JPS5983282U - 超高真空用フランジ継手構造 - Google Patents

超高真空用フランジ継手構造

Info

Publication number
JPS5983282U
JPS5983282U JP17937982U JP17937982U JPS5983282U JP S5983282 U JPS5983282 U JP S5983282U JP 17937982 U JP17937982 U JP 17937982U JP 17937982 U JP17937982 U JP 17937982U JP S5983282 U JPS5983282 U JP S5983282U
Authority
JP
Japan
Prior art keywords
joint structure
flange joint
ultra
high vacuum
gasket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17937982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139187Y2 (enrdf_load_stackoverflow
Inventor
石丸　肇
Original Assignee
高エネルギ−物理学研究所長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 高エネルギ−物理学研究所長 filed Critical 高エネルギ−物理学研究所長
Priority to JP17937982U priority Critical patent/JPS5983282U/ja
Publication of JPS5983282U publication Critical patent/JPS5983282U/ja
Application granted granted Critical
Publication of JPS6139187Y2 publication Critical patent/JPS6139187Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
JP17937982U 1982-11-27 1982-11-27 超高真空用フランジ継手構造 Granted JPS5983282U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17937982U JPS5983282U (ja) 1982-11-27 1982-11-27 超高真空用フランジ継手構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17937982U JPS5983282U (ja) 1982-11-27 1982-11-27 超高真空用フランジ継手構造

Publications (2)

Publication Number Publication Date
JPS5983282U true JPS5983282U (ja) 1984-06-05
JPS6139187Y2 JPS6139187Y2 (enrdf_load_stackoverflow) 1986-11-11

Family

ID=30389215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17937982U Granted JPS5983282U (ja) 1982-11-27 1982-11-27 超高真空用フランジ継手構造

Country Status (1)

Country Link
JP (1) JPS5983282U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63152988U (enrdf_load_stackoverflow) * 1987-03-27 1988-10-06
KR100915890B1 (ko) 2008-07-22 2009-09-07 윌로펌프 주식회사 자동펌프

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011117469A (ja) * 2009-11-30 2011-06-16 Ihara Science Corp 傾斜リング

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5680581A (en) * 1979-12-03 1981-07-01 Varian Associates Sealed flange joint with easy removing metal gasket
JPS57149693A (en) * 1981-03-09 1982-09-16 Kouenerugii Butsurigaku Kenkyu Flange joint structure for ultra-high vacuum

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5680581A (en) * 1979-12-03 1981-07-01 Varian Associates Sealed flange joint with easy removing metal gasket
JPS57149693A (en) * 1981-03-09 1982-09-16 Kouenerugii Butsurigaku Kenkyu Flange joint structure for ultra-high vacuum

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63152988U (enrdf_load_stackoverflow) * 1987-03-27 1988-10-06
KR100915890B1 (ko) 2008-07-22 2009-09-07 윌로펌프 주식회사 자동펌프

Also Published As

Publication number Publication date
JPS6139187Y2 (enrdf_load_stackoverflow) 1986-11-11

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