JPS5980629U - クリ−ンル−ムの送風量制御装置 - Google Patents

クリ−ンル−ムの送風量制御装置

Info

Publication number
JPS5980629U
JPS5980629U JP17649982U JP17649982U JPS5980629U JP S5980629 U JPS5980629 U JP S5980629U JP 17649982 U JP17649982 U JP 17649982U JP 17649982 U JP17649982 U JP 17649982U JP S5980629 U JPS5980629 U JP S5980629U
Authority
JP
Japan
Prior art keywords
clean room
control device
air flow
flow control
room air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17649982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320921Y2 (enrdf_load_stackoverflow
Inventor
康司 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonets Corp
Original Assignee
Tonets Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tonets Corp filed Critical Tonets Corp
Priority to JP17649982U priority Critical patent/JPS5980629U/ja
Publication of JPS5980629U publication Critical patent/JPS5980629U/ja
Application granted granted Critical
Publication of JPS6320921Y2 publication Critical patent/JPS6320921Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Positive-Displacement Air Blowers (AREA)
  • Ventilation (AREA)
JP17649982U 1982-11-24 1982-11-24 クリ−ンル−ムの送風量制御装置 Granted JPS5980629U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17649982U JPS5980629U (ja) 1982-11-24 1982-11-24 クリ−ンル−ムの送風量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17649982U JPS5980629U (ja) 1982-11-24 1982-11-24 クリ−ンル−ムの送風量制御装置

Publications (2)

Publication Number Publication Date
JPS5980629U true JPS5980629U (ja) 1984-05-31
JPS6320921Y2 JPS6320921Y2 (enrdf_load_stackoverflow) 1988-06-09

Family

ID=30383715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17649982U Granted JPS5980629U (ja) 1982-11-24 1982-11-24 クリ−ンル−ムの送風量制御装置

Country Status (1)

Country Link
JP (1) JPS5980629U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010255898A (ja) * 2009-04-23 2010-11-11 Omron Corp 送風制御パターン作成装置、送風制御装置、送風制御パターン作成方法、送風制御パターン作成プログラム、送風制御方法、および風量制御システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010255898A (ja) * 2009-04-23 2010-11-11 Omron Corp 送風制御パターン作成装置、送風制御装置、送風制御パターン作成方法、送風制御パターン作成プログラム、送風制御方法、および風量制御システム

Also Published As

Publication number Publication date
JPS6320921Y2 (enrdf_load_stackoverflow) 1988-06-09

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