JPS5985863A - 多孔質基体への連続蒸着方法 - Google Patents

多孔質基体への連続蒸着方法

Info

Publication number
JPS5985863A
JPS5985863A JP19737482A JP19737482A JPS5985863A JP S5985863 A JPS5985863 A JP S5985863A JP 19737482 A JP19737482 A JP 19737482A JP 19737482 A JP19737482 A JP 19737482A JP S5985863 A JPS5985863 A JP S5985863A
Authority
JP
Japan
Prior art keywords
substrate
vapor deposition
porous substrate
rotating drum
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19737482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6334223B2 (https=
Inventor
Wataru Kuramochi
倉持　渉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP19737482A priority Critical patent/JPS5985863A/ja
Publication of JPS5985863A publication Critical patent/JPS5985863A/ja
Publication of JPS6334223B2 publication Critical patent/JPS6334223B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP19737482A 1982-11-10 1982-11-10 多孔質基体への連続蒸着方法 Granted JPS5985863A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19737482A JPS5985863A (ja) 1982-11-10 1982-11-10 多孔質基体への連続蒸着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19737482A JPS5985863A (ja) 1982-11-10 1982-11-10 多孔質基体への連続蒸着方法

Publications (2)

Publication Number Publication Date
JPS5985863A true JPS5985863A (ja) 1984-05-17
JPS6334223B2 JPS6334223B2 (https=) 1988-07-08

Family

ID=16373435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19737482A Granted JPS5985863A (ja) 1982-11-10 1982-11-10 多孔質基体への連続蒸着方法

Country Status (1)

Country Link
JP (1) JPS5985863A (https=)

Also Published As

Publication number Publication date
JPS6334223B2 (https=) 1988-07-08

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