JPS5972316U - 静圧軸受 - Google Patents

静圧軸受

Info

Publication number
JPS5972316U
JPS5972316U JP16954582U JP16954582U JPS5972316U JP S5972316 U JPS5972316 U JP S5972316U JP 16954582 U JP16954582 U JP 16954582U JP 16954582 U JP16954582 U JP 16954582U JP S5972316 U JPS5972316 U JP S5972316U
Authority
JP
Japan
Prior art keywords
fluid
hydrostatic bearing
bearing according
sliding
sliding shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16954582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215541Y2 (enrdf_load_stackoverflow
Inventor
西坂 久和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP16954582U priority Critical patent/JPS5972316U/ja
Publication of JPS5972316U publication Critical patent/JPS5972316U/ja
Application granted granted Critical
Publication of JPS6215541Y2 publication Critical patent/JPS6215541Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP16954582U 1982-11-09 1982-11-09 静圧軸受 Granted JPS5972316U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16954582U JPS5972316U (ja) 1982-11-09 1982-11-09 静圧軸受

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16954582U JPS5972316U (ja) 1982-11-09 1982-11-09 静圧軸受

Publications (2)

Publication Number Publication Date
JPS5972316U true JPS5972316U (ja) 1984-05-16
JPS6215541Y2 JPS6215541Y2 (enrdf_load_stackoverflow) 1987-04-20

Family

ID=30370373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16954582U Granted JPS5972316U (ja) 1982-11-09 1982-11-09 静圧軸受

Country Status (1)

Country Link
JP (1) JPS5972316U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005331048A (ja) * 2004-05-20 2005-12-02 Imv Corp 防振x−yテーブル

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54106445U (enrdf_load_stackoverflow) * 1978-01-13 1979-07-26
JPS55126117A (en) * 1979-03-22 1980-09-29 Hitachi Ltd Main rotary shaft unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54106445U (enrdf_load_stackoverflow) * 1978-01-13 1979-07-26
JPS55126117A (en) * 1979-03-22 1980-09-29 Hitachi Ltd Main rotary shaft unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005331048A (ja) * 2004-05-20 2005-12-02 Imv Corp 防振x−yテーブル

Also Published As

Publication number Publication date
JPS6215541Y2 (enrdf_load_stackoverflow) 1987-04-20

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