JPS5998165U - 高真空ゲ−トバルブ - Google Patents

高真空ゲ−トバルブ

Info

Publication number
JPS5998165U
JPS5998165U JP19317282U JP19317282U JPS5998165U JP S5998165 U JPS5998165 U JP S5998165U JP 19317282 U JP19317282 U JP 19317282U JP 19317282 U JP19317282 U JP 19317282U JP S5998165 U JPS5998165 U JP S5998165U
Authority
JP
Japan
Prior art keywords
valve
vacuum gate
gate valve
high vacuum
desk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19317282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145419Y2 (enExample
Inventor
一男 伊藤
川内　与一
Original Assignee
株式会社岸川特殊バルブ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社岸川特殊バルブ filed Critical 株式会社岸川特殊バルブ
Priority to JP19317282U priority Critical patent/JPS5998165U/ja
Publication of JPS5998165U publication Critical patent/JPS5998165U/ja
Application granted granted Critical
Publication of JPS6145419Y2 publication Critical patent/JPS6145419Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
JP19317282U 1982-12-22 1982-12-22 高真空ゲ−トバルブ Granted JPS5998165U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19317282U JPS5998165U (ja) 1982-12-22 1982-12-22 高真空ゲ−トバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19317282U JPS5998165U (ja) 1982-12-22 1982-12-22 高真空ゲ−トバルブ

Publications (2)

Publication Number Publication Date
JPS5998165U true JPS5998165U (ja) 1984-07-03
JPS6145419Y2 JPS6145419Y2 (enExample) 1986-12-20

Family

ID=30415532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19317282U Granted JPS5998165U (ja) 1982-12-22 1982-12-22 高真空ゲ−トバルブ

Country Status (1)

Country Link
JP (1) JPS5998165U (enExample)

Also Published As

Publication number Publication date
JPS6145419Y2 (enExample) 1986-12-20

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