JPS5973942A - Surface protective material - Google Patents

Surface protective material

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Publication number
JPS5973942A
JPS5973942A JP18497282A JP18497282A JPS5973942A JP S5973942 A JPS5973942 A JP S5973942A JP 18497282 A JP18497282 A JP 18497282A JP 18497282 A JP18497282 A JP 18497282A JP S5973942 A JPS5973942 A JP S5973942A
Authority
JP
Japan
Prior art keywords
electrode
sputter
film
high frequency
protection material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18497282A
Other languages
Japanese (ja)
Inventor
飯村 満男
吉村 厚生
一好 上森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP18497282A priority Critical patent/JPS5973942A/en
Publication of JPS5973942A publication Critical patent/JPS5973942A/en
Pending legal-status Critical Current

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  • Laminated Bodies (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は表面保護材に関し、特に防湿性を要求される太
陽電池等に好適な保護材を提供するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface protective material, and particularly provides a protective material suitable for solar cells and the like that require moisture resistance.

太陽電池としては、例えば°アルミ電極上にアモルファ
ス・シリコン、透明電極および表面保護材としてのガラ
ス板を順次積層せしめたものが知られている〇 しかしながら、従来の太陽電池においてはガラス板が破
損され易いばかりでなく、ガラス板と透明電極との密閉
性が必らずしも充分でなく、防湿性に問題があった。
As a solar cell, for example, one in which amorphous silicon, a transparent electrode, and a glass plate as a surface protection material are laminated in sequence on an aluminum electrode is known. However, in conventional solar cells, the glass plate is damaged. Not only is it easy to use, but the sealing between the glass plate and the transparent electrode is not necessarily sufficient, and there are problems with moisture resistance.

本発明は従来技術の有する上記問題を解決した表面保護
材に係り、7ノ素樹脂フィルムの表面75x高周波スパ
ッタエツチング処理されており、該処理面にホン)メル
ト接着剤層が形成されて成るものである。
The present invention relates to a surface protection material that solves the above-mentioned problems of the prior art, and comprises a 75x high-frequency sputter-etched surface of a 7-layer resin film, and a melt adhesive layer is formed on the treated surface. It is.

本発明に用いるフッ素樹脂ノイルレムは、テトラフルオ
ロエチレンーヘキサフルオロク1コビレン共M合体(F
EP ) 、クロルトリフルオロエチレン重合体(0T
FE ) 、エチレン−テトラフルオロエチレン共重合
体等から成るものが好適であり、厚さは通常約25〜3
00μのものが用いられる。
The fluororesin Noylrem used in the present invention is a tetrafluoroethylene-hexafluoro-cobylene co-M polymer (F
EP), chlorotrifluoroethylene polymer (0T
FE), ethylene-tetrafluoroethylene copolymer, etc. are suitable, and the thickness is usually about 25 to 3
00μ is used.

本発明においては上記7ノ素樹脂フィルムの表面が高周
波スパッタエツチング処理(以Fスノクノタエッチング
処理と称す)される。
In the present invention, the surface of the above-mentioned resin film is subjected to high frequency sputter etching treatment (hereinafter referred to as F Sunokunota etching treatment).

このスパッタエツチング処理とは、耐圧容器内で減圧雰
囲気下において陰陽両電極間に高周波電圧を印加し、放
電域のイオイエネルギーの大きい陰極暗部において、放
電によって生じた陽イオンを加速して、陰極上のフッ素
樹脂フイ’)レム表面に衝突させる処理である。このだ
めの装置(詳細は後述)はミ耐圧容器内に陰極と陽極が
対向して配設され、陰極はインピーダンス整合器を介し
て高周波電源に接続され、陽極は高周波電源のアース側
に接続されて構成されているり陰極の外側にはシールド
用電極が配設され、アース電位に保たれている。フッ素
樹脂フィルムはかような装置によりバッチ式、連続式い
ずれにてもスハ−)タエノチング処理できる。
This sputter etching process involves applying a high frequency voltage between cathode and anode electrodes in a reduced pressure atmosphere in a pressure-resistant container, accelerating the cations generated by the discharge in the dark part of the cathode where the sulfur energy is large in the discharge area. This is a process in which the fluororesin film (above) is collided with the surface of the rem. This device (details will be described later) has a cathode and an anode facing each other in a pressure-resistant container, the cathode is connected to a high-frequency power source via an impedance matching device, and the anode is connected to the ground side of the high-frequency power source. A shielding electrode is provided on the outside of the cathode and maintained at ground potential. A fluororesin film can be subjected to the anodic treatment using such an apparatus in either a batch or continuous manner.

本発明においては、フッ素樹脂フィルムに対するスパノ
タエ・チング処理を安定して行なうため、雰囲気圧を通
常0.005〜0.5 Torr好ましくは0.05〜
0.21’orrに設定するのがよい。
In the present invention, in order to stably perform the spano-etching treatment on the fluororesin film, the atmospheric pressure is usually 0.005 to 0.5 Torr, preferably 0.05 to 0.5 Torr.
It is preferable to set it to 0.21'orr.

また、放電処理量、即ち、放電電力(W/ci )と処
理時間(sea )の積はl WSec/c+y/以上
好適には10〜4 (l W−5ec10+/になるよ
うに行なう。
Further, the discharge processing amount, that is, the product of the discharge power (W/ci) and the processing time (sea) is set to be equal to or more than l WSec/c+y/, preferably from 10 to 4 (l W-5ec10+/).

放電電力および処理時間は、放電処理量が上記所定値以
上になるようならば、いかようにも設定し得るが、実用
上から放電電力は通常O11〜5W/cm好ましくは0
.2〜2ν宥の範囲内で、処理時間は通常1〜3(川砂
の範囲内で各々設定される。
The discharge power and treatment time can be set in any way as long as the amount of discharge treatment exceeds the above predetermined value, but from a practical standpoint, the discharge power is usually O11 to 5 W/cm, preferably 0.
.. The processing time is usually set within the range of 1 to 3 (river sand) within the range of 2 to 2 v.

また、スパッタエツチング処理に用いる高周波電源とし
ては、通常数百KHz〜数士MHz (7)周波数のも
のを用い得るが、実用上は工業割当周波数の13.56
MHzの電源を用いるのが好ましい0雰囲気ガスとして
は種々の気体を用いることができるが、アルゴン、ヘリ
ウム等の不活性ガス、チッ素ガス、炭酸ガス、水蒸気等
が好ましい。
Furthermore, as a high frequency power source used for sputter etching processing, a power source with a frequency of several hundred KHz to several MHz (7) can be used, but in practice, the industrially allocated frequency of 13.56 is used.
It is preferable to use a MHz power source. Various gases can be used as the atmosphere gas, but inert gases such as argon and helium, nitrogen gas, carbon dioxide gas, water vapor, etc. are preferable.

次に、本発明におけるフッ素樹脂フィルムに対するスパ
ッタエツチング処理の一例を図面を参照しながら説明す
る。図面において、1は減圧容器2内の気体を排気する
ための真空ポンプ(図示省略)に接続する排気管、3は
雰囲気ガスを減圧容器2内に導入するだめのバルブ、4
はフッ素樹脂フィルム5の表面をスパッタエツチング処
理する/ヒめの電極であって、電気的に減圧容器2と絶
縁され、気密シールされたリード線で外部のマツチング
ボックス6(インピーダンス整合器)に接続され、さら
に高周波電源7に導びかれている08は電極4のシール
ド用電極で、高周波電源7のアース9に導通している。
Next, an example of sputter etching treatment for a fluororesin film in the present invention will be explained with reference to the drawings. In the drawing, 1 is an exhaust pipe connected to a vacuum pump (not shown) for exhausting gas in the reduced pressure container 2, 3 is a valve for introducing atmospheric gas into the reduced pressure container 2, and 4 is a valve for introducing atmospheric gas into the reduced pressure container 2.
is the second electrode for sputter-etching the surface of the fluororesin film 5, which is electrically insulated from the vacuum container 2 and connected to an external matching box 6 (impedance matching device) using an airtightly sealed lead wire. 08, which is connected and further led to the high frequency power source 7, is a shielding electrode of the electrode 4, and is electrically connected to the ground 9 of the high frequency power source 7.

lOは対向電極で同じく高周波電源7のアース側に接続
されている。
IO is a counter electrode and is also connected to the ground side of the high frequency power source 7.

な訃、減圧容器2は雰囲気圧を一定に保つ役目をし、金
属製減圧容器を用いた場合には高周波電源7のアース側
に接続する。
The reduced pressure container 2 serves to keep the atmospheric pressure constant, and if a metal reduced pressure container is used, it is connected to the ground side of the high frequency power source 7.

マツチングボックス6はキャパシタンストインダクタン
スからなる回路器で、インピーダンス整合を行なうもの
である。
The matching box 6 is a circuit made of capacitance and inductance, and performs impedance matching.

このフィルム5の対向電極10に対応する片側表面をス
パッタエツチング処理するには、真空ポンプにより減圧
容器2を減圧すると共にパルプ3から雰囲気ガスを導入
しながら、容器2内を所定雰囲気圧に調整し、その後、
引き続き雰囲気ガスを導入しながら所定雰囲気圧のもと
で、高周波電源7から所定時間継続して電圧を印加する
と、フィルム5の前記片側表面が徐々にスバノタエ、テ
ング処理される。
In order to sputter-etch the surface of one side of the film 5 corresponding to the counter electrode 10, the pressure inside the reduced pressure container 2 is reduced using a vacuum pump, and while atmospheric gas is introduced from the pulp 3, the pressure inside the container 2 is adjusted to a predetermined atmospheric pressure. ,after that,
When a voltage is continuously applied from the high frequency power source 7 for a predetermined period of time under a predetermined atmospheric pressure while introducing an atmospheric gas, the surface of one side of the film 5 is gradually treated with scorch and proboscis.

なお、電極4および対向電極10は放電により発熱し、
その温贋が上昇するので、その内部に冷却通路を設け、
冷却用の液体や気体を流通させるのが好ましい。
Note that the electrode 4 and the counter electrode 10 generate heat due to discharge,
As the temperature rises, a cooling passage is installed inside it,
It is preferable to circulate a cooling liquid or gas.

このようにしてフッ素樹脂フィルムの表面をスパッタエ
ツチング処理すると、該処理面に無数の微細針状突起が
形成される。
When the surface of the fluororesin film is sputter-etched in this manner, countless fine needle-like protrusions are formed on the treated surface.

本発明に訃いては、7ノ素樹脂フイルムのスパッタエツ
チング処理面にエチレノー酢酸ビニル共重合体、エチレ
ン−エチルアクリレート共重合体等を主成分とするホッ
トメルト接着剤層が形成される。
According to the present invention, a hot-melt adhesive layer containing ethylene-vinyl acetate copolymer, ethylene-ethyl acrylate copolymer, etc. as a main component is formed on the sputter-etched surface of the heptad resin film.

かような本発明の表面保護材を太陽電池用保喪材のよう
な透明性が要求される用途に適用する場合には、その光
線透過率(JIS−に−671411により測定)を9
0係以上にするのが好ましい。
When the surface protection material of the present invention is applied to applications requiring transparency such as a preservation material for solar cells, the light transmittance (measured according to JIS-671411) should be 9.
It is preferable to set the coefficient to 0 or higher.

本発明の表面保護材に卦けるフッ素樹脂フィルムとホッ
トメルト接着剤との接着力は、スパッタエツチング処理
によりフィ・レム表面に形成された微細剣状突起が接着
剤に対して投錨効果を発揮するため、大きなものとなる
The adhesive force between the fluororesin film and the hot melt adhesive in the surface protection material of the present invention is due to the fact that the fine sword-like protrusions formed on the surface of the film by sputter etching exert an anchoring effect on the adhesive. Therefore, it becomes large.

本発明の表面保護材をホットメルト接着剤層により太陽
電池の透明電極上に接着せしめると、電池の延命効果が
得られることが−f′lJ明した。
It has been revealed that when the surface protection material of the present invention is adhered to the transparent electrode of a solar cell using a hot melt adhesive layer, the life of the cell can be extended.

この理由は必らずしも明らかではないが、ホットメルト
接着f¥11層が透明電極に強固に接合するので、この
界+i’j VC秒ける密閉性が優れたものとなり、“
まだフッ素(iit I指ノイIレムとホットメルト接
着剤層l /債との接着力は前記した如く°大きなもの
であり、この界面の密閉性も優れているので、電池表面
イ寸近の防湿性は万全で、水分は電池表面で遮断され内
部への到達が防止され、透明電極やアモルファス・/リ
コンが水分から保護されるためと推論される0 本発明の表面保護材は太陽電池以外、例えば太陽光集熱
器、太陽光選択吸収膜等の保護材としても有用でるる。
The reason for this is not necessarily clear, but since the hot melt adhesive f\11 layer is firmly bonded to the transparent electrode, the sealing performance in this field is excellent.
As mentioned above, the adhesive force between the fluorine (iit I finger I Rem and the hot melt adhesive layer l/bond) is great, and the sealing properties of this interface are also excellent, making it almost moisture-proof to the surface of the battery. It is inferred that this is because moisture is blocked on the battery surface and prevented from reaching the inside, and the transparent electrode and amorphous/licon are protected from moisture. For example, it is useful as a protective material for solar heat collectors, solar selective absorption films, etc.

本発明は上記のように構成され、)・素樹脂フィルムの
スパッタエツチング処理面にホットメルト接着剤層を形
成したので、両者の接着力は強固で、この界面における
密閉性が万全であり、太陽市、池等の高度の防湿性を要
求される物品の表面保護利として好適に使用できる特徴
がある。
The present invention is constructed as described above.) Since a hot melt adhesive layer is formed on the sputter-etched surface of the base resin film, the adhesive strength between the two is strong, the sealing property at this interface is perfect, and the It has the characteristic that it can be suitably used as a surface protection agent for items that require a high degree of moisture resistance, such as in cities and ponds.

以下、実施例により本発明を説明する。The present invention will be explained below with reference to Examples.

実施例1 厚さ100μの透明なFEPフィルムを第1図に示す装
置の電極4上に置き、排気管1に連結された真空ポンプ
により0.1 TOrr以下に一旦減圧した後パルプ3
を開き水蒸気を導入し、雰囲気圧を01TOrrに調整
維持する。
Example 1 A transparent FEP film with a thickness of 100 μm was placed on the electrode 4 of the apparatus shown in FIG.
Open the chamber, introduce water vapor, and adjust and maintain the atmospheric pressure at 01 TOrr.

次に、高周波電源7から電極4と対向電極10の間に周
波数13.56 MHzの高周波電圧を印加し、放電電
力0.5 W/cmにて2秒間フィルムの片側表面をス
パッタエツチング処理する。
Next, a high frequency voltage of 13.56 MHz is applied from the high frequency power supply 7 between the electrode 4 and the counter electrode 10, and one surface of the film is sputter etched for 2 seconds at a discharge power of 0.5 W/cm.

その後、F”BPフィルムのスパッタエツチング処理面
にエチレン−エチルアクリレート共重合体(日本ユニカ
ー社製、商品名EEA6169 )から成る厚さ30μ
のホットメルト接着剤層を形成し、光線透過率95%の
表面保護材(試料番号1)を得た。
After that, a 30 μm thick layer of ethylene-ethyl acrylate copolymer (manufactured by Nippon Unicar Co., Ltd., trade name: EEA6169) was applied to the sputter-etched surface of the F”BP film.
A hot melt adhesive layer was formed to obtain a surface protection material (sample number 1) with a light transmittance of 95%.

この表面保護材をアルミ電極、アモルファス・シリコン
および酸化スズ薄膜から成る透明電極が順次積層された
太陽電池の透明電極北に温度120℃、圧力5 kg/
mの条件で3分間熱加圧して接着せしめ、これを50℃
、90%REの雰囲気下に放置し、電池の防湿性能を調
べた。
This surface protection material was applied to the north of the transparent electrode of a solar cell in which transparent electrodes consisting of an aluminum electrode, amorphous silicon, and a thin film of tin oxide were sequentially laminated at a temperature of 120°C and a pressure of 5 kg/cm.
Heat and pressure was applied for 3 minutes under the conditions of
The moisture-proof performance of the battery was examined by leaving it in an atmosphere of 90% RE.

この防湿性能は太陽電池における光変換効率の半減期を
測定することにより知ることができ、試料番号1の表面
保護材を用いた太陽電池においては半減期が3500時
間であ−、た〇 まだ、これとは別にスパッタエツチング処理条件を表1
表に示すように変える以外は全て試料番号1と同様にし
て、試料番号2〜4の表面保護材を得、これら表面保護
材を上記と同様にして太陽電池に適用し、防湿性能を調
べた結果を第1表に示す。
This moisture-proofing performance can be determined by measuring the half-life of the light conversion efficiency of the solar cell, and the half-life of the solar cell using the surface protection material of sample number 1 was 3500 hours, and the half-life was 3500 hours. Separately, Table 1 shows the sputter etching processing conditions.
The surface protective materials of Sample Nos. 2 to 4 were obtained in the same manner as Sample No. 1 except for the changes shown in the table, and these surface protective materials were applied to solar cells in the same manner as above to examine the moisture-proof performance. The results are shown in Table 1.

なお、比較のため厚さ0θμのガラス板をポリビニルブ
ナラール樹脂によって透明電極に接着せしめた太陽電池
における光変換効率の半減期を測定し/ことこる。 2
500時間であった。
For comparison, the half-life of the light conversion efficiency was measured in a solar cell in which a glass plate with a thickness of 0θμ was adhered to a transparent electrode using polyvinylbunaral resin. 2
It was 500 hours.

第1表 実施例2 厚さ200μの透明なC!TFEシートの片面を水蒸気
を導入しながら雰囲気圧0.1 Torr、放電電力1
Vσ〆の条件で30秒間スハノタエソチング処理する0 その後、 C!TFEシートのスパッタエツチング処理
面に酢酸ビニル含量19重量係のエチレン−酢酸ビニル
共重合体(三井ポリケミカル社製、商品名+1907 
)から成る厚さ30μのホットメルト接着剤層を形成し
、光線透過率91%の表面保護材を得た。
Table 1 Example 2 Transparent C with a thickness of 200μ! While introducing water vapor to one side of the TFE sheet, the atmospheric pressure is 0.1 Torr, and the discharge power is 1.
Suhanota etching treatment for 30 seconds under the condition of Vσ〆0 Then, C! An ethylene-vinyl acetate copolymer with a vinyl acetate content of 19% by weight (manufactured by Mitsui Polychemical Co., Ltd., trade name +1907) was applied to the sputter-etched surface of the TFE sheet.
) to obtain a surface protection material with a light transmittance of 91%.

この表面保護材を実施例1の場合と同様にして透明電極
上に接着せしめ、この電池の防湿性能を調べたところ、
太陽光変換効率の半減期は4500時間であった。
This surface protective material was adhered to the transparent electrode in the same manner as in Example 1, and the moisture-proof performance of this battery was examined.
The half-life of solar conversion efficiency was 4500 hours.

上記実施例および比較例から明らかなように、本発明の
表面保護材は防湿性が摩れて2す、この表面保護材を適
用すると、太陽電池の寿命を大幅に延長できることが判
る。
As is clear from the above Examples and Comparative Examples, the surface protection material of the present invention has poor moisture resistance, and it can be seen that when this surface protection material is applied, the life of the solar cell can be significantly extended.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明に用いろフッ素樹脂フィルムの表面をスハ
ノタエ、チング処理するための装置の一例を示す概略図
である。 2・・・減圧容器  4・・・電極  5・・・フッ素
樹脂フィルム  7・・・高周波電源 1o−・・対向
電極特許出願人 日東電気工業株式会社 代表者土方三部
The drawing is a schematic view showing an example of an apparatus for subjecting the surface of a fluororesin film to a scratching process for use in the present invention. 2...Reduced pressure container 4...Electrode 5...Fluororesin film 7...High frequency power source 1o-...Counter electrode Patent applicant Sanbe Hijikata, representative of Nitto Electric Industry Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] フ、素樹脂フィルムの表面が高周波スパッタエツチング
処理されており、該処理面にホットメルト接着剤層が形
成されて成る表面保護材。
F. A surface protection material in which the surface of a base resin film is subjected to high frequency sputter etching treatment, and a hot melt adhesive layer is formed on the treated surface.
JP18497282A 1982-10-20 1982-10-20 Surface protective material Pending JPS5973942A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18497282A JPS5973942A (en) 1982-10-20 1982-10-20 Surface protective material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18497282A JPS5973942A (en) 1982-10-20 1982-10-20 Surface protective material

Publications (1)

Publication Number Publication Date
JPS5973942A true JPS5973942A (en) 1984-04-26

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JP18497282A Pending JPS5973942A (en) 1982-10-20 1982-10-20 Surface protective material

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5344501A (en) * 1992-03-23 1994-09-06 Canon Kabushiki Kaisha Solar cell
EP0641030A2 (en) * 1993-08-31 1995-03-01 Canon Kabushiki Kaisha Photoelectric conversion device and photoelectric conversion module each having a protective member comprised of fluorine-containing polymer resin
US5421909A (en) * 1992-03-03 1995-06-06 Canon Kabushiki Kaisha Photovoltaic conversion device
US5656098A (en) * 1992-03-03 1997-08-12 Canon Kabushiki Kaisha Photovoltaic conversion device and method for producing same
WO2000020489A1 (en) * 1998-10-06 2000-04-13 Daikin Industries, Ltd. Non-perfluoro fluororesin molded article having low-temperature heat sealability

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119777A (en) * 1975-04-14 1976-10-20 Nitto Electric Ind Co Ltd Composite sheet

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119777A (en) * 1975-04-14 1976-10-20 Nitto Electric Ind Co Ltd Composite sheet

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5421909A (en) * 1992-03-03 1995-06-06 Canon Kabushiki Kaisha Photovoltaic conversion device
US5656098A (en) * 1992-03-03 1997-08-12 Canon Kabushiki Kaisha Photovoltaic conversion device and method for producing same
US5344501A (en) * 1992-03-23 1994-09-06 Canon Kabushiki Kaisha Solar cell
EP0641030A2 (en) * 1993-08-31 1995-03-01 Canon Kabushiki Kaisha Photoelectric conversion device and photoelectric conversion module each having a protective member comprised of fluorine-containing polymer resin
EP0641030A3 (en) * 1993-08-31 1996-02-28 Canon Kk Photoelectric conversion device and photoelectric conversion module each having a protective member comprised of fluorine-containing polymer resin.
WO2000020489A1 (en) * 1998-10-06 2000-04-13 Daikin Industries, Ltd. Non-perfluoro fluororesin molded article having low-temperature heat sealability
US6392138B1 (en) 1998-10-06 2002-05-21 Daikin Industries, Ltd. Non-perfluoro fluorine-containing resin molded article having low-temperature heat-sealing property
JP2012001732A (en) * 1998-10-06 2012-01-05 Daikin Industries Ltd Non-perfluoro fluorine-containing resin molded article having low-temperature heat-sealing property
JP5170919B2 (en) * 1998-10-06 2013-03-27 ダイキン工業株式会社 Non-perfluoro fluororesin molding with low temperature heat sealability

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