JPS5989571U - Photoresist stripping equipment - Google Patents

Photoresist stripping equipment

Info

Publication number
JPS5989571U
JPS5989571U JP18486982U JP18486982U JPS5989571U JP S5989571 U JPS5989571 U JP S5989571U JP 18486982 U JP18486982 U JP 18486982U JP 18486982 U JP18486982 U JP 18486982U JP S5989571 U JPS5989571 U JP S5989571U
Authority
JP
Japan
Prior art keywords
photoresist stripping
stripping equipment
processed
substrate
heat exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18486982U
Other languages
Japanese (ja)
Inventor
松本　成光
西沢　茂
博 佐藤
秋本　千代松
滝沢　弘雄
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP18486982U priority Critical patent/JPS5989571U/en
Publication of JPS5989571U publication Critical patent/JPS5989571U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のフォトレジスト剥離装置の概要を示す図
、第２図および第３図は本考案に係るフォトレジスト剥
離装置の構成を示す図である。 図において、１は入口、２は被処理基体、３はコンベア
ー、４は出口、５はノズル、６は種部、７は水冷管、８
はフィン、９は隔室、１０はローラーである。FIG. 1 is a diagram showing an outline of a conventional photoresist stripping device, and FIGS. 2 and 3 are diagrams showing the configuration of a photoresist stripping device according to the present invention. In the figure, 1 is an inlet, 2 is a substrate to be processed, 3 is a conveyor, 4 is an outlet, 5 is a nozzle, 6 is a seed part, 7 is a water cooling pipe, 8
9 is a fin, 9 is a compartment, and 10 is a roller.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）フォートレジスト剥離装置において、被処理基体
の出入口のそれぞれの近傍に溶剤を凝縮させるための熱
交換機構を設けたことを特徴とするフォトレジスト剥離
装置。(1) A photoresist stripping device characterized in that a heat exchange mechanism for condensing a solvent is provided near each of the entrances and exits of the substrate to be processed. （２）フォトレジスト剥離装置内に被処理基体の出入口
と剥離処理室との間に、熱交換機構を設置した隔室を設
けたことを特徴とする実用新案登録請求の範囲第１項記
載のフォトレジスト剥離装置。(2) Utility model registration claim 1, characterized in that a compartment equipped with a heat exchange mechanism is provided between the entrance/exit of the substrate to be processed and the stripping chamber in the photoresist stripping apparatus. Photoresist stripping equipment.
JP18486982U 1982-12-07 1982-12-07 Photoresist stripping equipment Pending JPS5989571U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18486982U JPS5989571U (en) 1982-12-07 1982-12-07 Photoresist stripping equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18486982U JPS5989571U (en) 1982-12-07 1982-12-07 Photoresist stripping equipment

Publications (1)

Publication Number Publication Date
JPS5989571U true JPS5989571U (en) 1984-06-18

Family

ID=30399724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18486982U Pending JPS5989571U (en) 1982-12-07 1982-12-07 Photoresist stripping equipment

Country Status (1)

Country Link
JP (1) JPS5989571U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54126636A (en) * 1978-02-28 1979-10-02 Applic Gen Erekutorishite E Do Surface treating apparatus using at least one solvent

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54126636A (en) * 1978-02-28 1979-10-02 Applic Gen Erekutorishite E Do Surface treating apparatus using at least one solvent

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