JPS5994351A - 半導体素子の電位像出力方法及びその装置 - Google Patents

半導体素子の電位像出力方法及びその装置

Info

Publication number
JPS5994351A
JPS5994351A JP57204804A JP20480482A JPS5994351A JP S5994351 A JPS5994351 A JP S5994351A JP 57204804 A JP57204804 A JP 57204804A JP 20480482 A JP20480482 A JP 20480482A JP S5994351 A JPS5994351 A JP S5994351A
Authority
JP
Japan
Prior art keywords
potential image
electron beam
semiconductor element
extraction range
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57204804A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512815B2 (enrdf_load_stackoverflow
Inventor
Akio Ito
昭夫 伊藤
Yoshiaki Goto
後藤　善朗
Toshihiro Ishizuka
俊弘 石塚
Kazuyuki Ozaki
一幸 尾崎
Yasuo Furukawa
古川　泰男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57204804A priority Critical patent/JPS5994351A/ja
Publication of JPS5994351A publication Critical patent/JPS5994351A/ja
Publication of JPH0512815B2 publication Critical patent/JPH0512815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57204804A 1982-11-22 1982-11-22 半導体素子の電位像出力方法及びその装置 Granted JPS5994351A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57204804A JPS5994351A (ja) 1982-11-22 1982-11-22 半導体素子の電位像出力方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57204804A JPS5994351A (ja) 1982-11-22 1982-11-22 半導体素子の電位像出力方法及びその装置

Publications (2)

Publication Number Publication Date
JPS5994351A true JPS5994351A (ja) 1984-05-31
JPH0512815B2 JPH0512815B2 (enrdf_load_stackoverflow) 1993-02-19

Family

ID=16496635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57204804A Granted JPS5994351A (ja) 1982-11-22 1982-11-22 半導体素子の電位像出力方法及びその装置

Country Status (1)

Country Link
JP (1) JPS5994351A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236676A (ja) * 1984-05-11 1985-11-25 株式会社　オ−ゼン 水中発音装置及びこれを利用した水中玩具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5684102A (en) * 1979-12-07 1981-07-09 Sumitomo Metal Ind Ltd Rough rolling method for billet
JPS5714438U (enrdf_load_stackoverflow) * 1980-06-27 1982-01-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5684102A (en) * 1979-12-07 1981-07-09 Sumitomo Metal Ind Ltd Rough rolling method for billet
JPS5714438U (enrdf_load_stackoverflow) * 1980-06-27 1982-01-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236676A (ja) * 1984-05-11 1985-11-25 株式会社　オ−ゼン 水中発音装置及びこれを利用した水中玩具

Also Published As

Publication number Publication date
JPH0512815B2 (enrdf_load_stackoverflow) 1993-02-19

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