラメータの最適値x2I−j:第
2記憶部16昏こ送出されここ昏こ記1.ハδれる。同
時にCI) U 8は第1記憶部14昏こ記憶された基
準時におけるパラメータ最適値x1を続み出し、新た【
こ算出した現時点での最適値x2とともにこれらを減算
部18に送出する。減算部IEIまCl) U 8から
送出された基準時と現時点での各パラメータの最適値x
、 、 X2をもと昏こ、現時点のパラメータの最適値
X2から基準時のパラメータの最適値X1を各パラメー
タごとに減算して偏差値(y=x2−x、)を算出する
。減算部1日で算出された偏差値γと、第2記憶部16
に記憶されている現在のパラメータの最適値x2(d1
第2記憶部16と減算部18からそれぞれ表示部20に
送出されこの表示部20の画面」−に、たとえば第2図
のごとく表示される。同図の〔〕内の数値が偏差値yを
表わしている。従って、この偏差値yiこより質量分析
計1の基準時から現時点までの時間経過にともなう各パ
ラメータの状態たとえば汚染の度合や部品交換時期の目
やすなどがモニタできることになる。なお、第2図中に
表わされた三種のピークは質量分析計1の最適化の目や
す]こするために使用される標準試料のイオンピークで
、このようにイオンピークを表示部20の画面上に併せ
て表示すれば最適化の調整度合の判断が一層′番易にな
る。
To monitor the current state of the mass spectrometer 1 after a certain period of time has elapsed from the reference time, when a signal for optimization is input from the operation panel 10, the CPU 13 controls each unit 2 of the mass spectrometer 1.
.. 4. Read the values of the parameters in 6 and calculate the optimum value X2 of the parameters at the present time in the same way as at the reference time. The calculated optimal value x2I-j of the parameter is sent to the second storage unit 16 and is stored here. Ha δreru. At the same time, CI) U 8 reads out the parameter optimum value x1 at the reference time stored in the first storage unit 14, and calculates a new [
These are sent to the subtraction unit 18 together with the calculated optimum value x2 at the current time. The optimal value x of each parameter at the reference time and at the present time sent from the subtraction unit IEI or Cl) U8
, , Based on X2, the optimum value X1 of the parameter at the reference time is subtracted for each parameter from the optimum value X2 of the parameter at the present time to calculate the deviation value (y=x2-x,). The deviation value γ calculated in one day by the subtraction unit and the second storage unit 16
The optimum value x2(d1) of the current parameter stored in
The signals are sent from the second storage section 16 and the subtraction section 18 to the display section 20, and displayed on the screen of the display section 20, for example, as shown in FIG. The numerical value in [ ] in the figure represents the deviation value y. Therefore, from this deviation value yi, it is possible to monitor the state of each parameter over time from the reference time of the mass spectrometer 1 to the present time, such as the degree of contamination and the timing of parts replacement. The three types of peaks shown in FIG. 2 are the ion peaks of the standard sample used for scouring. If both are displayed on the screen, it will be easier to judge the degree of optimization adjustment.

(へ) 効 果 以上のように本発明によれは表示部に表示された偏差値
を見れば質量分析計の各基の状態をモニタできるので、
各パラメータの最適化の調整か簡単をこなる。さら【こ
各基の洗浄や修理1部品交換などの時期を適確1こ把握
することができる。つまり装置のコンディ/コンを常時
知ることができるので装置の一維持管理が容易となり、
ひいては装置の長寿命化にも・つrlがるという優れた
効果が得られる。
(f) Effects As described above, according to the present invention, the status of each group of the mass spectrometer can be monitored by looking at the deviation value displayed on the display.
You can easily adjust the optimization of each parameter. Furthermore, you can accurately determine when each unit should be cleaned, repaired, or replaced. In other words, the condition of the equipment can be known at all times, making it easier to maintain and manage the equipment.
Furthermore, an excellent effect of extending the life of the device can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の実施例を示し、第1図は質量分析計とそ
のモニタ装置の構成図、第2図(d各パラメータの表示
例を示す説明図である。 1・・・質量分析計、2・・イオン源系、4・・・分析
系、6・・・検・出糸、12・・・モニタ装置、14・
・・第1記憶部、16・・・第2記憶部、18・・・減
算部、20・・・表示部。 出 願 人 昧式会社島津製作所 代理人 弁理士岡田和秀 第1図 1、 第2図
The drawings show embodiments of the present invention, and FIG. 1 is a configuration diagram of a mass spectrometer and its monitoring device, and FIG. 2 (d) is an explanatory diagram showing display examples of each parameter. 1...Mass spectrometer, 2... Ion source system, 4... Analysis system, 6... Detection/detachment, 12... Monitor device, 14...
...first storage section, 16...second storage section, 18...subtraction section, 20...display section. Applicant Shimadzu Corporation Representative Patent Attorney Kazuhide Okada Figures 1 and 2

Claims (1)

【特許請求の範囲】 ([)質量分析計のイオン源系、分析系、検出系などの
各基の基準時しこおけるパラメータの最適値を記憶する
第1記憶部と、現時点で設定される前記各基のパラメー
タの最適値を記憶する第2記憶部と、この第2記憶部に
記憶された現時点のパラメータの最適値から前記第1記
憶部【こ記憶てれた基準時のパラメータの最適値を減算
、して偏差値を算出する減算部と、この減W部で算出さ
れた偏差値を表示する表示部とを(、iffえ、この表
示部に表示された偏差値で質量分析計の各基の状態をモ
ニタするようにしたことを特徴とする質量分析百」のモ
ニタ装置。
[Scope of Claims] ([) A first storage unit that stores optimal values of parameters set at the reference time for each unit of the ion source system, analysis system, detection system, etc. of the mass spectrometer; a second storage section that stores the optimal values of the parameters of each group; and a second storage section that stores the optimal values of the parameters at the current time stored in the second storage section; A subtraction section that subtracts the value to calculate the deviation value, and a display section that displays the deviation value calculated by this W reduction section (if), the mass spectrometer is What is claimed is: 1. A mass spectrometry monitoring device, characterized in that it monitors the state of each group.
JP58119655A 1983-06-30 1983-06-30 Monitoring device for mass spectrometer Granted JPS6011155A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58119655A JPS6011155A (en) 1983-06-30 1983-06-30 Monitoring device for mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58119655A JPS6011155A (en) 1983-06-30 1983-06-30 Monitoring device for mass spectrometer

Publications (2)

Publication Number Publication Date
JPS6011155A true JPS6011155A (en) 1985-01-21
JPH0554061B2 JPH0554061B2 (en) 1993-08-11

Family

ID=14766801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58119655A Granted JPS6011155A (en) 1983-06-30 1983-06-30 Monitoring device for mass spectrometer

Country Status (1)

Country Link
JP (1) JPS6011155A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123658A (en) * 1988-10-31 1990-05-11 Yokogawa Electric Corp Mass spectrometer for high frequency induction bonded plasma
GB2406965A (en) * 2003-10-10 2005-04-13 Agilent Technologies Inc Mass spectrometry performance optimization
GB2406966A (en) * 2003-10-10 2005-04-13 Agilent Technologies Inc Mass spectrometry spectral correction
WO2019229954A1 (en) * 2018-05-31 2019-12-05 株式会社島津製作所 Mass spectrometry device
JP2021077444A (en) * 2019-11-05 2021-05-20 株式会社島津製作所 Mass spectrometer

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123658A (en) * 1988-10-31 1990-05-11 Yokogawa Electric Corp Mass spectrometer for high frequency induction bonded plasma
GB2406965A (en) * 2003-10-10 2005-04-13 Agilent Technologies Inc Mass spectrometry performance optimization
GB2406966A (en) * 2003-10-10 2005-04-13 Agilent Technologies Inc Mass spectrometry spectral correction
GB2406965B (en) * 2003-10-10 2006-11-29 Agilent Technologies Inc Mass spectrometry performance enhancement
WO2019229954A1 (en) * 2018-05-31 2019-12-05 株式会社島津製作所 Mass spectrometry device
JPWO2019229954A1 (en) * 2018-05-31 2021-04-08 株式会社島津製作所 Mass spectrometer
JP2021077444A (en) * 2019-11-05 2021-05-20 株式会社島津製作所 Mass spectrometer

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Publication number Publication date
JPH0554061B2 (en) 1993-08-11

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