JPS5980469U - Target for sputtering equipment - Google Patents

Target for sputtering equipment

Info

Publication number
JPS5980469U
JPS5980469U JP17680982U JP17680982U JPS5980469U JP S5980469 U JPS5980469 U JP S5980469U JP 17680982 U JP17680982 U JP 17680982U JP 17680982 U JP17680982 U JP 17680982U JP S5980469 U JPS5980469 U JP S5980469U
Authority
JP
Japan
Prior art keywords
target
sputtering equipment
sputtering
sputtering device
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17680982U
Other languages
Japanese (ja)
Inventor
高橋　正長
平賀　泰司
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP17680982U priority Critical patent/JPS5980469U/en
Publication of JPS5980469U publication Critical patent/JPS5980469U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来構造のターゲットの消耗状態を示す断面図
、第２図は本考案によるターゲットの正面図、第３図は
本考案によ、る中央部のターゲット部材にあけられたピ
ン穴の配置を示す図、第４図は本考案による周縁部のタ
ーゲット部材に設けられたピンの構造を示す側面図、第
５図は本考案による中央部のターゲット部材に設けられ
たピン穴に、本考案による周縁部のターゲット部材に設
けられたピンがセットされた状態を示す部分断面図であ
る。 なお図において、１・・・・・・中央部のターゲット部
材、１′・・・・・・従来構造による消耗したターゲッ
ト、２．３・・・・・・周縁部のターゲット部材（長辺
）、４゜５・・・・・・周縁部のターゲット部材（短辺
）、６，７゜８．９・・・・・・４隅のターゲット部材
、１０・・・・・・中央部のターゲット部材に設けられ
たピン穴、１１・・・・・・周縁部のターゲット部材に
設けられたピン、である。Fig. 1 is a cross-sectional view showing the state of wear of a target with a conventional structure, Fig. 2 is a front view of the target according to the present invention, and Fig. 3 is a cross-sectional view showing the state of wear of a target with a conventional structure. FIG. 4 is a side view showing the structure of the pin provided in the peripheral target member according to the present invention, and FIG. 5 is a diagram showing the pin hole provided in the central target member according to the present invention. FIG. 6 is a partial cross-sectional view showing a state in which pins provided on the peripheral target member according to the invention are set; In the figure, 1... Target member at the center, 1'... Worn target with conventional structure, 2.3... Target member at the periphery (long side) , 4゜5...Target member at the periphery (short side), 6,7゜8.9...Target members at the four corners, 10...Target at the center A pin hole provided in the member, 11... is a pin provided in the target member at the peripheral portion.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] スパッタリングチャンバー内に平行平板電極を対向して
垂直に配置したスパッタリング装置に使われるターゲッ
トにおいて、ターゲットを部分的に変換できるようにし
たことを特徴とするスパッタリング装置用ターゲット。1. A target for a sputtering device, which is used in a sputtering device in which parallel plate electrodes are vertically arranged in a sputtering chamber to face each other, and is characterized in that the target can be partially converted.
JP17680982U 1982-11-22 1982-11-22 Target for sputtering equipment Pending JPS5980469U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17680982U JPS5980469U (en) 1982-11-22 1982-11-22 Target for sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17680982U JPS5980469U (en) 1982-11-22 1982-11-22 Target for sputtering equipment

Publications (1)

Publication Number Publication Date
JPS5980469U true JPS5980469U (en) 1984-05-31

Family

ID=30384305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17680982U Pending JPS5980469U (en) 1982-11-22 1982-11-22 Target for sputtering equipment

Country Status (1)

Country Link
JP (1) JPS5980469U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008032489A1 (en) * 2006-09-11 2008-03-20 Shinmaywa Industries, Ltd. Structure for attaching plasma gun to chamber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008032489A1 (en) * 2006-09-11 2008-03-20 Shinmaywa Industries, Ltd. Structure for attaching plasma gun to chamber
JP2008066240A (en) * 2006-09-11 2008-03-21 Shin Meiwa Ind Co Ltd Mounting structure of plasma gun into chamber

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