JPS5974083U - Vacuum suction device - Google Patents

Vacuum suction device

Info

Publication number
JPS5974083U
JPS5974083U JP16901282U JP16901282U JPS5974083U JP S5974083 U JPS5974083 U JP S5974083U JP 16901282 U JP16901282 U JP 16901282U JP 16901282 U JP16901282 U JP 16901282U JP S5974083 U JPS5974083 U JP S5974083U
Authority
JP
Japan
Prior art keywords
vacuum suction
suction device
operating rod
spring
constituted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16901282U
Other languages
Japanese (ja)
Inventor
竹前　孝
谷崎　昭典
昇 安藤
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP16901282U priority Critical patent/JPS5974083U/en
Publication of JPS5974083U publication Critical patent/JPS5974083U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の真空吸着装置におけるコレット部を示す
要部側面図、第２図、第３図は本考案の一実施例である
緩衝手段を備えたコレット部を示す側面図であり、第２
図は静止状態、第３図は試料を保持した状態を示す図で
ある。 図中、１１・・・動作桿、１２・・・コレット、１３・
・・フレーム、１４・・・スプリング、１５・・・ガイ
ドリング、１６・・・半導体素子、１７・・・アーム、
１８・・・真空供給路。FIG. 1 is a side view of a main part showing a collet part in a conventional vacuum suction device, and FIGS. 2 and 3 are side views showing a collet part equipped with a buffer means according to an embodiment of the present invention. 2
The figure shows the stationary state, and FIG. 3 shows the state where the sample is held. In the figure, 11... operating rod, 12... collet, 13...
... Frame, 14... Spring, 15... Guide ring, 16... Semiconductor element, 17... Arm,
18...Vacuum supply path.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 動作桿と該動作桿の先端に取付けられたコレットと、該
動作桿を支持するフレームと該動作桿との間に設けられ
スプリングで構成された緩衝手段とを備えたことを特徴
とする真空吸着装置。A vacuum suction device comprising an operating rod, a collet attached to the tip of the operating rod, and a buffer provided between a frame supporting the operating rod and the operating rod and constituted by a spring. Device.
JP16901282U 1982-11-08 1982-11-08 Vacuum suction device Pending JPS5974083U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16901282U JPS5974083U (en) 1982-11-08 1982-11-08 Vacuum suction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16901282U JPS5974083U (en) 1982-11-08 1982-11-08 Vacuum suction device

Publications (1)

Publication Number Publication Date
JPS5974083U true JPS5974083U (en) 1984-05-19

Family

ID=30369337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16901282U Pending JPS5974083U (en) 1982-11-08 1982-11-08 Vacuum suction device

Country Status (1)

Country Link
JP (1) JPS5974083U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936671B1 (en) * 1969-12-24 1974-10-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936671B1 (en) * 1969-12-24 1974-10-02

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