JPS60102869U - 荷電粒子ビ−ム用スリツト - Google Patents

荷電粒子ビ−ム用スリツト

Info

Publication number
JPS60102869U
JPS60102869U JP19595783U JP19595783U JPS60102869U JP S60102869 U JPS60102869 U JP S60102869U JP 19595783 U JP19595783 U JP 19595783U JP 19595783 U JP19595783 U JP 19595783U JP S60102869 U JPS60102869 U JP S60102869U
Authority
JP
Japan
Prior art keywords
slit
duct
charged particle
particle beam
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19595783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235166Y2 (OSRAM
Inventor
南條　繁治
Original Assignee
日新ハイボルテ−ジ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテ−ジ株式会社 filed Critical 日新ハイボルテ−ジ株式会社
Priority to JP19595783U priority Critical patent/JPS60102869U/ja
Publication of JPS60102869U publication Critical patent/JPS60102869U/ja
Application granted granted Critical
Publication of JPH0235166Y2 publication Critical patent/JPH0235166Y2/ja
Granted legal-status Critical Current

Links

JP19595783U 1983-12-19 1983-12-19 荷電粒子ビ−ム用スリツト Granted JPS60102869U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19595783U JPS60102869U (ja) 1983-12-19 1983-12-19 荷電粒子ビ−ム用スリツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19595783U JPS60102869U (ja) 1983-12-19 1983-12-19 荷電粒子ビ−ム用スリツト

Publications (2)

Publication Number Publication Date
JPS60102869U true JPS60102869U (ja) 1985-07-13
JPH0235166Y2 JPH0235166Y2 (OSRAM) 1990-09-21

Family

ID=30420646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19595783U Granted JPS60102869U (ja) 1983-12-19 1983-12-19 荷電粒子ビ−ム用スリツト

Country Status (1)

Country Link
JP (1) JPS60102869U (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118652U (ja) * 1982-02-06 1983-08-12 日本電子株式会社 可変スリツト装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118652U (ja) * 1982-02-06 1983-08-12 日本電子株式会社 可変スリツト装置

Also Published As

Publication number Publication date
JPH0235166Y2 (OSRAM) 1990-09-21

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