JPS598332A - Shifter for sample - Google Patents
Shifter for sampleInfo
- Publication number
- JPS598332A JPS598332A JP57116800A JP11680082A JPS598332A JP S598332 A JPS598332 A JP S598332A JP 57116800 A JP57116800 A JP 57116800A JP 11680082 A JP11680082 A JP 11680082A JP S598332 A JPS598332 A JP S598332A
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- sample
- vacuum
- conductive
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 238000005192 partition Methods 0.000 claims abstract description 6
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- 230000005291 magnetic effect Effects 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 abstract description 3
- 239000010959 steel Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 238000005086 pumping Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 208000019901 Anxiety disease Diseases 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は電子線描画装量等に用いられる真空中で作動す
る試料移動装置に関し、特に高い真空度を維持するとと
もに試料室内の磁場変動を極力小さくした試料移動装置
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample moving device that operates in vacuum and is used in electron beam lithography, and more particularly to a sample moving device that maintains a high degree of vacuum and minimizes magnetic field fluctuations within a sample chamber. .
電子線描画装置用試料台（以下、単に「試料台」という
。）では、高真空中での作動に加えて、試料移動時に試
料室内の磁場を変動させないという条件が課せられる。In addition to operating in a high vacuum, a sample stage for an electron beam lithography apparatus (hereinafter simply referred to as a "sample stage") is required to not fluctuate the magnetic field within the sample chamber during sample movement.
そのため、従来は１例えば第１図に示す如く、モータ１
等の強磁性体は試料室１０の外部に設け、回転導入真空
シール２等を介して前記試料室１０内の送りねじ３を回
転させて試料台４を移動させていた。しかしながら、こ
の方法では前記磁場を変動させないという条件から送り
ねじ３、ナツト５等は完全な非磁性材料で構成しなけれ
ばならず、これらの加工が困難である上に耐久性に劣る
という欠点があった。Therefore, conventionally, as shown in FIG.
A ferromagnetic material such as the above was provided outside the sample chamber 10, and the sample stage 4 was moved by rotating the feed screw 3 inside the sample chamber 10 via the rotation introduction vacuum seal 2 or the like. However, in this method, the feed screw 3, nut 5, etc. must be made of completely non-magnetic material in order to keep the magnetic field from fluctuating, which has the drawbacks of difficult machining and poor durability. there were.
これらの欠点を解消するために、第２図に示す如く送シ
ねじ３とナツト５は試料室ｌｏ外の大気中に設け、ベロ
ーズ６で真空シールした駆動ロッド７で試料室１０内の
試料台４を移動させる方法が考えられている。しかし、
この方法においてもベローズ６の耐久性に難点であり、
また駆動ロッドには大気圧による大きな力が加わること
から、送シねじ等の駆動系が大型化するという欠点があ
った。In order to eliminate these drawbacks, as shown in FIG. A method of moving 4 is being considered. but,
Even with this method, there is a problem with the durability of the bellows 6.
Furthermore, since a large force due to atmospheric pressure is applied to the drive rod, there is a drawback that the drive system including the feed screw becomes large.
本発明は上記事情に鑑みてなされたもので、その目的と
するところは、従来の試料移動装置における上述の如き
欠点を除去し１．高い真空度を維持しつつ試料室１０の
磁場変動を極力小さくするとともに耐久性に富む試料移
動装置を提供するごとにある。The present invention has been made in view of the above circumstances, and its purpose is to eliminate the above-mentioned drawbacks of conventional sample moving devices. The objective is to provide a highly durable sample moving device that minimizes magnetic field fluctuations in the sample chamber 10 while maintaining a high degree of vacuum.
本発明の上記目的は、真空容器および磁気シールドの役
割をはたす試料室と該試料室内に設けられた移動可能な
試料台と前記試料室外に設けられた駆動機構および該駆
動機構と前記試料台とを接続する伝導機構とから成る試
料移動装置において、前記伝導機構を前記試料室に隣接
した第２の真空容器内に収容するとともに、該第２の真
空容器と前記試料室との隔壁を前記伝導機構が貫通する
部分に差動排気シールを設けたことを特徴とする試料移
動装置によって達成される。The above object of the present invention is to provide a sample chamber that serves as a vacuum container and a magnetic shield, a movable sample stand provided within the sample chamber, a drive mechanism provided outside the sample chamber, and a link between the drive mechanism and the sample stand. a conduction mechanism that connects the conduction mechanism, the conduction mechanism is housed in a second vacuum container adjacent to the sample chamber, and a partition wall between the second vacuum container and the sample chamber is connected to the conduction mechanism. This is achieved by a sample moving device characterized by providing a differential pumping seal in the portion through which the mechanism passes.
以下、本発明の実施例を図面に基づいて詳細に説明する
。Embodiments of the present invention will be described in detail below with reference to the drawings.
第３図は本発明の一実施例を示す試料移動装置の側面図
である。第３図において、符号１〜７および１０は第１
図、第２図に示したと同じ構成要素を表わしており、８
は差動排気シール、１１は試料室１０の真空排気系とは
別の真空排気系（いずれも図示されていない。）によっ
て５Ｘ１０−’ｔｏｒｒ程度の真空に引かれている駆動
系室である。FIG. 3 is a side view of a sample moving device showing one embodiment of the present invention. In FIG. 3, symbols 1 to 7 and 10 are the first
It represents the same components as shown in Fig. 2, and 8
11 is a differential pumping seal, and 11 is a drive system chamber which is evacuated to a vacuum of about 5×10-'torr by a vacuum pumping system (none of which is shown) that is separate from the vacuum pumping system of the sample chamber 10.
上述の如く構成された本実施例装置においては、モータ
１の回転は回転シール２を介して前記駆動系室１１内の
送シねじ３に伝達される。これを受動ロッド７によシ、
試料台４に伝達される。前記隔壁の前記駆動ロッド７の
貫通部には、前記差動排気シール８が設けられていて、
分子流的シールの役割をはたしており、これにより、駆
動系室１１内の真空度が試料室１０内の真空度が１招電
度悪くても、試料室１０内の高真空を容易に維持するこ
とが可能となる。In the apparatus of this embodiment configured as described above, the rotation of the motor 1 is transmitted to the feed screw 3 in the drive system chamber 11 via the rotary seal 2. Transfer this to the passive rod 7,
The signal is transmitted to the sample stage 4. The differential exhaust seal 8 is provided in the penetrating portion of the drive rod 7 of the partition wall,
It plays the role of a molecular flow seal, thereby easily maintaining a high vacuum in the sample chamber 10 even if the degree of vacuum in the drive system chamber 11 and the degree of vacuum in the sample chamber 10 are one degree worse. becomes possible.
なお、上記実施例においては、試料台を一次元方向に移
動させる場合を示したが、これは二次元方向に移動させ
る如く構成することも可能であり、その場合、例えば、
本出願人が先に特願昭５４−４１１０８号に提案した如
き移動装置を用いると良い。In the above embodiment, the sample stage is moved in one dimension, but it can also be configured to move in two dimensions, and in that case, for example,
It is preferable to use a moving device such as that previously proposed by the present applicant in Japanese Patent Application No. 54-41108.
以上述べた如く、本発明によれば、真空容器および磁気
シールドの役割ヲハたす試料室と該試料室内に設けられ
た移動可能な試料台と前記試料室外に設けられた駆動機
構および該駆動機構と前記試料台とを接続する伝導機構
とから成る試料移動装置において、前記伝導機構を前記
試料室に隣接した第２の真空容器内に収容するとともに
、該第２の真空容器と前記試料室との隔壁を前記伝導機
構が貫通する部分に差動排気シールを設けたので、伝導
機構を構成する送りねじ、ナツト、ベアリング等は耐久
性にすぐれた鋼製のものを用いることができ、また、こ
れらを収容する駆動系室（第２の真空容器〕内は特に高
真空の必要がないことから、潤滑剤やリミットスイッチ
の材質等に対する制約もなくなるという顕著な効果を奏
するものである。As described above, according to the present invention, there is provided a sample chamber that serves as a vacuum container and a magnetic shield, a movable sample stage provided within the sample chamber, a drive mechanism provided outside the sample chamber, and the drive mechanism. and a conduction mechanism connecting the sample stage and the conduction mechanism, wherein the conduction mechanism is housed in a second vacuum container adjacent to the sample chamber, and the second vacuum container and the sample chamber are connected to each other. Since a differential exhaust seal is provided at the part where the transmission mechanism penetrates the partition wall, the feed screws, nuts, bearings, etc. that make up the transmission mechanism can be made of highly durable steel. Since there is no need for a particularly high vacuum in the drive system chamber (second vacuum container) that accommodates these, there is a remarkable effect that there are no restrictions on the lubricant, the material of the limit switch, etc.
第１図、第２図は従来の装置を示す側面図、第３図は本
発明の一実施例を示す側面図である。
１・・・モータ、２・・・回転シール、３・・・送りね
じ、４・・・試料台、５・・・ナツト、７・・・駆動ロ
ッド、８・・・差動排気シール、１０・・・試料室。
１１ 、％Ｅ ’ｆｌＪ 系焚。
代理人 弁理士 薄田利幸
第 １ 月
第 ２ 悶
■ ３ 図
第１頁の続き
０発 明 者 小俣富士夫
武蔵野市緑町３丁目９番１１号日
本電信電話公社武蔵野電気通信
研究所内
■出 願 人 日本電信電話公社1 and 2 are side views showing a conventional device, and FIG. 3 is a side view showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Motor, 2... Rotating seal, 3... Feed screw, 4... Sample stage, 5... Nut, 7... Drive rod, 8... Differential exhaust seal, 10 ...Sample room.
11, %E'flJ system firing. Agent: Toshiyuki Usuda, Patent Attorney 1st Month 2nd Anguish 3 Continuation of Figure 1 Page 0 Inventor: Fujio Omata 3-9-11 Midoricho, Musashino City, Musashino Telecommunications Research Institute, Nippon Telegraph and Telephone Public Corporation Applicant: Nippon Telegraph Corporation telephone corporation
Claims (1)
と該試料室内に設けられた移動可能な試料台と前記試料
室外に設けられた駆動機構および該５駆動機構と前記試
料台とを接続する伝導機構とから成る試料移動装置にお
いて、前記伝導機構を前記試料室に隣接した第２の真空
容器内に収容するとともに、該第２の真空容器と前記試
料室との隔壁を前記伝導機構が貫通する部分に差動排気
シールを設けたこと′ｆ！：％徴とする試料移動装置。The role of the vacuum container and the magnetic shield'f: is to connect a sample chamber to be evacuated, a movable sample stand provided within the sample chamber, a drive mechanism provided outside the sample chamber, and the drive mechanism and the sample stand. In a sample moving device comprising a conduction mechanism, the conduction mechanism is housed in a second vacuum container adjacent to the sample chamber, and the conduction mechanism connects a partition wall between the second vacuum container and the sample chamber. A differential exhaust seal was provided at the penetrating part'f! : Sample moving device with percentage characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57116800A JPS598332A (en) | 1982-07-07 | 1982-07-07 | Shifter for sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57116800A JPS598332A (en) | 1982-07-07 | 1982-07-07 | Shifter for sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS598332A true JPS598332A (en) | 1984-01-17 |
Family
ID=14695973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57116800A Pending JPS598332A (en) | 1982-07-07 | 1982-07-07 | Shifter for sample |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS598332A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020129988A1 (en) * | 2018-12-20 | 2020-06-25 | Ntn株式会社 | Hub unit having steering function and vehicle equipped with same |
-
1982
- 1982-07-07 JP JP57116800A patent/JPS598332A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020129988A1 (en) * | 2018-12-20 | 2020-06-25 | Ntn株式会社 | Hub unit having steering function and vehicle equipped with same |
| JP2020100178A (en) * | 2018-12-20 | 2020-07-02 | Ntn株式会社 | Hub unit with steering capability, and vehicle having the same |
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