JPS5984019A - Combustion of monosilane gas in treating exhaust gas - Google Patents

Abstract

PURPOSE:To make it possible to burn monosilane gas completely without making SiO2 agglometrate at the top end of a nozzle by a method wherein an inner pipe is made shorter than an outer pipe and undulating vibrations are given to the combustion atmosphere around the top end of the nozzle formed by the inner pipe. CONSTITUTION:When the exhaust gases are injected from the nozzle 6a, air introduced from an air inlet pipe 23a is injected toward the top end of the nozzle 6a from a small cylinder 23 so that monosilane gas SiH4 is subjected to the air and burns explosively. As a result, undulating vibrations generating due to a convection resulting from the combustion of the monosilane gas, a swirling air current running against a distributor 28 and vibrations caused by a combustion flame running against the distributor 28 are transmitted to the exhaust gas combustion atmosphere A so that a metallic oxide SiO2 generating from the monosilane gas SiH4 falls down without adhering to the top end of the nozzle 6a. Consequently, it is possible to burn the monosilane gas completely without making SiO2 agglomerate at the top end of the nozzle.

Description

[Detailed description of the invention] Monosilane gas (5
iH4) When (exhaust gas) is oxidized and discharged as a harmless gas, the purifier composition in the gas treatment device is chemically oxidized and absorbed to fix metal hydrides in the exhaust gas and maintain constant temperature and humidity. In this method, when the metal hydride is sent from the reactor to the humidifier via a vacuum pump and blower, the metal hydride is fixed, but the fixed metal powder and exhaust gas are separated in the humidifier. However, the exhaust gas still contains a large amount of Il and metal hydrides.
Therefore, an oxidation-absorbing type purifying agent using a gas treatment tube not only has a lower oxidation-absorbing ability, but also has the drawback that intermediate products that act on oxidation regeneration are released together with the exhaust gas.

The present application was invented in view of these drawbacks, and in the stage before the exhaust gas is sent from the reactor to the blower, air is sent to the exhaust gas coming out of the reactor to burn the monosilane gas, and the metal oxide is separated from the exhaust gas in the combustor. In an exhaust gas treatment method in which exhaust gas is sent to a blower, a mono-silane gas injection nozzle that opens into the combustor is prevented from adhering to metal oxides at the opening end of the mono-silane gas injection nozzle.
The present invention relates to a silane gas combustion method.

Monosilane gas (5iH4) burns explosively when it comes in contact with air.

Conventionally, the combustion method uses a single tube nozzle, but the 5ift generated by combustion of 5i84 adheres to the tip of the nozzle and continues to grow, eventually clogging the nozzle. 5iO clustered into a mushroom shape due to the original pressure of the gas to be combusted.
z is peeled off from the nozzle tip with a popping sound.

If this condition continues, the combustion chamber will become full of these mushroom-like lumps, and cleaning the combustion chamber will become a part of maintenance. Furthermore, since the nozzle is blocked by the growth of 5 iOz produced, the combustion port is narrowed, and the toxicity of Sr 84 is exhausted without complete combustion.

Therefore, in this application, the combustion tube has a double structure, the inner tube is shorter than the outer tube, and the combustion is performed by applying wave-like vibration waves to the combustion atmosphere at the tip of the nozzle formed by the inner tube, or by making the combustion tube at a certain distance from the tip of the nozzle. It will burn at the tip of the 5%y tin (5i).
This invention is characterized by achieving complete combustion without forming lumps of h.

Now, to explain the embodiment, an exhaust gas diffuser header <2) is opened at the inner bottom of the humidifier (1), the diffuser header (2) is connected to the blower (3), and the blower (2) is connected to the blower (3). 3) and the reactor (4) via a vacuum pump (5).
), and the upper part of the humidifier (1) and the upper part of the gas treatment cylinder (river) sealed with a purifying agent are connected by a pipe (9).
The lower part of the gas treatment cylinder (8) and the one inch pipe are connected with a pipe (11).

Cyclone (Dismiss the pipe eel coming out from the bottom of the rule! (+
51 is interpolated.

Also, install the flow 11 regulating valve ae between the true 9 pump (5) and the blower (3) at one point on the pipe (6).
) If the pressure inside the pipe (3) decreases, air is automatically sucked into the pipe (6) between the vacuum pump (5) and the blower (3). combustor (7) and blower (3).
A pipe (6) K filter aη is provided in between.

Next, the combustor (to describe the force in detail, the first embodiment forms a double combustion tube 21 with a jacket body Q81 and an inner body (11), and the front and rear ends of the combustion tube (end) are connected to a presser plate (21). The blind plate cab K is sealed with a blind plate (221), and the blind plate cab K is opened from the inner shell 0!1 into which the nozzle (6a) connected to the pipe (6) installed from the vacuum pump (5) is inserted. Small diameter small cylinder C
231 with a connecting opening, and a small cylinder (the ridge of the chest is a nozzle (6
a) is fitted with a blind ring (2a), and a small cylinder (
2,1 is from the inner edge of the blind plate (22)! Inside fl1M (1
The nozzle (6a) is longer than the small cylinder (c) and is formed to protrude far beyond the inner cylinder a.

An air introduction pipe (23a) is connected to the upper part of the small cylinder (231).

An exhaust pipe (29) consisting of a double pipe is installed on the front lower surface of the combustion tube (,!
25a) is short and has an opening connected to the jacket body u81 at the inner end, and the small diameter inner pipe (25b) is long and has an outer pipe (25a).
The inner end of the inner pipe (25b) protrudes from the lower part of the inner pipe (1
The outer end is connected to the pipe (6) connected to the blower (3), and the lower end of the outer pipe (25a) is airtightly closed with the inner pipe (25b) by a blind ring (A). ing.

The inner end pressure of the nozzle (6a) is controlled by two gate-shaped rod-shaped sabots)
(J7) is fixed and supported) (on the opposite side of the inner nozzle (6a) of 2η). It consists of a chest attached.

Also, there is a manhole pipe C in the lower pressure cylinder OI where Zaboto 071 is located! Fix the upper end of 91 and manpole tube rx's
The cover body t'll++ is detachably attached to the lower part of the outer shell of the jacket by penetrating through the jacket body 0 (end).

(31) is a water supply pipe connected to the upper part of the rear end of the jacket girth; 1. (21 is the drainage pipe and the outer pipe (25
a) is prevented from being released to the outside.

C(゛( is the jacket body (181 and inner body 09
This is to keep the distance between the jacket body (+81
and the inner body (1!) are provided as appropriate between the cram, and the irregular shape is ring-shaped (a part has a notch and communicates with other waiting areas to allow water to flow easily).

According to the above structure, when the exhaust gas is injected from the nozzle (6a), the air introduced from the air introduction pipe (23a) is injected from the small cylinder (2) toward the tip of the nozzle (6a).・Silane gas (5i
H4) burns explosively when exposed to air, and the convection generated by the combustion, the vortex caused by the colliding flames, and the flame itself are
The wave-like vibrations caused by the vibrations caused by the collision with the exhaust gas (5) are transmitted to the combustion atmosphere (5) of the exhaust gas, and the metal oxide (Si(h) produced by the burned monosilane gas (SiH4) is
) falls to the bottom without adhering to the tip of the nozzle (6a).

Therefore, when a certain amount of metal oxide accumulates inside the manhole tube (I!ω), it is only necessary to open the lid (7) and throw it away.

In the second embodiment, a double combustion tube (20) is formed with the jacket circumference and the inner body u9, and the front and rear ends of the combustion tube 1 are sealed with a holding plate CD and a blind plate @, and the blind plate (2) is Vacuum pump inside (5)
A nozzle (6) connected to a pipe (6) installed from
A small cylinder (to) with a smaller diameter than the inner cylinder 0 into which a) is inserted is connected and opened, and the rear part of the small cylinder is closed with a blind ring (24) fitted with a nozzle (6a). d is blind&, (2
The length of the nozzle (6a) should be such that it protrudes from the inner end of the cylinder into the inner cylinder (In), and the nozzle (6a) is formed to protrude longer into the inner cylinder α9. An air introduction pipe (23a) is connected to the upper part.

An exhaust pipe (c) having the same configuration as the first embodiment is provided on the front lower surface of the combustion tube (2).

An intermediate cylinder C!41, which is longer than the nozzle (6a), is provided between the small cylinder and the nozzle (6a), and the rear end of the intermediate cylinder C341 (
The inner end (inner end) is open, and the front end (outer end) is airtightly sealed to connect and open the N2 nozzle CP51.

It is something to keep. The water supply pipe c31), the drain pipe (321), and the jammer plate (one port is the same as in the first embodiment, and are arranged to have the same function).

From the front j++r 4a configuration, when the exhaust gas is injected from the nozzle (6a), the air introduced from the 9 air introduction pipe (23a) is injected from the small cylinder 1.23) toward the tip of the nozzle (6a), so the nozzle ( The monosilane gas (SiH<) injected from 6a) burns explosively when it comes into contact with air.

At this time, when nitrogen gas is blown into the intermediate cylinder 64) from the N2 nozzle 09, the nitrogen gas flows into the open end of the nozzle (6a) to create a nitrogen gas atmosphere (mono-silane gas (Si)).
H+) burns before the nitrogen gas atmosphere (Bl).

That is, since a certain gap is created between the open end of the nozzle (6a) and the combustor, the metal oxide (SiOi:)
) falls to the bottom without adhering to the tip.

Therefore, when a certain amount of oxidized metal accumulates in the manhole tube c29), it is only necessary to open the lid (7) and discard it.

As described above, the present application is characterized by applying wave-like vibration to the combustion atmosphere of exhaust gas sent to a combustor to prevent metal oxide from adhering to the tip of a single pipe nozzle for exhaust gas injection, and A nitrogen gas atmosphere is formed at the tip of the single-tube nozzle for exhaust gas injection that protrudes from the vessel, and mono-silane gas is burned at the tip of this nitrogen gas atmosphere and placed at the tip of the single-tube nozzle for exhaust gas injection. It is characterized by preventing the adhesion of oxidized metals, so it has excellent features such as being able to completely burn the 8'i0z clumps without creating 8'i0z lumps by applying wavy vibration waves to the combustion atmosphere at the tip of the nozzle. It is something that you have.

[Brief explanation of the drawing]

FIG. 1 is a flow sheet of an exhaust gas treatment device, FIGS. 2 and 3 are enlarged sectional views of a combustor, and FIG. 4 is an enlarged sectional view of a nozzle portion of a conventional combustor. Patent applicant: 1 person other than Toyo Sanso Co., Ltd. Procedural amendment (method) August 1988, 3rd day, 1982 111-ku Kajicho 2-4-1 (4th floor, Saeki Building) 'I'T', L (252)
2551 6, hlii Number of inventions increasing from today 7h11 Positive subject drawings (Figure 4) and document confirming the right of representation 8,
Contents of hli it- 1.l as attached
ljMf3; distribution E! 1N5IC Ikuko 1111 Procedural Amendment (Voluntary) 1 Indication of the Case 1984 Patent Application No. 194452
□3, Compensating sound 4, Agent 6, Number of inventions increased by amendment 7 Subject of amendment Ming #I11 Yoi full text correction Shoji Gansho No. 57-194452) Name of invention Silane gas combustion in exhaust gas treatment Method 2 Claims l) The exhaust gas in the reactor is sucked by a vacuum pump, and the sucked exhaust gas is sent to a combustor and burned in the combustor, separated into oxides and exhaust gas, which are then discharged from the combustor. Exhaust gas is sent to a filter, sent to a humidifier using a blower, and the humidified exhaust gas is sent to a gas treatment tube for cleaning.The exhaust gas is then sent to a cyclone for exhaust.In exhaust gas treatment, the exhaust gas sent to a combustor is combusted. A silane gas combustion method in an exhaust gas treatment device, characterized in that wavy vibrations are applied to the atmosphere to prevent metal oxide from adhering to the tip of a single pipe nozzle for injecting exhaust gas. '2) The exhaust gas in the reactor is sucked by a vacuum pump, the sucked exhaust gas is sent to the combustor, where it is burned and separated into oxides and exhaust gas, and the exhaust gas discharged from the combustor is sent to the filter. The end of the single pipe nozzle for exhaust gas injection protrudes into the combustor during exhaust gas treatment, where the humidified exhaust gas is sent to a humidifier using a blower, and then sent to a processing tube for cleaning, and then sent to a cyclone for exhaust gas. An exhaust gas treatment method characterized by forming a nitrogen gas atmosphere in the air and burning silane gas at the tip of the nitrogen gas atmosphere to prevent metal oxide from adhering to the tip of a single pipe nozzle for exhaust gas injection. silane gas combustion method. 3. Detailed Description of the Invention When silane gas emitted from a reactor in a semiconductor manufacturing factory is oxidized and discharged as a harmless gas, metallic hydrogen in the exhaust gas is chemically oxidized and absorbed from the cleaning agent composition in the gas treatment device. In the method of fixing metal hydrides and purifying them in a gas treatment tube while maintaining a constant temperature and humidity, if the metal hydrides are sent from the reactor to a humidifier via a vacuum pump and blower, the metal hydrides are fixed but the humidifier Even if the metal powder fixed in the interior of the exhaust gas is separated from the exhaust gas, the exhaust gas still contains a large amount of metal hydride. Not only does this decrease, but there is also the drawback that intermediate products that act on oxidative regeneration are released together with the exhaust gas. The present application was invented in view of these drawbacks, and in the stage before sending the exhaust gas from the reactor to the blower, air is sent to the exhaust gas coming out of the reactor to burn the silane gas, and the oxidized metal is separated from the exhaust gas in the combustor. In an exhaust gas treatment method in which silane gas is sent to a blower, metal oxides are prevented from adhering to the opening of the silane gas injection nozzle that opens in the combustor.
The present invention relates to a silane gas combustion method in exhaust gas treatment according to E. Silane gas burns when it comes into contact with air. Conventionally, the combustion method uses a single tube nozzle. Hydrogen oxide, which is produced by combustion of silane gas, adheres to the tip of the nozzle and continues to grow, eventually clogging the nozzle. When this happens, the mushroom-shaped hydrogen oxide is peeled off from the nozzle tip due to the original pressure of the combustion gas. If this condition continues, the combustion chamber will become full of these mushroom-like lumps, and cleaning the combustion chamber will become a part of maintenance. Furthermore, since the nozzle is blocked by the growth of the generated hydrogen oxide, the combustion port is narrowed and complete combustion does not occur, and the toxicity of the silane gas is exhausted as it is. Therefore, in this application, the combustion tube has a double structure, the inner tube has a shorter comb than the outer tube, and the combustion is performed by applying wave-like vibration waves to the combustion atmosphere at the tip of the nozzle formed by the inner tube. This invention is characterized by completely burning the hydrogen oxide at the tip of the nozzle without creating a lump of hydrogen oxide at the tip of the nozzle. Now, to explain the embodiment, an exhaust gas diffuser header (2) is opened at the inner bottom of the humidifier (1), the diffuser header (2) is connected to a blower (3), and the blower ( 3) and the reactor (4) via a vacuum pump (5).
), and the upper part of the humidifier (1) and the upper part of the gas treatment cylinder (8) containing a purifying agent are connected by the nokuib (9), and the lower part of the gas treatment cylinder (8) is connected to the cyclone. (Connect to Iυ with a pipe. Open the pipe (12+) coming out from the bottom of Cyclone 01 to the bottom of the water seal separator. Furthermore, connect the refrigerator (14) inside the humidifier (1). The connected cooling pipe 05) is inserted between the vacuum pump (5) and the blower (3) at one point on the pipe (6). 6) If the internal pressure drops, the air is automatically sucked and air is sent into the pipe, and the pipe is placed between the vacuum pump (5) and the blower (3) at (
6), the combustor (7) is installed, and 'f! '9A machine ('7
) and the blower (3), the pipe (6) is provided with a filter (lη).Next, to describe the combustor (power) in detail, the first embodiment has a jacket barrel (l barrel and inner barrel a1). A double combustion tube (A) is formed, and the front and rear ends of the combustion tube are fitted with holding plates (2 pieces and a blind plate G!2).
1 plate (23 has a nozzle (6a) connected to a pipe (6) installed from a vacuum pump (5) inside)
A small cylinder (c) with a smaller diameter than 11 is inserted into the inner cylinder (a small cylinder (c) is connected and opened, and the rear part of the small cylinder (2) is closed with a blind ring G24 fitted with a nozzle (6a)), and further a small cylinder ( The length of the blind plate (c) is such that it protrudes from the inner end of the blind plate (240) into the inside 118I, and the nozzle (6a) is longer than the small cylinder (c).
19 and is formed to protrude. An air introduction pipe (23a) is connected to the upper part of the small cylinder (c). Exhaust pipe G consisting of a double pipe on the front lower surface of the combustion tube (A)
! 51 and exhaust pipe G! ■ Large diameter outer pipe (2
Sa) is short and the inner end is the jacket body (connects and opens in 1 second,
The small diameter inner pipe (25b) is long and the outer pipe (25a)
The inner end of the inner pipe (25b) is connected to the inner shell 0, the outer end is connected to the pipe (6) connected to the blower (3), and the lower end of the outer pipe (25a) is The inner pipe (25b) is airtightly closed with a blind ring 06. Two gate-shaped rod-shaped supports QD are fixed to the inner end of the nozzle (6a), and the inner part of the support Q'0 (nozzle (6a)
On the opposite side of a), a triangular plate is installed radially and a nozzle (
Attach the distributor (to) assembled in the shape of a single mountain to the 6a) side, and also attach the support (to) to the support (27).
Inside +11ii at the bottom where 1 is located! (Fix the upper end of the manhole tube (2!
It is attached removably. ! 311 is a water supply pipe connected to the upper part of the rear end of one jacket, and 1321 is a drainage pipe connected to the outer pipe (25
a) Open the 1/C connection opening, supply water from the water supply pipe (3+), drain water from the drainage pipe +33, and cool the combustion tube (2(ll). This is to keep the distance between the shells U81 and the inner shell U81 parallel, and it is provided appropriately between the jacket shell U81 and the inner shell U81, and the shell shape is not ring-shaped, but has a part cutout so that it can communicate with other spaces to easily drain water. Due to the above structure, when the exhaust gas is injected from the nozzle (6a), the air introduced from the air introduction pipe (Z3a) is injected from the small cylinder (c) toward the tip of the nozzle (6a). The 7 run gas injected from (6a) touches the empty cartridge and burns, and the convection and distribution generated by the combustion
Wave-like vibrations caused by the vortex caused by the flame colliding with the distributor (c) and the vibration of the flame itself colliding with the distributor (a) are transmitted to the combustion atmosphere of the exhaust gas (A), and are caused by the combusted silane gas. Do not let it adhere to the tip of the silicon oxide nozzle (6a) (it will fall to the bottom. Therefore, when a certain amount of silicon oxide accumulates inside the manhole tube (2), you can open the lid 0 (11) and throw it away. In the second embodiment, a double combustion tube C!υ is formed with a jacket body (21
1) and a blind plate Q'IJ, and the blind plate (a) has an inner shell (a) in which a nozzle (6a) connected to a pipe (6) from a vacuum pump (5) is inserted. A small cylinder (c) with a smaller diameter than 19 is connected and opened, and the rear part of the small cylinder (c) is closed with a blind ring (24) fitted with a nozzle (6a),
Furthermore, the small cylinder @ is a blind plate cl! From the inner end of each to the inner body (19
The length of the nozzle (6a) is such that it protrudes inward, and the nozzle (6a) is formed to protrude into the inner body a1 longer than the small cylinder (c). Moreover, an air introduction pipe (23a) is connected to the upper part of the small cylinder e31. An exhaust pipe C having the same configuration as the first embodiment is provided on the lower front surface of the combustion tube (A). A small cylinder (an intermediate cylinder (34) longer than the nozzle (6a) is provided between the two cylinders and the nozzle (6a), and the rear end (inner side) of the intermediate cylinder +34 is open and the front end (outer end) is airtightly sealed. The Nt nozzle (351) is connected and opened. Also, a manhole pipe Q10 having the same configuration as the first embodiment is provided at the lower part where the intermediate pipe 1341 is opened. .Water supply pipe (31), drainage pipe (32)
1 and the jammer plate r31 are the same as those in the first embodiment and have the same function. With the above configuration, when the exhaust gas is injected from the nozzle (6a), the air introduced from the air introduction pipe (23a) is injected from the small cylinder (23) toward the tip of the nozzle (6a), so that the silane gas injected from the nozzle (6a) burns when exposed to air. At this time, when nitrogen gas is blown into the intermediate cylinder (341) from the N2 nozzle C35+, the nitrogen gas creates a nitrogen gas atmosphere (13) at the open end of the nozzle '(6a), so the silane gas is released before the nitrogen gas atmosphere (B). In other words, since a certain gap is created between the open end of the nozzle (6a) and the combustor, silicon oxide falls to the bottom without adhering to the tip of the nozzle (6a). Once a certain amount of silicon oxide has accumulated inside, you can open the lid (3) and throw it away. It is characterized by preventing silicon oxide from adhering to the tip of a single tube nozzle for exhaust gas injection, and forming a nitrogen gas atmosphere at the tip of the single tube nozzle for exhaust gas injection protruding into the combustor, The silane gas is burned at the tip of this nitrogen gas atmosphere to prevent metal oxide from adhering to the tip of the single pipe nozzle for exhaust gas injection, so it creates wavy vibration waves in the combustion atmosphere at the tip of the nozzle. It has excellent features such as being able to completely burn the oxygen without creating a lump of oxygen and silicon at the tip of the nozzle by either giving it a certain amount of oxygen and burning it or burning it at a certain distance from the tip of the nozzle. Brief explanation of weak drawings Figure 1 is a flow sheet of an exhaust gas treatment device, Figures 2 and 3 are enlarged sectional views of the combustor, and Figure 4 is an enlarged sectional view of the nozzle part of a conventional combustor. Patent Applicant Toyo Sanso Co., Ltd. Procedural Amendment (Voluntary) June 0, 1920 Showa F1a (3) Name of Toyo Sanso Co., Ltd. (4, Agent) 6 Number of inventions will increase due to Urasa 7. Amendment to the subject of amendment The specification of the patent application No. 194452/1987 dated June 1988 (full text correction interval [1'] submitted on April 26, 1988) is corrected as follows. Note (1) "Hydrogen oxide" in the 16th line of the specification, the 19th line of the same page, the 3rd line of the 4th page, and the 11th line of the same page.
"Silicon oxide" is corrected. (2) "Oxygen" in line 20 of page 10 is corrected to "oxidation." (3) In the 6th line of page 8, it says ``Silicon oxide.''
"Silicon oxide is," he corrected. Patent applicant: Toyo Sanso Co., Ltd.

Claims (1)

[Claims] (11 Reactor, the exhaust gas inside is sucked by a vacuum pump, the sucked exhaust gas is sent to a combustor, burned in the combustor, separated into oxides and exhaust gas, and discharged from the combustor. In the exhaust gas treatment process, in which the exhaust gas is sent to a cyclone and exhausted after being purified, wavy vibrations are applied to the combustion atmosphere of the exhaust gas sent to the combustor, causing metal oxides to adhere to the tip of the single pipe nozzle for exhaust gas injection. A mono-silane gas combustion method for exhaust gas treatment, which is characterized by preventing Exhaust gas treatment is to separate the exhaust gas from the combustor, send it to a filter, send it to a blower, send it to a filter, send the humidified exhaust gas to a processing cylinder, clean it, and then send the exhaust gas to a cyclone for exhaust. , the combustor VC/12'
A nitrogen gas atmosphere is formed at the tip of the protruding single-tube nozzle for exhaust gas injection, and the silane gas in the mono is burned at the tip of this nitrogen gas atmosphere, and a metal oxide is formed at the tip of the single-tube nozzle for exhaust gas injection. A mono-silane gas combustion method for exhaust gas treatment characterized by preventing the adhesion of silane.