JPS60108240A - Guide device of heavy weight movable bench - Google Patents
Guide device of heavy weight movable benchInfo
- Publication number
- JPS60108240A JPS60108240A JP21583283A JP21583283A JPS60108240A JP S60108240 A JPS60108240 A JP S60108240A JP 21583283 A JP21583283 A JP 21583283A JP 21583283 A JP21583283 A JP 21583283A JP S60108240 A JPS60108240 A JP S60108240A
- Authority
- JP
- Japan
- Prior art keywords
- guide
- pressure
- feed screw
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は大形工作機械等の大重量可動台を案内する案内
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION <Field of Industrial Application> The present invention relates to a guide device for guiding a heavy movable platform of a large machine tool or the like.
〈従来技術〉
門形マシニングセンタ等大形工作機械用の案内面はテー
ブル1及びテーブル上に載置されるワ−り2が大重量と
なるので駆動系の負担を軽減させるため第1図に示すよ
うに′重量支持面3及びナローガイド4共に静圧案内面
が採用されている。しかしながら静圧案内面においては
摩擦係数が極端に低いため、送り方向の動剛性が低く振
動が発生し易いという問題があった。<Prior art> Guideways for large machine tools such as double-column machining centers are shown in Figure 1 in order to reduce the load on the drive system since the table 1 and the workpiece 2 placed on the table are heavy. As shown, both the weight support surface 3 and the narrow guide 4 employ static pressure guide surfaces. However, since the friction coefficient of the static pressure guide surface is extremely low, there is a problem in that the dynamic rigidity in the feeding direction is low and vibrations are likely to occur.
又静圧ポケット5には固定絞り6を介して圧力流体が供
給されているため、テーブルl上に載せられるワーク重
量の変動により浮上量の変化が大きくなり、剛性を高め
るのが困難であり、更に送りねじ7に対しナローガイド
4が片寄って設りられているため、テーブルlにはモー
メントが生じ蛇行し易いという欠点もあった。In addition, since pressure fluid is supplied to the static pressure pocket 5 through the fixed throttle 6, the flying height changes greatly due to fluctuations in the weight of the workpiece placed on the table l, making it difficult to increase the rigidity. Furthermore, since the narrow guide 4 is disposed off-centered with respect to the feed screw 7, a moment is generated in the table 1, which causes the table 1 to meander easily.
〈発明の目的〉
そこで本発明はテーブル重量が増大しても駆動系の負担
を増すことなく送り方向の動剛性を高めて振動の発生を
防止することを目的とする。<Objective of the Invention> Therefore, an object of the present invention is to prevent the occurrence of vibration by increasing the dynamic rigidity in the feeding direction without increasing the load on the drive system even when the weight of the table increases.
更に他の目的はナローガイドと送り駆動部のモーメント
をなくしテーブルの蛇行を防止し、かつワーク重量の変
動による浮上量の変動をもなくすることを目的とする。Still another object is to eliminate the moment of the narrow guide and the feed drive unit, to prevent the table from meandering, and to eliminate fluctuations in the flying height due to fluctuations in the weight of the workpiece.
〈発明の構成〉
本発明の特徴とする構成は、重量支持作用をなす一対の
水平支持面に対して静圧軸受で支承し、送りねじ方向の
ガイドとしては送りねし軸線に対し対称に横方向案内面
を形成して動圧すベリ面のナローガイドを構成し、テー
ブル重量に影響されない重力作用方向と平行な案内面に
て摩擦力を付与して送り方向の動剛性を高めるようにし
たものである。<Configuration of the Invention> The characteristic configuration of the present invention is that a pair of horizontal support surfaces that perform a weight-supporting action are supported by a hydrostatic bearing, and as a guide in the feed screw direction, a pair of horizontal support surfaces are supported symmetrically with respect to the feed screw axis. A narrow guide with a vertical surface that forms a direction guide surface and applies dynamic pressure, and the dynamic rigidity in the feeding direction is increased by applying frictional force on the guide surface parallel to the direction of gravity that is unaffected by the table weight. It is.
〈実施例〉 以下本発明の実施例を図面に基づいて説明する。<Example> Embodiments of the present invention will be described below based on the drawings.
第2図において、10はへ・ノド、11.12&よベッ
ドlO上に形成され重量支持作用をなす水平支持面、1
3.14は横方向のガイド作用をなす横方向案内面、こ
の横方向案内面13,144よ前δ己水平支持面11.
12に対し直角をなし案内面力く紙面に垂直な方向に形
成されている。IEIよノkXIL支持面11,1.2
及び横方向案内面13,1.Hこて摺動可能に案内され
たテーブル、このテーフ゛ル15の下面には複数の静圧
ポケット17が形成され、各静圧ポケット17にはポケ
ット圧に応答して絞り抵抗の調整される可変絞り弁18
がそれぞれ設りられている。この可変絞り弁18は、第
4図に示すように、ダイヤフラム21と、このダイヤフ
ラム21を決着する一対の弁ハウジング22゜23と、
ダイヤフラム21の一側に配置されたシート部ItA2
4と、他側に配置されたスプリング25とにより構成さ
れている。弁ハウジング22とダイヤフラム21にて形
成される圧力室22aの中央にはノズル26が開口し、
このノズル26の開口端面にシート部材24が押圧され
絞り作用をなしている。シート部材24の周囲の圧力室
22aには静圧ポケット17に絞り通過後の流体を導(
通路27が開口している。他方の弁ハウジング23とダ
イヤフラム21にて形成された室23aには大気圧が導
入されるとともにこの弁ハウジング23側にはダイヤフ
ラム21を押圧するスプリング25の押圧力調整手段2
8が設けられている。In Fig. 2, 10 is a horizontal support surface formed on the top of the bed, 11. 12 is a horizontal support surface that acts as a weight support,
3.14 is a lateral guide surface that acts as a lateral guide; in front of this lateral guide surface 13, 144 is a horizontal support surface 11.
12, and the guide surface is formed in a direction perpendicular to the plane of the paper. IEI YonokXIL support surface 11, 1.2
and lateral guide surfaces 13,1. A plurality of static pressure pockets 17 are formed on the lower surface of the H-trowel slidingly guided table, and each static pressure pocket 17 has a variable throttle whose throttle resistance is adjusted in response to the pocket pressure. valve 18
are set up for each. As shown in FIG. 4, the variable throttle valve 18 includes a diaphragm 21 and a pair of valve housings 22 and 23 that connect the diaphragm 21.
Seat part ItA2 arranged on one side of the diaphragm 21
4 and a spring 25 disposed on the other side. A nozzle 26 opens in the center of a pressure chamber 22a formed by the valve housing 22 and the diaphragm 21.
The sheet member 24 is pressed against the opening end surface of this nozzle 26 to perform a restricting action. In the pressure chamber 22a around the sheet member 24, the fluid after being squeezed and passed through the static pressure pocket 17 is introduced (
Passage 27 is open. Atmospheric pressure is introduced into a chamber 23a formed by the other valve housing 23 and the diaphragm 21, and a pressing force adjusting means 2 of a spring 25 that presses the diaphragm 21 is provided on the valve housing 23 side.
8 is provided.
弁ハウジング23の上方突出部に刻設されたねじ部29
に蝮合するねし部材30は、突出部内孔31に嵌挿され
た摺動部材32とボルト33で連結され、このねじ部材
30を回転調整することにより摺動部材32を上下移動
させ、スプリング25の押圧力を調整し、シート部材2
4とノズル26との初期隙間を任意に設定し、浮上量及
び絞り弁特性が調整可能となっている。Threaded portion 29 carved into the upper protrusion of the valve housing 23
The screw member 30 is connected to a sliding member 32 fitted into the inner hole 31 of the protruding part by a bolt 33, and by adjusting the rotation of the screw member 30, the sliding member 32 is moved up and down, and the spring Adjust the pressing force of 25 and press the sheet member 2.
4 and the nozzle 26 can be arbitrarily set, and the flying height and throttle valve characteristics can be adjusted.
前記ダイヤフラム21はスプリング25の一定の押圧力
に対し、圧力室22a側に発生ずる流体押圧力により変
位しシート部材24とノズル開口端面間の隙間を調整し
絞り抵抗を変化させる。即ち負荷の増加に伴う静圧ポケ
ット周囲の隙間の減少により静圧ポケット17の圧力が
高くなるとスプリング25を圧縮する方向にダイヤフラ
ム21が変位し、シート部材24とノズル開口端面間の
隙間が増大し、絞り抵抗が小さくなり、圧力室22a内
への流入量を増やす作用をなす。これとともに静圧ポケ
ット17の圧力が増加し静圧支持力を高め、負荷変動に
伴う静圧ポケット17周囲の流体流出隙間の変化を補償
する。The diaphragm 21 is displaced by the fluid pressing force generated on the pressure chamber 22a side with respect to the constant pressing force of the spring 25, adjusting the gap between the sheet member 24 and the nozzle opening end face, and changing the throttling resistance. That is, when the pressure in the static pressure pocket 17 increases due to a decrease in the gap around the static pressure pocket as the load increases, the diaphragm 21 is displaced in a direction that compresses the spring 25, and the gap between the sheet member 24 and the nozzle opening end face increases. , the throttling resistance is reduced and the amount of flow into the pressure chamber 22a is increased. At the same time, the pressure in the static pressure pocket 17 increases, increasing the static pressure supporting force and compensating for changes in the fluid outflow gap around the static pressure pocket 17 due to load fluctuations.
これに対し負荷の減少により静圧ポケット周囲の隙間が
増大し、ポケット圧が低下するとダイヤフラム21が復
元することによりシート部材24の隙間を狭め絞り抵抗
を増大させ、圧力室22a内への流入量を減少し、静圧
ポケット17の圧力をより低下させて隙間の変化を補償
する。On the other hand, as the load decreases, the gap around the static pressure pocket increases, and when the pocket pressure decreases, the diaphragm 21 restores itself, narrowing the gap between the sheet members 24 and increasing the throttling resistance, thereby increasing the flow rate into the pressure chamber 22a. , and the pressure in the static pressure pocket 17 is further reduced to compensate for the gap change.
かかる可変絞り弁18のノズル26に通ずる供給ボート
35には供給圧力調整手段36を介して圧力流体供給源
39が連通されている。この供給圧力調整手段36は、
−例として固定絞り37とドレン通路に設けた可変絞り
38にて構成され、4個1組の可変絞り弁18に対して
共通に設けられている。面この供給圧力調整手段36は
テーブル支持点を4系統に分割しているので、各系統別
の圧力調整によりテーブルの1喚き補正ができる。A supply boat 35 communicating with the nozzle 26 of the variable throttle valve 18 is connected to a pressure fluid supply source 39 via a supply pressure adjusting means 36 . This supply pressure adjustment means 36 is
- For example, it is composed of a fixed throttle 37 and a variable throttle 38 provided in the drain passage, and is provided in common to a set of four variable throttle valves 18. Since the supply pressure adjusting means 36 divides the table support points into four systems, it is possible to correct one rotation of the table by adjusting the pressure for each system.
前記横方向案内面13.14とテーブル15下面に突設
された案内部材15aとの間には楔状部材40および平
行部材41が介挿されている。楔状部材40の端部には
第6図、第7図、第8図に示すように、テーブル15に
固着されたブラケット42に挿通され楔状部材40に螺
合する引張りボルト43及びブラケット42に螺合し端
面が当接する押しボルト44が設けられ、楔状部材40
の長手方向位置調整機構をなしている。かかる楔状部材
40の位置調整により、案内面13.14と案内部材1
52間の隙間が調整されるとともに、摺接面に所定の面
圧が付与され、適度の摩擦力が与えられる。この摩擦力
は横方向案内面13,14が重力作用方向と平行に形成
されているためテーブル15に作用する重量に全く影響
を受けないで、常に一定の摩擦力が与えられ、送り方向
の振動に対する安定性が保たれる。A wedge-shaped member 40 and a parallel member 41 are interposed between the lateral guide surface 13, 14 and a guide member 15a protruding from the lower surface of the table 15. At the end of the wedge-shaped member 40, as shown in FIGS. 6, 7, and 8, a tension bolt 43 is inserted into a bracket 42 fixed to the table 15 and screwed into the wedge-shaped member 40, and a tension bolt 43 is screwed into the bracket 42. A push bolt 44 whose mating end surfaces abut is provided, and the wedge-shaped member 40
It serves as a longitudinal position adjustment mechanism. By adjusting the position of the wedge-shaped member 40, the guide surface 13.14 and the guide member 1
The gap between the parts 52 is adjusted, and a predetermined surface pressure is applied to the sliding surface to provide an appropriate frictional force. This frictional force is not affected by the weight acting on the table 15 at all because the lateral guide surfaces 13 and 14 are formed parallel to the direction of gravity, and a constant frictional force is always applied, causing vibrations in the feeding direction. Stability against is maintained.
又テーブルの重量支持作用をなす水平支持面11.12
及び横方向案内面13.14は送りねし19中心に対し
左右対称的に設けられているので、テーブル駆動時にお
けるテーブルの蛇行も防止することができる。In addition, horizontal support surfaces 11 and 12 serve to support the weight of the table.
Since the lateral guide surfaces 13 and 14 are provided symmetrically with respect to the center of the feed screw 19, it is possible to prevent the table from meandering when the table is driven.
前記静圧ポケット17には、ダイヤフラムを内蔵する可
変絞り弁にて制御される絞り抵抗を介して圧力流体が供
給され、金属接触のない状態までテーブル15を浮上さ
せて支持するので、大重量のワークが載置されてもテー
ブルの摺動抵抗は非當に小さく、送り駆動系における負
荷を小さくすることができる。又テーブルに作用する重
量変化は案内面の隙間変化をもたらしポケット圧が変わ
るのでこのポケット圧変化により可変絞り弁が制御され
、隙間変化を補償するように絞り抵抗を調整し、隙間変
化があたかも生じないような極めて高剛性の案内作用を
なす。Pressure fluid is supplied to the static pressure pocket 17 via a throttle resistance controlled by a variable throttle valve with a built-in diaphragm, and the table 15 is floated and supported to the point where there is no metal contact. Even when a workpiece is placed, the sliding resistance of the table is extremely small, and the load on the feed drive system can be reduced. Also, a change in the weight acting on the table causes a change in the gap on the guide surface, which changes the pocket pressure.The variable throttle valve is controlled by this change in pocket pressure, and the throttle resistance is adjusted to compensate for the change in the gap. It provides an extremely rigid guiding action that is unlike any other.
〈発明の効果〉
以上述べたように本発明においては、重量支持作用をな
す水平支持面に対してはテーブルを静圧支持するととも
に重力作用方向と平行な横方向案内面にてテーブルを横
方向に案内し、適当な摩擦力を付与するようにしたので
、送り駆動系の負荷を増すことなく送り方向の動剛性を
高めることができる。<Effects of the Invention> As described above, in the present invention, the table is supported by static pressure on the horizontal support surface that supports the weight, and the table is supported in the lateral direction by the lateral guide surface parallel to the direction of gravity. Since the material is guided by the material and an appropriate frictional force is applied, the dynamic rigidity in the feeding direction can be increased without increasing the load on the feeding drive system.
又、静圧ポケットにはダイヤフラム式の可変絞り弁を介
して圧力流体が供給され、圧力補償作用を助長するよう
にしたので、極めて高い静圧支持剛性が得られ、重量変
化に対するテーブルの上下変位はほとんど生じない。In addition, pressure fluid is supplied to the static pressure pocket via a diaphragm-type variable throttle valve to promote pressure compensation, resulting in extremely high static pressure support rigidity, which prevents vertical displacement of the table due to weight changes. rarely occurs.
更に送りねじに対し水平支持面、横方向案内面を対称的
に配置したので、テーブルの蛇行は効果的に防止される
。Furthermore, since the horizontal support surface and the lateral guide surface are arranged symmetrically with respect to the feed screw, meandering of the table is effectively prevented.
第1図は従来装置を示す断面図、第2図は本発明の実施
例を示す断面図、第3図は平面図に油圧回路を併記した
図、第4図は可変絞り弁の縦断面図、第5図は横方向案
内面における面圧付与手段を示す平面図、第6図、第7
図、第8図は楔状部材の位置調整機構を示すもので、第
6図は第8図におりるVl −Vl矢視断面図、第7図
は第8図における■−■矢視断面図である。
10・・・ベッド、11.12・・・水平支持面、13
.14・・・横方向案内面、15・・・テーブル、17
・・・静圧ポケット、18・・・可変絞り弁、21・・
・ダイヤフラム、22,23・・・弁ハウジング、24
・・・シート部相、25・・・スプリング、26・・・
ノズル、40・・・楔状部材、41・・・平行部材、4
3・・・引張りボルト、44・・・押しポルト。
特許出願人
豊田工機株式会社
第1図
第4図Fig. 1 is a sectional view showing a conventional device, Fig. 2 is a sectional view showing an embodiment of the present invention, Fig. 3 is a plan view showing a hydraulic circuit, and Fig. 4 is a longitudinal sectional view of a variable throttle valve. , FIG. 5 is a plan view showing surface pressure applying means on the lateral guide surface, FIGS. 6 and 7.
8 shows the position adjustment mechanism of the wedge-shaped member, FIG. 6 is a sectional view taken along the line Vl--Vl in FIG. 8, and FIG. 7 is a sectional view taken along the line ■-■ in FIG. 8. It is. 10...Bed, 11.12...Horizontal support surface, 13
.. 14... Lateral guide surface, 15... Table, 17
...Static pressure pocket, 18...Variable throttle valve, 21...
・Diaphragm, 22, 23... Valve housing, 24
... Seat part, 25... Spring, 26...
Nozzle, 40... Wedge-shaped member, 41... Parallel member, 4
3...Tension bolt, 44...Push port. Patent Applicant: Toyota Machine Machinery Co., Ltd. Figure 1 Figure 4
Claims (4)
は、送りねじを中心にしてその両側に、重量支持作用を
なす一対の水平支持面を外側に配置するとともに送りね
じ方向案内作用をなす重力作用方向と平行な一対の横方
向案内面を内側に配置してそれぞれ対称的に設け、前記
水平支持面にて受承されるテーブル下面には静圧ポケッ
トを形成し、この静圧ポケットには絞りを介して圧力流
体を供給する流体供給手段を接続し、前記横方向案内面
に摺接する案内部祠を前記テーブル下面に突設し1、こ
の案内部材と前記横方向案内面間に面圧付与手段を設け
たことを特徴とする大重量可動台の案内装置。(1) On the bed that supports the feed screw for feeding the movable table, a pair of horizontal support surfaces that support the weight are placed on the outside on both sides of the feed screw, and the feed screw has a direction guiding function. A pair of lateral guide surfaces parallel to the direction of gravitational force are arranged symmetrically on the inside, and a static pressure pocket is formed on the lower surface of the table that is received by the horizontal support surface. A fluid supply means for supplying pressurized fluid through a throttle is connected to the 1, and a guide part protruding from the lower surface of the table that comes into sliding contact with the lateral guide surface 1, and between the guide member and the lateral guide surface. A guide device for a heavy movable platform, characterized in that it is provided with surface pressure applying means.
変化に応じて絞り抵抗を増減せしめる可変絞り弁を有す
る特許請求の範囲第1項記載の大重量可動台の案内装置
。(2) The guide device for a heavy movable platform according to claim 1, wherein the fluid supply means includes a variable throttle valve that increases or decreases the throttle resistance according to changes in the pressure inside the static pressure pocket.
形可能なダイヤフラムと、このダイヤフラムの静圧ポケ
ット圧導入側−側面に近接して配置され圧力流体供給源
に連通されダイヤフラムの変形により絞り抵抗の変化す
るノズルとを有してなる特許請求の範囲第2項記載の大
重量可動台の案内装置。(3) The variable throttle valve includes a diaphragm that can be deformed in response to static pressure pocket pressure, and a diaphragm that is disposed close to the static pocket pressure introduction side of the diaphragm and communicated with a pressure fluid supply source to deform the diaphragm. 3. A guide device for a heavy movable platform according to claim 2, further comprising a nozzle whose aperture resistance changes depending on the size of the nozzle.
案内面間に介挿せしめた楔状部材と、この楔状部材を相
対的に移動調整する調整手段とを有してなる特許請求の
範囲第1項記載の大重量可動台の案内装置。(4) The surface pressure applying means includes a wedge-shaped member inserted between the guide member and the lateral guide surface, and an adjusting means for adjusting the relative movement of the wedge-shaped member. A guide device for a heavy movable platform as described in Scope 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21583283A JPS60108240A (en) | 1983-11-16 | 1983-11-16 | Guide device of heavy weight movable bench |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21583283A JPS60108240A (en) | 1983-11-16 | 1983-11-16 | Guide device of heavy weight movable bench |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60108240A true JPS60108240A (en) | 1985-06-13 |
Family
ID=16678997
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21583283A Pending JPS60108240A (en) | 1983-11-16 | 1983-11-16 | Guide device of heavy weight movable bench |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60108240A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100378665B1 (en) * | 2000-07-13 | 2003-03-31 | 위아 주식회사 | a gib inserting structure for a lathe table |
JP2015230022A (en) * | 2014-06-04 | 2015-12-21 | 株式会社ジェイテクト | Flow rate control mechanism and fluid bearing device including the same |
JP2017060999A (en) * | 2015-09-24 | 2017-03-30 | 三井精機工業株式会社 | Movable body support device in machine tool |
JP2019214089A (en) * | 2018-06-12 | 2019-12-19 | 東芝機械株式会社 | Guide mechanism of machine tool, machine tool and guide member of machine tool |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54126850A (en) * | 1978-03-27 | 1979-10-02 | Makino Milling Machine | Machine equipped with load compensation guide face |
-
1983
- 1983-11-16 JP JP21583283A patent/JPS60108240A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54126850A (en) * | 1978-03-27 | 1979-10-02 | Makino Milling Machine | Machine equipped with load compensation guide face |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100378665B1 (en) * | 2000-07-13 | 2003-03-31 | 위아 주식회사 | a gib inserting structure for a lathe table |
JP2015230022A (en) * | 2014-06-04 | 2015-12-21 | 株式会社ジェイテクト | Flow rate control mechanism and fluid bearing device including the same |
JP2017060999A (en) * | 2015-09-24 | 2017-03-30 | 三井精機工業株式会社 | Movable body support device in machine tool |
JP2019214089A (en) * | 2018-06-12 | 2019-12-19 | 東芝機械株式会社 | Guide mechanism of machine tool, machine tool and guide member of machine tool |
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