JPS5989537U - Pattern inspected object - Google Patents
Pattern inspected objectInfo
- Publication number
- JPS5989537U JPS5989537U JP18492982U JP18492982U JPS5989537U JP S5989537 U JPS5989537 U JP S5989537U JP 18492982 U JP18492982 U JP 18492982U JP 18492982 U JP18492982 U JP 18492982U JP S5989537 U JPS5989537 U JP S5989537U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- fine pattern
- inspected object
- patterned object
- ink film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案のパターン被検査体の一実施例を示す平面
図である。
１・・・基板、２・・・微細パターン、３・・・断裁線
、４・・・間隔、５・・・目印、６・・・欠陥。The drawing is a plan view showing an embodiment of a patterned object to be inspected according to the present invention. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Fine pattern, 3... Cutting line, 4... Spacing, 5... Mark, 6... Defect.
Claims (2)
多数形成され、各微細ノ〈ターンを仕切る如く断裁線が
設けられてなるパターン被検査体において、各微細パタ
ーンの良否に対応して磁性インキ膜からなる目印が微細
パターンと前記断裁線との間隙に施されてなることを特
徴とするパターン被検査体。(1) In a patterned object to be inspected, in which a large number of fine patterns to be inspected are formed at intervals on a substrate, and cutting lines are provided to separate each fine pattern (turns), the quality of each fine pattern is determined. A patterned object to be inspected, characterized in that a mark made of a magnetic ink film is placed in a gap between the fine pattern and the cutting line.
０ｒｒｒｒｎである実用新案登録請求の範囲第１項記載
のパターン被検査体。(2) The patterned object to be inspected according to claim 1, wherein the magnetic ink film of the mark has a virtual diameter of 0.2 to 1°0rrrrrn.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18492982U JPS5989537U (en) | 1982-12-07 | 1982-12-07 | Pattern inspected object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18492982U JPS5989537U (en) | 1982-12-07 | 1982-12-07 | Pattern inspected object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5989537U true JPS5989537U (en) | 1984-06-18 |
Family
ID=30399840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18492982U Pending JPS5989537U (en) | 1982-12-07 | 1982-12-07 | Pattern inspected object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5989537U (en) |
-
1982
- 1982-12-07 JP JP18492982U patent/JPS5989537U/en active Pending
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