JPS5996881A - Motor device utilizing supersonic vibration - Google Patents

Abstract

PURPOSE:To obtain a strong motor device which has small size and light weight by associating an electrostrictive or magnetostrictive element in an elastic unit, and rotatably or linearly moving a movable unit by surface wave excited on the surface. CONSTITUTION:The node part of a cylindrical bendable vibrator 12 is supported by a supporting member 12 in a casing body 11. A taper 13a is provided on the outer peripheral surface at the center of the vibrator 13, and the one end side of the inner peripheral surface of the rotor 14 is pressurized and contacted as a movable unit on the surface. The rotor 14 is axially movably supported to the rotational shaft 15, and the rotary force is transmitted through a pressure regulating mechanism 16 to the shaft 15. This vibrator 13 is associated with a plurality of electrostrictive or magnetostrictive elements 18, 19, and which are associated with the elastic unit. A surface wave which is produced by combining the lateral wave and the longitudinal wave is generated on the surface of the taper 13a, and the rotor 14 is driven in a direction.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a motor device characterized in that it converts a traveling wave excited on the surface of an ultrasonic transducer into a unidirectional motion of moving objects placed in pressure contact with each other. It is something.

Most of the various motor devices that have been widely used in the past utilize electromagnetic force as their driving source, and are used for various purposes. However, the size, weight, rotational force (torque), etc. of these devices are subject to certain limitations depending on the materials used. This is because the above-mentioned factors are determined by the magnetic properties of the materials used, and devices exceeding these properties cannot be rotated.

On the other hand, as an alternative to the various motor devices mentioned above, the present applicant has proposed a motor device using ultrasonic vibration (Japanese Patent Application No. 54-61955, Japanese Patent Application No. 55-40656, Japanese Patent Application No. 55-152756). The technical content is that one end of a vibrating body vibrated by an ultrasonic vibrator and one end face of a moving body are placed in positions facing each other, and a plate-shaped or rod-shaped vibrating piece is interposed between the two. A device has been disclosed in which the reciprocating motion of an ultrasonic transducer is converted into unidirectional motion of a moving body by tilting the vibrating piece at an appropriate angle. With the above invention, the powerful vibrational energy of ultrasonic waves is converted into rotational or linear motion, resulting in a compact size)7
However, in the present application, the viewpoint is further changed from the above device, and the surface of an ultrasonic vibrator having an electrostrictive element or a magnetostrictive element incorporated in an elastic body is excited. The purpose of this invention is to provide a motor device that utilizes traveling waves.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The operating principle and embodiments of the motor device according to the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a partially enlarged perspective view for explaining the principle of operation. Reference numeral 1 designates an elastic body such as a metal, and the state in which a traveling wave, which is a combination of transverse vibration and longitudinal vibration, is formed on its surface 1a is shown in an enlarged manner. The traveling wave mentioned above is firstly a surface wave generally called a Rayleigh wave, and it has been theoretically elucidated that there are waves that propagate along the surface of an elastic body. Elastic waves in solids include longitudinal waves and transverse waves, each of which exists independently, but due to the boundary condition of the surface, they intertwine and are synthesized. To generate Rayleigh waves, it is sufficient to place a vibrator that vibrates vertically or horizontally on the substrate medium and strike the surface of the substrate. No matter how you strike, the surface wave component will be generated at a point far away from the vibration source. can be observed.

The second is a traveling wave caused by the bending vibration of a rod-shaped (plate-shaped) elastic body, and an elliptical vibration in which longitudinal waves and transverse waves are out of phase by 90 degrees is formed on the surface of the elastic body, and the rod-shaped (plate-shaped) elastic body propagates along. Sixth, it propagates along the rod-shaped (plate-shaped) elastic body.
It is a longitudinal wave, and a transverse wave appears on the surface of an elastic body due to Poisson's ratio. In this case as well, the surface of the elastic body forms elliptical vibrations in which longitudinal waves and transverse waves are out of phase by 90 degrees.

In the case of FIG. 1, the vibration source is not shown, and only the propagation state of Rayleigh waves is shown. That is, if we focus on the mass point B, it is moving in the direction of the arrow N on the inertia circle Q, which is a combination of the horizontal amplitude a (vertical direction) and the longitudinal amplitude (horizontal direction), and its traveling wave It is moving at the speed of tri sound U. This movement is the same at any point on the surface of the elastic body 1, and under this condition, when the surface of the free i-body 20 is pressed into contact with the surface of the elastic body 1, the moving body 2 moves to the surface of the elastic body 1. Contact occurs only at the vertices A and A' of the traveling wave of 1, and the vertices A and A' have a vibration velocity v = 2π4b
Since the free moving body 2 is moving in the direction of the arrow M at a frequency (where the child is the frequency), the free moving body 2 is driven in the direction of the arrow N by the frictional force with the elastic body 1.

The present invention relates to a motor device based on driving a moving object using the traveling wave described above, and embodiments thereof will be described below. FIG. 2 shows a partial cross-sectional view of the device] 7, in which reference numeral 11 is a casing body, inside which the node portion of the cylindrical bending vibrator 16 is supported by a support member 12, and the vibrator is A taper 13a is provided on the outer peripheral surface of the approximately central portion of the taper 16a.
The rotor 14 as a moving body is arranged so that one end side of the inner circumferential surface of the rotor 14 is in pressurized contact with the surface of the rotor 14 . The rotor 14 is supported movably in the axial direction relative to the rotating shaft 15, and rotational force is transmitted to the rotating shaft 15 via the pressure regulating mechanism 16. Additionally, pressure regulating mechanism 1
6 will be described in detail later with reference to FIG. 17 indicates a bearing.

The vibrator 16 has electrostrictive elements 18 and 19 incorporated in its midway portion, and serves as an excitation source for traveling waves. FIG. 6 shows a side view of the vibrator 16, and FIG.
-A cross section is shown.

In FIG. 6, electrostrictive elements 18 and 19 are configured to expand and contract in the axial direction as shown by arrows, and electrodes 20 are sandwiched between them. The arrangement of the electrostrictive element and the electrodes is as shown in FIG. 4, with electrode a on the diagonal.

b is connected and led to the terminal 21, and the electrode C1d is similarly connected and led to the terminal 22. The electrostrictive elements located at respective diagonal positions operate to expand and contract in opposite directions. That is, the electrostrictive elements 18-19 in contact with the electrode a are polarized so as to operate in the elongating direction, and the electrostrictive elements 18-19 in contact with the electrode bK are polarized so as to operate in the shortening direction. Further, the electrostrictive elements 18, 19 in contact with the electrode d are polarized so as to operate in the elongating direction, and the electrostrictive elements is, 19a in contact with the electrode C are polarized so as to operate in the shortening direction.

FIG. 5 is a sectional view showing an example of the pressure regulating mechanism 16. The figure shows an example of an automatic pressure adjustment mechanism, which includes a pair of special cams 23 and 24 with a V-formation between the rotating shaft 15 and the rotor 14, and a plurality of steel balls interposed between them. By providing 25, there is a steel ball at the bottom of the cam when there is no load, but
As the load is applied and the torque increases, the steel ball rides up the groove, creating axial pressure. Thereby, the torque of the rotor 14 is transmitted to the rotating shaft 15 side.

With the above configuration, when a high frequency voltage is applied between the vibrator 16 and the terminal 21 connected to the electrodes a and b shown in FIG. 4, the vibrator 16 causes a bending vibration as shown in FIG. 6. That is, in the first-order vibration state, point B in the center is the antinode of vibration, and points H and 2 are nodes of vibration. Next, when a high frequency voltage having a phase shift of 90° with respect to the voltage of the electrodes a and b is applied between the terminal 22 connected to the other electrodes c and d and the vibrator 16, the vibration at the point B is applied. A phase-shifted vibration Z (perpendicular to the plane of the paper) is induced in the vertical direction, so to speak, a longitudinal wave and a transverse wave are artificially created, and the composite wave becomes a rotating circular vibration.

7, the contact state between the vibrator central portion 16B1, that is, the antinode portion of the vibration, and the inner peripheral surface of the rotor 14 that circumscribes it is broken down into quarter cycles (A), (B), C1α))
It was shown to. That is, the inner peripheral surface 14a of the rotor 14 is the vibrator 16.
The contact point is in contact with the top of the side wave, and the contact point moves sequentially and goes around the inner circumferential surface 14a of the rotor 14 every cycle. The velocity of the mass at the apex is proportional to the amplitude of vibration, and is 0 to several m/
It is about sec. The reason why the vibration generated on the vibrator side due to the movement of the contact point is converted into rotational force on the rotor side will be described below. That is, when comparing the length of the inner circumferential surface 14a of the rotor 14 and the length of the outer circumferential surface 13B of the vibrator 16 inscribed therein, as is clear from the illustration, the former has a longer circumference, and therefore As shown in Fig. 7, when the contact points between the two move sequentially and the contact points go through one rotation, the rotor 14 side shifts by the difference between the two stations, which causes rotation and takes out the rotor 14. It will be done.

Further, by reversing the phase of the high frequency voltage applied to electrodes a, b or c, d, the entire rotational direction of the rotor can be switched.

FIG. 8 shows another embodiment of the present invention (a) - thin sectional view;
It is a cross-sectional view taken along line c' IA-A. According to this embodiment, a ring-shaped bending vibrator 66 supported by a support member 62 is disposed inside a casing body 61, and a taper 3 is formed on the inner peripheral surface of the ring-shaped bending vibrator 66.
38 is provided and arranged so that the outer circumferential surface of the rotor 64 comes into contact with it.

The rotor 34 is supported so as to be movable in the axial direction with respect to the rotating shaft 65, and has a pressure regulating mechanism 66 similar to the configuration shown in FIG.
is provided to transmit rotational force to the rotating shaft 65. 67 indicates an electrostrictive element □, and 68 indicates a bearing. In FIG. 8(B) (the cross section of the casing body 31 is omitted in the same figure), the ring-shaped bending vibrator 66 is made of an elastic body, and the electrostrictive elements 1 to 9 fixedly arranged on the outer periphery are respectively indicated by the arrows. The electrode "l bl C1d1e+
Provide f+g+h. Furthermore, electrodes a, b, and c.

d and lead it to the terminal 69, and similarly the electrode e.

Connect f, g, and h and lead them to the terminal 40. When a high frequency voltage is applied between the terminal 69 and the vibrator 66, and a high frequency voltage with a 90° phase shift is applied between the terminal 40 and the vibrator 36, the vibrator 66 is generating bimorph bending vibration. Ru. In this case, the bending frequency + is as follows: E: Young's modulus ♂: Poisson's ratio a: Radius of the center circle h: Thickness of the peripheral wall n: Order of bending vibration /': Density of the material In the above example, n
In the case of = 2, the contact state of the rotor 64 inscribed in the vibrator 66 is decomposed into every 1Z4 period according to FIG.
A)<B)(CJ Shown in (D).

The point where the two contact each other is the apex of the wave, and the apex makes half a revolution on the outer peripheral surface of the rotor 64 in one cycle of vibration, and the vibration generated on the vibrator 66 side by the movement of the contact point is transmitted to the rotor 64. The fact that it is transmitted as a rotational force on the side is the same as explained using the example shown in FIG.

FIG. 10 shows still another embodiment of the present invention, in which (a) is a partial cross-sectional view, and (b) is an electrode arrangement diagram of a piezoelectric body. According to this embodiment, the piezoelectric body 2 is excited by applying high frequency voltages of two circuits having a phase shift of 90° to each electrode a and b. The elastic ring 1 generates bimorph vibration, and a surface wave composed of a transverse wave and a longitudinal wave is formed on one end surface of the elastic ring 1, and the rotor 6, which is in pressure contact with the one end surface, is driven to rotate.

FIG. 10(b) shows the polarization direction of the piezoelectric body and the electrode arrangement.

The electrode pitch is set to 1/2 of the wavelength of the surface wave, and the polarization direction of the piezoelectric body is set to ee, *e, etc., as shown in the figure (b). (The positions of electrode groups A and B are shifted by 1/4 wavelength.) Each electrode is connected to form two circuits of terminals a and b. With the above configuration, when high frequency voltages with a phase shift of 90° are applied to terminals a and b, a traveling wave is formed on the surface of the elastic body.

FIG. 1i shows still another embodiment of the present invention, and shows an example of a linear motor that converts ultrasonic vibration into linear motion. In the figure, one or more elastic bodies 42 (, 12) are brought into pressure contact with the surface of a plate-like member 41, and a piezoelectric body 13 (43) is provided on a part of the surface of the elastic body 42. , generates a surface wave (Rayleigh wave) in the elastic body 42.

By forming the corner part 42a of the elastic body 42 into a curved shape, the surface waves propagate along the surface of the elastic body 42, and drive the plate member 41 to move in the direction of the arrow W.

In Fig. 1Z, the plate-like member 2 is brought into pressure contact with the surface of the rod-like elastic body 1, a plurality of piezoelectric bodies 6 are fixedly arranged on the other part of the rod-like elastic body 1, and the rod-like elastic body is bent into a curved shape. This is an example of a linear motor with an endless structure. With the above configuration, the rod-shaped elastic body causes bending vibration, and the waves propagate along the rod-shaped elastic body 1 and become traveling waves that circulate on the ring.

In FIG. 13, two rod-shaped elastic bodies 1 and 2 are fixed by a connector 6.4, a plate-shaped member 5 is brought into pressure contact with the surface of one of the rod-shaped elastic bodies 1, and one part of the other rod-shaped elastic body 2 is fixed. This is an example of a linear motor in which a plurality of piezoelectric bodies 6 are fixedly disposed at a portion thereof. With the above configuration, the rod-shaped elastic body 2 causes bending vibration by the piezoelectric body 6, and the traveling wave is coupled at the end of the rod-shaped elastic body 1.
6, and the longitudinal vibration is converted into a bending vibration of the rod-shaped elastic body 2, which becomes a traveling wave and propagates on the rod-shaped elastic body 2. This traveling wave passes through the connector 4 and returns.

FIG. 14 shows an example of a linear motor in which vibrators 2.degree. 6 are coupled to both ends of a rod-like elastic body 1, and a plate-like member 4 is pressed into contact with the surface of the rod-like elastic body.

With the above configuration, the rod-shaped elastic body 1 causes bending vibration by the vibrator 2, and the vibration energy of the traveling wave is absorbed by the vibrator 6. This vibrational energy is converted into electrical energy and recovered or fed back to the vibrator 2.

FIG. 19 shows the unidirectional surface wave generation method used in the above embodiment, in which a plurality of electrodes 44.
4... are arranged, and as shown in the figure, they are divided into six circuits and connected to the phase shifter 45.

The phase shifter 45 provides 0° and 120°24 to each circuit.
A unidirectional surface wave can be generated in the piezoelectric body 46 by applying high frequency voltages with a phase shift of 120 degrees, such as 0 degrees.

FIG. 16 shows two circuits (A
and B) The piezoelectric body 2 having the electrodes is fixed, and the piezoelectric body is arranged so that the polarization direction of the piezoelectric body becomes arrows M, M', etc. perpendicular to the plane of the paper with respect to the elastic body 1 every 1/4 wavelength. do. When high-frequency voltages with a phase shift of 90' are applied to electrodes A and B, the rod-shaped elastic body causes bimorph vibration and forms a traveling wave in a constant direction.

17 and 19 show electrodes A' and B of the piezoelectric body 2.
' are placed at different positions and the polarization direction of the piezoelectric material is halved.
This is a case where the piezoelectric bodies A and B are arranged at intervals of wavelengths as shown by arrows M and M' with respect to the elastic body, and the positional relationship between the piezoelectric bodies A and B is set at an interval of 1/4 wavelength, 10th wave, and n: an integer.

FIG. 18 shows a case where a vibrator 2.6 is fixedly arranged on a part of the rod-shaped (plate-shaped) elastic body 1 via two connectors 4.5. When high-frequency voltages with a phase shift of 90° are applied to each vibrator with the spacing between the couplers set to 1/4 wavelength or 10th wavelength (n: integer), the rod-shaped elastic body 1 causes bending vibration and forms a traveling wave in a fixed direction. do.

Although this embodiment mainly uses an electrostrictive element, it is possible to use a magnetostrictive element instead.

The driving principle and embodiments of the motor device using ultrasonic vibration according to the present invention have been explained in detail above, but unlike various conventional motor devices, an electrostrictive element or a magnetostrictive element is incorporated in the elastic body. This is a device that uses traveling waves excited on the surface, and uses the powerful vibrational energy of ultrasonic waves to generate traveling waves with elliptical vibrations that are converted into rotational or rectilinear motion of a moving object. It is constructed using an innovative method, and has the great effect of being able to obtain a small and lightweight motor device with strong rotational force and driving force, and has the great effect of being able to be applied to all kinds of applications. Demonstrate.

[Brief explanation of drawings]

Fig. 1 is a partially enlarged perspective view for explaining the operating principle of the present invention, Fig. 2 is a partially sectional view showing an embodiment of the present invention, and Fig. 6 is a side view of the vibrator. Figure 4 is a cross-sectional view taken along the line A-A in Figure 6, Figure 5 is a cross-sectional view showing an example of the pressure regulating mechanism, Figure 6 is a state diagram showing the vibrator in a bent state, and Figure 7 is a diagram showing the vibrator and its rotation. FIG. 8 is an exploded view showing the contact state of the child; FIG. 8 is a partial partial view showing another embodiment of the present invention;
Figure 9 is an exploded view showing the state of contact between the vibrator and rotor.
Figure 0 shows still another embodiment of the present invention, (A) is a partial sectional view, (B) is an electrode arrangement diagram of a piezoelectric body, and Figure 11 is a still another embodiment of the present invention. Perspective view showing an example, 12th
The figure is an example of an endless structure linear motor, No. 16
The figure shows an example of a near motor with an endless structure using a coupler, Fig. 14 shows an example of a linear motor configured with one linear elastic body and two vibrators, and Fig. 15 shows a linear motor used in the above example. 16, 17, and 19 are arrangement diagrams of electrodes that form a traveling wave on a rod-shaped elastic body using a piezoelectric body, and Figure 18 is a diagram showing a method of generating a unidirectional surface wave on a rod-shaped elastic body using a piezoelectric body. FIG. 1... Elastic body 2... Moving body 11.31...
Casing body 12.32...Supporting member 16
．． 33... Vibrator 13a, 63a... Taper 14.34... Rotor 15.35...
Rotating axis 16. Filter 6...Pressure regulating mechanism 17...Bearing 18.19...Electrostrictive element 20...Electrode 23
．． 24...Cam 25...Steel ball 67...Electrostrictive element 68...Bearing 41...Plate member 42...
Elastic body 46... Piezoelectric body 44... Electrode 45...
・Phase shifter month・Figure 10 (a)
(.) Fig. 12 Fig. 13 Fig. 15 Fig. 18 Fig. 19 Procedural amendment (spontaneous) September 1983/Z Japan Commissioner of the Patent Office 1, Indication of the case Patent Application No. 1987-205220 2, Title of the invention Motor device using ultrasonic vibration 3 Relationship with the case of the person making the amendment Patent applicant 4 Subject of the amendment fl) Scope of claims in the specification (2) Claims of the invention in the specification Detailed explanation column (3) Brief explanation column of drawings in the specification (4) Drawings (Figure 8 (b)) 5. Contents of amendment (1) As shown in the attached sheet 1U゛Specification 1, Name of the invention, Motor device using ultrasonic vibration 2, Claims (1) Ultrasonic vibration constructed by combining a plurality of electrostrictive elements or magnetostrictive elements and incorporating them into an elastic body. By arranging the elastic body, one end surface of this elastic body, and one end surface of a moving body moving in a certain direction at a position where they are in pressurized contact with each other, transverse waves and longitudinal waves excited on the surface of this elastic body can be synthesized. A motor device that utilizes ultrasonic vibration, characterized in that it converts surface waves generated by the vibration into unidirectional motion of a moving object. (2) An ultrasonic transducer is constructed by incorporating two or more circuits of electrostrictive elements or magnetostrictive elements in a cylinder or a cylindrical elastic body, and a moving body that is brought into pressurized contact with one end surface of the ultrasonic transducer is made of a cylinder. shaped rotor and 1. Claim No. 11 (Recited in Claim 11) characterized in that, by configuring the ultrasonic transducer, a combined surface wave of a transverse wave and a longitudinal wave excited on the surface of an ultrasonic transducer is converted into a unidirectional rotational motion of a moving object. (3) An ultrasonic vibrator is composed of two or more circuits of electrostrictive elements or magnetostrictive elements built into a ring-shaped elastic body, and a rotor placed inside this ring-shaped elastic body. One end surface and one end surface of this elastic body are configured to come into pressure contact with each other, and a combined surface wave of a transverse wave and a longitudinal wave excited on the surface of the elastic body is converted into a unidirectional rotational motion of the rotor. A motor device using ultrasonic vibration according to claim (1), characterized in that: (4) The moving body is made of a plate-like member that moves in a fixed direction, and is brought into pressurized contact with the plate-like member. By fixing two or more circuits of magnetostrictive or electrostrictive elements on the surface of one or more elastic bodies and shifting the phase of the high-frequency voltage applied to each circuit, transverse waves and longitudinal waves can be generated on the surface of the elastic body. A motor device using ultrasonic vibration according to claim (1), characterized in that the plate-like member is moved straight in a fixed direction by forming a combined surface wave. 3. Details of the invention. Description: The present invention relates to a motor device that converts surface waves excited on the surface of an ultrasonic transducer into unidirectional motion of moving bodies placed in pressure contact with each other. Most of the various widely used motor devices apply electromagnetic force as their driving source, and are used for various purposes.75) The size, weight, torque, etc. of these devices depend on the materials used. It is subject to certain restrictions. This is because these factors are determined by the magnetic properties of the materials used, and devices exceeding these properties cannot be rotated. The present invention further differs from these devices in that it aims to provide a motor device that utilizes surface waves excited on the surface of an ultrasonic vibrator having an electrostrictive element or a magnetostrictive element incorporated in an elastic body. It is something. Hereinafter, the operating principle and embodiments of the motor device according to the present invention will be described in detail with reference to the drawings. <1> Principle of operation FIG. 1 is a partially enlarged perspective view for explaining the principle of operation. Reference numeral 1 denotes an elastic body such as a metal, and the state in which a surface wave, which is a combination of transverse vibration and longitudinal vibration, is formed on the surface la is shown in an enlarged manner. First, this surface wave is generally called a Rayleigh wave, and it has been theoretically clarified that there are waves that propagate along the surface of an elastic body. Elastic waves in solids include longitudinal waves and transverse waves, each of which exists independently, but due to the boundary condition of the surface, they intertwine and are synthesized. To generate Rayleigh waves, if a vibrator that vibrates vertically or horizontally is placed on the substrate medium and the surface of the elastic body is excited, the surface wave component can be observed at a considerable distance from the vibration source. The second type is a surface wave caused by the bending vibration of a rod-shaped (plate-shaped) elastic body. Propagates along the body. Thirdly, there are longitudinal elastic waves that propagate along a rod-shaped (plate-shaped) elastic body, and transverse waves due to Poisson's ratio appear on the surface of the elastic body. In this case as well, the surface of the elastic body has longitudinal waves and transverse waves of 90
° Out of phase creates in-column vibration. In the case of FIG. 1, only the propagation state of Rayleigh waves (the vibration source is not shown) is shown. That is, if we focus on mass point B,
It is moving in the direction of the arrow N on the field Q, which is a combination of the transverse amplitude a (vertical direction) and the longitudinal amplitude b (horizontal direction), and its surface wave moves at the speed of sound U at 1~ There is. This movement is the same at any point on the surface of the elastic body 1a, and under this condition, when the surface of the free moving body 2 is pressed into contact with the surface of the elastic body 1, this moving body 2 moves to the elastic body. They are in contact only at the vertices A and A' of the surface waves of 1, and these vertices A and A' are in the direction of arrow M at the vibration velocity V:'; Therefore, the free moving body 2 is driven in the direction of arrow N by the frictional force with the elastic body 1. <2> Embodiments of the present invention The present invention relates to a motor device based on driving a moving object using surface waves, and embodiments thereof will be described below. FIG. 2 shows a partial cross-sectional view of the device. Reference numeral 11 denotes a casing body, in which a node portion of a cylindrical bending vibrator 13 is supported by a support member 12, and approximately at the center of this vibrator 13. A cheever x3a is provided on the outer peripheral surface of the part, and this taper 13H
The rotor 14, which is disposed so that one end side of the inner circumferential surface of the rotor 14 as a moving body is in pressurized contact with the surface of The rotation shaft 15 is transmitted through a mechanism 16. Note 1. Details of an example i of the pressure regulating mechanism 16 will be described later with reference to FIG. 17 indicates a bearing. <3> About the Vibrator The vibrator 13 has electrostrictive elements 18 and 19 incorporated in its midway portion, and serves as an excitation source for surface waves. FIG. 3 shows a side view of the vibrator 13, and FIG. 4 shows a side view of the vibrator 13, and FIG.
M cross section is shown. In FIG. 3, electrostrictive elements 18 and 19 are configured to expand and contract in the axial direction as shown by arrows, and electrodes 20 are sandwiched between them. The arrangement of the electrostrictive element and the electrodes is as shown in FIG. 4, where diagonal electrodes a and b are connected and led to terminal 21, and electrodes c and d are similarly connected and led to terminal 22. The electrostrictive elements located at each diagonal position operate to expand and contract in opposite directions. That is, the electrostrictive elements 18 and 19 in contact with the electrode a extend in the extending direction, and the electrostrictive elements 1 in contact with the electrode
8.19 is polarized to move in the shortening direction. Furthermore, the electrostrictive elements 18, 19 in contact with the electrode d are polarized so as to operate in the elongating direction, and the electrostrictive elements 18, 19 in contact with the electrode C are polarized so as to operate in the retracting direction. <4> Pressure Regulation Mechanism FIG. 5 is a sectional view showing an example of the pressure regulation mechanism 16. The figure shows an example of an automatic pressure adjustment mechanism, which includes a pair of special cams 23 and 24 with a V-formation between the rotating shaft 15 and the rotor 14, and a plurality of steel balls interposed between them. By providing 25, the steel ball is located at the bottom of the cam when no load is applied.
As the load is applied and the torque increases, the steel ball rides up the groove, creating axial pressure. Thereby, the torque of the rotor 14 is transmitted to the rotating shaft 15 side. With this configuration, when a high frequency voltage is applied between the terminal 21 connected to electrodes a and b shown in FIG. 4 and the vibrator 13, the vibrator 13 causes a bending vibration as shown in FIG. 6. That is, in the - next vibration state, the central point B becomes the antinode of the vibration, and the points H and 2 become the nodes of the vibration. Next, when a high-frequency voltage with a phase shift of 90° with respect to the voltages of these electrodes a and b is applied between the terminal 22 connected to the other electrode C9d and the vibrator 13, the vibration at point B A vibration Z (perpendicular to the plane of the paper) with a phase shift in the vertical direction is induced, so to speak, and a longitudinal wave and a transverse wave are artificially created, and the surface wave becomes a rotating circular vibration. <5> Concerning the contact state between the vibrator and the rotor As shown in FIG. It was decomposed into (A), (B), (C), and (D). That is, the inner circumferential surface 14a of the rotor 14 is in contact with the peak of the wave on the side of the vibrator 13, and the contact point moves sequentially and goes around the inner circumferential surface 14a of the rotor 14 every cycle. The velocity of the mass point at the apex is proportional to the amplitude of vibration, and is on the order of 0 to several m/sec. The reason why the imaging generated on the vibrator side due to the movement of these contact points is converted into rotational force on the rotor side will be described below. That is, when comparing the circumferential length of the inner circumferential surface 14a of the rotor 14 and the circumferential length of the outer circumferential surface 13B of the vibrator 13 inscribed therein, as is clear from the illustration, the former is naturally longer; Therefore, as shown in Fig. 7, when the contact points of both move sequentially and go around once, the rotor 14 side will shift by the difference between the two stations, and this will be taken out as rotation. . Further, the rotation direction of the rotor can be switched by reversing the phase of the high frequency voltage applied to the electrodes a, b or c, d. <6> Regarding the ring-shaped bending camera element, FIG. 8 shows another embodiment of the present invention, and according to the nine embodiments, which are (a) - thin sectional view and (b) sectional view on the line A-A. A ring-shaped bending vibrator 33 supported by a support member 32 is disposed inside the casing body 31, and a taper 3 is formed on the inner peripheral surface of the ring-shaped bending vibrator 33 supported by a support member 32.
33 is provided and arranged so that the outer circumferential surface of the rotor 34 comes into contact with it. The rotor 34 is supported so as to be movable in the axial direction with respect to the rotating shaft 35, and has a pressure regulating mechanism 36 similar to the configuration shown in FIG.
is provided to transmit rotational force to the rotating shaft 35. 37 shows an electrostrictive element, and 38 shows a bearing. In FIG. 8(B) (the cross section of the casing body 31 is omitted in the same figure), the vibrator 33 is made of an elastic body, and is fixedly arranged on the outer periphery of the vibrator 33. The electrostrictive elements 37 are polarized to expand and contract in the directions of the arrows, respectively, and form electrodes a, b, c, and d. Provide e+ f+ g+ h. Furthermore, electrodes a, b
. Connect c and d and lead them to terminal 39, and similarly connect electrode e. Connect f, g, and h and lead them to the terminal 40. A high frequency voltage is applied between the terminal 39 and the vibrator 33, and the terminal 40
When a high frequency voltage with a phase shift of 90° is applied between the oscillator 33 and the oscillator 33, the oscillator 33 generates a bimorph-shaped mausoleum vibration. The bending frequency in this case is as follows: E: Young's modulus f: Boastsun ratio a: radius of center circle h: thickness of peripheral wall n: order of bending vibration f' density of material In this example, n =
In case 2, the contact state of the rotor 34 inscribed in the vibrator 33 is broken down into main phases according to FIG. 9 (A) and (B).
) (C) (D). The point where these two come into contact is the peak of the wave, and the peak is the number of rotors per cycle of vibration.
It was explained using the example shown in FIG. 7 that the vibration generated on the vibrator 33 side by the movement of these contact points is transmitted as rotational force on the rotor 34 side. That's right. <7> About excitation of piezoelectric material by high frequency voltage Part 10
The figures show other embodiments of the present invention, in which figure (a) is a partial sectional view and figure (b) is a diagram of the arrangement of electrodes of a piezoelectric body. According to this embodiment, the piezoelectric body 2 is excited by applying high frequency voltages of two circuits having a phase difference of 90° to the respective electrodes a and b. The elastic ring 1 generates bimorph vibration, and a surface wave that is a combination of a transverse wave and a longitudinal wave is formed on one end surface IA.
The rotor 3, which is brought into pressure contact with one end surface thereof, receives rotational drive. Figure 10 (C) shows the polarization direction of the piezoelectric material and the electrode arrangement. The electrode pitch is set to 1 of the wavelength of the surface wave, and the polarization direction of the piezoelectric body is set to ○■e... as shown in the figure (b). (The positions of electrode groups A and B are arranged at the same wavelength.) Each electrode is connected to form two circuits of terminals a and b. With these configurations, 90! When out-of-phase high-frequency voltages are applied, surface waves are formed on the surface of the elastic body. . <8> Regarding the linear motor that converts into linear motion FIG. 11 shows another embodiment of the present invention, and shows an example of a linear motor that converts ultrasonic vibration into linear motion. In the same figure, one or more elastic bodies 42 (42) are brought into pressure contact with the surface of a plate-like member 41, and a piezoelectric body 43 (43) is provided on a part of the surface of this elastic body 42. generates surface waves (Rayleigh waves). By making the corner part 42a of the elastic body 42 curved, surface waves propagate along the surface of the elastic body 42, and the plate-like member 4
1 is driven to move in the direction of arrow W. <9> Regarding a linear motor with an endless structure. In FIG. 12, a plate-like member 2 is brought into pressure contact with the surface of a rod-like elastic body 1, and a plurality of piezoelectric bodies 3 are fixedly arranged on the other part of the rod-like elastic body 1. This is an example of a linear motor that has an endless structure by bending a rod-shaped elastic body into a curved shape. With this configuration, the rod-shaped elastic body causes bending vibration, and the wave propagates along the rod-shaped elastic body 1 and circulates on the ring as a surface wave. <10> Regarding a linear motor having two rod-shaped elastic bodies, FIG. 13 shows two rod-shaped elastic bodies 1.2 fixed by connectors 3 and 4, and a plate member 5 on the surface of the rod-shaped elastic bodies 1. This is an example of a linear motor in which a plurality of piezoelectric bodies 6 are fixedly arranged on a part of a rod-shaped elastic body 2 in pressure contact. With this configuration, the rod-shaped elastic body 2 causes bending vibration by the piezoelectric body 6, and the surface wave is converted into longitudinal vibration of the coupler 3 at the end of the rod-shaped elastic body 1, and the longitudinal vibration is the bending vibration of the rod-shaped elastic body 2. is converted into a surface wave and propagates on the rod-shaped elastic body 2. This surface wave passes through the coupler 4 and returns to the source. <11> Regarding a linear motor having two vibrators on a rod-shaped elastic body, FIG. This is an example of a linear motor in pressure contact. With this configuration, the rod-shaped elastic body 1 causes bending vibration by the vibrator 2, and the vibration energy of the surface wave is absorbed by the vibrator 3. Kome-furi. The dynamic energy is converted into electrical energy, which is then recovered and fed back to the vibrator 2. <12> Unidirectional surface wave generation method FIG. 15 shows the unidirectional surface wave generation method used in the example, in which a plurality of electrodes 44, 44... are arranged on the surface of the piezoelectric body 43,
As shown in the figure, the three circuits are connected to the pollution U and connected to the phase shifter 45. This phase shifter 45 provides 00.1 to each circuit.
A unidirectional surface wave can be generated in the piezoelectric body 43 by applying high frequency voltages with a phase shift of 120 degrees, such as 20 degrees and 240 degrees. <13> Surface wave generation method Figure 16 shows two circuits (A
The piezoelectric body 2 having the electrodes 2 and B) is fixed, and the piezoelectric body is arranged so that the polarization direction of the piezoelectric body becomes every other wavelength as arrows M, M', . . . perpendicular to the plane of the paper with respect to the elastic body 1. When high frequency voltages with a phase shift of 90° are applied to electrodes A and B, the rod-shaped elastic body causes bimorph vibration and forms a surface wave in a fixed direction. <14> Surface wave generation method Figures 17 and 19 show that the electrodes A' and B' of the piezoelectric body 2 are arranged at different positions, and the polarization direction of the electric body is changed every other wavelength with respect to the elastic body. Arrange it as shown by arrows M and M',
This is a case where the positional relationship between the piezoelectric bodies A and B is set to an interval of the upper liquid length + 7 wavelengths (11: an integer). <15> Surface wave generation method FIG. 18 shows a case where vibrators 2 and 3 are fixedly arranged on a part of a rod-shaped (plate-shaped) elastic body 1 via two couplers 48.5. When the spacing between the couplers is set to 11 wavelengths (n: integer) and high frequency voltages with a phase shift of 90° are applied to each vibrator, the rod-shaped elastic body 1 causes bending vibration and forms a surface wave in a fixed direction. Note that although an electrostrictive element is mainly used in this embodiment, a magnetostrictive element can be used instead. <16) Effects of the present invention The driving principle and embodiments of the motor device using ultrasonic vibration according to the present invention have been explained in detail above, but it is different from various conventional motor devices in terms of potency and elasticity. This is a device that uses surface waves excited on the surface by incorporating an electrostrictive element or magnetostrictive element into the body, and generates surface waves with in-field vibration using the powerful vibrational energy of ultrasonic waves. It uses an innovative method of converting the motion of a moving object into rotational or linear motion, and has the great effect of producing a small and lightweight motor device with strong rotational force and driving force. It is highly effective and can be applied to a variety of applications. 4. Brief description of the drawings Fig. 1 is a partially enlarged perspective view for explaining the operating principle of the present invention, Fig. 2 is a partially sectional view showing an embodiment of the present invention, and Fig. 3 is a vibration 4 is a sectional view taken along the line A-A in FIG. 3, FIG. 5 is a sectional view showing an example of the pressure regulating mechanism, FIG. 6 is a state diagram showing the vibrator in a bent state, and FIG. The figure is an exploded view showing the contact state of the vibrator and rotor, FIG. 8 is a partial cross-sectional view showing another embodiment of the present invention, (b) a cross-sectional view taken along the line A--A, and FIG. FIG. 10, an exploded view showing the state of contact between the camera element and the rotor, shows another embodiment of the present invention (a).
The figure is a partial cross-sectional view, and the figure (b) is a diagram of the electrode arrangement of the piezoelectric body.
1 is a perspective view showing another embodiment of the present invention, FIG. 12 is an example of a linear motor with an endless structure, FIG. 13 is an example of a linear motor with an endless structure using a connector, and FIG. 14 is an example of a linear motor with an endless structure. By the linear elastic body of the book and two vibrators,
Figure 15 is an example of a linear motor configured as shown in Figure 14.
FIGS. 16, 17, and 19 are diagrams showing the unidirectional surface wave generation method used in the example shown in the figure, and are layout diagrams of electrodes that generate surface waves in a rod-shaped elastic body using a piezoelectric body. 18
The figure is a layout diagram in which a surface wave is formed in a rod-shaped elastic body by a vibrator. 1... Elastic body 2... Moving body 11, 31...
Casing body 12.32...Supporting member 13
．． 33... Vibrator 13a, 33a... Taper 14.34... Rotor 15.35... Rotating shaft 16.36... Pressure regulating mechanism 17... Bearing 18.19... Electric Strain element 20...electrode
23.24...Cam 25...Steel ball 37...
- Electrostrictive element 38... Bearing 41... Plate member 42... Elastic body 43... Piezoelectric body 44...
Electrode 45...phase shifter

Claims (4)

[Claims] (1) An ultrasonic transducer constructed by combining a plurality of electrostrictive elements or magnetostrictive elements into an elastic body, and one end surface of the elastic body and one end surface of a moving body moving in a certain direction are mutually connected. The ultrasonic vibration is characterized in that, by placing the ultrasonic vibration in a position where the elastic body is in pressure contact, a traveling wave that is a combination of a transverse wave and a longitudinal wave excited on the surface of the elastic body is converted into a unidirectional motion of the moving body. The motor device used. (2) The ultrasonic vibrator is constructed by incorporating two or more circuits of electrostrictive elements or magnetostrictive elements into a columnar or cylindrical elastic body, and includes a moving body that is brought into pressurized contact with one end surface of the ultrasonic vibrator. Claim No. 1, characterized in that by configuring the ultrasonic rotor as a cylindrical rotor, a combined traveling wave of a transverse wave and a longitudinal wave excited on the surface of the ultrasonic transducer is converted into a unidirectional rotational motion of a moving object. A motor device using ultrasonic vibration as described in (1). (3) An ultrasonic vibrator is constructed by incorporating two or more circuits of electrostrictive elements or magnetostrictive elements in a ring-shaped elastic body, and connects one end surface of a rotor disposed in the ring-shaped elastic body and the elastic body. One end surface is in pressure contact with each other, and a combined traveling wave of a transverse wave and a longitudinal wave excited on the surface of the elastic body is converted into a unidirectional rotational motion of a rotor. A motor device using ultrasonic vibration as described in scope (1). (4) The moving body consists of a plate-like member that moves in a fixed direction, and the surface of one or more elastic bodies that comes into pressure contact with the plate-like member has two
By fixedly arranging magnetostrictive or electrostrictive elements larger than the circuit and shifting the phase of the high-frequency voltage applied to each circuit, a traveling wave in which a transverse wave and a longitudinal wave are combined is formed on the surface of the elastic body, and the plate-shaped A motor device using ultrasonic vibration according to claim 1, wherein the motor device moves a member straight in a fixed direction.