JPS5975103A - Size measuring device - Google Patents

Abstract

PURPOSE:To move only an earth electrode of a couple of electrodes vertically and to realize calibration of 0mum by rotating a shaft united with a measuring element properly. CONSTITUTION:The measuring element 1 is united with the shaft and equipped with a knob which is vertically movable and rotatable. When the knob of the measuring element 1 is rotated properly with nothing between a measurement table 2 and the measuring element 1 (0mum calibration state), the earth electrode 5 also moves up and down, and thus the interval between a signal electrode and the earth electrode is adjusted until a display part 13 displays 0mum. A circuit substrate 9 is provided with part 10 of CR oscillation circuit parts and the signal electrode and stored in shield cases 7 and 8.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the size (
The present invention relates to a dimension measuring device for measuring the size, thickness, etc., and particularly to a dimension measuring device that can easily and accurately determine the dimensions of a subject.

In the present invention, a pair of electrodes (for example, a signal electrode and a ground electrode) that are spaced apart at a certain distance in advance are further spaced apart according to the dimensions of the subject, and a high frequency is applied between the pair of electrodes to separate the pair of electrodes. The size is determined by measuring the capacitance between the two and converting the capacitance into the size of the object.

In case 1, there is a certain correlation between capacitance and oscillation frequency if the circuit constants are constant, so measure the oscillation frequency that corresponds to the capacitance at this time. become. For example, if conditions such as electrode area and circuit constants are kept constant, there is a difference between this oscillation frequency and the dimensions of the object to be examined.
Since the relationship shown in FIG. 6 holds, the dimensions of the object to be measured can be determined from the oscillation frequency.

On the other hand, since the signal electrode forms a capacitor with a nearby substance, in order to satisfy the above conditions, it is necessary to keep the capacitance constant except for the capacitance between the ground electrode of the detection part and the signal electrode.

Also, when nothing is sandwiched between the measuring table and the measuring head (0
If the distance between the pair of electrodes deviates from the important condition when the distance is 0 μm-1, it is natural that a measurement result of 0 μm-1 will be obtained.
Therefore, if the =I° method is used to measure the small sample, an erroneous measurement result will be obtained. If we were to calibrate this on the electronic circuit side, we would need a complicated circuit to correct the linearity of the display. He almost reached the 1st rank.

Therefore, the present invention forms a signal electrode and a power control circuit (at least a CR oscillation circuit) on one circuit board, fixes the positional relationship between the signal electrode and the CR oscillation circuit,
By housing the circuit board in a fixed shield case, variations in capacitance other than the detection part can be minimized and production can be improved relatively easily.

Furthermore, in the present invention, when nothing is sandwiched between the measuring table and the measuring head, by appropriately rotating the shaft integrated with the measuring head, the ground electrode moves up and down, and the display of "0 μm" is displayed. This enables zero calibration as shown in the figure.

Hereinafter, an embodiment of the dimension measuring device of the present invention will be described with reference to the drawings in the case where the oil of the hair diameter is constant.

Fig. 1 shows an outline of the cross-sectional structure of the hair diameter measuring device of the present invention, and Fig. 2 shows an outline of the main parts of the hair diameter measuring device of the present invention when viewed from the front. It is something that

FIG. 3 is a diagram in which the signal electrode and the CR oscillation circuit are formed on the same substrate and viewed from one side.

In the figure, reference numeral 1 denotes a probe integrated with a shaft, and is equipped with a knob that can move up and down and rotate it. 2 is the measuring stand (measuring head 1
), 3 is a bearing, and 4 compression springs (when the male threaded part of the shaft of probe 1 is aligned with the female threaded part of ground electrode 5, it is pressed with a certain force to prevent it from loosening). ), 5 is the ground electrode, 6 is the I
``A rotation stopper that prevents the ground electrode 5 from rotating in one place when the mold 1 of the 1ill constantor 1 rotates, 7 is a shield case,'' 2 and 8 are under the shield case, 9 is a circuit board, and 10 is a Some of the CR oscillation circuit components, 11 is the outer box, 12 is the AC power supply 0N10FF switch, 13 is the display, 14
For example, the DC line/signal line, 19 is the object to be examined.

FIG. 3 is a diagram of the circuit board 9 viewed from above, showing the N/V electrode 15, electrical and electrical insulation (e.g. epoxy resin glass cloth base material).
16, earth pattern J7, CR oscillation circuit pattern section 18 (indicates that the CR oscillation circuit pattern is located in this section).

FIG. 4 is a block diagram showing an electronic control circuit using a microcomputer (microcomputer) of the hair diameter measuring device according to the present invention, where 27 is a microcomputer, 20 AC power supplies, 21 a DC power supply circuit, and 22 microcomputers. A pair of electrode parts (signal electrode 15 and ground electrode 5), 23 are connected to the signal side of the CR oscillation circuit (15 signal electrodes are connected to the signal side of the CR oscillation circuit, and 5 earth electrodes are connected to the ground side of the CR oscillation circuit). .

ing). 24 is a reference pulse generator, 25 is a frequency counter, 26 is an oscillation circuit, 28 is a driver circuit, and 29 is a display device.

Next, the operation of the hair diameter measuring device of the present invention will be explained.

First, turn on the AC power supply (I N10 F F switch 12f
Make it frONJ. Next, when there is nothing between the measuring table 2 and the measuring head 1 (calibration condition...0 μm), turn the knob of the measuring head 1 to the left or right as appropriate. As the shaft rotates, the ground electrode 5 moves up and down a little by 17 degrees, so the distance between the signal electrode 15 and the ground electrode 5 is adjusted so that the display section 13 displays rOJ4m.

Next, lift the knob of probe 1 and
A piece of wooden hair is sandwiched between the measuring table 2 and the measuring element 1 as shown in FIG. The oscillation frequency at this time is Ml, and the microcomputer 27
is input and stored in memory. The microcomputer 27 enters the current oscillation frequency M1 into a predetermined relationship between the oscillation frequency and the dimensions of the object (for example, the relationship in the example shown in FIG. 6), calculates the dimension M2 of the object, and stores it in memory. The dimensions of the display section of the display device 29 via the driver circuit 28]
3. (For example, "801μm" is displayed)
Next, a portion of the hair of the subject 19 to be removed, the measuring table 2
Since there is nothing between the stylus and the probe 1, the display section 13 does not display 01 μm, but if there is a deviation, then [)'! 'l Note 11 <Adjust. Hereafter, operate 1 as above. - The diameter of the hair, which is skin specimen 19, is measured. Such a relationship is shown in the flowchart of FIG.

The dimension measuring device of the present invention is A with the connection +74 configuration.
During measurement, just turn one knob of the measuring head.
You can easily calibrate the 0 point when the handprint, thin line 11
It is possible to easily and accurately measure the dimensions (thickness, thickness, etc.) of films, etc., and the cost can be kept extremely low.Furthermore, since the measuring table is fixed, it will not go awry due to changes over time. reliability is improved.

[Brief explanation of the drawing]

FIG. 1 is a schematic sectional view showing one embodiment of the dimension measuring device of the present invention, FIG. 2 is a schematic front view seen from the front of FIG. 1, and FIG.
The figure is a top view of a signal electrode and a CR oscillation circuit formed on the same substrate, and FIG. FIG. 6 is a diagram showing the relationship between the dimensions of the object and the oscillation frequency. In the drawing, 1 is a measuring head, 2 measuring stands, 5 is a ground electrode, 9
is a circuit board, 1 (1: part of CR oscillation circuit components, 15 is a signal electrode, 19 is a subject, 22 is a pair of electrode parts, 2
3 shows the CR oscillation circuit. Representative Patent Attorney Aihiko Fukushi (and 2 others) 11 - Ichisara Mizukane & \, Machiba

Claims (1)

[Claims] A capacitance measuring means for measuring capacitance by applying a high frequency between the electrodes of 1-71; An inter-electrode distance variable means for changing the distance between a pair of electrodes in accordance with the distance between the test object and the measuring element, and a capacitance measured by the capacitance measuring means. In the dimension measuring device, which is equipped with a method conversion means for converting the above-mentioned object into the dimensions of the object, only the ground electrode of the pair of electrodes is vertically moved by appropriately rotating a shaft integrated with the measuring element. 1. A dimension measuring device characterized by comprising a calibration means that enables calibration of 0 μm by moving the device.