JPS5978964U - Surface defect inspection equipment - Google Patents
Surface defect inspection equipmentInfo
- Publication number
- JPS5978964U JPS5978964U JP17507782U JP17507782U JPS5978964U JP S5978964 U JPS5978964 U JP S5978964U JP 17507782 U JP17507782 U JP 17507782U JP 17507782 U JP17507782 U JP 17507782U JP S5978964 U JPS5978964 U JP S5978964U
- Authority
- JP
- Japan
- Prior art keywords
- defect inspection
- inspected
- surface defect
- defect
- inspection equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案になる表面欠陥検査装置の一実施例の正
面図、第２図は上記装置により検査される被検査部材の
観測領域及び測定領域を示す図、第３図Ａ、−Ｂは夫々
上記装置による検査状況を被検査部材の位置変化を伴な
い示す側面歯、第４図は被検査部材の測定領域の位置変
化に対する乱反射光量の変化を示す図である。
１・・・被検査部材、２・・・回転装置、３・・・ＩＴ
Ｖカメラ、４・・・観測領域、５・・・画像メモリ、６
・・・データ処理判定装置、７・・・照明装置、８１・
・・測定領域、９・・・格子。′Fig. 1 is a front view of an embodiment of the surface defect inspection device according to the present invention, Fig. 2 is a diagram showing the observation area and measurement area of the inspected member inspected by the above-mentioned device, and Figs. 3A and -B. 4 is a side view showing the inspection situation by the above-mentioned apparatus with changes in the position of the member to be inspected, and FIG. 4 is a diagram showing changes in the amount of diffusely reflected light with respect to changes in the position of the measurement area of the member to be inspected. 1... Member to be inspected, 2... Rotating device, 3... IT
V camera, 4... Observation area, 5... Image memory, 6
... data processing determination device, 7... illumination device, 81.
...Measurement area, 9...grid. ′
Claims (1)
し該表面よりの反射光が適宜入射される撮像手段と、該
表面の測定領域を画成してなる複数の区画を複数種の明
るさ別に比較識別する手段と、該被検査部材の反射条件
が連続的に多段階に異なる複数態様において夫々所定の
明るさの区画個数の和を求めその和から演算したパラメ
ータが一定条件を満足したとき欠陥ありと判定する判定
手段とより構成してなる表面欠陥検査装置。An illumination means for illuminating the surface of the member to be inspected; an imaging means for imaging the surface and receiving reflected light from the surface as appropriate; and a plurality of sections defining measurement areas on the surface. A means for comparing and identifying each brightness, and calculating the sum of the number of sections each having a predetermined brightness in a plurality of modes in which the reflection conditions of the inspected member are continuously different in multiple stages, and a parameter calculated from the sum satisfies a certain condition. A surface defect inspection device comprising a determination means for determining that there is a defect when a defect occurs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17507782U JPS5978964U (en) | 1982-11-19 | 1982-11-19 | Surface defect inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17507782U JPS5978964U (en) | 1982-11-19 | 1982-11-19 | Surface defect inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5978964U true JPS5978964U (en) | 1984-05-28 |
Family
ID=30380989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17507782U Pending JPS5978964U (en) | 1982-11-19 | 1982-11-19 | Surface defect inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5978964U (en) |
-
1982
- 1982-11-19 JP JP17507782U patent/JPS5978964U/en active Pending
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