JPS5894254U - Optical device for electron beam holography - Google Patents
Optical device for electron beam holographyInfo
- Publication number
- JPS5894254U JPS5894254U JP18806381U JP18806381U JPS5894254U JP S5894254 U JPS5894254 U JP S5894254U JP 18806381 U JP18806381 U JP 18806381U JP 18806381 U JP18806381 U JP 18806381U JP S5894254 U JPS5894254 U JP S5894254U
- Authority
- JP
- Japan
- Prior art keywords
- optical device
- electron beam
- lens
- electron
- beam holography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Holo Graphy (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は、従来の電子線ホログラフィ−用光学装置の例
を示す図、第2図は、従来装置の例において、電子線プ
リズムの位置とホログラムに記録できる試料領域の大き
さの関係を示す図、第3図は本考案の一実施例を示す図
である。
12・・・電界放射形電子銃、2・・・コンデンサレン
ズ、3・・・試料、4・・・対物レンズ、5・・・中間
レンズ、8・・・電子線プリズム、10・・・投射レン
女、11・・・フィルム。Fig. 1 shows an example of a conventional optical device for electron beam holography, and Fig. 2 shows the relationship between the position of the electron beam prism and the size of the sample area that can be recorded in a hologram in an example of the conventional device. FIG. 3 is a diagram showing an embodiment of the present invention. 12... Field emission type electron gun, 2... Condenser lens, 3... Sample, 4... Objective lens, 5... Intermediate lens, 8... Electron beam prism, 10... Projection Ren woman, 11...film.
Claims (1)
物レンズ、中間レンズおよび投射レンズより成る拡大レ
ンズ系とで構成された電子光学装置において、試料と電
子線プリズムとの間に2個以上の電子レンズが配置され
たことを特徴とする電子線ホログラフィ−用光学装置。In an electron optical device consisting of an irradiation system section consisting of an electron gun and a condenser lens, and a magnifying lens system consisting of an objective lens, an intermediate lens, and a projection lens, two or more electron lenses are provided between the sample and the electron beam prism. 1. An optical device for electron beam holography, characterized in that: is arranged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18806381U JPS5894254U (en) | 1981-12-18 | 1981-12-18 | Optical device for electron beam holography |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18806381U JPS5894254U (en) | 1981-12-18 | 1981-12-18 | Optical device for electron beam holography |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5894254U true JPS5894254U (en) | 1983-06-25 |
JPS6333472Y2 JPS6333472Y2 (en) | 1988-09-06 |
Family
ID=30102875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18806381U Granted JPS5894254U (en) | 1981-12-18 | 1981-12-18 | Optical device for electron beam holography |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5894254U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007115409A (en) * | 2004-03-31 | 2007-05-10 | Institute Of Physical & Chemical Research | Electron beam interference device and electron microscope |
JP2007335083A (en) * | 2006-06-12 | 2007-12-27 | Hitachi Ltd | Electron beam holography observing device |
JP4807592B2 (en) * | 2005-02-21 | 2011-11-02 | 国立大学法人京都工芸繊維大学 | Electron microscope and compound irradiation lens |
-
1981
- 1981-12-18 JP JP18806381U patent/JPS5894254U/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007115409A (en) * | 2004-03-31 | 2007-05-10 | Institute Of Physical & Chemical Research | Electron beam interference device and electron microscope |
JP4807592B2 (en) * | 2005-02-21 | 2011-11-02 | 国立大学法人京都工芸繊維大学 | Electron microscope and compound irradiation lens |
JP2007335083A (en) * | 2006-06-12 | 2007-12-27 | Hitachi Ltd | Electron beam holography observing device |
Also Published As
Publication number | Publication date |
---|---|
JPS6333472Y2 (en) | 1988-09-06 |
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