JPS5988233A - Anti-vibration rest - Google Patents

Abstract

PURPOSE:To provide an absolute reference surface of high reliability, by placing a float and a viscous fluid in a container on a base, providing a surface plate on the top of the float and using a balancing weight to determine the position of the float. CONSTITUTION:A container 8 is secured on a base 13. A float 7 and a viscous fluid 9 are provided in the container 8. The viscous fluid is enclosed by a seal 10. Stoppers 12 prevent the float 7 from being much displaced. A balancing weight 11 is provided in the internal opening of the float 7 to stabilize the position of the float. The float 7 can be turned within the allowable range determined by the stoppers 12, by changing the position of the balancing weight 11. The vibration of the floor is damped by the viscous fluid 9.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vibration isolation table, and particularly to one provided with vibration isolation and vibration isolation mechanisms necessary for realizing an absolute reference plane.

A conventional device of this type is shown in FIG.

In the figure, 111 is, for example, a surface plate on which an object is installed (
21 is an air spring, (3) is a vibration-proof rubber, (4) is a surface plate (1
1 and an air spring (2) to adjust the height of the surface plate (11 from the floor surface), (5) is a fixed base that connects the vibration isolating rubber (3) and the floor.

In the above configuration, the height and inclination of the upper surface of the surface plate (11) are adjusted by the adjustment support base (4).The adjusted surface plate i
When an object is placed on the floor surface, the vibrations generated on the floor are damped by the anti-vibration rubber (31) and the air spring (2), preventing the vibrations from being transmitted to the object.

However, since the height and inclination of the top surface of the surface plate il+ can be adjusted by adjusting the height of the support base (4),
When readjusting when using the top surface of the surface plate (11) as an absolute reference surface, there was an inconvenience that the adjustment was very delicate and the reproducibility was poor.

This invention was made in order to eliminate the drawbacks of the conventional ones as described above. The object of the present invention is to provide a vibration isolation table that can be used as an absolute reference surface with good reproducibility by including a fluid, a balance weight configured on the floating body, and a surface plate formed on the surface of the floating body.

Hereinafter, one embodiment of the present invention will be described with reference to the drawings. Second
In the figure, (11 is a surface plate on which the object (6) is installed, (7
) is, for example, a hemispherical hollow floating body, and the surface plate (11 is fixed to the upper surface 1 of the floating body (7). (81 is a container,
For example, in a spherical shell-shaped casing, (9) is a viscous fluid that fills the gap between the floating body (7) and the casing (81).
For example, mineral oil is a diaphragm-shaped seal that is fixed to the floating body (7) and the casing (8) and covers the surface of the mineral oil (9). It is a balance weight that stabilizes the spherical side of the floating body (71) vertically downward. (121 is a stopper, for example, one end is fixed to the floating body (71), and the other end faces the casing (8) with a space. It was designed to do so.

(The casing is a fixing base that fixes the casing (81) to the floor.

In the above configuration, the floating body (7) can freely rotate within the range allowed by the stopper (12) inside the casing (8). When the object (6) is placed on the surface plate (11), the upper surface of the surface plate (1) is affected by the buoyant force that the floating body (7) receives from the mineral oil (9), and the free surface of the mineral oil (9) that extends over the horizontal plane. Due to its nature, it always tries to maintain a stable state at a constant inclination with respect to the horizontal plane.At this time, the inclination between the top surface of the surface plate (11) and the horizontal plane is determined by the position of the balance weight a1 fixed in the floating body (7). It is determined.

When vibration occurs on the floor, the casing (8) vibrates, but due to internal friction due to the viscosity of the mineral oil (8) filled between the casing (8) and the floating body (7), the casing (8) The vibrations are attenuated and isolated, and almost no vibrations are transmitted to the floating body (7) and the object (6) on the surface plate 111. As a result, it is possible to form an absolute reference plane that has a vibration isolation function and can be accurately reproduced, which is necessary for measuring instruments and the like.

Here, the seal (11) prevents the mineral oil (8) from leaking to the outside.

In the above embodiment, the balance weight 0υ is fixed at the adjusted position within the floating body, but it may be configured to be adjusted to any position when used. For example, the balance weight 0υ may be adjusted to any position within the floating body
An opening (14) is provided on the top surface of the balance way [
11) so that the inclination of the upper surface of the surface plate +11 can be adjusted to any desired inclination.

Although mineral oil is used as the viscous fluid, any viscous fluid such as water or mercury may be used.
If a spring damping device is incorporated in 13), an even more reliable vibration isolation table can be obtained.

Furthermore, the floating bodies and containers are not limited to hemispherical shapes, but can also be constructed in any shape such as a rectangular parallelepiped.

As described above, according to the present invention, a vibration isolation table includes a container disposed on a base, a floating body housed in the container, and a viscous fluid filled in a gap between the container and the floating body. , a balance weight formed on the above-mentioned floating body, and a surface plate formed on the surface of the above-mentioned floating body, so that a highly reliable absolute reference surface is realized, and furthermore, due to the viscous friction of the fluid, This has the effect of providing a vibration isolation table that damps and isolates vibrations.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a conventional example, and FIG. 2 is a block diagram of an embodiment of the present invention. In the figure, ill is a surface plate, (7) is a floating body, (8) is a container, +91 is a viscous fluid, the concave is a seal, (11) is a balance weight, and (the model is a stopper. In addition, the same reference numerals in the figure are Indicates the same or equivalent part. Agent Makoto Kuzuno

Claims (1)

[Claims] (11) A container disposed on a base, a floating body housed in the container, a viscous fluid filling a gap between the first container and the floating body, and a structure in the floating body. A vibration isolation table comprising a balance weight and a surface plate formed on the surface of the floating body. (2) The vibration isolation table according to claim 1, comprising a stopper for regulating rotation of the floating body. (31 Claim jl! The vibration isolation table according to claim 1 or 2, which is equipped with a seal that prevents viscous fluid from flowing out from the gap. (4) Claim where the container and the floating body have a hemispherical shape. The vibration isolation table according to any one of paragraphs 1 to 3.