JPS5983282U - Flange joint structure for ultra-high vacuum - Google Patents
Flange joint structure for ultra-high vacuumInfo
- Publication number
- JPS5983282U JPS5983282U JP17937982U JP17937982U JPS5983282U JP S5983282 U JPS5983282 U JP S5983282U JP 17937982 U JP17937982 U JP 17937982U JP 17937982 U JP17937982 U JP 17937982U JP S5983282 U JPS5983282 U JP S5983282U
- Authority
- JP
- Japan
- Prior art keywords
- joint structure
- flange joint
- ultra
- high vacuum
- gasket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Gasket Seals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案の一実施例としての超高真空用フランジ継手
構造を示すもので、第１図はその縦断面図、第２図は第
１図の■部を拡大して示す部分断面図である。
１・・・・・・アルミニウム製パイプ、２・・・・・・
アルミニウム合金製フランジ、２ａ・・・・・・ナイフ
ェツジ、２ａ′・・・・・・ナイフェツジ先端、２ａ’
−−−−−−ナイフェツジ面部、３・・・・・・環状
スペース、４・・・・・・軟質金属製の環状ガスケット
、５・・・・・・締付ボルト、６・・・・・・締付ナツ
ト、７・・・・・・ワッシャ。The figures show a flange joint structure for ultra-high vacuum as an embodiment of the present invention. Fig. 1 is a longitudinal sectional view thereof, and Fig. 2 is a partial sectional view showing the enlarged section ■ in Fig. 1. be. 1... Aluminum pipe, 2...
Aluminum alloy flange, 2a... Knife fitting, 2a'... Knife fitting tip, 2a'
-------- Knife joint surface, 3... Annular space, 4... Soft metal annular gasket, 5... Tightening bolt, 6...・Tightening nut, 7... washer.
Claims (1)
状スペース内に、軟質金属で作られた環状ガスケットを
介装され、このガスケットに食い込むようにして密着す
べく上記環状スペースの内壁にナイフェツジが形成され
て、上記ガスケツドグ鏡面研削を施された表面をそなえ
るとともに、上記ナイフェツジが鏡面研削を施された面
部にイオンブレーティング処理による窒化チタンまたは
窒化クロムの硬質表層をそなえていることを特徴とする
、超高真空用フランジ継手構造。An annular gasket made of soft metal is interposed in the annular space formed between the opposing aluminum alloy flanges, and a knife is formed on the inner wall of the annular space so as to bite into the gasket and fit tightly. , the above-mentioned gasket dog has a mirror-ground surface, and the knife has a hard surface layer of titanium nitride or chromium nitride formed by ion-blating treatment on the mirror-ground surface. Vacuum flange joint structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937982U JPS5983282U (en) | 1982-11-27 | 1982-11-27 | Flange joint structure for ultra-high vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937982U JPS5983282U (en) | 1982-11-27 | 1982-11-27 | Flange joint structure for ultra-high vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5983282U true JPS5983282U (en) | 1984-06-05 |
| JPS6139187Y2 JPS6139187Y2 (en) | 1986-11-11 |
Family
ID=30389215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17937982U Granted JPS5983282U (en) | 1982-11-27 | 1982-11-27 | Flange joint structure for ultra-high vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5983282U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152988U (en) * | 1987-03-27 | 1988-10-06 | ||
| KR100915890B1 (en) | 2008-07-22 | 2009-09-07 | 윌로펌프 주식회사 | Automatic pump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011117469A (en) * | 2009-11-30 | 2011-06-16 | Ihara Science Corp | Inclination ring |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5680581A (en) * | 1979-12-03 | 1981-07-01 | Varian Associates | Sealed flange joint with easy removing metal gasket |
| JPS57149693A (en) * | 1981-03-09 | 1982-09-16 | Kouenerugii Butsurigaku Kenkyu | Flange joint structure for ultra-high vacuum |
-
1982
- 1982-11-27 JP JP17937982U patent/JPS5983282U/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5680581A (en) * | 1979-12-03 | 1981-07-01 | Varian Associates | Sealed flange joint with easy removing metal gasket |
| JPS57149693A (en) * | 1981-03-09 | 1982-09-16 | Kouenerugii Butsurigaku Kenkyu | Flange joint structure for ultra-high vacuum |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152988U (en) * | 1987-03-27 | 1988-10-06 | ||
| KR100915890B1 (en) | 2008-07-22 | 2009-09-07 | 윌로펌프 주식회사 | Automatic pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6139187Y2 (en) | 1986-11-11 |
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