JPS5980461U - vacuum equipment - Google Patents

vacuum equipment

Info

Publication number
JPS5980461U
JPS5980461U JP17518882U JP17518882U JPS5980461U JP S5980461 U JPS5980461 U JP S5980461U JP 17518882 U JP17518882 U JP 17518882U JP 17518882 U JP17518882 U JP 17518882U JP S5980461 U JPS5980461 U JP S5980461U
Authority
JP
Japan
Prior art keywords
vacuum equipment
bell jar
vacuum
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17518882U
Other languages
Japanese (ja)
Inventor
原田　八十雄
Original Assignee
三洋電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三洋電機株式会社 filed Critical 三洋電機株式会社
Priority to JP17518882U priority Critical patent/JPS5980461U/en
Publication of JPS5980461U publication Critical patent/JPS5980461U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例を示す縦断面図であり、第２図は本考案
の一実施例を示す縦断面図である。 １・・・ベルジャ、４・・・通路。FIG. 1 is a longitudinal sectional view showing a conventional example, and FIG. 2 is a longitudinal sectional view showing an embodiment of the present invention. 1...Bellja, 4...Aisle.

Claims (1)

【実用新案登録請求の範囲】 １　排気装置に接続されたベルジャの内部に、このベル
ジャを冷却する装置が備えられた真空装置。 ２　冷却温度が０°Ｃ以下である実用新案登録請求の範
囲第１項記載の真空装備。 ３　ベルジャの内壁に液体空気若しくは液体窒素を導通
する通路が形成される実用新案登録請求の範囲第１項若
しくは第２項記載の真空装置。[Claims for Utility Model Registration] 1. A vacuum device in which a device for cooling the bell jar is provided inside the bell jar connected to an exhaust device. 2. The vacuum equipment according to claim 1 of the utility model registration claim, which has a cooling temperature of 0°C or less. 3. The vacuum device according to claim 1 or 2, wherein a passageway for conducting liquid air or liquid nitrogen is formed in the inner wall of the bell jar.
JP17518882U 1982-11-18 1982-11-18 vacuum equipment Pending JPS5980461U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17518882U JPS5980461U (en) 1982-11-18 1982-11-18 vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17518882U JPS5980461U (en) 1982-11-18 1982-11-18 vacuum equipment

Publications (1)

Publication Number Publication Date
JPS5980461U true JPS5980461U (en) 1984-05-31

Family

ID=30381201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17518882U Pending JPS5980461U (en) 1982-11-18 1982-11-18 vacuum equipment

Country Status (1)

Country Link
JP (1) JPS5980461U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612293U (en) * 1979-07-09 1981-02-02
JPS5741368A (en) * 1980-08-26 1982-03-08 Toshiba Corp Vacuum treatment chamber containing trap member
JPS5785971A (en) * 1980-11-17 1982-05-28 Toshiba Corp Thin film former

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612293U (en) * 1979-07-09 1981-02-02
JPS5741368A (en) * 1980-08-26 1982-03-08 Toshiba Corp Vacuum treatment chamber containing trap member
JPS5785971A (en) * 1980-11-17 1982-05-28 Toshiba Corp Thin film former

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