JPS60110971U - 真空装置 - Google Patents

真空装置

Info

Publication number
JPS60110971U
JPS60110971U JP20190483U JP20190483U JPS60110971U JP S60110971 U JPS60110971 U JP S60110971U JP 20190483 U JP20190483 U JP 20190483U JP 20190483 U JP20190483 U JP 20190483U JP S60110971 U JPS60110971 U JP S60110971U
Authority
JP
Japan
Prior art keywords
curve
evacuated chamber
vacuum device
pressure
displaying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20190483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314774Y2 (enExample
Inventor
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP20190483U priority Critical patent/JPS60110971U/ja
Publication of JPS60110971U publication Critical patent/JPS60110971U/ja
Application granted granted Critical
Publication of JPH0314774Y2 publication Critical patent/JPH0314774Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP20190483U 1983-12-28 1983-12-28 真空装置 Granted JPS60110971U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20190483U JPS60110971U (ja) 1983-12-28 1983-12-28 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20190483U JPS60110971U (ja) 1983-12-28 1983-12-28 真空装置

Publications (2)

Publication Number Publication Date
JPS60110971U true JPS60110971U (ja) 1985-07-27
JPH0314774Y2 JPH0314774Y2 (enExample) 1991-04-02

Family

ID=30764122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20190483U Granted JPS60110971U (ja) 1983-12-28 1983-12-28 真空装置

Country Status (1)

Country Link
JP (1) JPS60110971U (enExample)

Also Published As

Publication number Publication date
JPH0314774Y2 (enExample) 1991-04-02

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