JPS5987642U - piezoelectric pressure sensor - Google Patents

piezoelectric pressure sensor

Info

Publication number
JPS5987642U
JPS5987642U JP18453982U JP18453982U JPS5987642U JP S5987642 U JPS5987642 U JP S5987642U JP 18453982 U JP18453982 U JP 18453982U JP 18453982 U JP18453982 U JP 18453982U JP S5987642 U JPS5987642 U JP S5987642U
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric
pressure sensor
piezoelectric vibrator
deforms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18453982U
Other languages
Japanese (ja)
Inventor
守矢　滋
Original Assignee
ティーディーケイ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ティーディーケイ株式会社 filed Critical ティーディーケイ株式会社
Priority to JP18453982U priority Critical patent/JPS5987642U/en
Publication of JPS5987642U publication Critical patent/JPS5987642U/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る気圧センサの側断面図、第２図は
同センサで構成する自励振発振回路の一例を示す回路図
である。 １：ダイヤフラム、２：圧電振動子、２ｂ：主電極、２
Ｃ：帰還電極、３：センサーケース、６：通気孔、７：
気圧室。FIG. 1 is a side sectional view of a barometric pressure sensor according to the present invention, and FIG. 2 is a circuit diagram showing an example of a self-oscillation oscillation circuit configured with the sensor. 1: Diaphragm, 2: Piezoelectric vibrator, 2b: Main electrode, 2
C: Return electrode, 3: Sensor case, 6: Ventilation hole, 7:
Pressure chamber.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）気圧変化に応じて歪曲変形するダイヤフラムを持
ち、そのダイヤフラムに高周波電圧を印加する圧電振動
子を一体装着し、ダイヤフラムの歪曲変形で変化する圧
電振動子の発振周波数により気圧を検出可能に構成した
ことを特徴とする圧電式気圧センサ。(1) It has a diaphragm that distorts and deforms in response to changes in atmospheric pressure, and a piezoelectric vibrator that applies a high-frequency voltage to the diaphragm is integrally attached, making it possible to detect atmospheric pressure by the oscillation frequency of the piezoelectric vibrator that changes as the diaphragm distorts and deforms. A piezoelectric pressure sensor characterized by the following configuration. （２）上記圧電振動子が、主電極、対向電極と絶縁分離
した帰還電極を持って自励発振回路を形成するようにさ
れているところの実用新案登録請求の範囲第１項記載の
圧電式気圧センサ。(2) The piezoelectric type according to claim 1, wherein the piezoelectric vibrator has a main electrode, a counter electrode, and a feedback electrode insulated and separated to form a self-excited oscillation circuit. Barometric pressure sensor. （３）上記ダイヤフラムが、センサーケースの通気孔成
形部側と気圧室成形部側とを遮断する隔膜状に張設され
ているところの実用新案登録請求の範囲第１項記載の圧
電式気圧センサ。(3) The piezoelectric pressure sensor according to claim 1, wherein the diaphragm is stretched in the form of a diaphragm that blocks the air hole forming part side and the pressure chamber forming part side of the sensor case. .
JP18453982U 1982-12-06 1982-12-06 piezoelectric pressure sensor Pending JPS5987642U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18453982U JPS5987642U (en) 1982-12-06 1982-12-06 piezoelectric pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18453982U JPS5987642U (en) 1982-12-06 1982-12-06 piezoelectric pressure sensor

Publications (1)

Publication Number Publication Date
JPS5987642U true JPS5987642U (en) 1984-06-13

Family

ID=30399103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18453982U Pending JPS5987642U (en) 1982-12-06 1982-12-06 piezoelectric pressure sensor

Country Status (1)

Country Link
JP (1) JPS5987642U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039392A (en) * 1973-08-14 1975-04-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039392A (en) * 1973-08-14 1975-04-11

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