JPS5985953U - 走査オージェ電子分光分析装置 - Google Patents

走査オージェ電子分光分析装置

Info

Publication number
JPS5985953U
JPS5985953U JP18173682U JP18173682U JPS5985953U JP S5985953 U JPS5985953 U JP S5985953U JP 18173682 U JP18173682 U JP 18173682U JP 18173682 U JP18173682 U JP 18173682U JP S5985953 U JPS5985953 U JP S5985953U
Authority
JP
Japan
Prior art keywords
signal
scanning
signal component
level
auger electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18173682U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0339724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
彰男 堀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP18173682U priority Critical patent/JPS5985953U/ja
Publication of JPS5985953U publication Critical patent/JPS5985953U/ja
Application granted granted Critical
Publication of JPH0339724Y2 publication Critical patent/JPH0339724Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP18173682U 1982-11-30 1982-11-30 走査オージェ電子分光分析装置 Granted JPS5985953U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18173682U JPS5985953U (ja) 1982-11-30 1982-11-30 走査オージェ電子分光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18173682U JPS5985953U (ja) 1982-11-30 1982-11-30 走査オージェ電子分光分析装置

Publications (2)

Publication Number Publication Date
JPS5985953U true JPS5985953U (ja) 1984-06-11
JPH0339724Y2 JPH0339724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-21

Family

ID=30393748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18173682U Granted JPS5985953U (ja) 1982-11-30 1982-11-30 走査オージェ電子分光分析装置

Country Status (1)

Country Link
JP (1) JPS5985953U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0339724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-21

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