JPS60102577A - Ultrasonic transmitter receiver - Google Patents

Ultrasonic transmitter receiver

Info

Publication number
JPS60102577A
JPS60102577A JP21010783A JP21010783A JPS60102577A JP S60102577 A JPS60102577 A JP S60102577A JP 21010783 A JP21010783 A JP 21010783A JP 21010783 A JP21010783 A JP 21010783A JP S60102577 A JPS60102577 A JP S60102577A
Authority
JP
Japan
Prior art keywords
ultrasonic
air
acoustic matching
acoustic
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21010783A
Other languages
Japanese (ja)
Other versions
JPH0374797B2 (en
Inventor
Tsutomu Yano
屋野 勉
Masayuki Tone
利根 昌幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21010783A priority Critical patent/JPS60102577A/en
Publication of JPS60102577A publication Critical patent/JPS60102577A/en
Publication of JPH0374797B2 publication Critical patent/JPH0374797B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521Constructional features

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Abstract

PURPOSE:To attain to enhance the accuracy in distance measurement and ultrasonic image pick-up by eliminating air fluctuation caused by high speed scanning of ultrasonic beam, by providing an acoustic matching body. CONSTITUTION:The ultrasonic signal 4 emitted from a piezoelectric vibrator 1 is effectively passed through an ultrasonic wave propagating medium 6 such as water or an inert fluorine contained liquid such as silicone oil by the first acoustic matching body 5 provided to the front surface of the vibrator 1 and subsequently passed through the acoustic window 8 provided to the front surface of an ultrasonic cell 7 and efficiently emitted into air by the second acoustic matching body 9 provided to the front surface of the window to be converted to an ultrasonic signal 11. This signal 11 is reflected from an object 12 and received by the vibrator 1 through the same propagating route. Because the vibrator 1 is blocked from air 10 at this time, no air fluctuation is generated even if high speed scanning is performed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は超音波距離計測装置などに用いる超音波送受波
器に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultrasonic transducer used in an ultrasonic distance measuring device or the like.

従来例の構成とその問題点 従来の空中における超音波距離計測装置において使用さ
れている周波数は20kHzから1ookHz程度の周
波数であり、超音波波長が比較的長いことや、外米雑音
レベルも高いことによって高精度の距離1測や10cm
以下の近距離の距離言4測を行うことが困難であった。
Configuration of conventional examples and their problems The frequencies used in conventional aerial ultrasonic distance measuring devices are approximately 20 kHz to 1 kHz, which means that the ultrasonic wavelength is relatively long and the noise level is high. Highly accurate distance measurement of 1 or 10 cm
It was difficult to perform the following short-distance measurements.

このため、数6曲から1朧程度の超#波周波数を送受信
できる超音波送受波器を用いる試みもなされている。こ
の1石程度の超音波送受波器を距離計測装置などに用い
る場合は、風や温度変化などによる空気のゆらぎによっ
て超昌波の送受信信号に大きな変動が生じ、測定精度の
劣化を生じる。特に超音波送受波器を扇形走査し、広範
囲の測定を行う場合、超音波送受波器の回転などによっ
て生じる空気のゆらぎが問題となる。
For this reason, attempts have been made to use an ultrasonic transducer that can transmit and receive an ultra-high frequency of approximately 1 halo from several six songs. When this one-stone ultrasonic transducer is used in a distance measuring device or the like, fluctuations in the air due to wind, temperature changes, etc. cause large fluctuations in the ultrasonic wave transmission and reception signals, resulting in a deterioration in measurement accuracy. Particularly when performing fan-shaped scanning with an ultrasonic transducer to measure a wide range, air fluctuations caused by rotation of the ultrasonic transducer become a problem.

更に、従来の超音波送受波器では、その構成が第1図に
示されるが如く圧電振動子1と、その前面に設けられた
汁響祭合体2と、後面に設けられれた背面負荷3からな
っている。音響整合体2に用いられる材料の特性はよく
知られているように圧14i振動子1と空気のそれぞれ
の音響インピーダンスの匝の積の1層2乗に近い値が望
1しく、従って圧電振動子1として一般的な圧電セラミ
ック材を用いると音響整合体2に適した音響インピーダ
ンスとして0,1〜I X 106に2層m’・Sが該
当する。しかし、これらの範囲を使ったとしても圧電振
動子1と空気の琶響インピーダンス差が略105:1と
極めて大きいため超音波送受波器の周波数帯域特性は狭
く、応答特性が悪くなる欠点がある。
Furthermore, in the conventional ultrasonic transducer, as shown in FIG. It has become. As is well known, the characteristics of the material used for the acoustic matching body 2 are preferably close to the square of the product of the acoustic impedances of the pressure 14i vibrator 1 and the air, and therefore the piezoelectric vibration When a general piezoelectric ceramic material is used as the element 1, the acoustic impedance suitable for the acoustic matching body 2 corresponds to two layers m'·S of 0.1 to I.times.106. However, even if these ranges are used, the difference in acoustic impedance between the piezoelectric vibrator 1 and the air is extremely large, approximately 105:1, so the frequency band characteristics of the ultrasonic transducer are narrow and the response characteristics are poor. .

一方、医用超音波送受波器においては数ルの超音波を送
受信する圧電振動子を超音波セル内で機械的に高速に扇
形走査し5超音波断層隊を得る方式もよく知られている
。しかじながら、この場合の超質波の被伝播体は人体で
あり、この1ま空気中VC超音波を出すと極めて感度の
低いものとなり使用困難となる。
On the other hand, in a medical ultrasonic transducer, a method is well known in which a piezoelectric vibrator that transmits and receives several ultrasonic waves is mechanically scanned in a fan shape at high speed within an ultrasonic cell to obtain five ultrasonic tomograms. However, in this case, the object to which the ultrasonic waves propagate is the human body, and if VC ultrasonic waves are emitted in the air, the sensitivity will be extremely low and it will be difficult to use.

発明の目的 本発明は、以上のような従来の問題点を解決するだめに
なされたもので5空中用として高速に超音波ビームを走
査しても空気のゆらぎが極めて少なく、しかも1石程度
の超音波周仮数帯でも十分動作でき、超皆阪距離計測装
置や超音波撮像装置などに用いることのできる効率のよ
い超音波送受波器全提供するものである。
Purpose of the Invention The present invention has been made to solve the conventional problems as described above. The present invention provides an efficient ultrasonic transducer that can operate satisfactorily in the ultrasonic mantissa band and can be used in ultrasonic distance measuring devices, ultrasonic imaging devices, and the like.

発明の構成 この目的を達成するために本発明は圧電振動子と、 I
]E電振励振動子音波伝播媒体である液体との間の音響
的整合を司り、圧電振動子の1iJ曲に設けられた第1
の音響整合体とを内蔵した超音波セルと、その超音波セ
ルの前面に設けられた音響窓とそのO1J而に空気中に
効率よく超音波を送受信するだめの第2の音響整合体と
金備えた超音波送受波?+M (j:’ 4iE供する
もので、かかる構成によって、高速に超昌彼ビームを走
査しても空気のゆらき全土じることもなく、かつ、超音
波の損失を極めて少なくし、高周波領域でも十分距離唱
測を行いつるものである。
Structure of the Invention In order to achieve this object, the present invention includes a piezoelectric vibrator, I
] E-electrical vibration excitation vibrator The first element provided in the 1iJ curve of the piezoelectric vibrator controls the acoustic matching with the liquid which is the sound wave propagation medium.
an ultrasonic cell with a built-in acoustic matching body; an acoustic window provided in front of the ultrasonic cell; a second acoustic matching body for efficiently transmitting and receiving ultrasonic waves into the air; Equipped with ultrasonic transmission and reception? +M (j:' 4iE is provided. With this configuration, even if the ultrasonic beam is scanned at high speed, there will be no air fluctuations and the loss of ultrasonic waves will be extremely small, and even in the high frequency range. It is possible to measure distances sufficiently.

実施例の説明 以下に本発明の実施例を図面を用いて説明する。Description of examples Embodiments of the present invention will be described below with reference to the drawings.

第2図は本発明の一実施例における超音波送受波器を示
す断面図である。同図において、圧電セラミックなどか
らなる圧電振動子1から放射される数6kll+の超音
波信号4は、圧電振動子1の前面に設けられた第1の音
響整合体5(例えばタングステンエポキシからなる1層
構造、或いバカラスとエポキシからなる2層構造)によ
って効率的に水或いは、シリコーンオイルなどのような
オイル類、或いはダイフロイルやフロリナート(商品名
)などのフッ素不活性液体のような液体からなる超)−
1波伝播媒体6全通過し、ポリエチレン或いはジメチル
ペンテンなどからなる超音波セルフの音響窓8を通過し
、音響窓8の前面に設けた第2の音響整合体91tlえ
ば、シリコーンゴム膜やプラスチック中空球体入りシリ
コーンゴム膜からなる1層til造、或いは音響インピ
ーダンスの異なる2層の中空球体入りシリコーンゴム又
はエポキシ樹脂からなる2層構造)によって効率よく空
気中10に放射された超音波信号11は対象物12で反
射し、再び同じ伝播経路を通って圧電振動子1で受信さ
れ、図示していない信号処理系によって距離=t nt
tlや超音波+@を家に供される。1だ、圧電振動子1
が扇形走査を行う場合には回転系や往復振動系の先端に
取付けられ、高速走査が可能になっている。ここで回転
系の走査を行う場合には、走査機(71713内に設け
られたモータ14より、ベルト16を介して圧電振動子
1側に設けたプーリ16を回転さぜ、圧電振動子1を回
転させる。ここで、3は背面負荷、17は回転中心であ
り、18は超音波セルフ内の不要な超#彼信号を吸収す
る吸音体であり、音響窓8以外の部分に設けられている
FIG. 2 is a sectional view showing an ultrasonic transducer according to an embodiment of the present invention. In the figure, an ultrasonic signal 4 of several 6kll+ emitted from a piezoelectric vibrator 1 made of piezoelectric ceramic or the like is transmitted to a first acoustic matching body 5 (for example, a first acoustic matching body 5 made of tungsten epoxy A layered structure (or a two-layered structure consisting of Bacara and epoxy) efficiently absorbs water, oils such as silicone oil, or liquids such as fluorinated inert liquids such as Dyfloil and Fluorinert (trade name). super)−
The entire one-wave propagation medium 6 passes through the ultrasonic self-acoustic window 8 made of polyethylene or dimethylpentene, and the second acoustic matching body 91tl provided in front of the acoustic window 8 is made of silicone rubber membrane or plastic hollow. The ultrasonic signal 11 efficiently radiated into the air 10 by a single-layer tiled structure made of a silicone rubber membrane filled with spheres, or a two-layered structure made of two layers of silicone rubber or epoxy resin filled with hollow spheres with different acoustic impedances is the target. It is reflected by the object 12, passes through the same propagation path again, is received by the piezoelectric vibrator 1, and is determined by a signal processing system (not shown) at a distance = t nt
TL and ultrasound +@ are provided at home. 1, piezoelectric vibrator 1
When performing fan-shaped scanning, it is attached to the tip of a rotating system or reciprocating vibration system, making high-speed scanning possible. When scanning the rotation system here, the motor 14 provided in the scanner (71713) rotates the pulley 16 provided on the piezoelectric vibrator 1 side via the belt 16, and the piezoelectric vibrator 1 is rotated. Rotate.Here, 3 is the back load, 17 is the rotation center, and 18 is a sound absorber that absorbs unnecessary ultrasonic signals in the ultrasonic self, and is provided in the part other than the acoustic window 8. .

以上のような超音波送受波器を使用すると、田′1iJ
、振動子1は空気中10とはしゃ断された超音波セルフ
内で高速に走査され、また第1と第2の音# a!合体
5と9によって、それぞれ圧電振動子1と液体の超音波
伝播媒体6の間、超音波伝播媒体6と空気10との間の
音響整合を図っている。
When using the above-mentioned ultrasonic transducer,
, the transducer 1 is scanned at high speed within the ultrasonic self which is cut off from the air 10, and the first and second sounds #a! The combinations 5 and 9 provide acoustic matching between the piezoelectric vibrator 1 and the liquid ultrasonic propagation medium 6, and between the ultrasonic propagation medium 6 and air 10, respectively.

以上のように本実施列によれば、圧電振動子1は空気中
10とはしゃ断されているため、走査機構13によって
商運に機械定食されても空気のゆらぎは生じない。即ち
、数百匪以上の超音波信号を空気中に送受信しても比較
的安定に距離計測などが実行できる。
As described above, according to this embodiment, the piezoelectric vibrator 1 is isolated from the air 10, so even if the piezoelectric vibrator 1 is mechanically fed by the scanning mechanism 13, no air fluctuation occurs. In other words, distance measurement can be performed relatively stably even when ultrasonic signals of several hundred yen or more are transmitted and received in the air.

徒だ、第1及び第2の音響整合体5と9は超音波伝播媒
体6の桐材を選択することによって、入手しやすい整合
層(A料で構成でき、感度や周波数帯域特性を向上させ
、空気中に効率よく超音eを送受信できる。
By selecting paulownia wood for the ultrasonic propagation medium 6, the first and second acoustic matching bodies 5 and 9 can be constructed from an easily available matching layer (A material), improving sensitivity and frequency band characteristics. , it is possible to efficiently transmit and receive ultrasonic waves in the air.

なお、圧電振動子1の形状は通常よく知られているよう
にフォーカスを行うために凹面振動子或いは平&撮動子
に音響レンズをつけてもよい。また超音波セルの形状も
円筒形に限定されない。
Note that the shape of the piezoelectric vibrator 1 may be a concave vibrator or a flat & camera element with an acoustic lens attached thereto for focusing, as is generally well known. Further, the shape of the ultrasonic cell is not limited to a cylindrical shape either.

第3図は本発明の他の実施例を示す断面図である。超盲
彼送受欧器は隣接して配列され、電子的に走査される圧
電振動素子群19と5その前面に先の実施例と同様に設
けられた第1の音響整合体20と、超音波伝播媒体21
を満した超音波セル22とそのni1面に設けだ音響窓
23と、更にそのfjiJ 1fjlに設けた第2の音
響整合体24及び周囲の吸音体25.背面の吸音体26
から構成されている。
FIG. 3 is a sectional view showing another embodiment of the present invention. The ultra-blind transmitter/receiver has piezoelectric vibrating elements 19 and 5 which are arranged adjacent to each other and which are scanned electronically, and a first acoustic matching body 20 provided in front thereof in the same way as in the previous embodiment, and an ultrasonic wave Propagation medium 21
an acoustic window 23 provided on its ni1 surface, a second acoustic matching body 24 provided on its fjiJ 1fjl, and a surrounding sound absorbing body 25. Sound absorber 26 on the back
It consists of

このような超音波送受波器では圧電振動子群19を順次
電子的に切り替えて送受信することにより、機械的な定
歪によらないために振動による歪みや、耐久性のfli
ll限などが緩和される。更に、圧電振動素子群・19
と′MA音波伝播媒体21の間の音響インピーダンスの
比は略(10〜30):1であり第1の音響整合体20
によって広帯域周波数特性が得られる。更に第2の音響
整合体24に係る超音波伝播媒体21と音響窓23及び
空気27との間の音響インピーダンス比は超音波伝播媒
体21と音響窓23をほぼ同じ値を有するもの列えは、
水と軟質ポリエチレンなど全組合ぜた場合、略3X10
3:1とな9、これは従来の構造における比(105:
1)と比較して極めて小さくなり、音響整合粂件も得や
すく、広帯域特性が得ら扛ることになる。このことはパ
ルス応答性の向上につながり、短い超音波パルス信号の
送受信が可能となり、超音波距離計測の精度向上につな
がる。
In such an ultrasonic transducer, the piezoelectric vibrator group 19 is sequentially switched electronically for transmission and reception, so that distortion due to vibration and durability are reduced because it does not depend on mechanical constant strain.
ll restrictions etc. will be relaxed. Furthermore, piezoelectric vibrating element group 19
The ratio of the acoustic impedance between the and 'MA sound wave propagation medium 21 is approximately (10 to 30):1, and the first acoustic matching body 20
Broadband frequency characteristics can be obtained by Furthermore, the acoustic impedance ratio between the ultrasonic propagation medium 21, the acoustic window 23, and the air 27 in the second acoustic matching body 24 is as follows:
When all combinations such as water and soft polyethylene are combined, approximately 3X10
3:1, which is the ratio in the conventional structure (105:
Compared to 1), it is extremely small, it is easier to obtain acoustic matching, and it is possible to obtain broadband characteristics. This leads to an improvement in pulse responsiveness, making it possible to transmit and receive short ultrasonic pulse signals, and leading to improved accuracy in ultrasonic distance measurement.

発明の効果 以上安するに本発明は超音波伝播媒体を満たした超I波
セル内に設置された圧電振動子と、前記圧電振動子の前
面に設けられた第1の音響整合体と、+iiJ記超昌彼
セルに設けられた超音波信号を進退させる音響窓と、前
記音響窓の外面に設けられた第2の音響整合体とを具備
することを特徴とする超ff1Ji送受波器を提供する
もので、圧電振動子が空気としゃ断されているため、高
速に機械走査を行っても空気のゆらぎが生ぜず5更に2
種類の音響整合体によって効率よく超音波を空気中に放
射できるために超音波距離1測、或いは超皆波撮1象用
l・ランスジューサとして使用した場合の精度向上が図
れるγi・の利点に/I’にする。
More than the effects of the invention, the present invention includes a piezoelectric vibrator installed in an ultra-I wave cell filled with an ultrasonic propagation medium, a first acoustic matching body provided in front of the piezoelectric vibrator, Provides an ultra ff1Ji transducer characterized by comprising an acoustic window provided in a cell for advancing and retracting ultrasonic signals, and a second acoustic matching body provided on the outer surface of the acoustic window. Since the piezoelectric vibrator is isolated from the air, there is no air fluctuation even during high-speed mechanical scanning.
The advantage of γi is that it can efficiently radiate ultrasonic waves into the air using different types of acoustic matching bodies, which improves accuracy when used as a transducer for ultrasonic distance measurement or ultratotal wave imaging for one image. /I'.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の仝中用超汁波送受波器を示す断面図、第
2図は本発明の一実施例による空中用の超音波送受V器
の断面図、第3図は回能の実施例における同断面図であ
る。 1・・・・・・圧電振動子、5,20・・・・第1の音
響整合体、6,21・・・・超音波伝播媒体、7,22
・・・・・・超音波セル、8・・・・・音響窓、9,2
4・・・・・第2の音響整合体、13・・・・・・走査
機構、14・・・ モータ、16・・・・・・ベルト、
19・・・・・・圧電振動素子群。
Fig. 1 is a sectional view showing a conventional ultrasonic wave transducer for airborne use, Fig. 2 is a sectional view of an ultrasonic transducer for aerial use according to an embodiment of the present invention, and Fig. 3 is a sectional view of an ultrasonic wave transducer for use in the air according to an embodiment of the present invention. It is the same sectional view in an Example. 1... Piezoelectric vibrator, 5, 20... First acoustic matching body, 6, 21... Ultrasonic propagation medium, 7, 22
... Ultrasonic cell, 8 ... Acoustic window, 9,2
4...Second acoustic matching body, 13...Scanning mechanism, 14...Motor, 16...Belt,
19...Piezoelectric vibrating element group.

Claims (3)

【特許請求の範囲】[Claims] (1)超行波伝播媒体を満たした超音波セル内に設置さ
れた圧電振動子と5前記圧電振動子の前面に設けられた
第1の廿響整合体と、前記超音波セルに設けられた超音
波信号を通過させる音響窓と、前記音響窓の外面に設け
られた第2の音響整合体とを具備することを特徴とする
超音波送受波器。
(1) a piezoelectric vibrator installed in an ultrasonic cell filled with an ultrasonic wave propagation medium; 5. a first acoustic matching body provided in front of the piezoelectric vibrator; 1. An ultrasonic transducer comprising: an acoustic window through which an ultrasonic signal passes; and a second acoustic matching body provided on an outer surface of the acoustic window.
(2)圧7L振動子が超音波セル内で機械的に回転又は
揺動定食されることを特徴とする特許請求の範囲第1項
Bt載の超音波送受波器。・
(2) The ultrasonic transducer according to claim 1, wherein the pressure 7L transducer is mechanically rotated or oscillated within the ultrasonic cell.・
(3)圧電振動子が複数個の圧電振動素子群よりなり、
前記圧電振動素子群が電子的に走査されることを特徴と
する特許請求の範囲第1項記載の超音波送受波器。
(3) The piezoelectric vibrator is composed of a group of multiple piezoelectric vibrating elements,
2. The ultrasonic transducer according to claim 1, wherein said piezoelectric vibrating element group is electronically scanned.
JP21010783A 1983-11-09 1983-11-09 Ultrasonic transmitter receiver Granted JPS60102577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21010783A JPS60102577A (en) 1983-11-09 1983-11-09 Ultrasonic transmitter receiver

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21010783A JPS60102577A (en) 1983-11-09 1983-11-09 Ultrasonic transmitter receiver

Publications (2)

Publication Number Publication Date
JPS60102577A true JPS60102577A (en) 1985-06-06
JPH0374797B2 JPH0374797B2 (en) 1991-11-28

Family

ID=16583923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21010783A Granted JPS60102577A (en) 1983-11-09 1983-11-09 Ultrasonic transmitter receiver

Country Status (1)

Country Link
JP (1) JPS60102577A (en)

Also Published As

Publication number Publication date
JPH0374797B2 (en) 1991-11-28

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