JPS5980956U - ion gun - Google Patents

ion gun

Info

Publication number
JPS5980956U
JPS5980956U JP17684182U JP17684182U JPS5980956U JP S5980956 U JPS5980956 U JP S5980956U JP 17684182 U JP17684182 U JP 17684182U JP 17684182 U JP17684182 U JP 17684182U JP S5980956 U JPS5980956 U JP S5980956U
Authority
JP
Japan
Prior art keywords
ion
ion source
ion gun
ion beam
projection system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17684182U
Other languages
Japanese (ja)
Other versions
JPS6345735Y2 (en
Inventor
住友　征二
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP17684182U priority Critical patent/JPS5980956U/en
Publication of JPS5980956U publication Critical patent/JPS5980956U/en
Application granted granted Critical
Publication of JPS6345735Y2 publication Critical patent/JPS6345735Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の一実施例の側面図である。 １・・・第１のイオン源、２・・・収束レンズ、３・・
・第２のイオン源、４・・・対物レンズ、５・・・試料
、ａ。 Ａ・・・イオン化室、ｆｌ、　ｆ２−・・フィラメント
、ｇｌ。 ｇ２・・・グリッド、Ｓｌ・・・第１絞り、Ｓ２・・・
第２絞り、ｓｈ・・・イオン化室Ａの後側壁に穿設した
絞り孔。The drawing is a side view of an embodiment of the present invention. 1... First ion source, 2... Converging lens, 3...
- Second ion source, 4... Objective lens, 5... Sample, a. A... Ionization chamber, fl, f2-... Filament, gl. g2...grid, Sl...first aperture, S2...
Second throttle, sh... A throttle hole bored in the rear wall of the ionization chamber A.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 第１のイオン源と収束レンズと対物レンズとで第１のイ
オン源により形成されるイオンビームの縮小投影系を構
成し、上記収束レンズと対物レンズとの間に上記第１の
イオン源により形成されるイオンビームが貫通する貫通
孔を有する第２のイオン源を上記縮小投影系の光軸を軸
として配置したことを特徴とするイオン銃。The first ion source, the convergent lens, and the objective lens constitute a reduction projection system for the ion beam formed by the first ion source, and the ion beam formed by the first ion source is formed between the convergent lens and the objective lens. An ion gun characterized in that a second ion source having a through hole through which an ion beam passes through is arranged around the optical axis of the reduction projection system.
JP17684182U 1982-11-22 1982-11-22 ion gun Granted JPS5980956U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17684182U JPS5980956U (en) 1982-11-22 1982-11-22 ion gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17684182U JPS5980956U (en) 1982-11-22 1982-11-22 ion gun

Publications (2)

Publication Number Publication Date
JPS5980956U true JPS5980956U (en) 1984-05-31
JPS6345735Y2 JPS6345735Y2 (en) 1988-11-28

Family

ID=30384357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17684182U Granted JPS5980956U (en) 1982-11-22 1982-11-22 ion gun

Country Status (1)

Country Link
JP (1) JPS5980956U (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410972A (en) * 1977-06-27 1979-01-26 Mitsubishi Electric Corp Switching device
JPS56149370A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149371A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149365A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149367A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149366A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149368A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410972A (en) * 1977-06-27 1979-01-26 Mitsubishi Electric Corp Switching device
JPS56149370A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149371A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149365A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149367A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149366A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash
JPS56149368A (en) * 1980-04-21 1981-11-19 Kawasaki Heavy Ind Ltd Manufacture of hardened body chiefly based on coal ash

Also Published As

Publication number Publication date
JPS6345735Y2 (en) 1988-11-28

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