JPS5990831U

JPS5990831U - Illuminance measurement device for light sources for exposure equipment

Info

Publication number: JPS5990831U
Application number: JP18721882U
Authority: JP
Inventors: 幸隆宮田
Original assignee: 株式会社東芝
Priority date: 1982-12-13
Filing date: 1982-12-13
Publication date: 1984-06-20

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は露光装置用光源、フォトレジスト及び従来の照
度測定装置に使用されている光学フィルタの波長に対す
る感度を示すグラフ、第２図及び第３図は本考案の露光
装置用光源の照度測定装置の一実施例を示す図であり、
第２図は露光装置光源から受光器迄の構造を示す一部切
欠斜視図、第３図は受光素子から表示器迄の回路を示す
説明図である。１１・・・露光装置用光源、１３・・・オプティカルフ
ァイバ束、１４・・・受光器、１５・・・分岐オプティ
カルファイバ群、１６・・・光学フ不ルタ群、１７・・
・受光素子群、１８・・・アンプゲイン調整器、１９・
・・アンプ、２０・・・たし算器、２１・・・表示器。Figure 1 is a graph showing the wavelength sensitivity of the light source for exposure equipment, photoresist, and optical filters used in conventional illuminance measurement equipment. Figures 2 and 3 are illuminance measurements of the light source for exposure equipment of the present invention. It is a figure showing one example of a device,
FIG. 2 is a partially cutaway perspective view showing the structure from the light source of the exposure apparatus to the light receiver, and FIG. 3 is an explanatory diagram showing the circuit from the light receiving element to the display. DESCRIPTION OF SYMBOLS 11... Light source for exposure equipment, 13... Optical fiber bundle, 14... Light receiver, 15... Branch optical fiber group, 16... Optical filter group, 17...
・Photodetector group, 18...Amplifier gain adjuster, 19・
... Amplifier, 20... Adder, 21... Display.

Claims

[Scope of utility model registration request]

An optical fiber bundle consisting of a plurality of optical fiber arbor, each of which has one end facing a predetermined light emitting section of a light source for an exposure device, and a bundle of optical fiber knifes each having at least one optical fiber. A group of branched optical fibers that are branched, a group of optical filters that are disposed opposite to each other end surface of each of the group of branched optical fibers and that allow only the respective specific wavelength ranges of the light source for the exposure apparatus to pass through, and a group of optical filters that pass through the group of optical filters. The exposure device comprises a group of light receiving elements that receive the light, and a synthesizing device that synthesizes outputs from the group of light receiving elements, and is configured to precisely measure the illuminance of the light source for the exposure device. Illuminance measurement device for light sources for equipment.